Preheating device and photovoltaic material processing equipment
By using preheating devices of vacuum chambers, heating components and spray components in photovoltaic material production, the problem of long residence time in the preheating chamber in photovoltaic material production is solved, and production efficiency is improved.
Patent Information
- Application Number
- CN202421498950.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-27
- Publication Date
- 2025-04-08
- Estimated Expiration
- 2034-06-27
AI Technical Summary
During the production process of photovoltaic materials, the product in the preheating chamber stays for too long, resulting in low production efficiency.
A preheating device is designed, including a vacuum cavity, two heating assemblies and two spray assemblies. The heating assembly is used to heat the sheet material, and the spray assembly heats or cools the material through a spray gas medium to improve heating and cooling efficiency.
By improving preheating and cooling efficiency, shortening the preheating and cooling time of sheet-shaped materials, the production efficiency of photovoltaic materials is significantly improved.
Smart Images
Figure CN222729893U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of photovoltaic manufacturing equipment, and in particular to a preheating device and photovoltaic material processing equipment. Background Art
[0002] In the process of photovoltaic material production, ALD (atomic layer deposition) coating technology is generally used to coat the product. Before coating, the product is placed in a preheating chamber for preheating. In order to ensure that the product reaches the process target temperature and ensures the uniformity of the product surface temperature, the product needs to stay in the preheating chamber for a long time, and after the product is processed, it needs to be naturally cooled in the preheating chamber. As a result, the product stays in the preheating chamber for too long, resulting in low product production efficiency. Utility Model Content
[0003] In view of this, the present application provides a preheating device to solve the problem of low product production efficiency.
[0004] The present application provides a preheating device, comprising: a vacuum chamber, two heating components and two spray components. The vacuum chamber is provided with a receiving chamber, the receiving chamber is used to receive a carrier carrying a sheet material, and the receiving chamber includes a first side and a second side arranged along the thickness direction of the vacuum chamber. The two heating components are arranged on the first side and the second side relative to each other, and are respectively used to heat the sheet material on the first side and the second side. The two spray components are arranged on the first side and the second side relative to each other, and are respectively used to spray a gas medium on the first side and the second side, and the gas medium is used to heat or cool the sheet material.
[0005] In the above embodiment, before the sheet material is processed, the carrier is located in the accommodating chamber and is heated by the two heating components, while the spray components spray gaseous medium toward the two sides of the carrier, thereby improving the heating efficiency of the preheating device and shortening the preheating time of the sheet material. After the sheet material is processed, the carrier is located in the accommodating chamber, and the spray components spray gaseous medium toward the two sides of the carrier to cool the sheet material, thereby shortening the cooling time of the sheet material and improving the production efficiency of the sheet material.
[0006] In some embodiments, all the spraying components are disposed on the top wall of the vacuum chamber and are located above all the heating components.
[0007] In some embodiments, the vacuum chamber is provided with a through hole communicating with the accommodating chamber, and the through hole is located on a side of the heating component away from the spray component along a direction parallel to the Z axis, and the through hole can be connected to an external vacuum pump.
[0008] In some embodiments, each spray assembly includes a main pipeline and a branch pipeline, the main pipeline is placed in the vacuum chamber and communicates with the outside, and the branch pipeline extends in a direction parallel to the X-axis. A plurality of branch holes are provided on all branch pipelines of a spray assembly, and all branch holes are used to spray the gas medium toward one side of the carrier.
[0009] In some embodiments, the number of branch pipelines of each spray assembly is two or more, and along a direction parallel to the X-axis, the multiple branch pipelines are symmetrically distributed on both sides of the main pipeline.
[0010] In some embodiments, the heating assembly includes a heating element and a reflective cover, wherein the heating element is located between the reflective cover and another heating assembly, and the heating element is used to generate heat radiation toward the carrier. The reflective cover is used to reflect a portion of the heat radiation generated by the corresponding heating element toward the carrier.
[0011] In some embodiments, the inner wall of the vacuum chamber is provided with connecting rods, the connecting rods are distributed on both sides of the accommodating chamber, and all the connecting rods located on one side of the accommodating chamber are connected to a heating component.
[0012] In some embodiments, the heating element is connected to the corresponding reflective cover, and the connecting rod is connected to the reflective cover.
