A fence without AMC volatilization for semiconductor factories

Abstract

The utility model is a fence without AMC volatilization for semiconductor factories. Its structure includes several upright poles. Long holes are opened near the top of the upright poles. Warning tapes are inserted in the long holes of the upright poles. The upright poles are set on the elevated floor. The upright poles surround the objects that need to be surrounded. Warning tapes are inserted in the long holes of the upright poles. The warning tapes are set around the objects that need to be surrounded. Advantages of the utility model: stainless steel is preferably used to replace the rubber material upright poles in the prior art, which can effectively avoid the volatilization of VOCs and does not produce dust. In combination with the characteristics that the use layer of the semiconductor factory is an elevated floor, the upright poles are preferably processed into external threaded parts that match the internal threaded holes of the elevated floor, and the upright poles can be directly fixed to the elevated floor, thereby improving the structural stability. It is easy to install and saves manpower. Replacing the rubber railings with warning tapes not only avoids VOC volatilization, but also makes it more beautiful and has a stronger warning effect. The number of upright poles per unit enclosure area is reduced, which can effectively reduce costs.

Description

Technical Field

[0001] The utility model relates to a fence without AMC volatilization for semiconductor workshops, belonging to the technical field of fences. Background Art

[0002] The process of semiconductor manufacturing plants is very sensitive to the VOC content in the air. If the VOC content exceeds the standard, it will have a significant impact on the semiconductor manufacturing process and increase the operation and maintenance costs.

[0003] In the prior art, most semiconductor plants use rubber cones and railings. The cones are conical in design, small at the top and large at the bottom. The railings are directly placed on the cones through the rings at both ends. At the same time, the railings are connected together by two rods, one large and one small, to achieve the telescopic function. The rubber cones and railings will continuously volatilize organic compounds into the air during use, and their VOC volatilization volume far exceeds the VOC volatilization limit of general semiconductor manufacturing plants. Utility Model Content

[0004] The utility model provides a fence without AMC volatilization for semiconductor factories, which aims to overcome the above-mentioned shortcomings of the prior art and achieve VOC volatilization-free fence under the premise of ensuring low cost.

[0005] The technical solution of the utility model is: a fence without AMC volatilization for semiconductor factories, which includes a plurality of vertical poles, and the vertical poles have horizontally penetrating long holes near the top, and warning tapes are inserted into the long holes of all the vertical poles. The vertical poles are set on the elevated floor, and all the vertical poles surround the objects to be surrounded. The long holes of all the vertical poles are provided with warning tapes, and the warning tapes are set around the objects to be surrounded. The vertical poles are SUS304 stainless steel vertical poles. No AMC volatilization can be achieved.

[0006] Preferably, the vertical pole is cylindrical, and the vertical pole near the bottom end is an external threaded portion, a gasket is provided on the vertical pole above the external threaded portion, and the external threaded portion is threadedly connected to a corresponding internal threaded hole opened on the elevated floor.

[0007] Or, preferably, the vertical pole is a square steel, and four surfaces at the bottom end of the vertical pole are respectively welded with a square steel, and the square steel is fixed to the elevated floor by fixing screws and nuts.

[0008] The advantages of the utility model: the structural design is simple and reasonable, and stainless steel is preferably used to replace the rubber material columns of the prior art, which is not only not easy to rust, but also can effectively avoid the volatilization of VOCs and does not produce dust. In addition, considering the characteristics of the semiconductor plant's use layer as an elevated floor, it is preferred to process the columns into external threaded parts that match the internal threaded holes of the elevated floor, so that the columns can be directly fixed to the elevated floor, thereby improving the structural stability. It is easy to install and saves manpower. The rubber railings are also replaced with warning tapes, which not only avoid VOC volatilization, but also look more beautiful and have a stronger warning effect. The number of columns per unit enclosure area is reduced, which can effectively reduce costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 The utility model is a schematic diagram of a pole structure of an embodiment of a fence without AMC volatilization for semiconductor factories.

[0010] Figure 2 It is a schematic diagram of the pole structure of another embodiment of the utility model of the fence without AMC volatilization for semiconductor factory.

[0011] Figure 3 yes Figure 2 Top view of the .

[0012] Figure 4 yes Figure 2 Schematic diagram of the structure of an AMC-free fence for a semiconductor plant composed of vertical poles.

[0013] Figure 5 yes Figure 4 Top view of the .

