A nitrogen flow control device

Abstract

The utility model relates to the technical field of nitrogen flow control, and in particular to a nitrogen flow control device. Its technical solution: comprises a sealing box fixed on the nitrogen pipe of a vacuum pump, a mounting pipe is fixed in the sealing box, both ends of the mounting pipe are fixed to the flange of the nitrogen pipe of the vacuum pump, a flow meter and a regulating valve are fixed on the mounting pipe, a one-way valve is fixed on the exhaust end of the mounting pipe, a three-way valve is fixed on the air inlet end of the mounting pipe, a connecting pipe is fixed between the three-way valve and the mounting pipe, a compressor is fixed on the connecting pipe, and a controller is fixed on the upper end of the inner wall of the sealing box. On the basis of using a regulating valve to adjust the nitrogen flow in the pipeline, the utility model also arranges a compressor to adjust the gas pressure in the pipeline, which can expand the flow adjustment range and make it have a wider application, and the entire control structure is arranged in the sealing box, so that when a leak occurs, it can be discovered in time to reduce the running consumption loss.

Description

Technical Field

[0001] The utility model relates to the technical field of nitrogen flow control, in particular to a nitrogen flow control device. Background Art

[0002] Nitrogen flow control of vacuum pumps refers to the technology of using nitrogen to control or regulate gas flow in a vacuum system. By controlling the flow of nitrogen, the pressure of the system can be more effectively adjusted, thereby improving the vacuum pumping efficiency. At the same time, nitrogen is an inert gas. Using nitrogen flow control can reduce oxygen and water vapor in the system, thereby reducing the risk of contamination and corrosion.

[0003] In the flow control of nitrogen, it is mainly achieved through the cooperation of flow meter and regulating valve. In this case, when the regulating valve is adjusted to the maximum opening limit, the maximum amount of its flow can no longer be increased, resulting in limited flow control range and inability to inject nitrogen with a larger flow rate. The pipeline gas flow is not only proportional to the diameter of the pipeline, but also has a great correlation with the gas pressure in the pipeline. Therefore, it is necessary to design a control device that can adjust the gas pressure inside the pipeline to expand the control range of nitrogen flow so that it can have a wider application. Secondly, nitrogen is a colorless and odorless inert gas. Although leakage has little impact on the environment, it also consumes a lot of energy. Therefore, it is necessary to design a nitrogen delivery control device that can detect leaks in time. Utility Model Content

[0004] The purpose of the utility model is to provide a nitrogen flow control device to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: comprising a sealing box fixed on a nitrogen pipe of a vacuum pump, a mounting pipe fixed inside the sealing box, two ends of the mounting pipe fixed to flanges of the nitrogen pipe of the vacuum pump, a flow meter and a regulating valve fixed on the mounting pipe, a one-way valve fixed on the exhaust end of the mounting pipe, a three-way valve fixed on the intake end of the mounting pipe, a connecting pipe fixed between the three-way valve and the mounting pipe, a compressor fixed on the connecting pipe, a controller fixed on the upper end of the inner wall of the sealing box, the front end of the sealing box is an open structure, and is hinged with a sealing cover, a pressure sensor fixed on the inner side of the sealing cover, an alarm electrically connected to the pressure sensor fixed on the outer side of the sealing box, and a fixing component is arranged between the bottom of the sealing cover and the bottom of the sealing box.

[0006] Preferably, a pressure gauge is fixed on the mounting pipe and located between the connecting pipe and the regulating valve.

[0007] Preferably, an observation window is fixed at the center of the sealing cover, and an airtight gasket is fixed on the inner periphery of the sealing cover.

[0008] Preferably, the fixing assembly includes an insert plate, a fixing plate and a fixing frame, the insert plate is fixed to the side of the sealing cover away from the hinge and is symmetrically distributed, a fixing plate is fixed to the bottom of the sealing box and is aligned with the insert plate, a side slide plate is slidably connected to the outer side of the fixing plate, the end of the side slide plate is fixedly connected to the fixing frame, and the insert plate and the fixing plate are both inserted into the fixing frame.

[0009] Preferably, the fixing frame is a U-shaped structure, and an anti-slip pad is fixed to the inner wall.

[0010] Preferably, a sliding groove is provided on the outer wall of the fixed plate at a position corresponding to the side sliding plate, a sliding block is slidably connected in the sliding groove, the outer side of the sliding block is fixed to the side sliding plate, and a fixing spring is fixed between the sliding block and the inner wall of the sliding groove.

[0011] Compared with the prior art, the beneficial effects of the utility model are as follows: on the basis of using a regulating valve to adjust the nitrogen flow in the pipeline, a compressor is also provided to adjust the gas pressure in the pipeline, which can expand the flow regulation range and enable it to have a wider application, and the entire control structure is arranged in a sealed box, so that leakage can be discovered in time when it occurs, thereby reducing operating consumption losses. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the internal structure of a sealed box of a nitrogen flow control device of the utility model;

[0013] Figure 2 This is a schematic diagram of the connection structure between the bottom of the sealing box and the sealing cover of a nitrogen flow control device of the utility model;

[0014] Figure 3 The utility model is a schematic diagram of the combined structure of a fixing frame and a side slide plate of a nitrogen flow control device.