[0013] In some embodiments, when the gas medium heats the sheet material, the gas medium is hot nitrogen or hot inert gas. When the gas medium cools the sheet material, the gas medium is cold nitrogen or cold inert gas.
[0014] A photovoltaic material processing device comprises a reaction device, a conveying device and the above-mentioned preheating device. The reaction device is configured to coat the surface of a sheet material. The vacuum chamber is provided with two ports opposite to each other along a first direction, one port is connected to the outside world, and the other port is connected to the reaction device. The conveying device is configured to move a carrier from the outside world through the vacuum chamber to the reaction device, or to move a carrier from the reaction device through the vacuum chamber to the outside world. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 A side view of a photovoltaic material processing device provided in one embodiment of the present application.
[0016] Figure 2 for Figure 1 A cross-sectional view of a preheating device.
[0017] Figure 3 for Figure 1 Side view of the internal structure of the preheating device.
[0018] Figure 4 for Figure 3 Schematic diagram of the spray assembly.
[0019] Main component symbols
[0020] Photovoltaic material processing equipment 100
[0021] Conveying device 40
[0022] Transmission wheel 401
[0023] Reaction device 30
[0024] Vehicle 20
[0025] Preheating device 10
[0026] Vacuum chamber 11
[0027] Accommodating chamber 111
[0028] Connecting rod 112
[0029] Port 113
[0030] Through hole 114
[0031] Heating element 12
[0032] Heating element 121
[0033] Spray assembly 13
[0034] Main Road 131
[0035] Branch line 132
[0036] Branch hole 1321
[0037] Sheet material 200 DETAILED DESCRIPTION
[0038] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.
[0039] It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a central component at the same time. When a component is considered to be "located on" another component, it may be directly located on the other component or there may be a central component at the same time. The terms "top", "upper", "lower", "front", "back" and similar expressions used herein are for illustrative purposes only.
[0040] The terms "first", "second", etc. are only used to distinguish different objects and shall not be understood as indicating or implying relative importance or implying the quantity, specific order or primary and secondary relationship of the indicated technical features.
[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.
[0042] Some embodiments of the present application will be described below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.
[0043] In this embodiment, the direction of the X axis is an arbitrary direction, and the X axis, the Y axis, and the Z axis intersect each other at arbitrary angles.
[0044] In some embodiments, for ease of understanding, the X-axis, the Y-axis, and the Z-axis are perpendicular to each other, the Z-axis is parallel to the direction of gravity, and the Y-axis and the X-axis are parallel to the horizontal direction.
[0045] In some embodiments, the positive direction of the Z axis is the vertically upward direction.
[0046] In other embodiments, the positive direction of the Z axis is a vertically downward direction.
[0047] In other embodiments, the Z-axis may also cross the direction of gravity.
[0048] In some embodiments, see Figure 1 and Figure 2 The present application discloses a photovoltaic material processing device 100 (not shown) comprising: a reaction device 30, a conveying device 40 and a preheating device 10. The reaction device 30 is used to coat the surface of a sheet material 200. The preheating device 10 is connected to the reaction device 30. The preheating device 10 is used to preheat or cool the sheet material 200. During operation, a carrier 20 is used to carry the sheet material 200. The conveying device 40 then moves the carrier 20 from the outside into the preheating device 10. The preheating device 10 quickly preheats the sheet material 200 to shorten the preheating time of the sheet material 200. The carrier 20 carries the preheated sheet material 200 into the reaction device 30, and the reaction device 30 coats the sheet material 200. After the sheet material 200 is coated, the conveyor 40 moves the carrier 20 from the reaction device 30 into the preheating device 10, and the preheating device 10 cools the sheet material 200 to shorten the cooling time of the sheet material 200. The carrier 20 carries the cooled sheet material 200 and moves outward from the preheating device 10, thereby achieving the effect of rapid coating of the sheet material 200.
[0049] In some embodiments, see Figure 2 The carrier 20 is a plate-shaped component, and the sheet materials 200 are respectively arranged on two plate surfaces of the carrier 20.
