Drying groove ejector pin

Abstract

The utility model relates to the field of semiconductor production, in particular to a drying groove ejector pin, which comprises a pin top part, a bearing part and a base part, the needle top part is arranged at the top of the bearing part and is used for fixing a sheet, the base part is arranged at the bottom of the bearing part, and the bearing part is used for connecting the base part and the needle top part and is used for bearing the sheet. According to the drying groove ejector pin, the sheet can be controlled and ejected more stably, the sheet is prevented from falling, deviating or being damaged in the working period of a drying groove machine table, in conclusion, the sheet can be conveyed more stably and safely, the sheet falling probability is reduced, and meanwhile the service life of the ejector pin is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a drying tank ejector pin. Background Art

[0002] In the field of semiconductor production technology, it is usually necessary to place a wafer on a drying machine and transfer the wafer to an output position. During this process, the wafer needs to be translated and rotated with high precision. The rotation angle during the rotation process is usually large, for example, it needs to rotate about 80 degrees. At present, it is usually necessary to use a pin to translate the wafer to a preset position and lean it against a rotatable platform (the initial angle of the platform is between 80 and 90 degrees with the horizontal direction). When the wafer is stable on the rotatable platform, the rotatable platform rotates to the output position and drives the wafer to rotate to the output position, and the output position is parallel to the horizontal plane.

[0003] According to the above, in the process of translating or rotating the wafer slice on the drying machine, since the wafer slice is relatively fragile, it is easy to damage the wafer slice by directly placing it on the machine or manually moving the wafer slice. Therefore, it is usually necessary to use a special drying slot top to support the wafer slice. At the same time, the initial angle of the rotatable platform is set to be slightly less than ninety degrees to prevent the wafer slice from falling off; however, since the existing drying slot top pins only play the role of supporting the wafer slice, when the initial angle of the rotatable platform and the horizontal plane is closer to 90 degrees, or when the rotatable platform is rotated at a larger angle, the probability of the wafer slice falling off is still relatively high.

[0004] Therefore, the present application proposes a drying tank ejector pin, which is formed into an integral part of a pin top, a supporting part and a base part, wherein the supporting part is used to support the wafer slice and connect the pin top and the base part, and the pin top is set in a V-shape and fixed on the supporting part, so as to avoid the wafer slice from shifting in the left and right position directions during movement, thereby preventing the wafer slice from falling off, and a base part is provided under the supporting part, so that the drying tank ejector pin fits the drying tank machine, making the wafer slice more stable during movement, extending the service life of the drying tank ejector pin in the harsher working environment in this field, and not easily wearing the wafer slice, thereby improving the yield rate and reducing the risk of equipment downtime. Utility Model Content

[0005] To achieve the above objectives, the utility model is implemented through the following technical solutions: The utility model provides a drying tank ejector pin, comprising: a pin top, a supporting portion and a base portion;

[0006] The needle top is arranged at a first end of the supporting portion along a first direction, and an end of the needle top away from the supporting portion along the first direction has a V-shaped groove;

[0007] The base portion is disposed at a second end of the supporting portion along the first direction.

[0008] Preferably, the supporting portion is cylindrical, and the first direction is the axial direction of the supporting portion.

[0009] Preferably, the needle top has two beveled surfaces, which are arranged opposite to each other along a second direction, the second direction is perpendicular to the first direction, the two beveled surfaces extend to an end of the needle top away from the supporting portion along the first direction, and the two beveled surfaces intersect at the end.

[0010] Preferably, the V-shaped groove includes a first side surface and a second side surface, and an intersection line of the first side surface and the second side surface passes through the center of the first end of the supporting portion.

[0011] Preferably, when the needle top has two beveled surfaces, the first side surface intersects with a side wall of the needle top along a third direction, and the second side surface intersects with another side wall of the needle top along the third direction, and the third direction is perpendicular to the first direction and the second direction.

[0012] Preferably, the cross section of the base portion after being cut along a direction perpendicular to the first direction is rectangular.

[0013] Preferably, along the first direction, the projection of the base portion is located within the projection of the supporting portion.

