Cooling device for heat treatment annealing furnace and annealing furnace

Abstract

The utility model provides a heat treatment annealing furnace cooling device and an annealing furnace, the heat treatment annealing furnace cooling device comprises a heat dissipation module, an error acquisition module, an error generation module, an error comparison module and a cooling control module, a plurality of error acquisition modules are arranged in the furnace, and the system can monitor the temperature of different areas in real time; and the error comparison module transmits the data to the error generation module for processing, once the error generation module detects that the temperature difference exceeds a preset range, the error comparison module immediately sends a signal to the cooling control module, so that the heat dissipation module stops working, and the instant response mechanism ensures that the temperature difference is not uniform under the condition that the temperature is not uniform. And the heat dissipation module does not continue to dissipate heat in an unwanted area, so that the risk of further non-uniformity of the temperature is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of annealing furnace temperature reduction control, in particular to a heat treatment annealing furnace temperature reduction device and an annealing furnace. Background Art

[0002] In the semiconductor manufacturing process, heat treatment annealing is a crucial step used to improve the crystallization quality of materials, repair lattice damage caused by ion implantation, and adjust the electrical properties of materials. High-quality heat treatment is essential to ensure the performance of the final semiconductor product. The annealing process usually involves heating the semiconductor material to a high temperature and slowly cooling it in a controlled environment. The uniformity of the temperature in the furnace is crucial to the quality of the material. Any temperature non-uniformity may lead to inconsistent performance of semiconductor devices.

[0003] In the heat treatment process, the heat dissipation module plays a decisive role. It is used to reduce the temperature in the furnace after the annealing step to achieve the desired material properties. In the prior art, the heat dissipation fan is a commonly used device in the heat dissipation module. It transfers the heat in the furnace to the environment through forced convection to control the cooling rate in the furnace. Usually, the operation of these fans is based on a predetermined program. They run at a fixed speed to achieve the expected cooling curve. However, since the temperature distribution in the furnace may become uneven due to various factors such as the furnace structure, material placement, heat accumulation, etc., the heat dissipation fan with a fixed program cannot always provide the optimal cooling effect.

[0004] When uneven temperatures occur in the furnace, traditional systems are unable to immediately adjust the operating status of the cooling fan, which may cause the temperature in some areas to be too high or too low. In this case, if the cooling fan continues to run according to the preset program, the problem of uneven temperature may be aggravated because the fan may continue to dissipate heat in areas where the temperature is already low, while insufficient heat dissipation may occur in areas with higher temperatures. Utility Model Content

[0005] The purpose of the utility model is to provide a heat treatment annealing furnace cooling device and an annealing furnace to solve the problems raised in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A cooling device for a heat treatment annealing furnace, comprising a heat dissipation module, wherein the heat dissipation module is installed on the heat treatment annealing furnace and is used to cool the space inside the annealing furnace, and further comprising:

[0008] An error acquisition module, wherein an even number of the error acquisition modules are arranged evenly inside the annealing furnace, and every two error acquisition modules form a group, each group of error acquisition modules is electrically connected to an error generation module, and each group of error acquisition modules is used to collect temperature values ​​at two locations inside the annealing furnace, and convert the temperature values ​​into voltage values ​​and send them to the error generation module;

[0009] An error generation module, wherein two input terminals of the error generation module are electrically connected to a group of error acquisition modules, and an output terminal of the error generation module is electrically connected to an error comparison module, and is used to measure and calculate the difference between two voltage values ​​generated by a group of error acquisition modules, and send the difference to the error comparison module;

[0010] An error comparison module, the error comparison module is electrically connected to the temperature reduction control module, and is used to control the on and off of the temperature reduction control module according to the difference between the two voltage values ​​generated by the error generation module 30;

[0011] The temperature reduction control module is connected in series in the working loop of the heat dissipation module and is used to control the operation of the heat dissipation module.

[0012] Furthermore, the error acquisition module adopts a K-type thermocouple. In a group of error acquisition modules, the negative poles of two K-type thermocouples are grounded, and the positive poles are electrically connected to the two input terminals of the error generation module respectively.

[0013] Furthermore, the error generating module adopts a differential operation circuit, including an integrated operational amplifier U31, the same-direction input terminal and the reverse input terminal of the integrated operational amplifier U31 are electrically connected to resistors R31 and R32 respectively, the other ends of resistors R31 and R32 are electrically connected to the positive poles of two K-type thermocouples in a group of error acquisition modules respectively, the same-direction input terminal and the output terminal of the integrated operational amplifier U31 are electrically connected through a resistor R33, the reverse input terminal of the integrated operational amplifier U31 is also electrically connected to a resistor R34, and the other end of the resistor R34 is grounded.

