Automatic zooming laser cleaning system based on rotating mirror

Abstract

The utility model discloses an automatic zooming laser cleaning system based on a rotating mirror, which comprises a distance measuring laser and a cleaning laser, ranging laser emitted by the ranging laser is perpendicular to cleaning laser emitted by the cleaning laser; an optical fiber circulator, a first dichroscope, a second dichroscope and a multi-surface rotating mirror mechanism are sequentially arranged on a transmission light path of the ranging laser; a reflecting mirror is arranged on a reflecting light path of the second dichroscope; the reflecting mirror can reflect the ranging laser reflected by the second dichroscope to the multi-surface rotating mirror mechanism; a cleaning table for placing a to-be-cleaned workpiece is arranged below the multi-surface rotating mirror mechanism; a zoom lens set is further arranged between the multi-face rotating mirror mechanism and the cleaning table. And the optical fiber circulator is also connected with a distance measuring assembly. The device has the characteristics of high efficiency, stability and automation in distance measurement, and is suitable for cleaning workpieces with complex surface structures.

Description

Technical Field

[0001] The utility model belongs to the technical field of laser cleaning, and in particular relates to an automatic zoom laser cleaning system based on a rotating mirror. Background Art

[0002] In the process of industrial production, the surface of materials is susceptible to chemical, physical or biological interactions to form contamination layers or coatings, which affect production efficiency and quality, and even cause production safety accidents. Therefore, high-quality cleaning of the surface of materials and equipment is of great significance to ensure the quality, safety and life of products. In recent years, researchers have been exploring new cleaning technologies that can replace traditional cleaning technologies with high efficiency, cleanliness, low cost and convenience. At present, laser cleaning technology has become a new cleaning method to replace traditional cleaning methods due to its advantages of energy saving, pollution-free and remote operation. It has been widely used in industrial molds, microelectronic devices, ships, petrochemicals, aerospace, cultural relics, construction and other fields.

[0003] However, during the laser cleaning process, when the workpiece is not in the focal position, the laser spot will quickly expand, resulting in uneven cleaning and reduced cleaning effect. At the same time, some irregular workpieces will be unevenly cleaned and have poor cleaning effect due to their different heights during the cleaning process. In particular, since the laser cleaning equipment may shake during the operation of the personnel, it is impossible to ensure that the focal position is on the surface of the cleaning workpiece in real time, which urgently needs to be improved. Utility Model Content

[0004] The utility model aims to provide an automatic zoom laser cleaning system based on a rotating mirror to solve the technical problem in the prior art that the laser cleaning effect is poor due to the inability to ensure that the laser focus acts on the cleaning surface in real time.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] An automatic zoom laser cleaning system based on a rotating mirror includes a ranging laser and a cleaning laser;

[0007] The ranging laser emitted by the ranging laser and the cleaning laser emitted by the cleaning laser are perpendicular to each other; an optical fiber circulator, a first dichroic mirror, a second dichroic mirror and a multifaceted rotating mirror mechanism are sequentially arranged on the transmission optical path of the ranging laser; a reflecting mirror is arranged on the reflection optical path of the second dichroic mirror, and the reflecting mirror can reflect the ranging laser reflected by the second dichroic mirror onto the multifaceted rotating mirror mechanism; a cleaning table for placing workpieces to be cleaned is arranged below the multifaceted rotating mirror mechanism; a zoom lens group is also arranged between the multifaceted rotating mirror mechanism and the cleaning table; the optical fiber circulator is also connected to a ranging component.

[0008] The utility model also has the following technical features:

[0009] Specifically, the multi-faceted rotating mirror mechanism includes a rotating mirror body, a rotating shaft is provided through the center of the rotating mirror body, and one end of the rotating shaft is connected to a driving motor;

[0010] A plurality of second reflectors are arranged on the side wall of the rotating mirror body along the circumferential direction.

[0011] Furthermore, the zoom lens assembly includes a first lens and a second lens arranged in parallel.

[0012] Furthermore, the second lens is also connected to a stepping motor for driving the second lens to move.

