Reaction tube structure and tubular coating equipment
By designing the reaction tube structure in the tube PECVD equipment and using the sealing structure of the deflector to concentrate the process gas, the problems of uneven gas distribution and low utilization rate are solved, and the coating rate and quality are improved.
Patent Information
- Application Number
- CN202421440828.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-21
- Publication Date
- 2025-04-01
- Estimated Expiration
- 2034-06-21
AI Technical Summary
In existing tubular PECVD equipment, gas is prone to flow away from the outside of the graphite boat, resulting in uneven gas distribution, low gas utilization, low coating rate and poor uniformity of coating thickness.
A reaction tube structure is designed, including a furnace tube, a first flow guide plate and a second flow guide plate. The sealing structure formed by the combination of the first flow guide plate and the second flow guide plate is prevented from flowing into the non-coated area, and the gas is concentrated in the coating area to optimize the flow field distribution.
It effectively reduces the flow of gas from outside the coating area, improves the utilization rate of process gas in the coating area, and improves the coating rate and coating quality.
Smart Images
Figure CN222700408U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of solar cell manufacturing equipment, and more specifically, to a reaction tube structure and a tubular coating equipment. Background Art
[0002] Tubular plasma enhanced chemical vapor deposition (PECVD) equipment is mainly used to deposit thin films on substrates. The uniformity of the thickness distribution of the deposited thin films on the substrate is one of the important indicators for judging the quality of the final thin films. When the tubular PECVD equipment is in operation, the reaction gas is introduced, and the reaction gas is excited into a plasma state by means of glow discharge, the chemical activity of the reaction gas is enhanced, and the plasma gas undergoes a chemical reaction, thereby achieving the growth of the thin film material on the substrate. Within the same deposition time, the thickness of the film deposited on the substrate is affected by the deposition rate, and the deposition rate is closely related to the temperature field inside the quartz tube and the flow field distribution of the process gas.
[0003] In existing tubular PECVD equipment, most of the gas easily flows away from the outside of the graphite boat, the gas distribution is uneven, and the gas utilization rate is low, resulting in low coating rate and poor uniformity of coating thickness. Utility Model Content
[0004] The present application provides a reaction tube structure and a tubular coating device to solve the above technical problems.
[0005] The embodiment of the present application is implemented as follows:
[0006] A reaction tube structure comprises a furnace tube, a first guide plate, and a second guide plate. The first guide plate is connected to the inner wall of the furnace tube. The second guide plate is connected to the side of the first guide plate away from the inner wall of the furnace tube. Along the axial direction of the furnace tube, the length of the second guide plate is greater than or equal to the length of the coating area in the furnace tube. Along the axial direction of the furnace tube, the second guide plate has a first end and a second end, the first end is close to the air inlet end of the furnace tube, and the first guide plate is connected to the first end.
[0007] In this way, the reaction tube structure of the present application forms a structure for blocking the upper end area of the furnace tube through the combination of the first guide plate and the second guide plate to control the process gas beam, so that the process gas is concentrated in the coating area, and the situation where most of the gas flows away from the outside of the coating area is reduced, the flow field distribution in the furnace tube is optimized, and the utilization rate of the process gas in the coating area is improved, thereby improving the coating rate and coating quality.
[0008] In a possible implementation, there are multiple first guide plates, all of which are connected to the second guide plates, and the second end is connected to one of the first guide plates to improve the structural stability of the second guide plates.
[0009] In a possible implementation manner: the reaction tube structure further includes a third guide plate and a fourth guide plate, along the radial direction of the furnace tube, the third guide plate is arranged opposite to the first guide plate, the fourth guide plate is arranged opposite to the second guide plate, the third guide plate is connected to the inner wall of the furnace tube, and the fourth guide plate is connected to the side of the third guide plate away from the inner wall of the furnace tube. Along the axial direction of the furnace tube, the length of the fourth guide plate is greater than or equal to the length of the coating area.
[0010] In a possible implementation, the reaction tube structure further includes a plurality of third guide plates, which are connected to a side of the inner wall of the furnace tube opposite to the first guide plates, and are spaced apart from the second guide plates along the radial direction of the furnace tube.
[0011] In this way, the process gas can be further constrained, allowing the process gas to flow in the middle area of the furnace tube, thereby improving the utilization rate of the process gas.
[0012] In a possible implementation manner: the first guide plate and / or the second guide plate is a porous structure, which is beneficial to reducing the weight of the guide plate, facilitating installation, and reducing costs.
