Silicon wafer basket capable of adapting to silicon wafers with different thicknesses

Abstract

The utility model belongs to the technical field of silicon wafer production, and particularly relates to a silicon wafer basket capable of adapting to silicon wafers with different thicknesses, which comprises a fixing plate and a cover plate, a placing device is arranged on the fixing plate, and adjusting devices are respectively arranged on the front side and the rear side in the fixing plate. According to the silicon wafer flower basket capable of adapting to the silicon wafers with the different thicknesses, the silicon wafers are placed on the placement bottom plate between the flower basket rods and the side rods, then the electromagnets are electrified, so that suction force is generated between the electromagnets and the placement bottom plate, the placement bottom plate is pulled to move upwards along the movable cavity, and the silicon wafers with the different thicknesses are clamped between the placement bottom plate and the top plate; a bidirectional motor is started to drive a lead screw in a transmission part to rotate, so that a threaded sliding sleeve on the lead screw and a connecting rod at the top of the threaded sliding sleeve are driven to move relatively, a side rod at the top of the connecting rod is pulled to move relatively, and the distance between the side rod and a flower basket rod is adjusted to adapt to silicon wafers of different sizes; and the application range of the device is further expanded.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon slice production, in particular to a silicon slice flower basket which can adapt to silicon slices of different thicknesses. Background Art

[0002] With the rapid development of the photovoltaic industry, various sizes of silicon wafers have appeared on the market. Upstream and downstream manufacturers in the photovoltaic industry need to change the size of the existing cleaning tanks and the size of the silicon wafer transfer baskets used to handle silicon wafers of different sizes. This has caused great trouble to upstream and downstream manufacturers, requiring repeated modifications and increasing the cost of modification.

[0003] For example, Chinese patent announcement No. CN213424952U discloses a silicon wafer basket for cleaning. When in use, by setting a second support rod with multiple slots at both left and right ends, the number of wafers loaded in the basket can be doubled, and the overall size of the basket can be reduced. The basket occupies a smaller area of ​​the tank body, which reduces unnecessary tank body modification and reduces modification costs. At the same time, it is also suitable for new large-size tank cleaning machines, occupies a smaller area of ​​the tank body, can shorten the length of the whole machine, and is easy to transport and install; the silicon wafer basket for cleaning designed by the utility model has an adjustment hole on the fixed plate. By adjusting the position of the first support rod and / or the second support rod in the adjustment hole, the spacing between the first support rod and the second support rod can be adjusted to adapt to silicon wafers of different sizes, and has universality.

[0004] However, the cleaning silicon wafer basket in the above application, which adjusts the spacing by replacing the adjustment holes on the support rod to accommodate silicon wafers of different sizes, can only accommodate silicon wafers of several specific sizes and cannot accommodate silicon wafers of different thicknesses. Therefore, it has certain limitations.

[0005] Therefore, we urgently need to provide a silicon wafer basket that can adapt to silicon wafers of different thicknesses. Utility Model Content

[0006] The purpose of the utility model is to provide a silicon wafer basket that can adapt to silicon wafers of different thicknesses, so as to solve the problem that the cleaning silicon wafer basket proposed in the above-mentioned background technology adjusts the spacing by replacing the adjustment holes of the support rod to adapt to silicon wafers of different sizes, but can still only adapt to silicon wafers of several specific sizes and cannot adapt to silicon wafers of different thicknesses.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a silicon wafer flower basket that can adapt to silicon wafers of different thicknesses, comprising a fixed plate and a cover plate, wherein the cover plate is installed above the fixed plate, a placing device is arranged on the fixed plate, and adjustment devices are respectively arranged on the front and rear sides of the interior of the fixed plate.

[0008] The placement device includes a flower basket rod, a side rod, and a placement assembly. The two flower basket rods are respectively fixedly connected to the front and rear ends of the middle part of the upper surface of the fixed plate, and the two groups of side rods are respectively fixedly connected to the front and rear ends of the left and right sides of the upper surface of the fixed plate. Several groups of placement assemblies are respectively and vertically equidistantly arranged on the flower basket rods.

[0009] A further improvement is that the placement assembly includes an active cavity, an electromagnet, an elastic rope, a placement base plate, and a top plate, the active cavity is opened on the flower basket rod, the electromagnet is installed on the top wall of the active cavity, the elastic rope is fixedly connected to the bottom of the electromagnet, the placement base plate is fixedly connected to the bottom of the elastic rope, and the two top plates are respectively fixedly connected to the left and right outer surfaces of the flower basket rod.

[0010] A further improvement is that the inner center of the placement base plate is made of magnetic material, and the whole is an I-shaped structure. The silicon wafer is placed on the placement base plate between the basket rod and the side rod, and then the electromagnet is energized to generate suction between the placement base plate, thereby pulling the placement base plate upward along the movable cavity, so that silicon wafers of different thicknesses are clamped between the placement base plate and the top plate, thereby improving the applicability of the device.