[0014] Preferably, the needle top is made of elastic material.

[0015] Preferably, the angle of the V-shaped groove is between 53° and 74°, and / or the size of the needle top along the first direction is 6-8 mm, and / or the size of the supporting portion along the first direction is 4-6 mm, and / or the outer diameter of the supporting portion is 8-9 mm, and / or the size of the base portion along the first direction is 15-17 mm.

[0016] Preferably, the outer circumferential surface of the needle top and the outer circumferential surface of the supporting portion are located in the same cylindrical surface.

[0017] It can be seen from the above technical solutions that the utility model has the following advantages:

[0018] In the utility model, a drying slot ejector pin is provided, comprising a needle top, a needle top and a supporting portion, wherein the needle top, the supporting portion and the base portion are integrally formed, the supporting portion being used to support the wafer sheet and connect the needle top and the base portion, and the needle top is configured in a V-shape and fixed on the supporting portion; through the coordinated action of the above components, when the drying machine is operated, the sheet can be more stably controlled and lifted up to prevent the sheet from falling, deviating or being damaged during the operation of the drying machine. In summary, in a drying slot ejector pin provided in the present application, a more stable and safer transmission of the sheet can be achieved, the probability of sheet dropping can be reduced while the service life of the ejector pin is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of a drying tank ejector pin in an embodiment of the present application;

[0021] Figure 2 This is a schematic diagram of the structure of a drying tank ejector pin according to an embodiment of the present application;

[0022] Figure 3 This is a schematic diagram of the side view structure of a drying tank ejector pin according to an embodiment of the present application;

[0023] Figure 4 It is a schematic diagram of a top view structure of a drying tank ejector pin in an embodiment of the present application.

[0024] The accompanying drawings are denoted as follows:

[0025] 1-needle top; 2-supporting part; 3-base part; 4a-first beveled surface; 4b-second beveled surface; 5a-first side surface; 5b-second side surface. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] As used in the present invention, the singular forms "a", "an" and "the" include plural objects, the term "or" is generally used in a sense including "and / or", the term "several" is generally used in a sense including "at least one", and the term "at least two" is generally used in a sense including "two or more". In addition, the terms "first", "second" and "third" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features. The term "proximal end" is usually the end close to the operator, and the term "distal end" is usually the end close to the patient. "One end" and "the other end" as well as "proximal end" and "distal end" usually refer to two corresponding parts, which include not only the endpoints. The terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral body; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of the two elements or the interaction relationship between the two elements. In addition, as used in the present utility model, an element is arranged on another element, which usually only means that there is a connection, coupling, matching or transmission relationship between the two elements, and the connection, coupling, matching or transmission between the two elements can be direct or indirect through an intermediate element, and it cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any position such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0028] Please refer to Figure 1 and Figure 2 As shown, Figure 1 is a schematic diagram of the three-dimensional structure of a drying tank ejector pin of this embodiment, Figure 2 This is a front structural schematic diagram of a drying slot ejector pin of this embodiment when it is perpendicular to a horizontal plane, comprising: a pin top 1, a supporting portion 2 and a base portion 3; the pin top 1 is arranged at the first end of the supporting portion 2 along a first direction, and the end of the pin top 1 away from the supporting portion 2 along the first direction has a V-shaped groove; the base portion 3 is arranged at the second end of the supporting portion 2 along the first direction. The drying slot ejector pin is arranged on the drying machine, and when the drying machine stops or starts running, the first direction a is the axial direction of the supporting portion and the base portion.

[0029] When the drying slot ejector pin is installed on the drying machine, the drying slot ejector pin can be installed vertically, in which case the first direction is perpendicular to the horizontal plane (in which case the second direction is parallel to the horizontal plane), or the drying slot ejector pin can be installed at an angle, in which case the angle between the first direction and the horizontal plane is 80° to 90° (in which case the angle between the second direction and the horizontal plane is 0°-10°). The wafer sheet is clamped on the V-shaped groove at the top of the needle; during the operation of the drying machine, the machine pushes the drying slot ejector pin, and at the same time, the drying slot ejector pin pushes the wafer sheet to rise along the first direction to a preset position, and the preset position has a platform parallel to the first direction. When the wafer sheet reaches the preset position, it can lean on the platform, and the platform drives the wafer sheet to rotate to the output position, and the output position is parallel to the horizontal plane.