[0014] Further, the error comparison module includes an integrated operational amplifier U41 and an integrated operational amplifier U42, the output ends of the integrated operational amplifier U41 and the integrated operational amplifier U42 are electrically connected to the anodes of the diodes D41 and D42 respectively, the cathodes of the diodes D41 and D42 are connected in parallel and electrically connected to one end of the resistor R41, and the other end of the resistor R41 serves as the output end of the error comparison module 40;

[0015] The reverse input terminal of the integrated operational amplifier U41 and the non-inverting input terminal of the integrated operational amplifier U42 are electrically connected to the sliding terminals of the potentiometers W41 and W42 respectively, one fixed terminal of the potentiometer W41 is connected to an external reference voltage, the other fixed terminal is electrically connected to one fixed terminal of the potentiometer W42, and the other fixed terminal of the potentiometer W42 is grounded;

[0016] The non-inverting input terminal of the integrated operational amplifier U41 and the inverting input terminal of the integrated operational amplifier U42 are connected in parallel as an input terminal, and are electrically connected to the output terminal of the error generating module.

[0017] Further, the temperature reduction control module includes an NPN-type transistor, the emitter of the transistor is grounded, the base is electrically connected to the output end of the error comparison module, the collector is connected to one end of the coil inside the normally closed relay, and the other end of the coil is electrically connected to the external reference voltage;

[0018] The normally closed contact of the normally closed relay is connected in series to the control loop of the heat dissipation module.

[0019] Furthermore, the temperature reduction control module also includes an alarm unit, and the alarm unit is connected in parallel with two ends of the coil inside the normally closed relay.

[0020] Furthermore, the heat dissipation module includes a temperature detection unit, which is installed inside the annealing furnace and electrically connected to the analog-to-digital conversion unit, for measuring the temperature data inside the annealing furnace, and converting the temperature value into an analog quantity and sending it to the analog-to-digital conversion unit. The analog-to-digital conversion unit is electrically connected to the control unit, for converting the analog temperature data into a digital quantity and sending it to the control unit. The control unit is electrically connected to the driving unit, for sending a control signal to the driving unit. The driving unit is electrically connected to the heat dissipation fan, for driving the heat dissipation fan to work according to the control signal, and the heat dissipation fan is used to dissipate the internal heat of the annealing furnace.

[0021] The present invention further provides a heat treatment annealing furnace, which includes an annealing furnace body and the above-mentioned heat treatment annealing furnace cooling device, the error collection module is evenly arranged inside the annealing furnace body, and the heat dissipation module is installed on the annealing furnace body to cool the space inside the annealing furnace body.

[0022] Compared with the prior art, the beneficial effects of the utility model are:

[0023] By deploying multiple error acquisition modules in the furnace, the utility model enables the system to monitor the temperatures of different areas in real time and transmit the data to the error generation module for processing. Once the error generation module detects that the temperature difference exceeds a preset range, the error comparison module immediately sends a signal to the temperature reduction control module to stop the heat dissipation module. This instant response mechanism ensures that in the case of uneven temperature, the heat dissipation module will not continue to dissipate heat in unnecessary areas, thereby avoiding the risk of further uneven temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the overall system structure of the utility model;

[0025] Figure 2 This is a schematic diagram of the overall control circuit structure in the utility model;

[0026] Figure 3 This is a schematic diagram of the circuit structure of the error acquisition module, the error generation module and the error comparison module in the utility model;

[0027] Figure 4 It is a schematic diagram of the circuit structure of the heat dissipation module and the temperature reduction control module in the utility model.

