Furnace tube structure and reaction furnace

Abstract

The utility model relates to the technical field of photovoltaic and semiconductor processing, in particular to a furnace tube structure and a reaction furnace, and solves the problem that a furnace tube is easy to damage. The furnace tube structure comprises a tube body with an inner cavity; the at least one isolation protection layer comprises a plurality of protection units, each protection unit is of a tubular structure, the multiple protection units are located in the inner cavity and sequentially arranged in the axial direction of the tube body, the multiple protection units are fixedly connected with the inner wall of the tube body, and the ends of the adjacent protection units are spliced. According to the furnace tube structure and the reaction furnace, the tube body can be protected through the isolation protection layer, and the tube body can be effectively prevented from being damaged.

Description

Technical Field

[0001] The present disclosure relates to the technical field of photovoltaics and semiconductor processing, and in particular to a furnace tube structure and a reaction furnace. Background Art

[0002] In existing reaction furnaces (such as diffusion furnaces), most furnace tubes are made of quartz tubes. These furnace tubes are in a high temperature and large pressure difference between the inside and outside of the furnace tubes for a long time, and are also affected by the reaction in the furnace tubes. Since the furnace tubes are not isolated, the inner wall of the furnace tubes will directly contact the corrosive gas generated in the furnace. This contact, coupled with the accumulation of products during the reaction, will form a layer of reactant film inside the furnace tube, which will cause damage to the furnace tube to a certain extent.

[0003] In addition, since the current conventional process requires that the reaction site of the silicon wafer must maintain a certain vacuum condition, the furnace tube therefore plays the role of a closed container. Before the reaction, the inside of the furnace tube will be evacuated. However, once the inside of the furnace tube is damaged, the pressure difference between the inside and outside will aggravate the stress concentration at the damaged part, eventually causing the furnace tube to burst. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a furnace tube structure and a reaction furnace, which solve the problem in the related art that the furnace tubes are not isolated and are prone to damage.

[0005] In a first aspect, an embodiment of the present disclosure provides a furnace tube structure comprising: a tube body having an inner cavity; at least one insulating protective layer, comprising a plurality of protective units, wherein the protective units are tubular structures, and the plurality of protective units are located in the inner cavity and are arranged in sequence along the axial direction of the tube body; the plurality of protective units are fixedly connected to the inner wall of the tube body, and the ends of adjacent protective units are spliced.

[0006] In some embodiments, the protection unit includes: a plurality of components, wherein the components extend along the axial direction of the protection unit and are arranged in sequence along the circumferential direction of the protection unit.

[0007] In some embodiments, in the axial direction of the protection unit, two ends of the plurality of components are aligned respectively.

[0008] In some embodiments, one of the adjacent protective units has a first recessed structure, and the other of the two adjacent protective units has a first raised structure. The first recessed structure at the end of the protective unit is spliced ​​with the first raised structure at the end of the adjacent protective unit so that the two adjacent protective units form a recessed fit.

[0009] In some embodiments, the constituent member has a docking end that docks with the constituent member on the adjacent protective unit; among the multiple constituent members included in the same protective unit, the docking ends of at least some of the constituent members are axially offset from the docking ends of the constituent members other than at least some of the constituent members in the same direction, so as to form the first recessed structure or the first protruding structure at the end of the protective unit.

[0010] In some embodiments, among the multiple components included in the same protection unit, between every two adjacent components, the butt ends facing the same direction are axially offset from each other.

[0011] In some embodiments, the protection unit includes a plurality of constituent units arranged in sequence along the circumference of the protection unit, and the constituent unit includes a plurality of constituent members; between adjacent constituent units, the butt ends of the two constituent members in the connecting position with the same orientation are axially staggered; in the same constituent unit, the butt ends of adjacent constituent members with the same orientation are axially staggered.

[0012] In some embodiments, the butt joint ends of the same orientation of multiple components of the same component unit are staggered in sequence according to the same staggered direction, and the staggered direction includes the direction from the middle of the component to the butt joint end or the direction from the butt joint end to the middle of the component.

