Coating device

Abstract

The present disclosure relates to the technical field of semiconductor or photovoltaic material processing, and specifically to a coating device, which solves the problem of low production capacity of the coating device. The coating device includes: a cavity, a furnace door, at least one furnace door conveying mechanism and a furnace door covering mechanism. The coating device is provided with a furnace door conveying mechanism, and is provided with a furnace door covering mechanism and a furnace mouth direction, so that after the coating of the previous batch of products is completed, the furnace door covering mechanism can open the furnace mouth and transport the previous batch of products out of the cavity, and dock with a furnace door conveying mechanism, and the furnace door conveying mechanism transfers the previous batch of products. The furnace door conveying mechanism can transfer the next batch of products to the furnace door covering mechanism in time, so that the furnace door covering mechanism can deliver the next batch of products into the cavity in time and cover the furnace mouth for coating, thereby improving the transportation efficiency of the products, improving the coating efficiency, and thus improving the production capacity of the coating device.

Description

Technical Field

[0001] The present disclosure relates to the technical field of semiconductor or photovoltaic material processing, and in particular to a coating device. Background Art

[0002] Semiconductor product manufacturing equipment includes diffusion equipment, oxidation equipment, cleaning equipment and coating equipment. Among them, the coating process is to deposit a thin film on the semiconductor product through gaseous substances. The coating device mainly uses a boat module to carry and transport the product to put the product into the furnace body or take it out of the furnace body.

[0003] However, the boat moving module and the boat pushing module have complex structures, complex transportation methods and low transportation efficiency, which leads to low production capacity of the coating device. Utility Model Content

[0004] In view of this, an embodiment of the present disclosure provides a coating device, which solves the problem of low production capacity of the coating device.

[0005] An embodiment of the present disclosure provides a coating device, comprising: a cavity having a furnace opening facing downward, the cavity being configured to coat a product; a furnace door being configured to carry the product and capable of covering the furnace opening; at least one furnace door conveying mechanism being configured to cache and / or transport the furnace door loaded with the product; a furnace door covering mechanism being arranged below the furnace opening and capable of being connected to each of the furnace door conveying mechanisms, being configured to receive the furnace door loaded with the uncoated product transported by at least one of the furnace door conveying mechanisms, and to carry the furnace door loaded with the uncoated product upward so that the furnace door covers the furnace opening, and to carry the furnace door loaded with the coated product downward so that the furnace door is separated from the furnace opening, and to dock with at least one of the furnace door conveying mechanisms so as to transfer the furnace door loaded with the coated product.

[0006] In some embodiments, there are multiple furnace door conveying mechanisms, and the multiple furnace door conveying mechanisms are arranged at intervals in the vertical direction; wherein, when the furnace door covering mechanism is raised or lowered to different preset positions, the furnace door covering mechanism can be located on the same horizontal plane with the furnace door conveying mechanisms located at different positions.

[0007] In some embodiments, the coating device also includes: a loading and unloading mechanism, which is configured to carry the furnace door and carry the furnace door up and down so as to be connected with different furnace door conveying mechanisms respectively; a loading and unloading device, which is configured to load the uncoated product onto the furnace door carried by the loading and unloading mechanism, or to unload the coated product from the furnace door carried by the loading and unloading mechanism; wherein, when the loading and unloading mechanism is lifted to different preset loading positions, the loading and unloading device loads the uncoated product onto the furnace door carried by the loading and unloading mechanism, and the loading and unloading mechanism conveys the furnace door loaded with the uncoated product to different furnace door conveying mechanisms; when the loading and unloading mechanism is lifted to different preset unloading positions, different furnace door conveying mechanisms convey the furnace door loaded with the coated product to the loading and unloading mechanism.

[0008] In some embodiments, the loading and unloading equipment includes: a mobile module assembly, which is located above the loading and unloading mechanism when the loading and unloading mechanism is located at the preset loading position, and the mobile module assembly is configured to move along a first horizontal direction, a second horizontal direction and a vertical direction, wherein the first horizontal direction is the same as the horizontal movement direction of the furnace door on the loading and unloading mechanism, and the second horizontal direction is perpendicular to the first horizontal direction; a gripper, connected to the mobile module assembly, moves with the mobile module assembly, and is configured to grab or place the product.

[0009] In some embodiments, the coating device also includes: a loading mechanism, which is arranged adjacent to the loading and unloading mechanism, and is configured to transport the carrier to the loading position, so that the loading and unloading equipment can load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism, and the carrier is configured to hold the product; wherein the loading mechanism includes: a first sub-loading mechanism, which is configured to transport the carrier to the flipping position; a flipping device, which is connected to the first sub-loading mechanism, and is configured to flip the carrier located at the flipping position; a second sub-loading mechanism, which is connected to the flipping device, and is configured to transport the flipped carrier to the loading position, so that the loading and unloading equipment can load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism.

[0010] In some embodiments, the carrier has a first supporting surface and a second supporting surface set at an angle; wherein the flipping device includes: a first rotating shaft, which is horizontally arranged, and the extension direction of the first rotating shaft is perpendicular to the moving direction of the carrier on the first sub-feeding mechanism; a first supporting plate, which is connected to the first rotating shaft and rotates under the drive of the first rotating shaft, is configured to carry the carrier and can contact the first supporting surface of the carrier; a second supporting plate, which is connected to the first rotating shaft and rotates under the drive of the first rotating shaft, is configured to carry the carrier and can contact the second supporting surface of the carrier; wherein the second supporting plate is set at an angle to the first supporting plate to form a accommodating space, and the accommodating space is used to accommodate the carrier, so that during the rotation of the first rotating shaft, the carrier is converted from being supported by the first supporting plate to being supported by the second supporting plate.

[0011] In some embodiments, the coating device also includes: a unloading mechanism, adjacent to the loading and unloading mechanism and arranged side by side with the loading mechanism, so that the loading and unloading equipment can unload the carrier on the furnace door carried by the loading and unloading mechanism to the unloading mechanism; at least one loading and unloading equipment, arranged on the side of the unloading mechanism away from the loading mechanism or on the side of the loading mechanism away from the unloading mechanism, configured to place the uncoated product in the carrier on the loading mechanism, or to remove the coated product from the carrier on the unloading mechanism, or to transport the empty carrier on the unloading mechanism to the loading mechanism; a transverse movement device, connecting the loading mechanism and the unloading mechanism, configured to move the carrier on the unloading mechanism to the loading mechanism.