[0013] In a possible implementation manner: the third guide plate and / or the fourth guide plate is a porous structure.
[0014] In a possible implementation, in the porous structure, the diameter of the hole is 5-8 mm, and the spacing between adjacent holes is 8-11 mm. The size of the porous structure allows the guide plate to reduce weight while also playing a guiding role, reducing the flow of process gas into the non-coating area.
[0015] In a possible implementation, a gas supply component is further provided in the furnace tube, the gas supply component includes a first gas supply pipe and a second gas supply pipe, the axis of the first gas supply pipe intersects with the axis of the second gas supply pipe, one end of the first gas supply pipe is provided at the end of the furnace tube, and the other end of the first gas supply pipe is connected to the tube body of the second gas supply pipe. In this way, the rear section of the furnace tube can replenish the process gas in time, reduce the uneven gas density between the front section and the rear section of the furnace tube, and improve the uniformity of the coating thickness.
[0016] The embodiment of the present application also provides a tubular coating device, comprising a graphite boat and the reaction tube structure described in the above embodiment, wherein the graphite boat is arranged in a furnace tube of the reaction tube structure, and a fifth guide plate and a sixth guide plate are respectively arranged on opposite sides of the graphite boat in a direction perpendicular to the axial direction of the furnace tube and parallel to the second guide plate. The fifth guide plate and the sixth guide plate are connected to the side of the graphite boat, or the fifth guide plate and the sixth guide plate are connected to the inner wall of the furnace tube, so as to further restrict the process gas flow area.
[0017] In a possible implementation manner: along the axial direction of the furnace tube, a plurality of fifth guide plates are arranged at intervals, and / or a plurality of sixth guide plates are arranged at intervals.
[0018] In a possible implementation, a flow equalizer is provided at the end of the graphite boat along the axial direction of the furnace tube, and the flow equalizer includes a plurality of equally spaced guide vanes, so that the process gas entering the graphite boat can be evenly distributed, thereby improving the uniformity of the coating thickness. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.
[0020] Figure 1 This is a schematic diagram of the structure of a tubular coating equipment according to an embodiment of the present application.
[0021] Figure 2 for Figure 1 The schematic diagram of the structure of the tubular coating equipment after the furnace tube is processed in perspective.
[0022] Figure 3 It is a schematic structural diagram of a tubular coating device in another embodiment, wherein the furnace tube structure is shown in perspective.
[0023] Figure 4 It is a schematic structural diagram of a tubular coating device in another embodiment, wherein the furnace tube structure is shown in perspective.
[0024] Figure 5 for Figure 1 The schematic diagram of the structure of the tubular coating equipment in another direction is shown.
[0025] Figure 6 for Figure 1 Schematic diagram of the structure of the graphite boat in the tubular coating equipment shown.
[0026] Figure 7 It is a schematic structural diagram of a tubular coating device in another embodiment, wherein the furnace tube structure is shown in perspective.
[0027] Figure 8 It is a schematic structural diagram of an air supply component in a tubular coating device in one embodiment.
[0028] Description of main component symbols:
[0029] Tubular coating equipment 100
[0030] Reaction tube structure 10
[0031] Furnace pipe 11
[0032] Inlet end 111
[0033] Gas outlet 112
[0034] The first guide plate 12
[0035] Second guide plate 13
[0036] First end 131
[0037] Second end 132
[0038] The third guide plate 14
[0039] Fourth guide plate 15
[0040] Air supply parts 16
[0041] First air supply pipe 161
[0042] Second air supply pipe 162
[0043] Graphite Boat 20
[0044] Fifth guide plate 30
[0045] Sixth guide plate 40
[0046] Flow equalizer 50
[0047] Guide piece 51
[0048] The following specific implementation methods will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION
[0049] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.
[0050] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may also be a centered element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may also be a centered element. When an element is considered to be "set on" another element, it may be directly set on the other element or there may also be a centered element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.
[0051] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present application. The terms used herein in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "or / and" used herein includes any and all combinations of one or more related listed items.
[0052] Some embodiments of the present application are described in detail. In the absence of conflict, the following embodiments and features of the embodiments can be combined with each other.