[0013] In some embodiments, the number of the insulating and protective layers is multiple, and the multiple insulating and protective layers are stacked in sequence.

[0014] In some embodiments, the orthographic projections of the end splicing positions of adjacent protection units in the isolation protection layer and the end splicing positions of adjacent protection units in the adjacent isolation protection layer on the tube body do not overlap.

[0015] In some embodiments, when the protection unit includes multiple components, the orthographic projection of one component of the isolation protection layer on the tube body overlaps with the orthographic projection of two components of the adjacent isolation protection layer on the tube body, and one component of the isolation protection layer is fixedly connected to two adjacent components of the adjacent isolation protection layer respectively.

[0016] In some embodiments, the constituent member is a solid rod or a tubular structure.

[0017] In some embodiments, the material of the component is silicon carbide or zirconium oxide, and / or the surface of the component has a thermal radiation absorption layer.

[0018] In some embodiments, an insulating coating is provided on the inner wall of the tube body and / or on a side of the insulating protective layer facing away from the tube body.

[0019] In a second aspect, an embodiment of the present disclosure provides a reaction furnace, comprising: a furnace body; and a furnace tube structure as described in the first aspect, wherein the furnace tube structure is located in the furnace body.

[0020] The embodiments of the present disclosure provide a furnace tube structure and a reaction furnace, wherein at least one insulating protective layer is fixedly connected to the inner wall of the tube body of the furnace tube. The insulating protective layer can protect the tube body, prevent the inner wall of the tube body from directly contacting the gas in the furnace, and prevent product accumulation, thereby effectively avoiding damage to the tube body. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Shown is a three-dimensional view of a furnace tube structure provided by an embodiment of the present disclosure.

[0022] Figure 2 Shown is a side view of an insulating protective layer in a furnace tube structure provided by an embodiment of the present disclosure.

[0023] Figure 3 Shown is a side view of an insulating protective layer in a furnace tube structure provided by another embodiment of the present disclosure.

[0024] Figure 4 Shown is a three-dimensional view of a protection unit in a furnace tube structure provided by an embodiment of the present disclosure.

[0025] Figure 5 Shown is a schematic diagram of constituent units in a furnace tube structure provided in an embodiment of the present disclosure.

[0026] Figure 6 Shown is a schematic diagram of the coordination relationship between adjacent insulating protective layers in a furnace tube structure provided by an embodiment of the present disclosure.

[0027] Figure 7 Shown is a schematic diagram of the matching relationship between components of adjacent insulating protective layers in a furnace tube structure provided by an embodiment of the present disclosure.

[0028] Figure 8 Shown is a schematic diagram of the positional relationship between mounting parts and components in a furnace tube structure provided in an embodiment of the present disclosure.

[0029] Fig. 9 Shown is a schematic structural diagram of a reaction furnace provided in one embodiment of the present disclosure.

[0030] Reference numerals:

[0031] 100, tube body; 200, isolation protection layer; 201, protection unit; 202, constituent member; 203, constituent unit; 204, first protruding structure; 205, first recessed structure; 206, docking end; 300, mounting member. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0033] In existing reactors, most furnace tubes are made of quartz tubes. These furnace tubes are in a high temperature and large pressure difference between the inside and outside of the furnace tubes for a long time, and are also affected by the reaction in the furnace tubes. Since no structural isolation measures are taken on the inner wall of the furnace tube, the inner wall of the furnace tube will directly contact the corrosive gas generated in the furnace. This contact, coupled with the accumulation of products during the reaction, will form a layer of reactant film inside the furnace tube, which will cause damage to the furnace tube to a certain extent.

[0034] In addition, since the current conventional process requires that the reaction site of the silicon wafer must maintain a certain vacuum condition, the furnace tube therefore plays the role of a closed container. Before the reaction, the inside of the furnace tube will be evacuated. However, once the inside of the furnace tube is damaged, the pressure difference between the inside and outside will aggravate the stress concentration at the damaged part, eventually causing the furnace tube to burst.