[0012] In some embodiments, the coating device also includes: a first material box cache mechanism, which is arranged adjacent to the loading and unloading equipment and is configured to cache material boxes containing uncoated products; a second material box cache mechanism, which is arranged above or below the first material box cache mechanism and is configured to cache the material boxes containing coated products or empty material boxes; wherein the loading and unloading equipment transports the uncoated products in the material boxes on the first material box cache mechanism to the carrier on the loading mechanism, or transports the coated products in the carrier on the unloading mechanism to the material boxes on the second material box cache mechanism.

[0013] In some embodiments, the shape of the cavity includes a cube, and the horizontal cross-sectional shape of the furnace door includes a rectangle; wherein, when there are multiple coating devices, the multiple coating devices are arranged up and down and / or side by side.

[0014] In some embodiments, the coating device also includes: a first clean chamber, configured to accommodate the loading and unloading mechanism and the loading equipment; a second clean chamber, configured to accommodate a plurality of the furnace door conveying mechanisms; a cooling device, disposed at the top of the first clean chamber, configured to cool the first clean chamber; and a cleaning device, disposed at the top of the first clean chamber, configured to clean the furnace door on the loading and unloading mechanism.

[0015] The coating device provided by the embodiment of the present disclosure is provided with a furnace door conveying mechanism, and is provided with a furnace door covering mechanism and a furnace mouth direction, so that after the coating of the previous batch of products is completed, the furnace door covering mechanism can open the furnace mouth and transport the previous batch of products out of the cavity, and dock with a furnace door conveying mechanism, and the furnace door conveying mechanism transports the previous batch of products. The furnace door conveying mechanism can transport the next batch of products to the furnace door covering mechanism in time, so that the furnace door covering mechanism can timely deliver the next batch of products into the cavity and cover the furnace mouth for coating, thereby improving the transportation efficiency of the products, improving the coating efficiency, and thus improving the production capacity of the coating device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Shown is a schematic structural diagram of a coating device provided in one embodiment of the present disclosure.

[0017] Figure 2 Shown Figure 1 A partial enlarged view of area A is shown.

[0018] Figure 3 Shown Figure 2 A partial enlarged view of area B is shown.

[0019] Figure 4 Shown is a top view of a furnace door and a carrier provided in accordance with an embodiment of the present disclosure.

[0020] Figure 5 Shown is a schematic structural diagram of a carrier provided in one embodiment of the present disclosure.

[0021] Figure 6 Shown is a schematic structural diagram of a coating device provided in another embodiment of the present disclosure.

[0022] Reference numerals:

[0023] 10. Coating device; 100. Cavity; 110. Furnace mouth; 200. Furnace door; 350. Furnace door conveying mechanism; 300. First furnace door conveying mechanism; 400. Furnace door closing mechanism; 500. Second furnace door conveying mechanism; 600. Loading and unloading mechanism; 700. Loading and unloading equipment; 710. Moving module assembly; 7110. First horizontal module; 7120. Second horizontal module; 7130. Vertical module; 720. Gripper; 800. Loading mechanism; 810. First sub-loading mechanism; 820. First turning device; 8210. First rotating shaft; 8220. First bearing plate; 8230. Second bearing plate; 830. Second sub-loading mechanism; 900. Carrier; 901. Opening; 91 0. First supporting surface; 920. Second supporting surface; 930. Third supporting surface; 1000. Unloading mechanism; 1001. First sub-unloading mechanism; 1002. Second turning device; 1012. Second rotating shaft; 1022. Third supporting plate; 1032. Fourth supporting plate; 1003. Second sub-unloading mechanism; 1100. Unloading and loading equipment; 1110. First manipulator; 1120. Second manipulator; 1200. Transverse movement device; 1300. First material box cache mechanism; 1400. Second material box cache mechanism; 1500. First purification chamber; 1600. Second purification chamber; 1700. Cooling device; 1800. Cleaning device; 1900. Pump device; 2000. Heat removal device. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0025] The manufacture of solar cells usually includes processes such as texturing, diffusion, etching, coating, screen printing and sintering, and all of the above processes need to be carried out in specific manufacturing equipment. Specifically, the manufacturing equipment includes diffusion equipment, oxidation equipment, dry cleaning equipment and coating equipment. Among them, the coating process is to deposit a thin film on the silicon wafer through gaseous substances to reduce the reflection of sunlight and passivate the surface of the silicon wafer. The coating equipment includes: Plasma Enhanced Chemical Vapor Deposition (PECVD) equipment, low-pressure Chemical Vapor Deposition (LPCVD) equipment, atomic layer deposition (ALD) equipment, etc. The above equipment includes a clean bench, a furnace body, a gas source cabinet, an automated device, etc. The clean bench can carry and transport products and cool and purify the processed products. The products are processed in a sealed furnace body, the gas source cabinet provides reaction gas, and the automated device is used to pick and place the products.

[0026] The clean bench equipment in the coating device generally includes a boat pushing module, a boat moving module, a side boat exit module, a buffer rack, a cooling system, a heat dissipation system, etc. Each boat module is mainly used to carry and transport products so that the products can be placed in or taken out of the furnace body. The boat module structure is complex, the transportation method is complex and the transportation efficiency is low, resulting in low production capacity of the coating device.

[0027] In view of the above problems, the embodiment of the present disclosure provides a coating device, which is provided with a furnace door conveying mechanism, and is also provided with a furnace door covering mechanism and a furnace mouth direction, so that after the coating of the previous batch of products is completed, the furnace door covering mechanism can open the furnace mouth and transport the previous batch of products out of the cavity, and dock with a furnace door conveying mechanism, and the furnace door conveying mechanism transports the previous batch of products. The furnace door conveying mechanism can transport the next batch of products to the furnace door covering mechanism in time, so that the furnace door covering mechanism can timely deliver the next batch of products into the cavity and cover the furnace mouth for coating, thereby improving the transportation efficiency of the products, improving the coating efficiency, and thus improving the production capacity of the coating device.

[0028] The specific structure of the coating device is described below in conjunction with the embodiments.

[0029] Figure 1 FIG. 1 is a schematic diagram of the structure of a coating device provided by an embodiment of the present disclosure. Figure 1As shown, the coating device 10 includes: a chamber 100, a furnace door 200, at least one furnace door conveying mechanism 350, and a furnace door covering mechanism 400. The chamber 100 has a furnace opening 110 facing downward, the chamber 100 is configured to coat the product, the furnace door 200 is configured to carry the product, and can cover the furnace opening 110. The furnace door conveying mechanism 350 is configured to cache or transport the furnace door 200 loaded with the product, or cache and transport the furnace door 200 loaded with the product. The furnace door covering mechanism 400 is arranged below the furnace mouth 110 and can be connected to each furnace door conveying mechanism 350. It is configured to receive the furnace door 200 loaded with uncoated products transported by at least one furnace door conveying mechanism 350, and to carry the furnace door 200 loaded with uncoated products upward to cover the furnace door 200 with the furnace mouth 110, and to carry the furnace door 200 loaded with coated products downward to separate the furnace door 200 from the furnace mouth 110, and to dock with at least one furnace door conveying mechanism 350 to transfer the furnace door 200 loaded with coated products.