[0053] See also Figures 1 to 8 This embodiment provides a tubular coating device 100, including a graphite boat 20 and a reaction tube structure 10, wherein the graphite boat 20 is disposed in a furnace tube 11 of the reaction tube structure 10. The region in the furnace tube 11 where the graphite boat 20 is installed is a coating region. Figures 1 to 5 As shown, the reaction tube structure 10 includes a furnace tube 11, a first guide plate 12, and a second guide plate 13. The first guide plate 12 is connected to the inner wall of the furnace tube 11. The second guide plate 13 is connected to the side of the first guide plate 12 away from the inner wall of the furnace tube 11. Along the axial direction of the furnace tube 11, the length of the second guide plate 13 is greater than or equal to the length of the coating area in the furnace tube 11. Along the axial direction of the furnace tube 11, the second guide plate 13 has a first end 131 and a second end 132, the first end 131 is close to the air inlet end 111 of the furnace tube 11, and the first guide plate 12 is connected to the first end 131.
[0054] In the embodiment of the present application, the first guide plate 12 is arranged along the radial direction parallel to the furnace tube 11, and the second guide plate 13 is arranged along the axial direction parallel to the furnace tube 11. The height of the first guide plate 12 is less than the radius of the furnace tube 11, and the width of the second guide plate 13 is less than the diameter of the furnace tube 11. The first guide plate 12 and the second guide plate 13 are roughly installed in the upper area of the furnace tube 11, and the coating area is located below the second guide plate 13. The first guide plate 12 is used to shield the area between the second guide plate 13 and the inner wall of the furnace tube 11 to prevent the process gas from flowing into the area, so that the process gas converges to the coating area. In this way, the reaction tube structure 10 of the tubular coating equipment 100 of the present application forms a structure for blocking the upper end area of the furnace tube 11 through the combination of the first guide plate 12 and the second guide plate 13 to control the process gas beam, so that the process gas is concentrated in the coating area, and the situation where most of the gas flows away from the outside of the coating area is reduced, the flow field distribution in the furnace tube 11 is optimized, and the utilization rate of the process gas in the coating area is improved, thereby improving the coating rate and coating quality.
[0055] like Figure 2As shown, in some embodiments, the number of the first guide plate 12 is one, which is substantially located at the air inlet end 111 of the furnace tube 11 and connected to the first end 131 of the second guide plate 13. The side of the second guide plate 13 can abut against the inner wall of the furnace tube 11, and the second guide plate 13 and the furnace tube 11 are fixed by welding, bonding or mechanical locking to prevent the second guide plate 13 from accidentally falling due to its own weight.
[0056] In some embodiments, there are multiple first guide plates 12 , all of which are connected to the second guide plates 13 , and the multiple first guide plates 12 are spaced apart along the axial direction of the furnace tube 11 , and the second end 122 of the second guide plate 13 is connected to one of the first guide plates 12 to improve the structural stability of the second guide plate 13 .
[0057] Specifically, Figure 3 As shown, in some embodiments, the number of first guide plates 12 can also be two, which are respectively arranged near the air inlet end 111 and the air outlet end 112 of the furnace tube 11. The two first guide plates 12 are respectively connected to the first end 131 and the second end 132 of the second guide plate 13, so that the force on the second guide plate 13 is uniform and the installation stability is improved. At this time, the side of the second guide plate 13 can also abut against the inner wall of the furnace tube 11, and the second guide plate 13 and the furnace tube 11 are fixed by welding, bonding or mechanical locking. Figure 4 As shown, in some embodiments, the number of first guide plates 12 can be more than two, and multiple first guide plates 12 are arranged at intervals along the axial direction of the furnace tube 11, and connect the inner wall of the furnace tube 11 and the upper surface of the second guide plate 13, so as to further improve the structural stability of the second guide plate 13, and can better shield the upper cavity area of the furnace tube 11, and restrict the process airflow from flowing into the coating area. Among the multiple first guide plates 12 arranged at intervals, the first guide plates 12 at the head and tail ends are connected to the first end 131 and the second end 132 respectively.
[0058] Please refer again Figures 2 to 5In some embodiments, the reaction tube structure 10 further includes a third guide plate 14 and a fourth guide plate 15. Along the radial direction of the furnace tube 11, the third guide plate 14 is arranged opposite to the first guide plate 12, and the fourth guide plate 15 is arranged opposite to the second guide plate 13. The third guide plate 14 is connected to the inner wall of the furnace tube 11, and the fourth guide plate 15 is connected to the side of the third guide plate 14 away from the inner wall of the furnace tube 11. Along the axial direction of the furnace tube 11, the length of the fourth guide plate 15 is greater than or equal to the length of the coating area. The third guide plate 14 and the fourth guide plate 15 are combined to form a structure that shields the cavity area at the lower end of the furnace tube 11, preventing the process gas from flowing into the area below the fourth guide plate 15. The coating area is located between the fourth guide plate 15 and the second guide plate 13 to further constrain the flow area of the process gas, so that it is concentrated in the coating area, thereby improving the utilization rate of the process gas. It can be understood that the number of the third guide plate 14 can be one or more. When there is one piece, the third guide plate 14 is arranged close to the air inlet end 111 of the furnace tube 11; when there are multiple pieces, the arrangement form of the third guide plate 14 is roughly the same as the first guide plate 12, which will not be repeated here.