[0035] In response to the above-mentioned problems, the embodiments of the present disclosure provide a furnace tube structure and a reaction furnace, in which at least one insulating protective layer 200 is fixedly connected to the inner wall of the tube body 100 of the furnace tube. The insulating protective layer 200 can protect the tube body 100, prevent the inner wall of the tube body 100 from directly contacting the gas in the furnace, and prevent product accumulation, thereby effectively preventing the tube body 100 from being damaged.

[0036] Combine the following Figures 1 to 8 The furnace tube structure of the embodiment of the present disclosure is described.

[0037] Figure 1 is a three-dimensional diagram of the furnace tube structure in the embodiment of the present disclosure, such as Figure 1 As shown, the furnace tube structure of the embodiment of the present disclosure includes a tube body 100 and at least one insulating protective layer 200. The tube body 100 is usually a quartz tube. The tube body 100 has an inner cavity. At least one insulating protective layer 200 is fixedly arranged in the tube body 100 and can isolate and protect the inner wall of the tube body 100.

[0038] Combination Figure 2 , Figure 3 and Figure 4 The insulating protective layer 200 includes a plurality of protective units 201, which are tubular structures. The plurality of protective units 201 are respectively arranged in the inner cavity of the tube body 100, and the plurality of protective units 201 are respectively coaxial with the tube body 100, and the plurality of protective units 201 are sequentially arranged along the axial direction of the tube body 100, and the plurality of protective units 201 are fixedly connected to the inner wall of the tube body 100, and the ends of adjacent protective units 201 are spliced. The insulating protective layer 200 adopts a structure in which a plurality of protective units 201 are spliced ​​in sequence, which can shorten the length of each section and facilitate the production and installation of the insulating protective layer 200. Optionally, the inner diameter and outer diameter of the plurality of protective units 201 are the same, which is convenient for the docking of adjacent protective units 201 and the fixation of the protective units 201 and the tube body 100, and can also make the interior of the furnace tube structure more spacious and regular.

[0039] Optionally, the isolation protection layer 200 is bonded and fixed to the inner wall of the tube body 100, thereby ensuring that the isolation protection layer 200 is well connected to the tube body 100 and enhancing the isolation effect of the isolation protection layer 200 on the inner wall of the tube body 100. In other embodiments, the isolation protection layer 200 may also be mechanically connected by, for example, snap-fitting, which will not be described in detail here.

[0040] In some disclosed embodiments, the protection unit 201 includes a plurality of components 202. The components 202 extend along the axial direction of the protection unit 201 and are arranged in sequence along the circumference of the protection unit 201. The components 202 at adjacent positions may be tightly fitted or may have a small gap. The plurality of components 202 and the plurality of components 202 and the inner wall of the tube body 100 may be bonded by high-temperature glue, which has a fixing effect on the one hand and can improve the isolation ability on the other hand. The structural form in which the protection unit 201 includes a plurality of components 202 has the following advantages: before being fixed, the positions of the plurality of components 202 can be adjusted separately, which can better adapt to the changes in the inner wall structure of the tube body 100; reducing the size of each part is conducive to reducing the difficulty of production and installation.

[0041] The insulating protective layer 200 of this embodiment can be divided into two forms according to the different joints between adjacent protective units 201. The two forms will be introduced separately below.

[0042] like Figure 2 As shown, in an optional form, two ends of the plurality of components 202 are aligned in the axial direction of the protection unit 201. Thus, the joints formed between adjacent protection units 201 are in the shape of a circular ring.

[0043] like Figure 3As shown, in another optional form, adjacent protective units 201 are concave-convex matched. The concave-convex match in this embodiment means that the position where the protective unit 201 is connected to the adjacent protective unit 201 forms a curved seam (without gap). Specifically, one of the adjacent protective units 201 has a first concave structure 205, and the other of the two adjacent protective units has a first convex structure 204. The first concave structure 205 at the end of the protective unit 201 is connected to the first convex structure 204 at the end of the adjacent protective unit 201, so that the two adjacent protective units form a concave-convex match.