[0028] In the figure: a heat dissipation module 10, a temperature detection unit 11, an analog-to-digital conversion unit 12, a control unit 13, a drive unit 14, a heat dissipation fan 15, an error acquisition module 20, an error generation module 30, an error comparison module 40, a temperature reduction control module 50, a transistor 51, a normally closed relay 52, and an alarm unit 53. DETAILED DESCRIPTION

[0029] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0030] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0031] Example:

[0032] See also Figures 1 to 4 , the utility model provides a technical solution:

[0033] A cooling device for a heat treatment annealing furnace comprises a heat dissipation module 10, an error acquisition module 20, an error generation module 30, an error comparison module 40 and a cooling control module 50. The heat dissipation module 10 is installed on the heat treatment annealing furnace and is used to cool the space inside the annealing furnace, wherein:

[0034] The heat dissipation module 10 includes a temperature detection unit 11, which is installed inside the annealing furnace and is electrically connected to an analog-to-digital conversion unit 12, for measuring the temperature data inside the annealing furnace, and converting the temperature value into an analog quantity and sending it to the analog-to-digital conversion unit 12. The analog-to-digital conversion unit 12 is electrically connected to a control unit 13, for converting the analog temperature data into a digital quantity and sending it to the control unit 13. The control unit 13 is electrically connected to a driving unit 14, for sending a control signal to the driving unit 14. The driving unit 14 is electrically connected to a heat dissipation fan 15, for driving the heat dissipation fan 15 to work according to the control signal, and the heat dissipation fan 15 is used to dissipate the internal heat of the annealing furnace.

[0035] In this embodiment, the temperature detection unit 11 adopts a thermocouple of model OmegaKMQXL-125U-12, which is a K-type mineral insulated thermocouple with a stainless steel shell. It can measure temperature in the range of -270°C to 1372°C. It can withstand high temperature environments and is suitable for harsh conditions such as annealing furnaces. The temperature detection unit 11 converts the detected high temperature into a voltage signal and then transmits it to the analog-to-digital conversion unit 12. The two wires of the thermocouple are connected to the input end of the analog-to-digital conversion unit 12, the positive pole of the thermocouple is connected to the positive input end of the analog-to-digital conversion unit 12, and the negative pole is connected to the negative input end.

[0036] The model of the analog-to-digital conversion unit 12 is ADC0804, which is an 8-bit successive approximation analog-to-digital converter that can convert analog signals into digital signals. ADC0804 has high-speed conversion capability and is compatible with a microprocessor. It receives the analog temperature signal from the temperature detection unit 11 and converts it into a digital signal for processing by the control unit 13. The digital input terminal of the control unit 13 receives the digital signal from ADC0804, and the PWM output terminal outputs a PWM signal to the drive unit 14. The model of the control unit 13 is Arduino UNO, which is a microcontroller board based on ATmega328P. It receives the analog temperature signal from the analog-to-digital conversion unit and converts it into a digital signal. Arduino UNO can process the signal according to the set program logic and provide PWM output for controlling the drive unit 14.

[0037] The driving unit 14 adopts the model ULN2003A, which is a high-voltage, high-current Darlington transistor array for driving various loads. ULN2003A can receive the control signal from the control unit 13 and convert it into sufficient current and voltage to drive the operation of the cooling fan 15.

[0038] The cooling fan 15 model is Delta Electronics PFB0412EHN, which is a high-performance DC fan capable of providing stable cooling in a high temperature environment. The fan receives power from the drive unit 14 and adjusts the speed according to the control signal to achieve the desired cooling effect.

[0039] The error acquisition modules 20 are provided in an even number and are evenly arranged inside the annealing furnace, and every two error acquisition modules 20 form a group. Each group of error acquisition modules 20 is electrically connected to an error generation module 30. Each group of error acquisition modules 20 is used to collect temperature values ​​at two locations inside the annealing furnace, and convert the temperature values ​​into voltage values ​​and send them to the error generation module 30.

[0040] In this embodiment, the error acquisition module 20 uses a K-type thermocouple. In a group of error acquisition modules 20 , the negative poles of two K-type thermocouples are grounded, and the positive poles are electrically connected to the two input terminals of the error generation module 30 .

[0041] The error acquisition module 20 is composed of an even number of K-type thermocouples, which are evenly arranged inside the annealing furnace to ensure that temperature data can be collected from multiple points in the furnace, and every two thermocouples form a group and are directly connected to an error generation module 30. The output of these thermocouples is a voltage value generated based on the temperature difference they measure, that is, the thermoelectric effect.

[0042] The two K-type thermocouples in each error acquisition module 20 convert the temperature difference between two different positions in the furnace into a voltage difference, which reflects the temperature difference between the respective measurement points. This is achieved by grounding the negative poles of all thermocouples and connecting their positive poles to the input end of the error generation module 30. In this way, each thermocouple can generate a voltage signal corresponding to the temperature it detects.