[0014] In the figure, 1 is a vertical pole, 11 is an external threaded portion, 12 is a gasket, 2 is a long hole, 3 is a warning tape, 4 is a square steel, 5 is a fixing screw nut, and 6 is an elevated floor. DETAILED DESCRIPTION

[0015] The utility model is further described in detail below in conjunction with embodiments and specific implementation methods. Example 1

[0016] like Figure 1 As shown, a fence without AMC volatilization for semiconductor factories has a structure including a plurality of vertical poles 1. The vertical poles 1 are cylindrical, and the vertical poles 1 have an external threaded portion 11 near the bottom end. A gasket 12 is provided on the vertical poles 1 above the external threaded portion 11. The vertical poles 1 have a horizontally penetrating long hole 2 near the top end. The external threaded portion 11 is threadedly connected to a corresponding internal threaded hole on the elevated floor 6. All vertical poles 1 surround the objects to be surrounded, and warning tapes 3 are passed through the long holes 2 of all vertical poles 1. The warning tapes 3 are provided around the objects to be surrounded.

[0017] The upright pole 1 is made of SUS304 stainless steel, with a specification of M10, and the external threaded portion 11 is M6. When in use, it is directly screwed into the internal threaded hole of the elevated floor 6 for fixing. The gasket 12 is also made of SUS304 stainless steel, which can prevent the upright pole 1 from rubbing against the elevated floor 6 and damaging the floor surface. The width of the long hole 2 is 1mm. The upright pole 1 replaces the prior art rubber cone, and the warning tape 3 replaces the prior art rubber railing. Example 2

[0018] like Figure 2-5 As shown, a fence without AMC volatilization for semiconductor factories, the structure of which includes a plurality of vertical poles 1, the vertical poles 1 are square steel, four surfaces of the bottom end of the vertical poles 1 are respectively welded with square steel 4, the square steel 4 is fixed to the elevated floor 6 by fixing screws and nuts 5, and a long hole 2 penetrating in the horizontal direction is opened near the top of the vertical pole 1, all the vertical poles 1 surround the objects to be surrounded, and warning tapes 3 are inserted in the long holes 2 of all the vertical poles 1, and the warning tapes 3 are arranged around the objects to be surrounded.

[0019] The upright pole 1 is made of SUS304 stainless steel with a specification of 30X30mm. The long hole 2 is made of hardware and has a width of 1mm.

[0020] The SUS304 stainless steel pole 1 and gasket 12 can also be replaced by other VOC-free materials to achieve the same effect of reducing VOC volatilization. The external thread 11 is not limited to M6 and can be adjusted according to the size of the internal thread hole of the elevated floor 6 to ensure firmness. The 1mm wide long hole 2 can also use other forms of holes to connect the warning tape 3 to facilitate the installation and removal of the warning tape 3. The number of poles 1 can be adjusted according to the area of ​​the elevated floor 6 to meet the actual use effect.

[0021] Before the fences of Examples 1 and 2 were used, the VOC test of the semiconductor plant exceeded 100 ppb per square. After the fences of Examples 1 and 2 were used, the VOC test was undetectable, and the installation cost and operation and maintenance cost were low, meeting the initial expectations.

[0022] All the components mentioned above are prior art, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0023] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these modifications and improvements all fall within the protection scope of the present invention.

Claims

1. A semiconductor plant fence without AMC volatilization, characterized in that: The invention comprises a plurality of vertical poles (1), each vertical pole (1) having a horizontally extending long hole (2) near the top thereof, a warning tape (3) being inserted into the long holes (2) of all the vertical poles (1), the vertical poles (1) being arranged on an elevated floor (6), all the vertical poles (1) surrounding an object to be surrounded, and a warning tape (3) being inserted into the long holes (2) of all the vertical poles (1), and the warning tape (3) being arranged surrounding the object to be surrounded, and the vertical poles (1) are SUS304 stainless steel vertical poles (1).

2. The AMC-free fence for semiconductor plant as claimed in claim 1, characterized in that: The vertical pole (1) is cylindrical in shape, and an external threaded portion (11) is provided near the bottom end of the vertical pole (1). A gasket (12) is provided on the vertical pole (1) above the external threaded portion (11), and the external threaded portion (11) is threadedly connected to a corresponding internal threaded hole provided on the elevated floor (6).

3. The AMC-free fence for semiconductor plant as claimed in claim 1, characterized in that: The vertical pole (1) is a square steel, and four surfaces at the bottom of the vertical pole (1) are respectively welded with a square steel (4), and the square steel (4) is fixed on the elevated floor (6) by means of fixing screws and nuts (5).

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