[0044] The first protruding structure 204 and the first recessed structure 205 are explained here as follows: the first protruding structure 204 and the first recessed structure 205 are based on a certain position of the protective unit 201, and the portion protruding axially outward (away from the middle of the protective unit 201) of the protective unit 201 is defined as the first protruding structure 204, and the portion recessed axially inward (close to the middle of the protective unit 201) of the protective unit 201 is defined as the first recessed structure 205.

[0045] Optionally, one end of the protective unit 201 used to dock with the end of an adjacent protective unit 201 is respectively provided with multiple first protrusion structures 204 and multiple first recessed structures 205, and the end of the adjacent protective unit 201 is provided with corresponding multiple first protrusion structures 204 and multiple first recessed structures 205.

[0046] By matching the adjacent protection units 201 with concave and convex parts, stress concentration at the positions where the adjacent protection units 201 are connected can be avoided, and the pipe body 100 can be further prevented from being damaged.

[0047] Optionally, the component 202 has a butt end 206 butted with a component 202 on an adjacent protection unit 201; among the multiple components 202 included in the same protection unit 201, the butt ends 206 of at least some of the components 202 and the butt ends 206 of the components 202 other than the at least some of the components 202 in the same direction are axially misaligned to form a first concave structure 205 or a first convex structure 204 at the end of the protection unit 201. The above-mentioned axial misalignment refers to the misalignment formed along the axial direction of the component 202 (or the isolation protection layer 200, the tube body 100, the protection unit 201), and for the sake of simplicity of description, no further explanation will be given later.

[0048] Among the multiple components 202 of the protection unit 201, the butt end 206 of any component 202 can be axially offset with the butt end 206 of the adjacent component 202 in the same direction, or can be flush with it. However, the butt ends 206 of at least some of the multiple components 202 of the protection unit 201 are axially offset with the butt ends 206 of the same direction of other components 202 (components 202 other than at least some of the components 202), thereby forming at least one first protruding structure 204 and / or at least one first recessed structure 205.

[0049] Preferably, among the multiple components 202 included in the same protective unit 201, the butt joint 206 of any component 202 is axially offset from the butt joint 206 of the same direction of the adjacent component 202, thereby forming more first protrusion structures 204 and first recessed structures 205 to achieve better anti-fracture effect.

[0050] Combination Figure 3 , Figure 4 and Figure 5 In some embodiments of the present disclosure, the protection unit 201 includes a plurality of constituent units 203 sequentially arranged along the circumference of the protection unit 201, and the constituent unit 203 includes a plurality of constituent members 202, and the plurality of constituent members 202 included in the constituent unit 203 are sequentially arranged along the circumference of the protection unit 201. In this embodiment, the plurality of constituent units 203 have the same structure, so each constituent unit 203 can be used as a module, which is conducive to reducing the difficulty of production and installation of the protection unit 201.

[0051] Optionally, between two components 202 at the joint position of adjacent components 203, the butt ends 206 facing the same direction are axially staggered. Moreover, in the same component unit 203, between every two adjacent components 202, the butt ends 206 facing the same direction are mutually axially staggered. Thus, the number of concave-convex structures formed between two adjacent protection units 201 can be maximized, thereby achieving a better anti-fracture effect.

[0052] Optionally, the butt ends 206 of the same orientation of the multiple components 202 of the same component unit 203 are sequentially staggered in the same staggered direction, and the staggered direction includes a direction from the middle of the component 202 to the butt end 206 or a direction from the butt end 206 to the middle of the component 202. In this embodiment, the butt ends 206 of the same orientation of the multiple components 202 of the same component unit 203 are sequentially staggered in the same staggered direction, which can standardize the arrangement of the multiple components 202 in the component unit 203, avoid sequence errors, and help reduce the difficulty of production and installation.

[0053] In some embodiments of the present disclosure, the isolation protection layer 200 is provided with multiple layers, and the multiple isolation protection layers 200 are sequentially set. Adjacent isolation protection layers 200 are fixedly connected by, for example, bonding. The multiple isolation protection layers 200 work together to achieve a better isolation effect.