[0043] The two input ends of the error generation module 30 are electrically connected to a group of error acquisition modules 20, and the output end is electrically connected to the error comparison module 40, for measuring and calculating the difference between two voltage values ​​generated by a group of error acquisition modules 20, and sending it to the error comparison module 40.

[0044] Furthermore, the error generating module 30 adopts a differential operation circuit, including an integrated operational amplifier U31, the same-direction input terminal and the reverse input terminal of the integrated operational amplifier U31 are electrically connected to resistors R31 and R32 respectively, the other ends of resistors R31 and R32 are electrically connected to the positive poles of two K-type thermocouples in a group of error acquisition modules 20 respectively, the same-direction input terminal and the output terminal of the integrated operational amplifier U31 are electrically connected through a resistor R33, the reverse input terminal of the integrated operational amplifier U31 is also electrically connected to a resistor R34, and the other end of the resistor R34 is grounded.

[0045] The model of the integrated operational amplifier U31 is LM741. The integrated operational amplifier U31 compares and amplifies the voltage signals of two K-type thermocouples from a set of error acquisition modules 20. The same-direction input terminal of the integrated operational amplifier U31 is connected to the positive pole of the first thermocouple through a resistor R31, and the reverse input terminal is connected to the positive pole of the second thermocouple through a resistor R32, so that the operational amplifier can receive and compare the two input signals. Resistors R31 and R32 ensure the effective transmission of the signal while avoiding excessive current flowing through the thermocouple. Resistor R33 is connected between the same-direction input terminal and the output terminal of the integrated operational amplifier U31 to form a negative feedback loop, which helps to stabilize the output of the amplifier and control its gain. Resistor R34 is connected between the reverse input terminal of the integrated operational amplifier U31 and the ground to provide a reference voltage point, which helps to adjust the zero point of the amplifier.

[0046] The working principle of the error generation module 30 is that when the two thermocouples detect different temperatures, they will generate different voltage signals, which are input to the corresponding input terminals of the integrated operational amplifier U31 through resistors R31 and R32. The operational amplifier compares the two input voltages and outputs a signal representing the difference between the two voltages according to its internal amplification mechanism. This output signal is then sent to the error comparison module 40.

[0047] The error comparison module 40 is electrically connected to the temperature reduction control module 50 , and is used to control the on and off of the temperature reduction control module 50 according to the difference between the two voltage values ​​generated by the error generation module 30 .

[0048] Further, the error comparison module 40 includes an integrated operational amplifier U41 and an integrated operational amplifier U42, the output ends of the integrated operational amplifier U41 and the integrated operational amplifier U42 are electrically connected to the anodes of the diodes D41 and D42 respectively, the cathodes of the diodes D41 and D42 are electrically connected to one end of the resistor R41 after being connected in parallel, and the other end of the resistor R41 serves as the output end of the error comparison module 40;

[0049] The reverse input terminal of the integrated operational amplifier U41 and the non-inverting input terminal of the integrated operational amplifier U42 are electrically connected to the sliding terminals of the potentiometers W41 and W42 respectively, one fixed terminal of the potentiometer W41 is connected to an external reference voltage, the other fixed terminal is electrically connected to one fixed terminal of the potentiometer W42, and the other fixed terminal of the potentiometer W42 is grounded;

[0050] The non-inverting input terminal of the integrated operational amplifier U41 and the inverting input terminal of the integrated operational amplifier U42 are connected in parallel as an input terminal, and are electrically connected to the output terminal of the error generating module 30 .

[0051] The error comparison module 40 uses integrated operational amplifiers U41 and U42 to perform voltage comparison and control the on and off of the cooling control module 50. The integrated operational amplifiers U41 and U42 are of the LM358 model. The integrated operational amplifiers U41 and U42 are used to compare the voltage difference output by the error generation module 30 with a preset reference voltage to determine whether the cooling control module 50 needs to be activated.

[0052] Diodes D41 and D42 are used to ensure that current can only flow in one direction, which can prevent negative feedback of the operational amplifier output and ensure that the signal is active in only one direction. The temperature is only reduced when the voltage exceeds the threshold. Resistor R4 is used in parallel with diodes D41 and D42 to form an output signal and transmit it to the temperature reduction control module 50.

