Heating device for vacuum equipment

Abstract

The utility model discloses a heating device for vacuum equipment, belonging to the technical field of vacuum equipment, comprising vacuum equipment, a sealing cover fixedly installed on the vacuum equipment, a heating mechanism arranged outside the vacuum equipment, the heating mechanism comprising a heating bin, the heating bin sleeved outside the vacuum equipment, the upper end of the heating bin fixedly connected to the vacuum equipment through a mounting mechanism, a leg fixedly installed on the lower surface of the heating bin, a heat recovery mechanism detachably connected inside the leg. The utility model can conveniently dissipate the heat in the heating bin to the recovery bin via a connecting pipe through the setting of the heat recovery mechanism, thereby achieving the effect of rapidly reducing the temperature of the heating bin, and is also conducive to heating the water in the water tank, thereby achieving the goal of heat recovery and reuse.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum equipment, in particular to a heating device for vacuum equipment. Background Art

[0002] Vacuum equipment is a device for generating, improving and maintaining vacuum, including vacuum application equipment and vacuum acquisition equipment. In the current rapidly developing manufacturing industry, vacuum equipment is often used to maintain the vacuum inside the container, thereby improving the quality of manufactured products. The Chinese patent announcement number is: CN211267102U. A heating device used in vacuum equipment includes: a heater, a thermocouple, a top insulation radiation sleeve, a ceramic insulation base, and a stainless steel base. The stainless steel base is located at the bottom of the heating device, and there is a ceramic insulation base on it. The heater is located on the ceramic insulation base. The heater includes a heating ceramic core, a heating ceramic sleeve, a first electric heating wire, a second electric heating wire and a ceramic insulation coating. The device has small size, high heating efficiency, fast heating, good heat source closed insulation effect, effective control of the influence of thermal electrons on the electron beam of the scanning electron microscope, clear high-temperature images, and does not affect the normal use of other accessory functions of the scanning electron microscope.

[0003] The problem with the prior art is that when the above-mentioned vacuum equipment heating device heats the vacuum equipment, when the temperature inside the vacuum equipment exceeds the required heating temperature of the substance, or when the vacuum equipment completes heating of the first substance and prepares to heat the second substance, if the required heating temperature of the second substance is lower than the temperature of the first substance, the traditional approach is to lower the temperature of the heating wire until the temperature inside the vacuum equipment drops to the required temperature. However, this cooling method not only causes heat loss, but also reduces the cooling efficiency. Utility Model Content

[0004] In view of the problems existing in the prior art, the utility model provides a heating device for vacuum equipment, which has the advantage of heat recovery and solves the problem that when heating the vacuum equipment, when the temperature inside the vacuum equipment exceeds the required heating temperature of the material, the traditional approach is to lower the temperature of the heating wire until the temperature inside the vacuum equipment drops to the required temperature. However, this cooling method not only causes heat loss, but also reduces the cooling efficiency.

[0005] The utility model is implemented as follows: a heating device for vacuum equipment comprises vacuum equipment, a sealing cover is fixedly installed on the vacuum equipment, a heating mechanism is arranged outside the vacuum equipment, the heating mechanism comprises a heating bin, the heating bin is sleeved outside the vacuum equipment, the upper end of the heating bin is fixedly connected to the vacuum equipment through a mounting mechanism, a support leg is fixedly installed on the lower surface of the heating bin, and a heat recovery mechanism is detachably connected inside the support leg.

[0006] As a preferred embodiment of the utility model, a serpentine heating tube is fixedly coiled in the heating chamber, a receiver is fixedly installed on the bottom wall inside the heating chamber, and a temperature sensor is fixedly connected to one side of the receiver.

[0007] As a preferred embodiment of the utility model, handles are fixedly connected on both sides of the outer surface of the heating bin, a control panel is fixedly installed on the front side of the heating bin, installation grooves are provided on both sides of the upper end of the heating bin, and sockets are provided on the heating bin on both sides of each installation groove.

[0008] As a preferred embodiment of the utility model, the installation mechanism includes two movable blocks, each of the movable blocks slides in each installation groove respectively, and both sides of each movable block are fixedly connected with an insertion rod and a pull rod respectively, and the front end of the pull rod extends out of the heating chamber.

[0009] As a preferred embodiment of the present invention, slots are provided on both sides of the upper end of the vacuum equipment corresponding to each insertion rod, the insertion rod is adapted to the slots, and connecting pins are fixedly connected on both sides of the front end of each pull rod, and the connecting pins correspond to the sockets.