[0030] Please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the supporting portion is cylindrical, and the needle top 1 is arranged at the first end of the supporting portion 2 along the first direction ( Figure 1 The base portion 3 is disposed at the second end of the supporting portion 2 along the first direction ( Figure 1 The base portion 3 is in the shape of an elongated strip, and the cross section of the base portion 3 after being cut perpendicular to the first direction is rectangular, that is, the base portion 3 is in the shape of an elongated rod structure with a rectangular cross section.

[0031] Combination Figure 3 As shown, the needle top 1 has two beveled surfaces, namely a first beveled surface 4a and a second beveled surface 4b, and the two beveled surfaces are arranged opposite to each other along the second direction. It is worth noting that the second direction is perpendicular to the first direction, and the two beveled surfaces extend to an end of the needle top away from the supporting portion along the first direction ( Figure 3 The upper end of the middle needle top), and the two beveled surfaces intersect at this end, so that the upper end of the supporting part has a sharp structure. Figure 3 As shown, the projection of the needle top 1 along the third direction is a triangle, and the triangle is an isosceles triangle. The base of the triangle is equal to the diameter of the supporting portion 2. In addition, the two endpoints of the first bevel 4a and the second bevel 4b located in the third direction are colinear with the center of the circle on the cross section of the first end of the supporting portion 2, and the two bevels are congruent triangles.

[0032] Please refer to Figure 1 and Figure 2As shown, the V-shaped groove includes a first side surface 5a and a second side surface 5b, and the intersection line of the first side surface 5a and the second side surface 5b passes through the center of the first end of the supporting portion 2, and the first side surface 5a and the second side surface 5b are symmetrical along the intersection line. In addition, when the needle top 1 has a first beveled surface 4a and a second beveled surface 4b, the first side surface 5a intersects with a side wall of the needle top 1 along a third direction, and the second side surface 5b intersects with the other side wall of the needle top 1 along the third direction, and the third direction is perpendicular to the first direction and the second direction.

[0033] In other alternative embodiments, the two beveled surfaces may also be set to be semicircular. In this case, the shape of the needle top 1 is a hemisphere with a V-shaped notch, and one side of the hemisphere is coplanar with the first end of the supporting portion 2 along the first direction. The V-shaped notch is used to allow the wafer slice to be set on the needle top 1. It is worth noting that the bottom of the V-shaped notch can be either an end point or an arc shape, so as to prevent the wafer slice from being excessively tilted when being set on the needle top 1. The above are all prior arts and the present application does not make too many restrictions here.

[0034] Please refer to Figure 1 , Figure 2 and Figure 3 As shown, the base portion 3 is a cube. In addition, the cross section of the base portion 3 along the first direction is rectangular, so that the drying slot ejector pin can be arranged in a fit with the drying machine, and the projection of the base portion 3 along the first direction is within the projection of the supporting portion 2 along the first direction. In this embodiment, any diagonal of the cross section of the base portion 3 along the first direction is equal to the outer diameter length of the cross section of the supporting portion 2 along the first direction; the base portion 3 and the supporting portion 2 are integrally formed, and the end of the needle top 1 connected to the first end of the supporting portion 2 and the first end of the supporting portion 2 are conformally connected, that is, the outer peripheral surface of the needle top and the outer peripheral surface of the supporting portion are located in the same cylindrical surface. Through the above arrangement, the drying slot ejector pin is not easy to break or deform during long-term use, thereby ensuring the stable operation of the entire drying machine and reducing the wafer drop rate.