[0013] Furthermore, the distance measuring component includes a fiber coupler, a balanced detector, a signal processing board and a digital control board which are connected in sequence; the input end of the fiber coupler is respectively connected to the output end of the distance measuring laser and the output end of the fiber circulator, and is used to receive the local oscillator light signal emitted by the distance measuring laser and the reverse transmission light signal emitted by the fiber circulator, and mix the local oscillator light signal and the reverse transmission light signal to generate a mixed signal; the input end of the balanced detector is connected to the output end of the fiber coupler, and is used to modulate the mixed signal to obtain a modulated signal; the input end of the signal processing board is connected to the output end of the balanced detector, and is used to process the modulated signal to obtain a distance signal; the input end of the digital control board is connected to the output end of the signal processing board, and the digital control board is used to control the distance between the second lens and the first lens.

[0014] An optical fiber circulator is also provided between the distance measuring laser and the first dichroic mirror.

[0015] Furthermore, a collimation system is provided between the cleaning laser and the first dichroic mirror, and the collimation system is used for collimating the laser light emitted by the cleaning laser and then injecting the collimated laser light into the first dichroic mirror.

[0016] Furthermore, the output end of the digital control board is connected to a stepper motor for controlling the movement of the stepper motor to change the distance between the second lens and the first lens.

[0017] Furthermore, the first dichroic mirror and the second dichroic mirror are coaxially arranged.

[0018] Furthermore, the second dichroic mirror is arranged in parallel with the reflecting mirror.

[0019] Furthermore, a laser film layer is arranged on the outer surface of the second reflector.

[0020] Compared with the prior art, the utility model has the following technical effects:

[0021] The utility model realizes that the distance measuring laser line and the cleaning laser line arrive at the same angle through structural setting, and uses a dichroic mirror to filter the diffusely reflected cleaning laser, thereby improving the signal-to-noise ratio of the distance measuring laser. The device realizes that the distance measuring laser and the cleaning laser change at the same angle. The distance measuring laser is used to pre-scan the cleaning workpiece, collect distance information, and then adjust the position of the zoom lens group through a stepping motor to finally achieve the focus accuracy adjustment of the cleaning laser. The utility model has the characteristics of high efficiency, stability and automation in distance measurement, and is suitable for cleaning workpieces with complex surface structures. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic diagram of the overall structure of the laser cleaning system of Example 1;

[0023] Figure 2 It is a partial structural schematic diagram of Example 1;

[0024] The numbers in the figure represent:

[0025] 1-ranging laser, 2-cleaning laser, 3-fiber circulator, 4-first dichroic mirror, 5-second dichroic mirror, 6-polygonal rotating mirror mechanism, 7-cleaning table, 8-ranging component, 9-zoom lens group, 10-stepping motor, 11-first reflector, 12-collimation system, 13-cleaning laser, 14-ranging laser, 15-diffuse reflected light;

[0026] 601-rotating mirror body, 602-rotating shaft, 603-second reflecting mirror;

[0027] 801-fiber coupler, 802-balanced detector, 803-signal processing board, 804-digital control board

[0028] 901-first lens, 902-second lens. DETAILED DESCRIPTION

[0029] The specific implementation methods of the present utility model are given below. It should be noted that the present utility model is not limited to the following specific embodiments, and all equivalent changes made on the basis of the technical solution of this application fall within the protection scope of the present utility model.

[0030] It should be noted that when describing the orientation of the present invention, the orientation or positional relationship indicated by the terms "above", "below", "top", "bottom", etc. is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. "Inside" and "outside" refer to the inner core of the corresponding component outline, and the above terms cannot be understood as limiting the present invention. If the specific posture changes, the directional indication will also change accordingly.

[0031] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, unless otherwise clearly and specifically defined.

[0032] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] Example 1

[0034] Following the above technical solution, Figure 1 and Figure 2 As shown, this embodiment discloses an automatic zoom laser cleaning system based on a rotating mirror, including a ranging laser 1 and a cleaning laser 2. In this embodiment, the ranging laser 1 adopts a low-power pulse laser, and the wavelength of the ranging laser is different from that of the cleaning laser. The ranging is performed based on the phase ranging principle to ensure the accuracy of the ranging.