[0010] As a preferred embodiment of the utility model, a spring is sleeved on the middle part of each pull rod, and two ends of the spring are respectively fixedly connected to one side of the movable block and the inner wall of the installation groove.

[0011] As a preferred embodiment of the utility model, the heat recovery mechanism includes a connecting pipe, the connecting pipe is fixedly connected to the lower surface of the heating bin, a valve is fixedly installed on the connecting pipe, the lower end of the connecting pipe is fixedly connected to a recovery bin, and the outer wall of the recovery bin is detachably connected to a plurality of legs.

[0012] As a preferred embodiment of the utility model, a water tank is provided in the recovery bin, a plurality of pillars are fixedly connected to the lower surface of the water tank, the lower ends of the pillars are fixedly connected to the bottom wall inside the recovery bin, a water inlet pipe and a water outlet pipe are respectively fixedly connected to the water tank, and the outer ends of the water inlet pipe and the water outlet pipe are located outside the recovery bin.

[0013] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0014] 1. The utility model not only improves the disassembly and assembly efficiency between the vacuum device and the heating device through the setting of the installation mechanism, but also facilitates the maintenance of the parts in the vacuum device and the heating device, thereby enhancing the practicality.

[0015] 2. The utility model, through the setting of the heat recovery mechanism, can not only conveniently dissipate the heat in the heating bin to the recovery bin through the connecting pipe, thereby achieving the effect of quickly reducing the temperature of the heating bin, but also is beneficial to heating the water in the water tank, thereby achieving the goal of heat recovery and reuse. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional schematic diagram of the overall structure of the utility model;

[0017] Figure 2 It is a schematic diagram of the top view structure of the utility model;

[0018] Figure 3 For the utility model Figure 2 3D schematic diagram of the AA section structure;

[0019] Figure 4 For the utility model Figure 2 3D schematic diagram of the BB section structure;

[0020] Figure 5 For the utility model Figure 3 Enlarged view of the structure at point C in the middle.

[0021] In the figure: 1. vacuum equipment; 101. slot; 2. sealing cover; 3. heating mechanism; 301. heating chamber; 3011. mounting slot; 3012. socket; 302. serpentine heating tube; 303. receiver; 304. temperature sensor; 4. handle; 5. control panel; 6. mounting mechanism; 601. movable block; 602. pull rod; 603. spring; 604. plug rod; 605. connecting pin; 7. support leg; 8. heat recovery mechanism; 801. connecting pipe; 802. valve; 803. recovery chamber; 804. water tank; 805. support; 9. water inlet pipe; 10. water outlet pipe. DETAILED DESCRIPTION

[0022] In order to further understand the content, features and effects of the utility model, the following embodiments are given as examples and described in detail with reference to the accompanying drawings.

[0023] The structure of the utility model is described in detail below in conjunction with the accompanying drawings.

[0024] like Figures 1 to 5 As shown, a heating device for vacuum equipment provided by an embodiment of the utility model includes a vacuum equipment 1, a sealing cover 2 is fixedly installed on the vacuum equipment 1, a heating mechanism 3 is arranged outside the vacuum equipment 1, the heating mechanism 3 includes a heating bin 301, the heating bin 301 is sleeved outside the vacuum equipment 1, the upper end of the heating bin 301 is fixedly connected to the vacuum equipment 1 through a mounting mechanism 6, a support leg 7 is fixedly installed on the lower surface of the heating bin 301, and a heat recovery mechanism 8 is detachably connected to the support leg 7.

[0025] Furthermore, a serpentine heating tube 302 is fixedly coiled in the heating chamber 301 , a receiver 303 is fixedly installed on the bottom wall inside the heating chamber 301 , and a temperature sensor 304 is fixedly connected to one side of the receiver 303 .

[0026] In the present application, the setting of the serpentine heating tube 302 increases the contact area between the serpentine heating tube 302 and the vacuum equipment 1, thereby improving the heating efficiency. The setting of the temperature sensor 304 is used to monitor the temperature in the heating chamber 301. When the temperature in the heating chamber 301 exceeds the preset value, the temperature sensor 304 transmits a signal to the receiver 303, and the receiver 303 transmits the signal to the control panel 5, and the control panel 5 controls the closure of the serpentine heating tube 302, thereby reducing the temperature in the heating chamber 301.

[0027] Furthermore, handles 4 are fixedly connected to both sides of the outer surface of the heating chamber 301, a control panel 5 is fixedly installed on the front side of the heating chamber 301, installation grooves 3011 are opened on both sides of the upper end of the heating chamber 301, and sockets 3012 are opened on the heating chamber 301 on both sides of each installation groove 3011.