[0030] The coating device 10 is provided with at least one furnace door conveying mechanism 350, and is provided with a furnace door covering mechanism 400 and the direction of the furnace opening 110, so that after the coating of the previous batch of products is completed, the furnace door covering mechanism 400 can open the furnace opening 110 and transport the previous batch of products from the cavity 100, and dock with a furnace door conveying mechanism 350, and the furnace door conveying mechanism 350 transfers the previous batch of products. The furnace door conveying mechanism 350 can transfer the next batch of products to the furnace door covering mechanism 400 in time, so that the furnace door covering mechanism 400 can timely deliver the next batch of products into the cavity 100 and cover the furnace opening 110 for coating, thereby improving the transportation efficiency of the products, improving the coating efficiency, and thus improving the production capacity of the coating device.

[0031] The product may be a silicon wafer, a wafer, a solar panel, a glass substrate, etc. For example, the product may be a silicon wafer with a cross section, and the coating device 10 may passivate the cross section of the silicon wafer with a cross section.

[0032] The shape of the cavity 100 may be rectangular or cylindrical, and the present disclosure does not specifically limit the shape of the cavity 100. The shape of the furnace door 200 may be rectangular or circular, as long as the furnace door 200 can carry the product and cover the furnace opening 110, and the present disclosure does not specifically limit the shape of the cavity 100.

[0033] In some embodiments, the shape of the cavity 100 includes a cube, and the horizontal cross-sectional shape of the furnace door 200 includes a rectangle. The cavity 100 is generally horizontal, and multiple furnace tubes are stacked in the cavity 100. The furnace tubes are made of quartz material and are easily damaged. The furnace tubes are used as reaction chambers. Due to process limitations, the furnace tubes are cylindrical. Due to plant space limitations, the number and size of the furnace tubes are limited, resulting in the number of products that the cavity 100 can accommodate being limited. The shape of the product or the carrier 900 containing the product is mostly rectangular. Therefore, in the same space, compared with the cylindrical furnace tube, the cubic cavity 100 can accommodate more products, thereby further improving the production capacity of the coating device 10. In addition, the cubic cavity 100 facilitates the vertical arrangement or side-by-side arrangement of the coating device 10, which is convenient for saving the space occupied by the coating device 10. Therefore, in the case where there are multiple coating devices 10, multiple coating devices 10 are arranged vertically and / or side-by-side to improve the production efficiency of the coating device 10.

[0034] The furnace door conveying mechanism 350 may be a conveyor belt flow line, and may include a first power source, a first transmission assembly, and a first conveyor belt. The first power source drives the first transmission assembly to move, and the first transmission assembly carries the first conveyor belt to move, so that the first conveyor belt transports the furnace door 200 loaded with uncoated products. The first power source may be a device that can provide power, such as a motor, an electric cylinder, or a cylinder. The first transmission assembly may be a transmission device such as a roller, a pulley, a synchronous wheel, or a gear. The first conveyor belt may be a conveying device such as a belt, a mesh belt, or a synchronous belt.

[0035] The furnace door covering mechanism 400 may include a conveyor belt flow line and a first lifting device located below the conveyor belt mechanism. Exemplarily, the furnace door covering mechanism 400 may include a second power source, a second transmission assembly, and a second conveyor belt. The second power source drives the second transmission assembly to move, and the second transmission assembly carries the second conveyor belt to move, so that the second conveyor belt transports the furnace door 200 loaded with uncoated products. The second power source may be a device that can provide power, such as a motor, an electric cylinder, or a cylinder. The second transmission assembly may be a transmission device such as a roller, a pulley, a synchronous wheel, or a gear. The second conveyor belt may be a conveying device such as a belt, a mesh belt, or a synchronous belt. Exemplarily, the first lifting device is disposed below the conveyor belt flow line and is connected to the conveyor belt flow line to drive the conveyor belt flow line to rise, so that the furnace door 200 loaded with uncoated products on the second conveyor belt is covered with the furnace port 110, or drives the furnace door 200 loaded with coated products on the second conveyor belt to descend, so that the furnace door 200 loaded with coated products on the second conveyor belt is separated from the furnace port 110.

[0036] The coating device 10 further includes a pump device 1900 , which is connected to the chamber 100 and configured to transport reaction gas into the chamber 100 so that the chamber 100 can coat the product.

[0037] The product is contained in a carrier 900 , and an opening 901 is provided on the carrier 900 . The reaction gas enters the carrier 900 through the opening 901 in the chamber 100 to coat the product in the carrier 900 .

[0038] In some embodiments, there are multiple furnace door conveying mechanisms 350, and the multiple furnace door conveying mechanisms 350 are arranged at intervals in the vertical direction. When the furnace door covering mechanism 400 is raised or lowered to different preset positions, the furnace door covering mechanism 400 can be located at the same horizontal plane as a furnace door conveying mechanism 350 located at a different position.

[0039] For example, continue to refer to Figure 1 As shown, there are two furnace door conveying mechanisms 350, namely a first furnace door conveying mechanism 300 and a second furnace door conveying mechanism 500. The first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 can be arranged on the same side of the furnace door covering mechanism 400, and the pump equipment 1900 is arranged on the other side of the furnace door covering mechanism 400.

[0040] Exemplarily, the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 may also be arranged on different sides of the furnace door covering mechanism 400. For example, the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 are arranged on opposite sides of the furnace door covering mechanism 400. For another example, the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 are arranged on adjacent sides of the furnace door covering mechanism 400.

[0041] The first furnace door conveying mechanism 300 transports the furnace door 200 loaded with the uncoated product in the horizontal direction, so that the furnace door 200 loaded with the uncoated product is conveyed by the first furnace door conveying mechanism 300 to the furnace door covering mechanism 400. The furnace door covering mechanism 400 transports the furnace door 200 loaded with the uncoated product in the horizontal direction, so that the furnace door 200 loaded with the uncoated product is located below the furnace opening 110, and the furnace door covering mechanism 400 rises to allow the uncoated product loaded on the furnace door 200 to enter the cavity 100, and at the same time, the furnace door 200 covers the furnace opening 110, so that the cavity 100 is in a sealed state, and the product is coated in the sealed cavity 100.