[0054] Combination Figure 6 Optionally, the end splicing positions of adjacent protection units 201 in the insulating protective layer 200 and the end splicing positions of adjacent protection units 201 in the adjacent insulating protective layer 200 have no overlap in their orthographic projections on the tube body 100. Thus, the joints formed by adjacent protection units 201 in the insulating protective layer 200 and the joints of adjacent insulating protective layers 200 are misaligned along the axial direction of the insulating protective layer 200, thereby achieving a better insulating and protective effect and making the structural strength of the furnace tube structure higher.

[0055] Combination Figure 7 Optionally, when the protection unit 201 includes a plurality of components 202, the orthographic projection of one component 202 of the isolation protection layer 200 on the tube body 100 overlaps with the orthographic projection of two components 202 of the adjacent isolation protection layer 200 on the tube body 100, and one component 202 of the isolation protection layer 200 is fixedly connected to two adjacent components 202 of the adjacent isolation protection layer 200. This arrangement can make two adjacent components 202 of the isolation protection layer 200 and one component 202 of the adjacent isolation protection layer 200 arranged in a herringbone shape, and the gap between the adjacent components 202 of the isolation protection layer 200 is blocked by the components 202 of the adjacent isolation protection layer 200, which can not only enhance the isolation effect, but also reduce the overall thickness of the plurality of isolation protection layers 200, and it is also easier to position the components 202 of the inner isolation protection layer 200 during installation.

[0056] In this embodiment, the component 202 is a solid rod or a tubular structure. Preferably, the component 202 is a solid rod. The cross section of the component 202 is circular, square, elliptical, polygonal or irregular, etc. Preferably, the cross section of the component 202 is circular.

[0057] When the device is heated, most of its heat will be directly transferred to the silicon wafer and other products through the tube body 100 in the form of thermal radiation. Due to the different placement of the products in the tube body 100, the intensity of thermal radiation between different products and different parts of a single product is different. In addition, the tube body 100 is made of quartz material, and its heat storage performance is not ideal. After heating to the target temperature, a low-power heating output is required to offset the heat loss. Due to the lag in temperature detection, the accuracy of heating control is more stringent. The insulating protective layer 200 in this embodiment can not only protect the tube body 100, but also play a role in heat storage and temperature stabilization.

[0058] In some embodiments, the material of component 202 is silicon carbide or zirconium oxide, and / or the surface of component 202 has a heat radiation absorption layer. Therefore, on the one hand, it can absorb the thermal radiation of the thermal field very well, and then transfer the heat to the product in the form of heat conduction, so that the temperature transfer is more stable and balanced. On the other hand, it can play a very good role in heat storage. After reaching the target temperature, even if the heating is stopped, it can stably release heat to supplement the energy consumed by the reaction. When heated suddenly, component 202 as the inner layer can also play a buffering role, so as not to directly cause a strong thermal shock to the product, which is conducive to reducing the difficulty of temperature control and improving production quality.

[0059] Combination Figure 8 In some embodiments, the furnace tube structure further includes a mounting member 300, which is fixedly disposed on the inner wall of the tube body 100 and can be used to mount and fix structures such as an air intake pipe. The components 202 in the insulating protective layer 200 are arranged to avoid the mounting member 300.

[0060] In some embodiments, the furnace tube structure is further provided with an insulating coating (not shown in the figure), which can be provided on the inner wall of the tube body 100, or on the side of the insulating protective layer 200 away from the tube body 100 (i.e., the inner side of the insulating protective layer 200), or both the inner wall of the tube body 100 and the side of the insulating protective layer 200 away from the tube body 100 are provided with an insulating coating. The insulating coating can further improve the insulating effect and the protective effect on the furnace tube 100. In addition, it should be pointed out that the insulating layer can be made of inorganic non-metallic materials, or can be made of other insulating materials in the prior art, and this is not limited.

[0061] Combination Fig. 9 The embodiment of the present disclosure also provides a reaction furnace, including a furnace body and the above-mentioned furnace tube structure, and the furnace tube structure is located in the furnace body.