[0028] In the present application, the control panel 5 is electrically connected to the receiver 303, the serpentine heating tube 302, the temperature sensor 304 and the valve 802.

[0029] Furthermore, the mounting mechanism 6 includes two movable blocks 601, each movable block 601 slides in each mounting groove 3011 respectively, and each movable block 601 is fixedly connected with an insertion rod 604 and a pull rod 602 on both sides respectively, and the front end of the pull rod 602 extends out of the heating chamber 301, and slots 101 are opened on both sides of the upper end of the vacuum equipment 1 corresponding to each insertion rod 604, and the insertion rod 604 is adapted to the slots 101, and each pull rod 602 is fixedly connected with connecting pins 605 on both sides of the front end, and the connecting pins 605 correspond to the socket 3012, and a spring 603 is sleeved in the middle of each pull rod 602, and the two ends of the spring 603 are respectively fixedly connected to one side of the movable block 601 and the inner wall of the mounting groove 3011.

[0030] In the present application, the pull rod 602 is pulled outward to drive the insertion rod 604 to move outward. At this time, the spring 603 is compressed. When the insertion rod 604 is out of the slot 101, the vacuum equipment 1 can be taken out from the heating chamber 301 to facilitate the inspection and maintenance of the vacuum equipment 1 and the serpentine heating tube 302. When installing the vacuum equipment 1, the pull rod 602 is pulled outward and rotated so that the two connecting pins 605 are against the outer wall of the heating chamber 301. At this time, the two insertion rods 604 just disengage from the slot 101. Then the vacuum equipment 1 is placed in the heating chamber 301 so that the slot 101 is aligned with the installation groove 3011. Then the pull rod 602 is slowly rotated in the opposite direction and the pull rod 602 is released. At this time, the spring 603 is reset. Under the elastic action of the spring 603, the insertion rod 604 is driven to be inserted into the slot 101 to complete the fixed connection between the heating chamber 301 and the vacuum equipment 1.

[0031] Furthermore, the heat recovery mechanism 8 includes a connecting pipe 801, which is fixedly connected to the lower surface of the heating bin 301, a valve 802 is fixedly installed on the connecting pipe 801, a recovery bin 803 is fixedly connected to the lower end of the connecting pipe 801, the outer wall of the recovery bin 803 is detachably connected to a plurality of legs 7, a water tank 804 is arranged in the recovery bin 803, a plurality of pillars 805 are fixedly connected to the lower surface of the water tank 804, the lower ends of the pillars 805 are fixedly connected to the bottom wall inside the recovery bin 803, an inlet pipe 9 and an outlet pipe 10 are respectively fixedly connected to the water tank 804, and the outer ends of the inlet pipe 9 and the outlet pipe 10 are located outside the recovery bin 803.

[0032] In the present application, when the temperature in the vacuum equipment 1 exceeds the required heating temperature of the substance, or the vacuum equipment 1 completes heating of the first substance and prepares to heat the second substance, if the required heating temperature of the second substance is lower than the temperature of the first substance, the traditional practice is to lower the temperature of the heating tube until the temperature in the heating chamber 301 drops to the required temperature. However, this cooling method will not only cause heat loss, but also reduce the cooling efficiency. Therefore, the valve 802 can be opened through the control panel 5. At this time, the heat enters the recovery chamber 803 through the connecting pipe 801, and then is transferred to the water tank 804, which plays a role in heating the water in the water tank 804, making it convenient for people to use; the water tank 804 can be made of iron material to speed up the heat transfer speed; in this process, the heat in the heating chamber 301 is dissipated into the recovery chamber 803, which not only achieves effective cooling of the heating chamber 301, but also avoids waste of resources due to heat loss.

[0033] The working principle of this utility model:

[0034] When installing the vacuum device 1, first pull outward and rotate the pull rod 602 so that the two connecting pins 605 are against the outer wall of the heating chamber 301. At this time, the two plug rods 604 are just out of the slots 101. Then put the vacuum device 1 into the heating chamber 301 so that the slots 101 are aligned with the installation grooves 3011. Then, rotate the pull rod 602 in the opposite direction and release it. At this time, the spring 603 is reset. Under the elastic action of the spring 603, the plug rod 604 is driven to be inserted into the slot 101, completing the fixed connection between the heating chamber 301 and the vacuum device 1.