[0042] After coating is completed, the furnace door closing mechanism 400 descends to separate the furnace door 200 loaded with the coated products from the furnace mouth 110, and allows the coated products loaded on the furnace door 200 to exit the cavity 100 and dock with the second furnace door conveying mechanism 500. The furnace door covering mechanism 400 transports the furnace door 200 loaded with the coated products in the horizontal direction, so that the furnace door 200 loaded with the coated products is conveyed by the furnace door covering mechanism 400 to the second furnace door conveying mechanism 500.

[0043] Exemplarily, the first furnace door conveying mechanism 300 is located below or above the second furnace door conveying mechanism 500. When the furnace door covering mechanism 400 is lifted to the first preset position, the furnace door covering mechanism 400 and the first furnace door conveying mechanism 300 are located at the same horizontal plane, and when the furnace door covering mechanism 400 is lifted to the second preset position, the furnace door covering mechanism 400 and the second furnace door conveying mechanism 500 are located at the same horizontal plane. It can be seen that the arrangement of the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 can save space, thereby facilitating the improvement of the production capacity of the coating device 10 in a limited space.

[0044] The first preset position may be the position of the first furnace door conveying mechanism 300 when the distance between the first furnace door conveying mechanism 300 and the ground is the first preset distance. The first preset position and the first preset distance may be determined according to actual needs, and are not specifically limited in the present disclosure.

[0045] The second preset position may be the position of the second furnace door conveying mechanism 500 when the distance between the second furnace door conveying mechanism 500 and the ground is the second preset distance. The second preset position and the second preset distance may be determined according to actual needs, and are not specifically limited in the present disclosure.

[0046] When the first furnace door conveying mechanism 300 is located below the second furnace door conveying mechanism 500, the first preset position is located below the second preset position. When the first furnace door conveying mechanism 300 is located above the second furnace door conveying mechanism 500, the first preset position is located above the second preset position.

[0047] In some embodiments, Figure 1 and Figure 2As shown, the coating device 10 further includes a loading and unloading mechanism 600 and a loading and unloading device 700. The loading and unloading mechanism 600 is configured to carry the furnace door 200 and to lift and lower the furnace door 200 so as to dock with different furnace door conveying mechanisms 350 respectively. Exemplarily, the loading and unloading mechanism 600 can be connected to the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500. The loading and unloading device 700 is configured to load the uncoated product to the furnace door 200 carried by the loading and unloading mechanism 600, or to unload the coated product from the furnace door 200 carried by the loading and unloading mechanism 600. Wherein, when the loading and unloading mechanism 600 is lifted and lowered to different preset loading positions, the loading and unloading device 700 loads the uncoated product to the furnace door 200 carried by the loading and unloading mechanism 600, and the loading and unloading mechanism 600 conveys the furnace door 200 loaded with the uncoated product to different furnace door conveying mechanisms 350. When the loading and unloading mechanism 600 is lifted to different preset unloading positions, different furnace door conveying mechanisms 350 convey the furnace door 200 loaded with the coated product to the loading and unloading mechanism 600. Through automated loading and unloading, the loading and unloading efficiency is improved, thereby improving the production efficiency of the coating device 10.

[0048] The loading and unloading device 700 can be a robot or can be composed of other components. As long as the loading and unloading device 700 can load uncoated products onto the furnace door 200 carried by the loading and unloading mechanism 600, or unload coated products from the furnace door 200 carried by the loading and unloading mechanism 600, the present disclosure does not specifically limit the structure of the loading and unloading device 700.

[0049] The loading and unloading mechanism 600 is arranged on a side of the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 away from the furnace door covering mechanism 400. When the loading and unloading mechanism 600 is raised and lowered to the third preset position, the loading and unloading mechanism 600 and the first furnace door conveying mechanism 300 are located at the same horizontal plane, and the loading and unloading mechanism 600 transports the furnace door 200 loaded with the uncoated product in the horizontal direction, so that the furnace door 200 loaded with the uncoated product is conveyed by the loading and unloading mechanism 600 to the first furnace door conveying mechanism 300. When the loading and unloading mechanism 600 is lifted to the fourth preset position, the loading and unloading mechanism 600 and the second furnace door conveying mechanism 500 are located at the same horizontal plane, the second furnace door conveying mechanism 500 transports the furnace door 200 loaded with the coated product in the horizontal direction and away from the furnace door covering mechanism 400, the furnace door 200 loaded with the coated product is transported to the loading and unloading mechanism 600 by the second furnace door conveying mechanism 500, and the loading and unloading mechanism 600 transports the furnace door 200 loaded with the coated product in the horizontal direction and away from the second furnace door conveying mechanism 500. Among them, the third preset position is the preset loading position, and the fourth preset position is the preset unloading position.

[0050] The third preset position may be the position of the first furnace door conveying mechanism 300 when the distance between the first furnace door conveying mechanism 300 and the ground is the first preset distance. The third preset position and the first preset distance may be determined according to actual needs, and are not specifically limited in the present disclosure.

[0051] The fourth preset position may be the position of the second furnace door conveying mechanism 500 when the distance between the second furnace door conveying mechanism 500 and the ground is the second preset distance. The fourth preset position and the second preset distance may be determined according to actual needs, and are not specifically limited in the present disclosure.

[0052] When the first furnace door conveying mechanism 300 is located below the second furnace door conveying mechanism 500, the third preset position is located below the fourth preset position. When the first furnace door conveying mechanism 300 is located above the second furnace door conveying mechanism 500, the third preset position is located above the fourth preset position.

[0053] The loading and unloading mechanism 600 may include a conveyor belt flow line and a second lifting device. For example, the loading and unloading mechanism 600 may include a fourth power source, a fourth transmission assembly and a fourth conveyor belt. The fourth power source drives the fourth transmission assembly to move, and the fourth transmission assembly carries the fourth conveyor belt to move, so that the fourth conveyor belt transports the furnace door 200 loaded with uncoated products, or the fourth conveyor belt transports the furnace door 200 loaded with coated products. The fourth power source may be a device that can provide power, such as a motor, an electric cylinder, or a cylinder. The fourth transmission assembly may be a transmission device such as a roller, a pulley, a synchronous wheel, or a gear. The fourth conveyor belt may be a conveying device such as a belt, a mesh belt, or a synchronous belt. For example, the second lifting device is arranged below the conveyor belt flow line, connected to the conveyor belt flow line, and drives the fourth conveyor belt to be lifted to the third preset position, or drives the fourth conveyor belt to be lifted to the fourth preset position.