[0035] The laser signal emitted by the ranging laser 1 can be divided into a local oscillator laser and a ranging laser, wherein the ranging laser and the cleaning laser emitted by the cleaning laser 2 are perpendicular to each other, and an optical fiber circulator 3, a first dichroic mirror 4, a second dichroic mirror 5 and a multifaceted rotating mirror mechanism 6 are sequentially arranged on the transmission optical path of the ranging laser; a first reflecting mirror 11 is arranged on the reflection optical path of the second dichroic mirror 5, and the first reflecting mirror 11 is located below the second dichroic mirror 5, and the first reflecting mirror 11 can reflect the ranging laser reflected by the second dichroic mirror 5 onto the multifaceted rotating mirror mechanism 6; a cleaning table 7 for placing workpieces to be cleaned is arranged below the multifaceted rotating mirror mechanism 6; a zoom lens group 9 is also arranged between the multifaceted rotating mirror mechanism 6 and the cleaning table 7;

[0036] The optical fiber circulator 3 is also connected to a distance measuring component 8 .

[0037] In this embodiment, the mirror surface of the first dichroic mirror 4 is 45° to the horizontal plane, the mirror surface of the second dichroic mirror 5 is 45° to the horizontal plane, and the mirror surface of the first reflector 11 is also 45° to the horizontal plane; the ranging laser emitted by the ranging laser 1 and the cleaning laser emitted by the cleaning laser 2 are respectively incident on the first dichroic mirror 4, the first dichroic mirror 4 transmits the ranging laser and reflects the cleaning laser, the ranging laser and the ranging laser are combined by the first dichroic mirror 4 and then coaxially transmitted and incident on the second dichroic mirror 5, the second dichroic mirror 5 transmits the ranging laser and reflects the cleaning laser, the ranging laser is incident on the multi-faceted rotating mirror mechanism 6, and the cleaning laser is then reflected by the first reflector 11 and incident on the multi-faceted rotating mirror mechanism 6, and the ranging laser and the cleaning laser incident on the multi-faceted rotating mirror mechanism 6 are parallel.

[0038] Preferably, the distance between the second dichroic mirror 5 and the first reflector 11 is adjustable. The polygonal mirror mechanism 6 is used to change the angle of the incident ranging laser and cleaning laser to achieve linear distribution of the ranging laser and cleaning laser on the cleaning workpiece.

[0039] As a preferred solution of this embodiment, the multi-faceted rotating mirror mechanism 6 includes a rotating mirror body 601, which is a regular polygonal prism structure. A rotating shaft 602 is passed through the center of the rotating mirror body 601, and one end of the rotating shaft 602 is connected to a driving motor; the rotating mirror body 601 rotates when driven by the driving motor, and the rotation speed can be set according to actual needs; a plurality of second reflectors 603 are circumferentially arranged on the outer side wall of the rotating mirror body 601 with a regular polygonal prism structure, and during the rotation of the rotating mirror body 601, the incident laser is reflected by the second reflector 603.

[0040] As a preferred solution of this embodiment, the zoom lens assembly 9 includes a first lens 901 and a second lens 902 which are arranged in parallel.

[0041] The cleaning laser and the distance measuring laser incident on the polygonal mirror mechanism 6 are incident on the first lens 901 and the second lens 902 after the angles are changed by the polygonal mirror mechanism 6 .

[0042] As a preferred solution of this embodiment, the second lens 902 is also connected to a stepper motor 10 for driving the second lens 902 to move. The second lens 902 can be installed on a movable mounting table as needed, and the mounting table can be driven to move by the stepper motor 10 to adjust the position of the second lens 902.