[0050] In some embodiments, see Figure 2 and Figure 3 The preheating device 10 includes: a vacuum chamber 11, two heating components 12 and two spray components 13. The vacuum chamber 11 is provided with a receiving chamber 111, and the receiving chamber 111 is used to receive the carrier 20 carrying the sheet material 200. Along the direction parallel to the X-axis, the vacuum chamber 11 is provided with two ports 113, which are respectively connected to the receiving chamber 111, one port 113 is connected to the outside, and the other port 113 is connected to the reaction device 30, and the port 113 is used for the carrier 20 to pass through. The accommodating chamber 111 includes a first side (unmarked) and a second side (unmarked) arranged along the thickness direction of the vacuum chamber 11. The thickness direction of the vacuum chamber 11 is parallel to the Y-axis. The two heating components 12 are relatively arranged on the first side and the second side of the accommodating chamber 111. The conveying device 40 is located below the two heating components 12 and between the first side and the second side (that is, in the middle of the accommodating chamber 111). When the conveying device 40 conveys the carrier 20 through the accommodating chamber 111 for preheating, the carrier 20 is located between the two heating components 12, and the two heating components 12 heat the sheet material 200 facing the first side and the second side.
[0051] Along the direction parallel to the Y axis, two spray assemblies 13 are relatively arranged on the first side and the second side of the accommodating chamber 111, and one spray assembly 13 is arranged on the same side as one heating assembly 12. When the heating assembly 12 heats the sheet material 200, the two spray assemblies 13 spray gas medium (not shown) on the first side and the second side respectively, so that the gas medium heats the sheet material 200, thereby improving the heating efficiency of the sheet material 200, and further helping to shorten the preheating time of the sheet material 200. The carrier 20 drives the preheated sheet material 200 to move from the preheating device 10 to the reaction device 30.
[0052] After the coating of the sheet material 200 is completed, the carrier 20 drives the sheet material 200 to move from the reaction device 30 to the preheating device 10. At this time, the heating component 12 stops working, and the two spray components 13 spray gas medium on the first side and the second side respectively, so that the gas medium cools the sheet material 200, thereby helping to shorten the cooling time of the sheet material 200 and achieving the effect of improving the production efficiency of the sheet material 200.
[0053] In some embodiments, all the spray components 13 are arranged on the top wall of the vacuum chamber 11 along a direction parallel to the Z-axis, and are located above all the heating components 12, so as to reduce the risk of interference between the spray components 13 and the carrier 20, thereby causing the spray components 13 to block the carrier 20, which helps to improve the heating effect of the heating components 12.
[0054] In other embodiments, the X-axis, the Y-axis, and the Z-axis are arranged to cross each other at any other angle.
[0055] In other embodiments, the X-axis is at an angle to the direction of gravity.
[0056] In some embodiments, the sheet material 200 may be prone to breakage when it is heated or cooled unevenly.
[0057] For further information, see Figure 4 Each spray assembly 13 includes a main pipeline 131 and a branch pipeline 132. The main pipeline 131 is placed through the vacuum chamber 11 and communicates with an external gas medium source. The branch pipeline 132 extends in a direction parallel to the X axis. A plurality of branch holes 1321 are provided on all branch pipelines 132 of a spray assembly 13. When the plate-shaped carrier 20 moves into the accommodating chamber 111 in a direction parallel to the X axis, the branch pipeline 132 is parallel to the extension direction of the carrier 20, and the plurality of branch holes 1321 spray the gas medium toward the plate surface of the carrier 20, so as to improve the spray uniformity of the gas medium and achieve the effect of improving the uniformity of preheating or cooling of the sheet material 200.
[0058] In other embodiments, all branch pipelines 132 of a spray assembly 13 are provided with a plurality of spray heads (not shown), and the spray heads are used for spraying the gas medium.
[0059] In some embodiments, see Figure 4 The number of branch pipelines 132 of each spray component 13 is two or more. Along the direction parallel to the X-axis, all the branch pipelines 132 of the spray component 13 are symmetrically distributed on both sides of the main pipeline 131 to increase the spray range of the spray component 13 in the direction parallel to the X-axis. All the branch pipelines 132 of the spray component 13 are arranged in parallel with each other, so that the branch pipelines 132 evenly divert the main pipeline 131, thereby achieving the effect of improving the uniformity of the spray gas medium of the spray component 13.