[0054] In some embodiments, continue to refer to Figure 2 As shown, the loading and unloading device 700 includes a mobile module assembly 710 and a gripper 720. When the loading and unloading mechanism 600 is located at a preset loading position, the mobile module assembly 710 is located above the loading and unloading mechanism 600, and the mobile module assembly 710 is configured to move along a first horizontal direction X1, a second horizontal direction X2, and a vertical direction Y1. Among them, the first horizontal direction X1 is the same as the horizontal movement direction of the furnace door 200 on the loading and unloading mechanism 600, and the second horizontal direction X2 is perpendicular to the first horizontal direction X1. The gripper 720 is connected to the mobile module assembly 710, moves with the mobile module assembly 710, and is configured to grab or place the product. The loading and unloading device 700 has a simple structure and is located above the loading and unloading mechanism 600, thereby reducing the floor space of the coating device 10.

[0055] In some embodiments, the mobile module assembly 710 includes a first horizontal module 7110, a second horizontal module 7120 and a vertical module 7130. The first horizontal module 7110 is connected to the second horizontal module 7120 and are perpendicular to each other. The vertical module 7130 is connected to the second horizontal module 7120. The vertical module 7130 is connected to the gripper 720. The first horizontal module 7110 drives the second horizontal module 7120 and the vertical module 7130 to move along the first horizontal direction X1. The second horizontal module 7120 drives the vertical module 7130 to move along the second horizontal direction X2. The vertical module 7130 drives the gripper 720 to move along the vertical direction Y1, so that the gripper 720 can accurately grasp or place the product.

[0056] In some embodiments, Figure 1 , Figure 2 and Figure 6 As shown, the coating device 10 further includes a loading mechanism 800. The loading mechanism 800 is disposed adjacent to the loading and unloading mechanism 600 and is configured to transport the carrier 900 to the loading position so that the loading and unloading device 700 can load the carrier 900 from the loading position to the furnace door 200 carried by the loading and unloading mechanism 600, and the carrier 900 is configured to contain products. The loading mechanism 800 includes a first sub-loading mechanism 810, a first turning device 820, and a second sub-loading mechanism 830. The first sub-loading mechanism 810 is configured to transport the carrier 900 to the first flipping position, the first flipping device 820 is connected to the first sub-loading mechanism 810, and is configured to flip the carrier 900 located at the first flipping position, and the second sub-loading mechanism 830 is connected to the first flipping device 820, and is configured to transport the flipped carrier 900 to the loading position, so that the loading and unloading equipment 700 can load the carrier 900 from the loading position to the furnace door 200 carried by the loading and unloading mechanism 600. The position of the carrier 900 is adjusted by the loading mechanism 800, and then the direction of the opening 901 of the carrier 900 is adjusted to prepare for subsequent coating.

[0057] The feeding mechanism 800 may be a conveyor belt flow line. For example, the feeding mechanism 800 may include a fifth power source, a fifth transmission assembly, and a fifth conveyor belt. The fifth power source drives the fifth transmission assembly to move, and the fifth transmission assembly carries the fifth conveyor belt to move, so that the fifth conveyor belt transports the carrier 900 containing the uncoated product. The fifth power source may be a device that can provide power, such as a motor, an electric cylinder, or a cylinder. The fifth transmission assembly may be a transmission device such as a roller, a pulley, a synchronous wheel, or a gear. The fifth conveyor belt may be a conveying device such as a belt, a mesh belt, or a synchronous belt.

[0058] In some embodiments, the first flipping device 820 can flip the carrier 900 at the first flipping position by 90 degrees or 180 degrees, so that the opening 901 of the carrier 900 is exposed in the chamber 100, so that the reaction gas can enter the carrier 900 through the opening 901 in the chamber 100. For example, the flipping angle of the carrier 900 at the first flipping position by the first flipping device 820 can be selected according to actual conditions, for example, 30 degrees, 60 degrees, 150 degrees, etc., which is not specifically limited in the present disclosure.

[0059] The loading mechanism 800 is arranged on a side of the loading and unloading mechanism 600 away from the furnace door conveying mechanism 350. When the loading and unloading mechanism 600 is lifted to the fifth preset position, the loading and unloading mechanism 600 and the loading mechanism 800 are located on the same horizontal plane. The loading mechanism 800 transports the carrier 900 containing the uncoated product in the horizontal direction to transport the carrier 900 to the loading position. Exemplarily, the second lifting device drives the fourth conveyor belt to lift to the fifth preset position.

[0060] The fifth preset position may be the position of the loading mechanism 800 when the distance between the loading mechanism 800 and the ground is the third preset distance. The fifth preset position and the third preset distance may be determined according to actual needs, and the present disclosure does not make specific limitations thereon.

[0061] The second sub-loading mechanism 830 is disposed adjacent to the loading and unloading mechanism 600, and the second sub-loading mechanism 830 is disposed on a side of the loading and unloading mechanism 600 away from the furnace door conveying mechanism 350. The first flipping device 820 is connected to the second sub-loading mechanism 830, and the first flipping device 820 is disposed on a side of the second sub-loading mechanism 830 away from the loading and unloading mechanism 600. The first sub-loading mechanism 810 is connected to the first flipping device 820, and the first sub-loading mechanism 810 is disposed on a side of the first flipping device 820 away from the second sub-loading mechanism 830. The first sub-loading mechanism 810 transports the carrier 900 containing the uncoated products to the first flipping position, and the first flipping device 820 flips the carrier 900 containing the uncoated products located at the first flipping position, so that the carrier 900 containing the uncoated products is flipped from the first sub-loading mechanism 810 to the second sub-loading mechanism 830 and the opening 901 is exposed, and the second sub-loading mechanism 830 transports the flipped carrier 900 containing the uncoated products to the loading position, so that the loading and unloading equipment 700 can load the carrier 900 containing the uncoated products from the loading position to the furnace door 200 carried by the loading and unloading mechanism 600.

[0062] In some embodiments, the carrier 900 has a first support surface 910 and a second support surface 920 that are arranged at an angle. The first flip device 820 includes: a first rotating shaft 8210, a first supporting plate 8220, and a second supporting plate 8230. The first rotating shaft 8210 is arranged horizontally, and the extension direction of the first rotating shaft 8210 is perpendicular to the moving direction of the carrier 900 on the first sub-feeding mechanism 810. The first supporting plate 8220 is connected to the first rotating shaft 8210, rotates under the drive of the first rotating shaft 8210, is configured to carry the carrier 900, and can contact the first support surface 910 of the carrier 900. The second supporting plate 8230 is connected to the first rotating shaft 8210, rotates under the drive of the first rotating shaft 8210, is configured to carry the carrier 900, and can contact the second support surface 920 of the carrier 900. The second carrier plate 8230 is arranged at an angle with the first carrier plate 8220 to form a receiving space for receiving the carrier 900, so that during the rotation of the first rotating shaft 8210, the carrier 900 is transferred from being carried by the first carrier plate 8220 to being carried by the second carrier plate 8230. The first flipping device 820 has a simple structure and high flipping efficiency.