[0043] As a preferred solution of this embodiment, the distance measuring component 8 includes a fiber coupler 801, a balanced detector 802, a signal processing board 803 and a digital control board 804 which are connected in sequence; the input end of the fiber coupler 801 is respectively connected to the output end of the distance measuring laser 1 and the output end of the fiber circulator 3, and is used to receive the local oscillator light signal emitted by the distance measuring laser 1 and the reverse transmission light signal emitted by the fiber circulator 3, and mix the local oscillator light signal and the reverse transmission light signal to generate a mixed signal; the input end of the balanced detector 802 is connected to the output end of the fiber coupler 801, and is used to modulate the mixed signal to obtain a modulated signal; the input end of the signal processing board 803 is connected to the output end of the balanced detector 802, and is used to process the modulated signal to obtain a distance signal; the input end of the digital control board 804 is connected to the output end of the signal processing board 803, and is used to control the distance between the second lens 902 and the first lens 901.

[0044] As a preferred solution of this embodiment, a collimation system 12 is further provided between the cleaning laser 2 and the first dichroic mirror 4 , and the collimation system 12 is used for collimating the laser light emitted by the cleaning laser 2 and then injecting it into the first dichroic mirror 4 .

[0045] As a preferred solution of this embodiment, the output end of the digital control board 804 is connected to the stepping motor 10 for controlling the movement of the stepping motor 10 to change the distance between the second lens 902 and the first lens 901 .

[0046] As a preferred solution of this embodiment, the first dichroic mirror 4 and the second dichroic mirror 5 are coaxially arranged.

[0047] As a preferred solution of this embodiment, the second dichroic mirror 5 is arranged in parallel with the first reflecting mirror 11 .

[0048] As a preferred solution of this embodiment, a laser film layer is provided on the outer surface of the second reflector 603.

[0049] The use process of the utility model is as follows:

[0050] The workpiece to be cleaned is placed on the cleaning table 7, and the ranging laser 1 and the cleaning laser 2 are started. The ranging laser emitted by the ranging laser 1 and the cleaning laser emitted by the cleaning laser 2 are respectively incident on the first dichroic mirror 4. The first dichroic mirror 4 transmits the ranging laser and reflects the cleaning laser. The ranging laser and the ranging laser are combined by the first dichroic mirror 4 and then coaxially transmitted and incident on the second dichroic mirror 5. The second dichroic mirror 5 transmits the ranging laser and reflects the cleaning laser. The ranging laser is incident on the multifaceted rotating mirror mechanism 6. The cleaning laser is then reflected by the first reflecting mirror 11 and incident on the multifaceted rotating mirror mechanism 6. The ranging laser and the cleaning laser incident on the multifaceted rotating mirror mechanism 6 are parallel.

[0051] After the ranging laser reaches the surface of the workpiece, it forms diffuse reflection light after diffuse reflection by the workpiece, and part of the diffuse reflection light is transmitted in reverse, sequentially passing through the second lens 902, the first lens 901, the multi-faceted mirror mechanism 6, the first reflector 11, the second dichroic mirror 5, and the first dichroic mirror 4 to reach the optical fiber circulator 3, and is output through the output end of the optical fiber circulator 3. The diffuse reflection light output by the optical fiber circulator 3 and the local oscillator laser separated from the ranging laser are mixed through the optical fiber coupler 801, and the mixed laser is irradiated onto the balanced detector 802 to realize photoelectric conversion, and then the distance information is demodulated by the signal processing board 803; the demodulated distance information is fed back to the digital control board 804, and the digital control board 804 controls the stepping motor 10 to change the position of the second lens 902 according to the received information, so as to ensure that the cleaning laser is focused on the surface of the cleaning workpiece 11 in real time.

[0052] In this embodiment, the zoom lens assembly 9 includes a first lens 901 and a second lens 902 arranged in parallel, wherein the focal length of the first lens 901 is f1, the focal length of the second lens 902 is f2, the focal length of the zoom lens assembly 9 is F, and d is the distance between the optical centers of the first lens 901 and the second lens 902.

[0053] According to the combined lens principle, the focal length of the zoom lens assembly 9 can be determined by the following formula:

[0054]

[0055] It can be seen from the formula that when the value of d changes, the focal length F of the zoom lens group 9 changes, so the focus position of the cleaning laser changes. Therefore, the focal length of the entire lens group can be changed by adjusting the position of the second convex lens by the stepper motor 10. By adjusting the distance between the first lens 901 and the second lens 902 in real time so that the cleaning laser is focused on the workpiece surface, the focal length of the laser cleaning device can be adjusted in real time.