[0059] Please refer again Figures 2 to 5 In some embodiments, the reaction tube structure 10 includes a plurality of third guide plates 14, and the fourth guide plate 15 may also be omitted. The plurality of third guide plates 14 are connected to the inner wall of the furnace tube 11 on one side opposite to the first guide plate 12, and the plurality of third guide plates 14 are arranged at intervals along the axial direction of the furnace tube 11 to restrict the process gas from flowing in the coating area. Along the radial direction of the furnace tube 11, the third guide plate 14 is arranged at intervals from the second guide plate 13, and the coating area is located between the second guide plate 13 and the third guide plate 14.
[0060] In some embodiments, Figures 2 to 5 As shown, the first guide plate 12 and / or the second guide plate 13 are porous structures, which is beneficial to reduce the weight of the guide plate, facilitate installation, and reduce costs. Further, the third guide plate 14 and / or the fourth guide plate 15 can also be porous structures.
[0061] In the porous structures of the first guide plate 12, the second guide plate 13, the third guide plate 14, and the fourth guide plate 15, the diameter of the holes is 5-8 mm, and the spacing between adjacent holes is 8-11 mm. By restricting the size of the porous structure, the guide plate can reduce the weight while playing a guiding effect, reducing the process gas from flowing into the non-coating area.
[0062] Please refer again Figures 2 to 6In some embodiments, a fifth guide plate 30 and a sixth guide plate 40 are respectively provided on opposite sides of the graphite boat 20 in a direction perpendicular to the axial direction of the furnace tube 11 and parallel to the second guide plate 13. The fifth guide plate 30 and the sixth guide plate 40 are connected to the side of the graphite boat 20, or the fifth guide plate 30 and the sixth guide plate 40 are connected to the inner wall of the furnace tube 11, which is used to further restrict the flow area of the process gas, so that when the graphite boat 20 is placed in the inner cavity of the furnace tube 11, the process gas is constrained by the first guide plate 12, the second guide plate 13, the third guide plate 14, the fourth guide plate 15, the fifth guide plate 30 and the sixth guide plate 40, and flows in the area where the graphite boat 20 is located, thereby optimizing the gas field distribution in the furnace tube 11 and improving the coating quality.
[0063] In some embodiments, there may be a plurality of fifth guide plates 30, and / or a plurality of sixth guide plates 40. Along the axial direction of the furnace tube 11, the plurality of fifth guide plates 30 are arranged at intervals, and the plurality of sixth guide plates 40 are also arranged at intervals to further restrict the flow area of the process gas.
[0064] See also Figure 6 In some embodiments, a flow equalizer 50 is further provided at the end of the graphite boat 20 along the axial direction of the furnace tube 11, and the flow equalizer 50 includes a plurality of flow guides 51 distributed at equal intervals. The setting positions and arrangement directions of the plurality of flow guides 51 correspond to the plurality of substrates of the graphite boat 20, so that when the process gas flows in from the gas inlet end 111 of the furnace tube 11, it can be equally divided by the flow equalizer 50, so that the process gas flow rate flowing through each substrate is roughly the same, thereby improving the uniformity of the coating thickness.
[0065] See also Figure 7 and Figure 8 In some embodiments, a gas supply component 16 is further provided in the furnace tube 11. The gas supply component 16 includes a first gas supply pipe 161 and a second gas supply pipe 162, and the axis of the first gas supply pipe 161 intersects with the axis of the second gas supply pipe 162. In an embodiment of the present application, the axis of the first gas supply pipe 161 is arranged substantially perpendicular to the axis of the second gas supply pipe 162. One end of the first gas supply pipe 161 is arranged at the end of the furnace tube 11, which may be the gas outlet end 112 of the furnace tube 11, or the gas inlet end 111 of the furnace tube 11. The other end of the first gas supply pipe 161 is connected to the tube body of the second gas supply pipe 162, so that the gas supply component 16 is substantially in a T-shaped tubular structure. The process gas flows from the first gas supply pipe 161 into the second gas supply pipe 162, and flows into the furnace tube 11 from the opposite ends of the second gas supply pipe 162, so as to realize the gas replenishment in the rear section area of the furnace tube 11. The T-shaped gas replenishing member 16 can add a gas inlet in the furnace tube 11 , so that the gas can be replenished in the furnace tube 11 quickly and evenly.