[0060] In some embodiments, the gas medium is nitrogen. When the preheating device 10 heats the sheet material 200, the spray assembly 13 sprays hot nitrogen toward the sheet material 200. When the preheating device 10 cools the sheet material 200, the spray assembly 13 sprays cold nitrogen toward the sheet material 200. The use of chemically stable nitrogen in contact with the sheet material 200 helps to improve the heating effect or cooling effect of the sheet material 200.
[0061] In other embodiments, the gas medium is an inert gas such as argon. When the preheating device 10 heats the sheet material 200, the spray assembly 13 sprays hot argon toward the sheet material 200. When the preheating device 10 cools the sheet material 200, the spray assembly 13 sprays cold argon toward the sheet material 200.
[0062] In some embodiments, see Figure 2 and Figure 3 The vacuum chamber 11 is provided with a through hole 114 communicating with the accommodating chamber 111. The through hole 114 is used to connect with an external vacuum pump (not shown) to evacuate the vacuum chamber 11 through the vacuum pump, thereby reducing the risk of the sheet material 200 coming into contact with the air. In the direction parallel to the Z axis, the through hole 114 is located on the side of the heating component 12 away from the spray component 13. When the spray component 13 sprays nitrogen or inert gas, the vacuum pump evacuates the vacuum chamber 11 through the through hole 114, so that the nitrogen or inert gas flows from the spray component 13 to the through hole 114, so that the nitrogen or inert gas is uniformly dispersed along the extension direction of the plate surface of the carrier 20, thereby helping to improve the uniformity of the contact between the nitrogen or inert gas and the sheet material 200.
[0063] In some embodiments, there are multiple through holes 114 , and the multiple through holes 114 are arranged from one end to the other end of the vacuum chamber 11 , so as to achieve the effect of improving the uniform diffusion of nitrogen or inert gas.
[0064] In some embodiments, see Figure 3 The conveying device 40 includes a plurality of conveying wheels 401 located above the through hole 114. The plurality of conveying wheels 401 are arranged at intervals in a direction parallel to the X-axis. The bearings (not marked) of the conveying wheels 401 are connected to an external power device through one of the side walls of the vacuum chamber 11. The plurality of conveying wheels 401 are in contact with the bottom surface of the carrier 20 respectively. The conveying wheels 401 are rotated by an external force, so that the conveying device 40 conveys the carrier 20. In addition, the conveying wheels 401 are arranged at intervals to reduce the barrier of the conveying device 40 to nitrogen or inert gas, which is conducive to the flow of nitrogen or inert gas from the spray assembly 13 to the through hole 114.
[0065] In some embodiments, a plurality of supporting pins (not shown) are spaced apart on the plate surface of the carrier 20, and the supporting pins support the sheet material 200, so that the carrier 20 can support the sheet material 200, and the supporting pins are spaced apart from each other to reduce the barrier of the carrier 20 to nitrogen or inert gas, which is beneficial for the nitrogen or inert gas to flow from the spray assembly 13 to the through hole 114.
[0066] In some embodiments, the bearing surface of the bearing pin is inclined toward the board surface. When the carrier 20 carries the sheet material 200 , it helps the sheet material 200 to move toward the board surface, thereby improving the stability of the carrier 20 in carrying the sheet material 200 .
[0067] In some embodiments, see Figure 2 and Figure 3 The heating assembly 12 includes a heating element 121 and a reflective cover (not shown). The heating element 121 generates heat radiation toward the carrier 20, thereby heating the sheet material 200. Compared with the heating method of thermal convection, the use of heat radiation helps to reduce the interference of the heating element 12 on the gas medium, and compared with the heat conduction method, it reduces the risk of direct contact between the heating element 121 and the sheet material 200, which may easily cause damage to the sheet material 200 or uneven heating. The reflective cover is located on the side of the corresponding heating element 121 away from the other heating assembly 12, so that when the heating element 121 generates heat radiation, the reflective cover reflects the heat radiation generated by the heating element 121 toward the carrier 20, thereby achieving the purpose of improving the heating effect of the heating element 121.
[0068] In some embodiments, the heating element 121 extends on a plane parallel to the X-axis and the Z-axis, which helps to increase the heating area of the heating element 121 .
