Electron microscope sample stage

Abstract

The utility model relates to an electron microscope sample stage, which includes: a sample stage base, wherein a placement slot is provided through the sample stage base from front to back, and a plurality of slots are symmetrically provided on the two inner side walls of the placement slot; a movable layer plate, wherein the movable layer plate is inserted into the slots at equal heights on the two inner side walls of the placement slot from a horizontal direction, and the movable layer plate is used to place samples; a pressing plate, wherein the pressing plates are provided on both sides of the upper end surface of the sample stage base located at the placement slot, and the two pressing plates are used to clamp and fix the sample at the movable layer plate. The utility model adjusts the height of the movable layer plate so that the upper end surface of the sample to be tested is flush with the upper end surface of the sample stage base, and clamps and fixes the sample to be tested by two pressing plates, so that no traces of glue remain on the sample to be tested, and the sample remains fixed during the test.

Description

Technical Field

[0001] The utility model relates to the technical field of sample detection equipment; specifically, the utility model relates to an electron microscope sample stage. Background Art

[0002] In conventional electron microscope sample preparation, the sample to be tested usually needs to be fixed on the sample stage using conductive tape or conductive glue. However, in actual use, some materials will have glue marks on the surface of the conductive tape after the shooting is completed, and it is even possible that the surface material of the conductive glue has penetrated into the sample to be tested and cannot be cleaned. However, in order to avoid leaving glue marks on the sample to be tested, the sample to be tested is not fixed using conductive tape or conductive glue, which will make the sample to be tested easily affected by human factors during the test process, causing many inconveniences to the experiment. Utility Model Content

[0003] The purpose of the utility model is to provide an electron microscope sample stage, which can solve or at least alleviate one or more of the above-mentioned problems and other problems existing in the prior art.

[0004] In order to achieve the above-mentioned object, the utility model provides an electron microscope sample stage, wherein the electron microscope sample stage comprises:

[0005] A sample stage base, wherein the sample stage base is provided with a placement groove running through from front to back, and a plurality of slots are symmetrically provided on two inner side walls of the placement groove;

[0006] A movable layer plate, the movable layer plate is inserted into the slots at equal heights on the two inner side walls of the placement slot from a horizontal direction, and the movable layer plate is used to place samples;

[0007] A pressing plate is provided on both sides of the upper end surface of the sample stage base located at the placement groove, and the two pressing plates are used to clamp and fix the sample at the movable layer plate.

[0008] In the electron microscope sample stage as described above, optionally, the lower end surface of the sample stage base is circular.

[0009] In the electron microscope sample stage as described above, optionally, a connecting rod is provided at the center position of the lower end surface of the sample stage base.

[0010] In the electron microscope sample stage as described above, optionally, the upper end surface of the sample stage base is provided with threaded holes at two diagonals on both sides of the placement groove, and the bolts pass through the pressing plate and extend into the threaded holes, and the pressing plate can rotate around the bolts.

[0011] In the electron microscope sample stage as described above, optionally, a boss is provided on the upper end surface of the movable layer plate. Compared with the prior art, the beneficial effects of the utility model are:

[0012] According to the electron microscope sample stage of the utility model, the upper end surface of the sample to be tested is made flush with the upper end surface of the sample stage base by adjusting the height of the movable layer plate, and the sample to be tested is clamped and fixed by two pressing plates, so that no traces of glue remain on the sample to be tested and it remains fixed during the test. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the electron microscope sample stage of the utility model;

[0014] Figure 2 It is a stereoscopic diagram of the electron microscope sample stage of the utility model.

[0015] In the figure: 1. sample table base; 2. movable layer plate; 3. pressing plate; 4. placement groove; 5. card slot; 6. connecting rod; 7. bolt; 8. boss. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] It should be noted that, in the description of the present invention, the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside" and "outside" indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. The terms "first", "second" and similar words used in the description of the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components, and therefore cannot be understood as limitations on the present invention.