[0035] Subsequently, the serpentine heating tube 302 is controlled to be turned on through the control panel 5. Under the action of the serpentine heating tube 302, the purpose of heating the material in the vacuum equipment 1 is achieved. When the temperature in the heating chamber 301 exceeds the required heating temperature of the material, the temperature sensor 304 detects the high temperature and transmits a signal to the receiver 303. The signal is transmitted to the control panel 5 through the receiver 303, and the valve 802 is opened through the control panel 5. At this time, the heat enters the recovery chamber 803 through the connecting pipe 801, and is then transmitted to the water tank 804, which plays a role in heating the water in the water tank 804; in this process, the heat in the heating chamber 301 is dissipated into the recovery chamber 803, thereby achieving effective cooling of the heating chamber 301. When the temperature drops to the required temperature, the valve 802 can be closed.

[0036] To sum up: this heating device of vacuum equipment, through the setting of the mounting mechanism 6, not only improves the disassembly and assembly efficiency between the vacuum equipment 1 and the heating mechanism 3, but also facilitates the maintenance of the parts in the vacuum equipment 1 and the heating mechanism 3, thereby enhancing practicality; through the setting of the heat recovery mechanism 8, not only can the heat in the heating bin 301 be conveniently dissipated to the recovery bin 803 via the connecting pipe 801, thereby achieving the effect of quickly reducing the temperature of the heating bin 301, but it is also beneficial to heat the water in the water tank 804, thereby achieving the goal of heat recovery and reuse.

[0037] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A heating device for a vacuum device, comprising a vacuum device (1), characterized in that: A sealing cover (2) is fixedly mounted on the vacuum device (1); a heating mechanism (3) is arranged outside the vacuum device (1); the heating mechanism (3) comprises a heating chamber (301); the heating chamber (301) is sleeved outside the vacuum device (1); the upper end of the heating chamber (301) is fixedly connected to the vacuum device (1) via a mounting mechanism (6); a support leg (7) is fixedly mounted on the lower surface of the heating chamber (301); a heat recovery mechanism (8) is detachably connected inside the support leg (7).

2. A heating device for vacuum equipment according to claim 1, characterized in that: A serpentine heating tube (302) is fixedly coiled inside the heating chamber (301), a receiver (303) is fixedly installed on the bottom wall inside the heating chamber (301), and a temperature sensor (304) is fixedly connected to one side of the receiver (303).

3. A heating device for vacuum equipment according to claim 1, characterized in that: Handles (4) are fixedly connected to both sides of the outer surface of the heating chamber (301), a control panel (5) is fixedly installed on the front side of the heating chamber (301), mounting grooves (3011) are provided on both sides of the upper end of the heating chamber (301), and sockets (3012) are provided on the heating chamber (301) at both sides of each mounting groove (3011).

4. A heating device for vacuum equipment according to claim 3, characterized in that: The mounting mechanism (6) comprises two movable blocks (601), each of the movable blocks (601) slides in each mounting groove (3011), and each of the two sides of the movable block (601) is fixedly connected with an insertion rod (604) and a pull rod (602), and the front end of the pull rod (602) extends out of the heating chamber (301).

5. A heating device for vacuum equipment according to claim 4, characterized in that: The upper sides of the vacuum device (1) corresponding to each insertion rod (604) are provided with slots (101), the insertion rod (604) is adapted to the slots (101), and the front ends of each pull rod (602) are fixedly connected with connecting pins (605) on both sides, and the connecting pins (605) correspond to the sockets (3012).

6. A heating device for vacuum equipment according to claim 5, characterized in that: A spring (603) is sleeved on the middle of each pull rod (602), and two ends of the spring (603) are respectively fixedly connected to one side of the movable block (601) and the inner wall of the installation groove (3011).

7. A heating device for vacuum equipment according to claim 1, characterized in that: The heat recovery mechanism (8) comprises a connecting pipe (801), the connecting pipe (801) being fixedly connected to the lower surface of the heating bin (301), a valve (802) being fixedly mounted on the connecting pipe (801), a recovery bin (803) being fixedly connected to the lower end of the connecting pipe (801), and an outer wall of the recovery bin (803) being detachably connected to a plurality of legs (7).

8. A heating device for vacuum equipment according to claim 7, characterized in that: A water tank (804) is arranged in the recovery bin (803); a plurality of pillars (805) are fixedly connected to the lower surface of the water tank (804); the lower ends of the pillars (805) are fixedly connected to the inner bottom wall of the recovery bin (803); a water inlet pipe (9) and a water outlet pipe (10) are respectively fixedly connected to the water tank (804); the outer ends of the water inlet pipe (9) and the water outlet pipe (10) are located outside the recovery bin (803).

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