[0069] In some embodiments, see Figure 2 The inner wall of the vacuum chamber 11 is provided with connecting rods 112. In the direction parallel to the Y axis, the connecting rods 112 are distributed on both sides of the accommodating chamber 111 and extend from the inner wall of the vacuum chamber 11 to the middle of the accommodating chamber 111. All the connecting rods 112 located on one side of the accommodating chamber 111 are connected to the heating assembly 12 on the same side, and the connecting rods 112 on both sides extend from the inner wall of the vacuum chamber 11 to the middle of the accommodating chamber 111, so that the heating assembly 12 can be close to the carrier 20 in the middle of the accommodating chamber 111, thereby helping to improve the heating effect of the heating assembly 12.
[0070] In some embodiments, the connecting rod 112 is connected to the reflective cover, and the reflective cover is connected to the heating element 121, thereby avoiding direct contact between the heating element 121 and the connecting rod 112, helping to reduce the heat conduction effect between the heating element 121 and the vacuum chamber 11, and achieving the effect of reducing the need to set a thermal insulation element between the heating element 121 and the vacuum chamber 11.
[0071] In addition, those skilled in the art should recognize that the above embodiments are only used to illustrate the present application, and are not intended to limit the present application. As long as they are within the essential scope of the present application, appropriate changes and modifications to the above embodiments are within the scope disclosed in the present application.
Claims
1. A preheating device for preheating or cooling a sheet material, wherein the sheet material is carried on a carrier, characterized in that: The preheating device comprises: A vacuum chamber, wherein the vacuum chamber is provided with a receiving chamber, the receiving chamber is used to receive the carrier carrying the sheet material, and the receiving chamber comprises a first side and a second side arranged along a thickness direction of the vacuum chamber; Two heating components, the two heating components are arranged oppositely on the first side and the second side, and are used to heat the sheet material on the first side and the second side respectively; Two spray assemblies are arranged oppositely on the first side and the second side and are used to spray gaseous medium on the first side and the second side respectively, and the gaseous medium is used to heat or cool the sheet material.
2. The preheating device according to claim 1, characterized in that: All the spraying components are arranged on the top wall of the vacuum chamber and are located above the two heating components.
3. The preheating device according to claim 2, characterized in that: The vacuum chamber is provided with a through hole communicating with the accommodating cavity. Along a direction parallel to the Z axis, the through hole is located on a side of the heating component away from the spray component. The through hole can be connected to an external vacuum pump.
4. The preheating device according to claim 1, characterized in that: Each of the spraying assemblies comprises a main pipeline and a branch pipeline, wherein the main pipeline is placed through the vacuum chamber and communicated with the outside, and the branch pipeline extends in a direction parallel to the X-axis; All the branch pipelines of one of the spray assemblies are provided with a plurality of branch holes or nozzles, and all the branch holes or nozzles are used to spray the gas medium toward one side of the carrier.
5. The preheating device according to claim 4, characterized in that: The number of the branch pipelines of each of the spray components is two or more, and along a direction parallel to the X-axis, the plurality of branch pipelines are symmetrically distributed on both sides of the main pipeline.
6. The preheating device according to claim 1, characterized in that: The heating assembly comprises a heating element and a reflective cover, wherein the heating element is located between the reflective cover and another heating assembly, and the heating element is used to generate heat radiation toward the carrier; The reflective cover is used to reflect a portion of the heat radiation generated by the corresponding heating element toward the carrier.
7. The preheating device according to claim 6, characterized in that: The inner side wall of the vacuum chamber is provided with connecting rods, and the connecting rods are distributed on both sides of the accommodating chamber, and all the connecting rods located on one side of the accommodating chamber are connected to one of the heating components.
8. The preheating device according to claim 7, characterized in that: The heating element is connected to the corresponding reflecting cover, and the connecting rod is connected to the reflecting cover.
9. The preheating device according to claim 1, characterized in that: When the gas medium heats the sheet material, the gas medium is hot nitrogen or hot inert gas; When the gas medium cools the sheet material, the gas medium is cold nitrogen or cold inert gas.
10. A photovoltaic material processing device, characterized in that: It comprises a reaction device, a conveying device and the preheating device according to any one of claims 1 to 9, wherein the reaction device is configured to coat the surface of the sheet material; The vacuum chamber is provided with two ports opposite to each other along a first direction, one of the ports is connected to the outside, and the other port is connected to the reaction device; The conveying device is configured to move the carrier from the outside through the vacuum chamber to the reaction device, or is configured to move the carrier from the reaction device through the vacuum chamber to the outside.