[0053] Potentiometers W41 and W42 provide adjustable reference voltages, allowing the user to set the threshold of the comparison voltage for calibrating or adjusting the sensitivity and response range of the error comparison module 40. The voltage difference output by the error generation module 30 is used as an input signal and is sent to operational amplifiers U41 and U42 at the same time. One of the two amplifiers is used as an upper limit comparator and the other is used as a lower limit comparator. Potentiometers W41 and W42 set the comparison threshold. If the output voltage difference of the error generation module exceeds these preset thresholds, the corresponding amplifier will change its output state, causing the diode connected to the output end to be turned on or off. When the diode is turned on, current can flow through resistor R41 and transmit a signal to the temperature reduction control module 50, triggering its on-off operation.

[0054] The temperature reduction control module 50 is connected in series in the working circuit of the heat dissipation module 10, and is used to control the operation of the heat dissipation module 10. The temperature reduction control module 50 includes an NPN-type transistor 51, the emitter of the transistor 51 is grounded, the base is electrically connected to the output end of the error comparison module 40, the collector is connected to one end of the coil inside the normally closed relay 52, and the other end of the coil is electrically connected to an external reference voltage. The normally closed contact of the normally closed relay 52 is connected in series to the control circuit of the heat dissipation module 10.

[0055] In this embodiment, the NPN type transistor 51 is of model 2N2222. The role of the transistor 51 is to act as a switch, which can control the power-on state of the relay coil. The normally closed relay 52 is of model JQC-3F. The coil of the relay 52 is activated when the transistor 51 is turned on, causing its normally closed contacts to open, thereby interrupting the working circuit of the heat dissipation module 10. The external reference voltage provides a stable voltage source for the power supply of the relay coil.

[0056] When the difference between the temperature monitored by the error comparison module 40 and the set value exceeds a specific threshold, the module generates an output signal, which is sent to the base of the transistor 51 to turn on the transistor 51. When the transistor 51 is turned on, the current flows from the external reference voltage source through the coil of the relay 52 to the collector of the transistor 51, and finally flows to the emitter ground. When the coil of the relay 52 is activated, the normally closed contact inside it will open, which will interrupt the working circuit of the heat dissipation module 10. When the working circuit of the heat dissipation module 10 is disconnected, the heat dissipation module 10 stops working.

[0057] By deploying multiple error acquisition modules 20 in the furnace, the temperatures of different areas can be monitored in real time, and the data can be transmitted to the error generation module 20 for processing. Once the error generation module 20 detects that the temperature difference exceeds the preset range, the error comparison module 30 will immediately send a signal to the cooling control module 50 to stop the cooling fan 15. This instant response mechanism ensures that in the case of uneven temperature, the cooling fan 15 will not continue to dissipate heat in unnecessary areas, thereby avoiding the risk of further uneven temperature.

[0058] The temperature reduction control module 50 also includes an alarm unit 53, which is connected in parallel to both ends of the coil inside the normally closed relay 52. ​​The alarm unit 53 in the temperature reduction control module 50 is designed to provide instant feedback on the system status. When the relay 52 is activated or stopped, the alarm unit 53 will sound an alarm. Because the alarm unit 53 is connected in parallel to both ends of the coil of the relay 52, it will be energized at the same time when the relay coil is activated. The alarm unit 53 uses audio-visual alarm devices such as buzzers and LED indicators to remind operators of uneven temperature reduction.

[0059] The present invention further provides a heat treatment annealing furnace, which includes an annealing furnace body and the above-mentioned heat treatment annealing furnace cooling device, the error collection module 20 is evenly arranged inside the annealing furnace body, and the heat dissipation module 10 is installed on the annealing furnace body to cool the space inside the annealing furnace body.

[0060] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0061] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A cooling device for a heat treatment annealing furnace, comprising a heat dissipation module (10), wherein the heat dissipation module (10) is installed on the heat treatment annealing furnace and is used to cool the space inside the annealing furnace, characterized in that: Also included are: An error acquisition module (20), wherein an even number of the error acquisition modules (20) are arranged evenly inside the annealing furnace, and every two error acquisition modules (20) form a group, each group of error acquisition modules (20) is electrically connected to an error generation module (30), and each group of error acquisition modules (20) is used to acquire temperature values ​​at two locations inside the annealing furnace, and convert the temperature values ​​into voltage values ​​and send them to the error generation module (30); An error generating module (30), wherein two input terminals of the error generating module (30) are electrically connected to a group of error collecting modules (20), and an output terminal is electrically connected to an error comparing module (40), and is used to measure and calculate a difference between two voltage values ​​generated by a group of error collecting modules (20), and send the difference to the error comparing module (40); an error comparison module (40), the error comparison module (40) being electrically connected to the temperature reduction control module (50) and used for controlling the on and off of the temperature reduction control module (50) according to the difference between the two voltage values ​​generated by the error generation module (30); A temperature reduction control module (50) is connected in series in a working circuit of the heat dissipation module (10) and is used to control the operation of the heat dissipation module (10).