[0066] Along the axial direction of the furnace tube 11, two or more graphite boats 20 can be sequentially arranged in the furnace tube 11. The first gas supply pipe 161 can extend to the middle area of the furnace tube 11 or any position in the furnace tube 11 where process gas needs to be supplemented, so that the rear area of the furnace tube 11 can be supplemented with process gas in time, reducing the uneven gas density between the front and rear sections of the furnace tube 11, and improving the uniformity of the coating thickness.
[0067] In other embodiments, a plurality of gas holes may be provided at intervals on the first gas supply pipe 161 along the axial direction of the furnace tube 11 , so that the process gas can be evenly supplied to the rear section of the furnace tube 11 .
[0068] The above implementation modes are only used to illustrate the technical solutions of the present application and are not intended to limit the present application. Although the present application has been described in detail with reference to the above preferred implementation modes, a person skilled in the art should understand that the technical solutions of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present application.
Claims
1. A reaction tube structure, characterized in that: include: Furnace pipes; a first guide plate connected to the inner wall of the furnace tube; A second guide plate, wherein the first guide plate is connected to the second guide plate on one side of the inner wall facing away from the furnace tube; along the axial direction of the furnace tube, the length of the second guide plate is greater than or equal to the length of the coating area in the furnace tube; along the axial direction of the furnace tube, the second guide plate has a first end and a second end, the first end is close to the air inlet end of the furnace tube, and the first guide plate is connected to the first end.
2. The reaction tube structure according to claim 1, characterized in that: There are multiple first guide plates, and the multiple first guide plates are all connected to the second guide plates, and the second end is connected to one of the first guide plates.
3. The reaction tube structure according to claim 1, characterized in that: The reaction tube structure further includes a third guide plate and a fourth guide plate. Along the radial direction of the furnace tube, the third guide plate is arranged opposite to the first guide plate, and the fourth guide plate is arranged opposite to the second guide plate. The third guide plate is connected to the inner wall of the furnace tube, and the fourth guide plate is connected to the side of the third guide plate away from the inner wall of the furnace tube. Along the axial direction of the furnace tube, the length of the fourth guide plate is greater than or equal to the length of the coating area.
4. The reaction tube structure according to claim 1, characterized in that: The reaction tube structure also includes a plurality of third guide plates, which are connected to a side of the inner wall of the furnace tube opposite to the first guide plate, and are spaced apart from the second guide plates along the radial direction of the furnace tube.
5. The reaction tube structure according to claim 1, characterized in that: The first guide plate and / or the second guide plate is a porous structure.
6. The reaction tube structure according to claim 3, characterized in that: The third guide plate and / or the fourth guide plate is a porous structure.
7. The reaction tube structure according to claim 5 or 6, characterized in that: In the porous structure, the diameter of the holes is 5-8 mm, and the distance between adjacent holes is 8-11 mm.
8. The reaction tube structure according to claim 1, characterized in that: An air supply component is also provided in the furnace tube, and the air supply component includes a first air supply pipe and a second air supply pipe. The axis of the first air supply pipe intersects with the axis of the second air supply pipe. One end of the first air supply pipe is arranged at the end of the furnace tube, and the other end of the first air supply pipe is connected to the tube body of the second air supply pipe.
9. A tubular coating device, characterized in that: include: Graphite boat; and The reaction tube structure according to any one of claims 1 to 8, wherein the graphite boat is arranged in the furnace tube of the reaction tube structure, and a fifth guide plate and a sixth guide plate are respectively arranged on opposite sides of the graphite boat in a direction perpendicular to the axial direction of the furnace tube and parallel to the second guide plate; The fifth guide plate and the sixth guide plate are connected to the side of the graphite boat, or the fifth guide plate and the sixth guide plate are connected to the inner wall of the furnace tube.
10. The tubular coating device according to claim 9, characterized in that: Along the axial direction of the furnace tube, a plurality of the fifth guide plates are arranged at intervals, and / or a plurality of the sixth guide plates are arranged at intervals.
11. The tubular coating device according to claim 9, characterized in that: Along the axial direction of the furnace tube, a flow-leveling member is provided at the end of the graphite boat, and the flow-leveling member includes a plurality of guide vanes distributed at equal intervals.