[0063] For example, Figures 3 to 6 As shown, the carrier 900 is a rectangular structure, the first support surface 910 and the second support surface 920 are arranged at 90 degrees, the first support surface 910 is provided with an opening 901, and the second supporting plate 8230 is arranged at 90 degrees with the first supporting plate 8220. The first sub-loading mechanism 810 transports the carrier 900 to the first flipping position, the first supporting plate 8220 carries the first supporting surface 910, and the second supporting plate 8230 carries the second supporting surface 920. During the process of the first rotating shaft 8210 rotating 90 degrees, the carrier 900 is converted from the first supporting surface 910 being carried by the first supporting plate 8220 to the second supporting surface 920 being carried by the second supporting plate 8230. When the first rotating shaft 8210 rotates to 90 degrees, the carrier 900 is flipped to the second sub-loading mechanism 830, and the second sub-loading mechanism 830 transports the carrier 900 flipped 90 degrees to the loading position.

[0064] Exemplarily, there is a gap between the first supporting surface 910 and the third supporting surface 930 in the vertical direction, and the gap forms an opening 901 , wherein the third supporting surface 930 and the second supporting surface 920 are arranged opposite to each other.

[0065] In some embodiments, the coating device 10 further includes a material unloading mechanism 1000, at least one material loading and unloading device 1100, and a transverse movement device 1200. The material unloading mechanism 1000 is adjacent to the loading and unloading mechanism 600 and is arranged side by side with the loading and unloading mechanism 800, so that the loading and unloading device 700 can unload the carrier 900 on the furnace door 200 carried by the loading and unloading mechanism 600 to the material unloading mechanism 1000. The material unloading mechanism 1000 transports the carrier 900 containing the coated product in a horizontal direction and in a direction away from the loading and unloading mechanism 600. The loading and unloading device 1100 is arranged on the side of the unloading mechanism 1000 away from the loading mechanism 800 or on the side of the loading mechanism 800 away from the unloading mechanism 1000, and is configured to place the carrier 900 of the uncoated product in the carrier 900 on the loading mechanism 800, or to take the coated product out of the carrier 900 on the unloading mechanism 1000, or to transport the empty carrier 900 on the unloading mechanism 1000 to the loading mechanism 800. The traverse device 1200 connects the loading mechanism 800 and the unloading mechanism 1000, and is configured to move the carrier 900 on the unloading mechanism 1000 to the loading mechanism 800. Automatic unloading is achieved through the unloading mechanism 1000, the loading and unloading device 1100 and the traverse device 1200, thereby improving the production efficiency of the coating device 10.

[0066] The unloading mechanism 1000 may be a conveyor belt flow line. Exemplarily, the unloading mechanism 1000 may include a sixth power source, a sixth transmission assembly, and a sixth conveyor belt. The sixth power source drives the sixth transmission assembly to move, and the sixth transmission assembly carries the sixth conveyor belt to move, so that the sixth conveyor belt transports the carrier 900 containing the coated products. The sixth power source may be a device that can provide power, such as a motor, an electric cylinder, or a cylinder. The sixth transmission assembly may be a transmission device such as a roller, a pulley, a synchronous wheel, or a gear. The sixth conveyor belt may be a conveying device such as a belt, a mesh belt, or a synchronous belt.

[0067] In some embodiments, Figure 1 , Figure 2 and Figure 6As shown, the unloading mechanism 1000 includes: a first sub-unloading mechanism 1001, a second flipping device 1002 and a second sub-unloading mechanism 1003. The first sub-unloading mechanism 1001 is arranged adjacent to the loading and unloading mechanism 600 and arranged side by side with the second sub-loading mechanism 830, so that the loading and unloading device 700 can unload the carrier 900 on the furnace door 200 carried by the loading and unloading mechanism 600 to the first sub-unloading mechanism 1001, and the first sub-unloading mechanism 1001 transports the carrier 900 containing the coated product to the second flipping position, and the second flipping device 1002 is connected to the first sub-unloading mechanism 1001 and arranged side by side with the first flipping device 820, and is configured to flip the carrier 900 located at the second flipping position. The second sub-unloading mechanism 1003 is connected to the second flipping device 1002 and arranged side by side with the first sub-loading mechanism 810, and is configured to transport the flipped carrier 900 to achieve unloading.

[0068] In some embodiments, the second flipping device 1002 can flip the carrier 900 at the second flipping position by 90 degrees or 180 degrees, so that the carrier 900 is in a feeding state. For example, the flipping angle of the carrier 900 at the second flipping position by the second flipping device 1002 can be selected according to actual conditions, for example, 30 degrees, 60 degrees, 150 degrees, etc., which is not specifically limited in the present disclosure.

[0069] Exemplarily, the second flipping device 1002 may include a second rotating shaft 1012, a third carrying plate 1022, and a fourth carrying plate 1032. The second rotating shaft 1012 is horizontally arranged, and the extension direction of the second rotating shaft 1012 is perpendicular to the moving direction of the carrier 900 on the second sub-unloading mechanism 1003. The third carrying plate 1022 is connected to the second rotating shaft 1012, rotates under the drive of the second rotating shaft 1012, is configured to carry the carrier 900, and can contact the second support surface 920 of the carrier 900. The fourth carrying plate 1032 is connected to the second rotating shaft 1012, rotates under the drive of the second rotating shaft 1012, is configured to carry the carrier 900, and can contact the first support surface 910 of the carrier 900. The third carrier plate 1022 and the fourth carrier plate 1032 are arranged at an angle to form a receiving space for receiving the carrier 900, so that during the rotation of the second rotating shaft 1012, the carrier 900 is transferred from being carried by the third carrier plate 1022 to being carried by the fourth carrier plate 1032. The second flipping device 1002 has a simple structure and high flipping efficiency.