[0011] A further improvement is that the inner surface of the side rod is also vertically and equidistantly provided with placement components, which correspond horizontally to the placement components on the flower basket rod, and the electromagnets inside the side rod are energized synchronously, so as to clamp and fix the silicon wafer from the four corners.

[0012] A further improvement is that the adjustment device includes a bidirectional motor, a transmission member, and a connecting rod. The bidirectional motor is installed at the inner center of the fixed plate. The two groups of transmission members are respectively connected to the output ends on both sides of the bidirectional motor. The two connecting rods are respectively fixedly connected to the top of the transmission member, and the top thereof is connected to the bottom of the side rod.

[0013] A further improvement is that limiting slots are respectively provided at the left and right ends of the front and rear sides of the fixed plate, the transmission member is installed inside the limiting slot, the connecting rod is slidably connected to the inner wall of the limiting slot, and the bidirectional motor is started to drive the screw in the transmission member to rotate inside the sealed bearing, thereby driving the threaded sleeve on the screw and the connecting rod at its top to move relative to each other, thereby pulling the side rod at the top of the connecting rod to move relative to each other, thereby adjusting the spacing between the side rod and the basket rod to adapt to silicon wafers of different sizes, further improving the application scope of the device.

[0014] A further improvement is that guide rail grooves are respectively opened on the left and right sides of the front and rear sides of the lower surface of the cover plate, and a slider is slidably connected inside the guide rail groove, and its bottom is connected to the top of the side rod. When the side rod moves relatively, the slider slides synchronously along the guide rail groove, making the movement more stable.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] 1. The silicon wafer flower basket can adapt to silicon wafers of different thicknesses. The silicon wafer is placed on a placement base plate between the flower basket rod and the side rod. Then, the electromagnet is energized to generate suction between the placement base plate, thereby pulling the placement base plate to move upward along the active cavity, thereby clamping silicon wafers of different thicknesses between the placement base plate and the top plate, thereby improving the application range of the device.

[0017] 2. The silicon wafer basket can adapt to silicon wafers of different thicknesses. The bidirectional motor is started to drive the lead screw in the transmission part to rotate inside the sealed bearing, thereby driving the threaded sleeve on the lead screw and the connecting rod on its top to move relative to each other, thereby pulling the side rod on the top of the connecting rod to move relative to each other, thereby adjusting the distance between the side rod and the basket rod to adapt to silicon wafers of different sizes, further improving the application range of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a front view structural schematic diagram of the utility model;

[0019] Figure 2 For the utility model Figure 1 A in the middle is a schematic diagram of the split structure looking up;

[0020] Figure 3 This is a schematic diagram of the cross-sectional structure of the placement component of the utility model;

[0021] Figure 4 It is a schematic cross-sectional structure diagram of the regulating device of the utility model.

[0022] In the figure: 1, fixed plate; 2, cover plate; 301, flower basket rod; 302, side rod; 303, placement component; 3031, movable cavity; 3032, electromagnet; 3033, elastic rope; 3034, placement bottom plate; 3035, top plate; 401, bidirectional motor; 402, transmission part; 403, connecting rod; 404, slider. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-Figure 4 , the utility model provides a technical solution:

[0025] Embodiment 1:

[0026] A silicon wafer basket which can adapt to silicon wafers of different thicknesses comprises a fixing plate 1 and a cover plate 2. The cover plate 2 is installed above the fixing plate 1, and a placing device is arranged on the fixing plate 1.

[0027] The placement device includes a flower basket rod 301, a side rod 302, and a placement assembly 303. The two flower basket rods 301 are respectively fixedly connected to the front and rear ends of the middle part of the upper surface of the fixed plate 1, and the two groups of side rods 302 are respectively fixedly connected to the front and rear ends of the left and right sides of the upper surface of the fixed plate 1. A plurality of groups of placement assemblies 303 are respectively and vertically equidistantly arranged on the flower basket rods 301.

[0028] The placement assembly 303 includes an active cavity 3031, an electromagnet 3032, an elastic rope 3033, a placement base plate 3034, and a top plate 3035. The active cavity 3031 is opened on the flower basket rod 301, the electromagnet 3032 is installed on the top wall of the active cavity 3031, the elastic rope 3033 is fixedly connected to the bottom of the electromagnet 3032, the placement base plate 3034 is fixedly connected to the bottom of the elastic rope 3033, and the two top plates 3035 are respectively fixedly connected to the left and right outer surfaces of the flower basket rod 301.

[0029] The inner center of the placement base plate 3034 is made of magnetic material, and the whole is an I-shaped structure. The silicon wafer is placed on the placement base plate 3034 between the basket rod 301 and the side rod 302, and then the electromagnet 3032 is energized to generate suction between the placement base plate 3034, thereby pulling the placement base plate 3034 to move upward along the active cavity 3031, so that silicon wafers of different thicknesses are clamped between the placement base plate 3034 and the top plate 3035, thereby improving the application range of the device.