[0035] In this embodiment, the angle of the V-shaped groove is between 53° and 74°, and / or the size of the needle top along the first direction is 6-8 mm, and / or the size of the supporting portion along the first direction is 4-6 mm, and / or the outer diameter of the supporting portion is 8-9 mm, and / or the size of the base portion along the first direction is 15-17 mm, and the diagonal length of the base portion 3 along the surface perpendicular to the first direction is consistent with the diameter length of the cross-sectional circle of the supporting portion 3 along the surface perpendicular to the first direction; through the above arrangement, the drying groove While the ejector pin fits the thickness of the wafer slice, the V-shaped angle of the pin top is between 53° and 74°, which is lower than 90°, so that the wafer slice can be stably set on the ejector pin of the drying tank without falling off when pushed to the preset position. In addition, due to the certain angle, when the wafer slice is rotated to the output position, it can effectively prevent the contact surface between the wafer slice and the ejector pin of the drying tank from being worn, or the wafer slice from being bent, deformed or even broken due to the error between the rotation of the ejector pin of the drying tank and the rotation of the platform.

[0036] In this embodiment, the needle top 1, the supporting part 2 and the base part 3 are all made of elastic materials, and the soft material includes keep material and kmf rubber material, so that it is more resistant to high temperature, corrosion or oil, and extends the service life of the drying tank ejector pin in the harsh working environment in this field. The above is the prior art, and this application will not go into too much detail and limitation here.

[0037] In summary, in the utility model, a drying slot ejector pin is proposed, which is formed into an integral part by the pin top, the supporting part and the base part, the supporting part is used to support the wafer sheet and connect the pin top and the base part, and the pin top is set in a V shape and fixed on the supporting part; through the cooperation of the above components, the wafer sheet is prevented from being offset in the left and right position directions during the movement, thereby preventing the wafer sheet from falling off, and a base part is provided under the supporting part, so that the drying slot ejector pin fits the drying slot machine, making the wafer sheet more stable during the movement, and at the same time, the above components are all made of soft materials, so that the drying slot ejector pin is more resistant to high temperature, corrosion or oil, and the service life of the drying slot ejector pin in the harsher working environment in this field is extended, and the wafer sheet is not easily worn, thereby improving the yield rate and reducing the risk of equipment downtime.

[0038] Finally, it should be noted that the above is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A drying tank ejector pin, characterized in that: include: A needle top, a support portion, and a base portion; The needle top is arranged at a first end of the supporting portion along a first direction, and an end of the needle top away from the supporting portion along the first direction has a V-shaped groove; The base portion is disposed at a second end of the supporting portion along the first direction.

2. A drying tank ejector according to claim 1, characterized in that: The supporting portion is cylindrical, and the first direction is the axial direction of the supporting portion.

3. A drying tank ejector according to claim 1, characterized in that: The needle top has two beveled surfaces, which are arranged opposite to each other along a second direction, the second direction is perpendicular to the first direction, and the two beveled surfaces extend to an end of the needle top away from the supporting portion along the first direction, and the two beveled surfaces intersect at the end.

4. A drying tank ejector according to claim 3, characterized in that: The V-shaped groove includes a first side surface and a second side surface, and an intersection line of the first side surface and the second side surface passes through the center of the first end of the supporting portion.

5. A drying tank ejector according to claim 4, characterized in that: When the needle top has two beveled surfaces, the first side surface intersects with a side wall of the needle top along a third direction, and the second side surface intersects with another side wall of the needle top along the third direction, and the third direction is perpendicular to the first direction and the second direction.

6. A drying tank ejector according to claim 2, characterized in that: The cross section of the base portion cut along a direction perpendicular to the first direction is rectangular.

7. A drying tank ejector according to claim 6, characterized in that: Along the first direction, the projection of the base portion is located within the projection of the supporting portion.

8. The drying tank ejector according to claim 1, characterized in that: The needle top is made of elastic material.

9. A drying tank ejector according to claim 1, characterized in that: The included angle of the V-shaped groove is between 53° and 74°, and / or the dimension of the needle top along the first direction is 6-8mm, and / or the dimension of the supporting portion along the first direction is 4-6mm, and / or the outer diameter of the supporting portion is 8-9mm, and / or the dimension of the base portion along the first direction is 15-17mm.

10. A drying tank ejector according to claim 2, characterized in that: The outer circumferential surface of the needle top and the outer circumferential surface of the supporting portion are located in the same cylindrical surface.

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