[0070] The third carrier plate 1022 and the fourth carrier plate 1032 are arranged at 90 degrees. The first sub-unloading mechanism 1001 transports the carrier 900 to the second flipping position, the third carrier plate 1022 carries the second support surface 920, and the fourth carrier plate 1032 carries the first support surface 910. During the process of the second rotating shaft 1012 rotating 90 degrees, the carrier 900 is converted from being carried by the third carrier plate 1022 on the second support surface 920 to being carried by the fourth carrier plate 1032 on the first support surface 910. When the second rotating shaft 1012 rotates to 90 degrees, the carrier 900 is flipped to the second sub-unloading mechanism 1003, and the second sub-unloading mechanism 1003 transports the carrier 900 after being flipped 90 degrees.

[0071] Exemplarily, the transverse movement device 1200 connects the first sub-loading mechanism 810 and the second sub-unloading mechanism 1003 .

[0072] In some embodiments, when the loading and unloading equipment 1100 is arranged on a side of the loading mechanism 800 away from the unloading mechanism 1000, the loading and unloading equipment 1100 takes out the coated products in the carrier 900 on the second sub-unloading mechanism 1003, and transports the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810.

[0073] In some embodiments, when the loading and unloading equipment 1100 is arranged on the side of the loading mechanism 800 away from the unloading mechanism 1000, the transverse movement device 1200 moves the carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810, so that the loading and unloading equipment 1100 can take out the coated products in the carrier 900, and the loading and unloading equipment 1100 can place the uncoated products in the empty carrier 900 on the first sub-loading mechanism 810.

[0074] In some embodiments, when the loading and unloading equipment 1100 is arranged on the side of the unloading mechanism 1000 away from the loading mechanism 800, the loading and unloading equipment 1100 takes out the coated products in the carrier 900 on the second sub-unloading mechanism 1003, and transports the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810.

[0075] In some embodiments, when the loading and unloading equipment 1100 is arranged on the side of the unloading mechanism 1000 away from the loading mechanism 800, the loading and unloading equipment 1100 takes out the coated products in the carrier 900 on the second sub-unloading mechanism 1003, so that the loading and unloading equipment 1100 can place the uncoated products in the empty carrier 900 on the second sub-unloading mechanism 1003, and the transverse movement device 1200 moves the carrier 900 containing the uncoated products from the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810.

[0076] The loading and unloading equipment 1100 may include a first manipulator 1110 and a second manipulator 1120. The first manipulator 1110 and the second manipulator 1120 may be simultaneously arranged on a side of the unloading mechanism 1000 away from the loading mechanism 800 or simultaneously arranged on a side of the loading mechanism 800 away from the unloading mechanism 1000. The first manipulator 1110 and the second manipulator 1120 may work together to place an uncoated product in the carrier 900 on the first sub-loading mechanism 810, or to take a coated product out of the carrier 900 on the second sub-unloading mechanism 1003, or to transport an empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810. The first robot 1110 and the second robot 1120 can also work separately, the first robot 1110 places the uncoated product in the carrier 900 on the first sub-loading mechanism 810, and the second robot 1120 takes the coated product from the carrier 900 on the second sub-unloading mechanism 1003, and transports the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810, or the second robot 1120 places the uncoated product in the carrier 900 on the first sub-loading mechanism 810, the first robot 1110 takes the coated product from the carrier 900 on the second sub-unloading mechanism 1003, and transports the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810.

[0077] In some embodiments, Figure 6 As shown, the coating device 10 further includes a first material box cache mechanism 1300 and a second material box cache mechanism 1400. The first material box cache mechanism 1300 and the second material box cache mechanism 1400 are stacked up and down. Figure 6 The top view of the coating device 10 is shown. Since the first material box cache mechanism 1300 and the second material box cache mechanism 1400 are stacked up and down, Figure 6 The first material box buffer mechanism 1300 is represented by a dotted frame, that is, Figure 6 In the illustrated embodiment, the first material box cache mechanism 1300 is disposed below the second material box cache mechanism 1400. In other embodiments, the first material box cache mechanism 1300 may also be disposed above the second material box cache mechanism 1400.

[0078] The first material box buffer mechanism 1300 is disposed adjacent to the loading and unloading device 1100 and is configured to buffer material boxes containing uncoated products. The second material box buffer mechanism 1400 is disposed above or below the first material box buffer mechanism 1300 and is configured to buffer material boxes containing coated products or empty material boxes.

[0079] The loading and unloading device 1100 transports the uncoated products in the material box on the first material box buffer mechanism 1300 to the carrier 900 on the loading mechanism 800, or transports the coated products in the carrier 900 on the unloading mechanism 1000 to the material box on the second material box buffer mechanism 1400. The uncoated products are buffered by the first material box buffer mechanism 1300 to prevent untimely loading, the empty material boxes are buffered by the second material box buffer mechanism 1400 to facilitate unloading, and the material boxes containing coated products are buffered and transported by the second material box buffer mechanism 1400 to realize unloading, thereby realizing automatic loading and unloading and improving production efficiency.

[0080] like Figure 4 As shown, several rows, columns, and layers of carriers 900 can be arranged side by side on the furnace door 200, and each carrier 900 can hold several stacked products to increase the number of products carried by the furnace door 200, further improve the coating efficiency, and thus further improve the production capacity of the coating device 10.

[0081] In some embodiments, Figure 1 As shown, the coating device 10 further includes: a first cleaning chamber 1500, a second cleaning chamber 1600, a cooling device 1700 and a cleaning device 1800. The first cleaning chamber 1500 is configured to accommodate the loading and unloading mechanism 600 and the loading device 700, the second cleaning chamber 1600 is configured to accommodate a plurality of furnace door conveying mechanisms 350, the cooling device 1700 is disposed on the top of the first cleaning chamber 1500, and is configured to cool down the first cleaning chamber 1500, and the cleaning device 1800 is disposed on the top of the first cleaning chamber 1500, and is configured to clean the furnace door 200 on the loading and unloading mechanism 600.

[0082] The cooling device 1700 includes a water cooling mechanism and an air cooling mechanism. When the furnace door 200 loaded with the coated product is transported from the second furnace door buffer mechanism 500 to the loading and unloading mechanism 600, the water cooling mechanism and the air cooling mechanism cool the furnace door 200 loaded with the coated product and the product at the same time. The tops of the cavity 100, the first purification chamber 1500, and the second purification chamber 1600 are all provided with a heat exhaust device 2000, through which the heat in the cavity 100, the first purification chamber 1500, and the second purification chamber 1600 is discharged.

[0083] The cleaning device 1800 includes a dust suction and cleaning roller assembly to clean the oven door 200 carried by the loading and unloading mechanism 600. Exemplarily, the loading and unloading mechanism 600 lifts the oven door 200 loaded with uncoated products to the sixth preset position, and the dust suction and cleaning roller assembly is connected to the edge of the upper surface of the oven door 200 loaded with uncoated products in a rolling manner, and the dust suction and cleaning roller assembly rolls to clean the edge of the upper surface of the oven door 200 loaded with uncoated products.