[0062] Optionally, the reaction furnace further comprises a heating device, which is arranged on the furnace body and is used to provide radiant heat.

[0063] Since the reactor of the embodiment of the present disclosure includes the above-mentioned furnace tube structure, all technical features and technical effects of the reactor including the furnace tube structure are not repeated here.

[0064] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0065] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0066] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0067] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0068] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A furnace tube structure, characterized in that: include: a tubular body having an inner cavity; At least one insulating protective layer includes a plurality of protective units, each of which is a tubular structure. The plurality of protective units are located in the inner cavity and are arranged in sequence along the axial direction of the tube body. The plurality of protective units are fixedly connected to the inner wall of the tube body, and the ends of adjacent protective units are spliced.

2. The furnace tube structure according to claim 1, characterized in that: The protection unit comprises: A plurality of components are provided, wherein the components extend along the axial direction of the protection unit and are arranged in sequence along the circumferential direction of the protection unit.

3. The furnace tube structure according to claim 2, characterized in that: In the axial direction of the protection unit, both ends of the plurality of components are aligned respectively.

4. The furnace tube structure according to claim 2, characterized in that: One of the adjacent protection units has a first recessed structure, and the other of the two adjacent protection units has a first raised structure. The first recessed structure at the end of the protection unit is spliced ​​with the first raised structure at the end of the adjacent protection unit so that the two adjacent protection units form a recessed fit.

5. The furnace tube structure according to claim 4, characterized in that: The component has a butt joint end for butting with the component on the adjacent protection unit; Among the multiple components included in the same protective unit, the butt ends of at least some of the components are axially offset from the butt ends of the components other than at least some of the components in the same direction, so as to form the first recessed structure or the first protruding structure at the end of the protective unit.

6. The furnace tube structure according to claim 5, characterized in that: Among the multiple components included in the same protection unit, between every two adjacent components, the butt ends facing the same direction are axially offset from each other.

7. The furnace tube structure according to claim 5 or 6, characterized in that: The protection unit includes a plurality of constituent units sequentially arranged along the circumference of the protection unit, and the constituent unit includes a plurality of the constituent members; Between the adjacent constituent units, the butt ends of the two constituent members at the connecting position and facing the same direction are staggered along the axial direction; In the same constituent unit, the butt ends of adjacent constituent members facing the same direction are axially offset.

8. The furnace tube structure according to claim 7, characterized in that: The butt joint ends of the same orientation of the multiple components of the same component unit are staggered in sequence according to the same staggered direction, and the staggered direction includes the direction from the middle of the component to the butt joint end or the direction from the butt joint end to the middle of the component.

9. The furnace tube structure according to any one of claims 1 to 6, characterized in that: The number of the isolation and protection layers is multiple layers, and the multiple isolation and protection layers are sequentially arranged.

10. The furnace tube structure according to claim 8, characterized in that: The orthographic projections of the end splicing positions of the adjacent protection units in the isolation protection layer and the end splicing positions of the adjacent protection units in the adjacent isolation protection layer on the tube body do not overlap.

11. The furnace tube structure according to claim 9, characterized in that: When the protection unit includes multiple components, the orthographic projection of one component of the isolation protection layer on the tube body overlaps with the orthographic projection of two components of the adjacent isolation protection layer on the tube body, and one component of the isolation protection layer is fixedly connected to two adjacent components of the adjacent isolation protection layer respectively.

12. The furnace tube structure according to any one of claims 2 to 5, characterized in that: The constituent member is a solid rod or a tubular structure.

13. The furnace tube structure according to any one of claims 2 to 5, characterized in that: The material of the component is silicon carbide or zirconium oxide, and / or the surface of the component has a heat radiation absorption layer.

14. The furnace tube structure according to any one of claims 1 to 5, characterized in that: An insulating coating is provided on the inner wall of the tube body and / or on a side of the insulating protective layer facing away from the tube body.

15. A reaction furnace, characterized in that: include: Furnace body; The furnace tube structure according to any one of claims 1 to 14, wherein the furnace tube structure is located in the furnace body.

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