2. A cooling device for a heat treatment annealing furnace according to claim 1, characterized in that: The error acquisition module (20) uses a K-type thermocouple. In a set of error acquisition modules (20), the negative poles of two K-type thermocouples are grounded, and the positive poles are electrically connected to the two input ends of the error generation module (30) respectively.

3. A cooling device for a heat treatment annealing furnace according to claim 2, characterized in that: The error generation module (30) adopts a differential operation circuit, including an integrated operational amplifier U31, wherein the same-direction input terminal and the reverse input terminal of the integrated operational amplifier U31 are respectively electrically connected to a resistor R31 and a resistor R32, the other ends of the resistors R31 and R32 are respectively electrically connected to the positive poles of two K-type thermocouples in a group of error acquisition modules (20), the same-direction input terminal and the output terminal of the integrated operational amplifier U31 are electrically connected via a resistor R33, the reverse input terminal of the integrated operational amplifier U31 is also electrically connected to a resistor R34, and the other end of the resistor R34 is grounded.

4. A cooling device for a heat treatment annealing furnace according to claim 1, characterized in that: The error comparison module (40) comprises an integrated operational amplifier U41 and an integrated operational amplifier U42, the output ends of the integrated operational amplifier U41 and the integrated operational amplifier U42 are electrically connected to the anodes of the diodes D41 and D42 respectively, the cathodes of the diodes D41 and D42 are connected in parallel and are electrically connected to one end of a resistor R41, and the other end of the resistor R41 serves as the output end of the error comparison module (40); The reverse input terminal of the integrated operational amplifier U41 and the non-inverting input terminal of the integrated operational amplifier U42 are electrically connected to the sliding terminals of the potentiometers W41 and W42 respectively, one fixed terminal of the potentiometer W41 is connected to an external reference voltage, the other fixed terminal is electrically connected to one fixed terminal of the potentiometer W42, and the other fixed terminal of the potentiometer W42 is grounded; The non-inverting input terminal of the integrated operational amplifier U41 and the inverting input terminal of the integrated operational amplifier U42 are connected in parallel as an input terminal and are electrically connected to the output terminal of the error generating module (30).

5. A cooling device for a heat treatment annealing furnace according to claim 4, characterized in that: The temperature reduction control module (50) comprises an NPN-type transistor (51), the emitter of the transistor (51) is grounded, the base is electrically connected to the output end of the error comparison module (40), the collector is connected to one end of a coil inside a normally closed relay (52), and the other end of the coil is electrically connected to an external reference voltage; The normally closed contact of the normally closed relay (52) is connected in series to the control circuit of the heat dissipation module (10).

6. A cooling device for a heat treatment annealing furnace according to claim 5, characterized in that: The temperature reduction control module (50) further comprises an alarm unit (53), wherein the alarm unit (53) and two ends of a coil inside the normally closed relay (52) are connected in parallel.

7. The cooling device for a heat treatment annealing furnace according to claim 5, characterized in that: The heat dissipation module (10) comprises a temperature detection unit (11), which is installed inside the annealing furnace and is electrically connected to an analog-to-digital conversion unit (12) for measuring temperature data inside the annealing furnace and converting the temperature value into an analog quantity and sending it to the analog-to-digital conversion unit (12). The analog-to-digital conversion unit (12) is electrically connected to a control unit (13) for converting the temperature data of the analog quantity into a digital quantity and sending it to the control unit (13). The control unit (13) is electrically connected to a drive unit (14) for sending a control signal to the drive unit (14). The drive unit (14) is electrically connected to a heat dissipation fan (15) for driving the heat dissipation fan (15) to work according to the control signal. The heat dissipation fan (15) is used to dissipate the internal heat of the annealing furnace.

8. A heat treatment annealing furnace, characterized in that: The heat treatment annealing furnace comprises an annealing furnace body and a heat treatment annealing furnace cooling device according to any one of claims 1 to 7, wherein the error acquisition module (20) is evenly arranged inside the annealing furnace body, and the heat dissipation module (10) is installed on the annealing furnace body to cool the space inside the annealing furnace body.

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