[0084] The sixth preset position can be the position where the loading and unloading mechanism 600 lifts and lowers the furnace door 200 loaded with uncoated products to contact the cleaning device 1800 when the distance between the cleaning device 1800 and the ground is the fourth preset distance. The sixth preset position and the fourth preset distance can be determined according to actual needs and are not specifically limited in the present disclosure.

[0085] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0086] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0087] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0088] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0089] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A coating device, characterized in that: include: A chamber having a furnace opening facing downward, wherein the chamber is configured to coat a product; A furnace door, configured to carry the product and cover the furnace opening; at least one furnace door conveying mechanism, configured to buffer and / or transport the furnace door loaded with the product; The furnace door covering mechanism is arranged below the furnace mouth and can be connected to each of the furnace door conveying mechanisms. It is configured to receive the furnace door loaded with the uncoated product transported by at least one of the furnace door conveying mechanisms, and to carry the furnace door loaded with the uncoated product upward so that the furnace door and the furnace mouth are covered, and to carry the furnace door loaded with the coated product downward so that the furnace door and the furnace mouth are separated, and to dock with at least one of the furnace door conveying mechanisms to transfer the furnace door loaded with the coated product.

2. The coating device according to claim 1, characterized in that: There are multiple furnace door conveying mechanisms, and the multiple furnace door conveying mechanisms are arranged at intervals along the vertical direction; Wherein, when the furnace door covering mechanism is lifted or lowered to different preset positions, the furnace door covering mechanism can be located at the same horizontal plane as the furnace door conveying mechanism located at different positions.

3. The coating device according to claim 2, characterized in that: Also includes: A loading and unloading mechanism is configured to carry the furnace door and to lift and lower the furnace door so as to be connected to different furnace door conveying mechanisms respectively; A loading and unloading device configured to load the uncoated product onto the furnace door carried by the loading and unloading mechanism, or to unload the coated product from the furnace door carried by the loading and unloading mechanism; Among them, when the loading and unloading mechanism is lifted to different preset loading positions, the loading and unloading equipment loads the uncoated product into the furnace door carried by the loading and unloading mechanism, and the loading and unloading mechanism transports the furnace door loaded with the uncoated product to different furnace door conveying mechanisms; when the loading and unloading mechanism is lifted to different preset unloading positions, different furnace door conveying mechanisms transport the furnace door loaded with the coated product to the loading and unloading mechanism.

4. The coating device according to claim 3, characterized in that: The loading and unloading equipment includes: a mobile module assembly, which is located above the loading and unloading mechanism when the loading and unloading mechanism is located at the preset loading position, and is configured to move along a first horizontal direction, a second horizontal direction and a vertical direction, wherein the first horizontal direction is the same as the horizontal moving direction of the furnace door on the loading and unloading mechanism, and the second horizontal direction is perpendicular to the first horizontal direction; The gripper is connected to the mobile module assembly, moves with the mobile module assembly, and is configured to grab or place the product.

5. The coating device according to claim 3, characterized in that: Also includes: a loading mechanism, disposed adjacent to the loading and unloading mechanism, configured to transport the carrier to a loading position so that the loading and unloading device can load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism, the carrier being configured to contain the product; Wherein, the feeding mechanism comprises: a first sub-loading mechanism, configured to transport the carrier to a flipping position; a flipping device, connected to the first sub-feeding mechanism, and configured to flip the carrier located at the flipping position; The second sub-loading mechanism is connected to the flipping device and is configured to transport the flipped carrier to the loading position so that the loading and unloading equipment can load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism.

6. The coating device according to claim 5, characterized in that: The carrier has a first support surface and a second support surface arranged at an angle; Wherein, the flipping device comprises: A first rotating shaft is horizontally arranged, and an extending direction of the first rotating shaft is perpendicular to a moving direction of the carrier on the first sub-feeding mechanism; A first carrying plate, connected to the first rotating shaft, rotates under the drive of the first rotating shaft, is configured to carry the carrier, and can contact the first supporting surface of the carrier; a second carrying plate, connected to the first rotating shaft, rotated by the first rotating shaft, configured to carry the carrier, and capable of contacting the second supporting surface of the carrier; The second supporting plate is arranged at an angle with the first supporting plate to form a receiving space, and the receiving space is used to receive the carrier, so that during the rotation of the first rotating shaft, the carrier is converted from being supported by the first supporting plate to being supported by the second supporting plate.

7. The coating device according to claim 5, characterized in that: Also includes: a material unloading mechanism, adjacent to the loading and unloading mechanism and arranged side by side with the loading and unloading mechanism, so that the loading and unloading equipment can unload the carrier on the furnace door carried by the loading and unloading mechanism to the material unloading mechanism; At least one loading and unloading device, arranged on a side of the unloading mechanism away from the loading mechanism or on a side of the loading mechanism away from the unloading mechanism, configured to place the uncoated product in the carrier on the loading mechanism, or to take the coated product out of the carrier on the unloading mechanism, or to transport the empty carrier on the unloading mechanism to the loading mechanism; The transverse movement device connects the loading mechanism and the unloading mechanism and is configured to move the carrier on the unloading mechanism to the loading mechanism.

8. The coating device according to claim 7, characterized in that: Also includes: A first material box caching mechanism is disposed adjacent to the loading and unloading device and is configured to cache material boxes containing the uncoated product; A second material box caching mechanism is disposed above or below the first material box caching mechanism and is configured to cache the material box containing the coated product or the empty material box; Among them, the loading and unloading equipment transports the uncoated product in the material box on the first material box cache mechanism to the carrier on the loading mechanism, or transports the coated product in the carrier on the unloading mechanism to the material box on the second material box cache mechanism.

9. The coating device according to any one of claims 1 to 8, characterized in that: The shape of the cavity includes a cube, and the horizontal cross-sectional shape of the furnace door includes a rectangle; Wherein, when there are multiple coating devices, the multiple coating devices are arranged up and down and / or side by side.

10. The coating device according to any one of claims 3 to 7, characterized in that: Also includes: a first clean room configured to accommodate the loading and unloading mechanism and the loading and unloading equipment; a second purification chamber configured to accommodate a plurality of said furnace door conveying mechanisms; a cooling device, disposed on the top of the first purification chamber and configured to cool the first purification chamber; A cleaning device is disposed on the top of the first purification chamber and is configured to clean the furnace door on the loading and unloading mechanism.

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