[0030] The inner surface of the side rod 302 is also vertically and equidistantly provided with placement components 303, which correspond horizontally to the placement components 303 on the basket rod 301, and the electromagnet 3032 inside the side rod 302 is energized synchronously, so as to clamp and fix the silicon wafer from the four corners.

[0031] Embodiment 2:

[0032] On the basis of Example 1, adjustment devices are respectively provided on the front and rear sides inside the fixed plate 1, and the adjustment devices include a bidirectional motor 401, a transmission member 402, and a connecting rod 403. The bidirectional motor 401 is installed at the inner center of the fixed plate 1, and two groups of transmission members 402 are respectively connected to the output ends on both sides of the bidirectional motor 401. The two connecting rods 403 are respectively fixedly connected to the top of the transmission member 402, and the tops thereof are connected to the bottom of the side rod 302.

[0033] Limiting grooves are respectively provided at the left and right ends of the front and rear sides of the fixed plate 1, the transmission member 402 is installed inside the limiting groove, the connecting rod 403 is slidably connected to the inner wall of the limiting groove, and the bidirectional motor 401 is started to drive the screw in the transmission member 402 to rotate inside the sealed bearing, thereby driving the threaded sleeve on the screw and the connecting rod 403 on its top to move relative to each other, thereby pulling the side rod 302 on the top of the connecting rod 403 to move relative to each other, thereby adjusting the distance between the side rod 302 and the basket rod 301 to adapt to silicon wafers of different sizes, further improving the application range of the device.

[0034] Guide rail grooves are respectively provided on the left and right sides of the front and rear sides of the lower surface of the cover plate 2, and a slider 404 is slidably connected inside the guide rail groove, and its bottom is connected to the top of the side rod 302. When the side rod 302 moves relatively, the slider 404 slides synchronously along the guide rail groove to make the movement more stable.

[0035] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

Claims

1. A silicon wafer basket that can accommodate silicon wafers of different thicknesses, comprising a fixing plate (1) and a cover plate (2), wherein the cover plate (2) is mounted above the fixing plate (1), and is characterized in that: A placing device is arranged on the fixing plate (1), and adjustment devices are arranged on the front and rear sides of the fixing plate (1); The placement device comprises a flower basket rod (301), a side rod (302), and a placement assembly (303); two flower basket rods (301) are respectively fixedly connected to the front and rear ends of the middle part of the upper surface of the fixing plate (1); two groups of side rods (302) are respectively fixedly connected to the front and rear ends of the left and right sides of the upper surface of the fixing plate (1); and a plurality of groups of placement assemblies (303) are respectively and vertically equidistantly arranged on the flower basket rods (301).

2. The silicon wafer basket that can adapt to silicon wafers of different thicknesses according to claim 1, characterized in that: The placement assembly (303) comprises an active cavity (3031), an electromagnet (3032), an elastic rope (3033), a placement bottom plate (3034), and a top plate (3035); the active cavity (3031) is opened on the flower basket rod (301); the electromagnet (3032) is installed on the top wall of the active cavity (3031); the elastic rope (3033) is fixedly connected to the bottom of the electromagnet (3032); the placement bottom plate (3034) is fixedly connected to the bottom of the elastic rope (3033); and the two top plates (3035) are respectively fixedly connected to the left and right outer surfaces of the flower basket rod (301).

3. The silicon wafer basket that can adapt to silicon wafers of different thicknesses according to claim 2, characterized in that: The inner center of the placement base plate (3034) is made of a magnetic material, and the whole is an I-shaped structure.

4. The silicon wafer basket that can adapt to silicon wafers of different thicknesses according to claim 3, characterized in that: The inner surface of the side rod (302) is also provided with placement components (303) at equal intervals in a vertical direction, and corresponds horizontally to the placement components (303) on the flower basket rod (301).

5. The silicon wafer basket that can adapt to silicon wafers of different thicknesses according to claim 1, characterized in that: The regulating device comprises a bidirectional motor (401), a transmission member (402), and a connecting rod (403); the bidirectional motor (401) is installed at the inner center of the fixed plate (1); two groups of the transmission members (402) are respectively connected to the output ends on both sides of the bidirectional motor (401); and two connecting rods (403) are respectively fixedly connected to the top of the transmission member (402), and the tops of the connecting rods are connected to the bottom of the side rod (302).

6. The silicon wafer basket that can adapt to silicon wafers of different thicknesses according to claim 5, characterized in that: The fixing plate (1) is provided with limit sliding grooves at the left and right ends of the front and rear sides, respectively. The transmission member (402) is installed inside the limit sliding groove, and the connecting rod (403) is slidably connected to the inner wall of the limit sliding groove.

7. The silicon wafer basket that can adapt to silicon wafers of different thicknesses according to claim 6, characterized in that: The lower surface of the cover plate (2) is provided with guide rail grooves on the left and right sides of the front and rear sides respectively, and a slider (404) is slidably connected inside the guide rail groove, and the bottom of the slider is connected to the top of the side rod (302).

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