[0018] Furthermore, it should be understood that for the sake of ease of description, the sizes of the various components shown in the drawings are not drawn according to actual proportions. For example, the thickness or width of certain layers may be exaggerated relative to other layers.

[0019] It should be noted that like reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined or described in one drawing, it will not require further detailed discussion and description in the description of the subsequent drawings.

[0020] exist Figure 1-2The sample stage base 1, the movable layer plate 2 and the pressing plate 3 of the electron microscope sample stage are shown in FIG.

[0021] like Figure 1-2 As shown, a placement groove 4 is provided from front to back on the sample stage base 1, and a plurality of clamping grooves 5 are symmetrically provided on the two inner side walls of the placement groove 4; a movable layer plate 2 is horizontally inserted into the clamping grooves 5 at equal height positions on the two inner side walls of the placement groove 4, and the movable layer plate 2 is used to place samples; pressing plates 3 are provided on both sides of the upper end surface of the sample stage base 1 located on the placement groove 4, and the two pressing plates 3 are used to clamp and fix the sample on the movable layer plate 2.

[0022] When in use, the movable layer plate 2 is adjusted according to the thickness of the sample to be tested, and inserted into the slot 5 of the corresponding height, so that the upper end surface of the sample to be tested is as flush as possible with the upper end surface of the sample table base 1, and the sample to be tested is placed on the movable layer plate 2, and the two pressing plates 3 clamp and fix the sample to be tested.

[0023] It should be noted that the pressing sheet 3 is made of a conductive material with a certain elasticity, and is drooped obliquely when no sample to be tested is placed, and the edges are all chamfered and smooth.

[0024] Furthermore, the lower end surface of the sample stage base 1 is circular, and a connecting rod 6 is provided at the center position of the lower end surface of the sample stage base 1, and the connecting rod 6 is used to connect to external equipment.

[0025] Furthermore, the upper end surface of the sample stage base 1 is provided with threaded holes at two diagonal sides of the placement groove 4, and the bolts 7 pass through the pressing plate 3 and extend into the threaded holes. The pressing plate 3 can rotate around the bolts 7 to adjust the angle of the pressing plate 3, so that the pressing plate 3 can be applied to different samples to be tested. Moreover, in this embodiment, when the two pressing plates 3 are diagonal, they just touch each other.

[0026] Furthermore, a boss 8 is provided on the upper end surface of the movable layer plate 2 , and the sample to be tested is placed on the boss 8 .

[0027] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An electron microscope sample stage, characterized in that: The electron microscope sample stage comprises: A sample stage base (1), wherein the sample stage base (1) is provided with a placement groove (4) extending from front to back, and a plurality of clamping grooves (5) are symmetrically provided on two inner side walls of the placement groove (4); A movable layer plate (2), the movable layer plate (2) being inserted into the clamping grooves (5) at equal height positions on the two inner side walls of the placement groove (4) from a horizontal direction, the movable layer plate (2) being used for placing samples; A pressing sheet (3), the upper end surface of the sample stage base (1) is provided with the pressing sheets (3) on both sides of the placement groove (4), and the two pressing sheets (3) are used to clamp and fix the sample on the movable layer plate (2).

2. The electron microscope sample stage according to claim 1, characterized in that: The lower end surface of the sample stage base (1) is circular.

3. The electron microscope sample stage as claimed in claim 2, characterized in that: A connecting rod (6) is provided at the center position of the lower end surface of the sample stage base (1).

4. The electron microscope sample stage according to claim 1, characterized in that: The upper end surface of the sample table base (1) is provided with threaded holes at two diagonal positions on both sides of the placement groove (4), and bolts (7) pass through the pressing plate (3) and extend into the threaded holes. The pressing plate (3) can rotate around the bolts (7).

5. The electron microscope sample stage according to claim 1, characterized in that: The upper end surface of the movable layer plate (2) is provided with a boss (8).

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