[0056] Those skilled in the art to which the present invention belongs may make various modifications or additions to the described specific embodiments or replace them in a similar manner, but they will not deviate from the spirit of the present invention or exceed the scope defined by the attached claims.

Claims

1. An automatic zoom laser cleaning system based on a rotating mirror, comprising a distance measuring laser (1) and a cleaning laser (2), wherein the distance measuring laser emitted by the distance measuring laser (1) and the cleaning laser emitted by the cleaning laser (2) are perpendicular to each other, and characterized in that: An optical fiber circulator (3), a first dichroic mirror (4), a second dichroic mirror (5) and a multi-faceted rotating mirror mechanism (6) are sequentially arranged on the transmission optical path of the distance measuring laser; a first reflecting mirror (11) is arranged on the reflection optical path of the second dichroic mirror (5), and the first reflecting mirror (11) can reflect the distance measuring laser reflected by the second dichroic mirror (5) onto the multi-faceted rotating mirror mechanism (6); a cleaning table (7) for placing a workpiece to be cleaned is arranged below the multi-faceted rotating mirror mechanism (6); a zoom lens group (9) is also arranged between the multi-faceted rotating mirror mechanism (6) and the cleaning table (7); and the optical fiber circulator (3) is also connected to a distance measuring component (8).

2. The automatic zoom laser cleaning system according to claim 1, characterized in that: The multi-faceted rotating mirror mechanism (6) comprises a rotating mirror body (601), a rotating shaft (602) passing through the center of the rotating mirror body (601), and one end of the rotating shaft (602) is connected to a driving motor; A plurality of second reflecting mirrors (603) are arranged along the circumferential direction on the side wall of the rotating mirror body (601).

3. The automatic zoom laser cleaning system according to claim 1, characterized in that: The zoom lens assembly (9) comprises a first lens (901) and a second lens (902) which are arranged in parallel.

4. The automatic zoom laser cleaning system according to claim 3, characterized in that: The second lens (902) is also connected to a stepping motor (10) for driving the second lens (902) to move.

5. The automatic zoom laser cleaning system according to claim 1, characterized in that: The distance measuring component (8) comprises an optical fiber coupler (801), a balanced detector (802), a signal processing board (803) and a digital control board (804) which are sequentially connected. The input end of the optical fiber coupler (801) is respectively connected to the output end of the distance measuring laser (1) and the output end of the optical fiber circulator (3), and is used to receive the local oscillator light signal emitted by the distance measuring laser (1) and the reverse transmission light signal emitted by the optical fiber circulator (3), and mix the local oscillator light signal and the reverse transmission light signal to generate a mixed signal. The input end of the balanced detector (802) is connected to the output end of the optical fiber coupler (801), and is used to modulate the mixed signal to obtain a modulated signal. The input end of the signal processing board (803) is connected to the output end of the balanced detector (802), and is used to process the modulated signal to obtain a distance signal. The input end of the digital control board (804) is connected to the output end of the signal processing board (803), and is used to control the distance between the second lens (902) and the first lens (901).

6. The automatic zoom laser cleaning system according to claim 1, characterized in that: A collimation system (12) is also provided between the cleaning laser (2) and the first dichroic mirror (4), and the collimation system (12) is used to collimate the laser light emitted by the cleaning laser (2) and then inject it into the first dichroic mirror (4).

7. The automatic zoom laser cleaning system according to claim 5, characterized in that: The output end of the digital control board (804) is connected to the stepping motor (10) and is used to control the movement of the stepping motor (10) to change the distance between the second lens (902) and the first lens (901).

8. The automatic zoom laser cleaning system according to claim 1, characterized in that: The first dichroic mirror (4) and the second dichroic mirror (5) are coaxially arranged.

9. The automatic zoom laser cleaning system according to claim 1, characterized in that: The second dichroic mirror (5) is arranged in parallel with the first reflecting mirror (11).

10. The automatic zoom laser cleaning system according to claim 2, characterized in that: A laser film layer is arranged on the outer surface of the second reflector (603).

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