[0015] In the figure: 1. Nitrogen pipe of vacuum pump; 2. Sealing box; 21. Mounting pipe; 22. Alarm; 3. Flow meter; 4. Regulating valve; 5. Check valve; 6. Connecting pipe; 61. Three-way valve; 62. Compressor; 7. Pressure gauge; 8. Sealing cover; 81. Airtight pad; 82. Pressure sensor; 83. Observation window; 9. Fixing assembly; 91. Insert plate; 92. Fixing plate; 93. Side slide plate; 94. Fixing frame; 95. Sliding groove; 96. Sliding block; 97. Fixing spring; 98. Anti-slip pad. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] See also Figure 1-3 The utility model provides a technical solution: it includes a sealing box 2 fixed on a nitrogen pipe 1 of a vacuum pump, a mounting pipe 21 is fixed in the sealing box 2, both ends of the mounting pipe 21 are flange-fixed with the nitrogen pipe 1 of the vacuum pump, a flow meter 3 and a regulating valve 4 are fixed on the mounting pipe 21, a one-way valve 5 is fixed on the exhaust end of the mounting pipe 21, a three-way valve 61 is fixed on the intake end of the mounting pipe 21, a connecting pipe 6 is fixed between the three-way valve 61 and the mounting pipe 21, a compressor 62 is fixed on the connecting pipe 6, a controller is fixed on the upper end of the inner wall of the sealing box 2, the front end of the sealing box 2 is an open structure, and a sealing cover 8 is hingedly connected, a pressure sensor 82 is fixed on the inner side of the sealing cover 8, an alarm 22 electrically connected to the pressure sensor 82 is fixed on the outer side of the sealing box 2, a fixing component 9 is arranged between the bottom of the sealing cover 8 and the bottom of the sealing box 2, a barometer 7 is fixed on the mounting pipe 21 and between the connecting pipe 6 and the regulating valve 4, an observation window 83 is fixed at the center of the sealing cover 8, and an airtight pad 81 is fixed on the inner periphery of the sealing cover 8.

[0018] The fixing assembly 9 includes an insert plate 91, a fixing plate 92 and a fixing frame 94. The insert plate 91 is fixed to the side of the sealing cover 8 away from the hinge and is symmetrically distributed. A fixing plate 92 is fixed to the bottom of the sealing box 2 and is aligned with the insert plate 91. A side slide plate 93 is slidably connected to the outer side of the fixing plate 92. The end of the side slide plate 93 is fixedly connected to the fixing frame 94. The insert plate 91 and the fixing plate 92 are both inserted into the fixing frame 94. The fixing frame 94 is a U-shaped structure, and an anti-slip pad 98 is fixed to the inner wall. A sliding groove 95 is provided on the outer wall of the fixing plate 92 and at a position corresponding to the side slide plate 93. A sliding block 96 is slidably connected in the sliding groove 95. The outer side of the sliding block 96 is fixed to the side slide plate 93, and a fixing spring 97 is fixed between the sliding block 96 and the inner wall of the sliding groove 95.

[0019] Working principle: When using the vacuum pump nitrogen pipe 1 to transport nitrogen to the inside of the vacuum pump, before the gas flows out of the installation pipe 21, the flow meter 3 can be used to monitor the flow rate. According to the flow monitoring signal, the regulating valve 4 is driven and controlled to make its flow rate reach the preset range. In this process, the one-way valve 5 can be used to prevent the gas in the vacuum pump from flowing back into the installation pipe 21. When a large flow of nitrogen is required to be injected, the three-way valve 61 can be used to pass the nitrogen into the connecting pipe 6 and then into the installation pipe 21. At this time, the compressor 62 on the connecting pipe 6 is used to pressurize the nitrogen in the pipeline. When the diameter of the pipeline remains unchanged, the nitrogen pressure is continuously increased, the nitrogen flow rate is increased to a greater extent, and its application range is increased. The nitrogen pressure in the pipeline can be monitored by the barometer 7. In the entire control process During the process, the sealing cover 8 can be closed, and the entire control device is in a relatively sealed environment. At this time, if gas leakage occurs at the connection or the control device itself, the internal air pressure of the sealing box 2 will increase. The pressure sensor 82 can be used to monitor the air pressure change, and then an alarm is issued to achieve the purpose of rapid leak detection. When the sealing cover 8 is closed, its plug plate 91 and the fixed plate 92 are aligned. At this time, the fixed spring 97 is used to pull and drive the sliding block 96 to slide, and then drive the side slide plate 93 and the fixed frame 94 to slide, and the fixed plate 92 and the plug plate 91 are snapped into the fixed frame 94 to fix the sealing cover 8. Conversely, the fixed frame 94 is pulled, and the plug plate 91 and the fixed plate 92 are released while the fixing spring 97 is stretched, and the sealing cover 8 is quickly opened to perform maintenance on various control devices.

[0020] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0021] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A nitrogen flow control device, comprising a sealing box (2) fixed to a nitrogen pipe (1) of a vacuum pump, characterized in that: A mounting pipe (21) is fixed inside the sealing box (2), and both ends of the mounting pipe (21) are flange-fixed to a nitrogen pipe (1) of a vacuum pump. A flow meter (3) and a regulating valve (4) are fixed on the mounting pipe (21). A one-way valve (5) is fixed on the exhaust end of the mounting pipe (21), and a three-way valve (61) is fixed on the intake end of the mounting pipe (21). A connecting pipe (6) is fixed between the three-way valve (61) and the mounting pipe (21), and a compressor (62) is fixed on the connecting pipe (6). A controller is fixed on the upper end of the inner wall of the sealing box (2). The front end of the sealing box (2) is an open structure and is hingedly provided with a sealing cover (8). A pressure sensor (82) is fixed on the inner side of the sealing cover (8), and an alarm (22) electrically connected to the pressure sensor (82) is fixed on the outer side of the sealing box (2). A fixing component (9) is provided between the bottom of the sealing cover (8) and the bottom of the sealing box (2).

2. A nitrogen flow control device according to claim 1, characterized in that: A pressure gauge (7) is fixed on the installation pipe (21) and located between the connecting pipe (6) and the regulating valve (4).

3. A nitrogen flow control device according to claim 1, characterized in that: An observation window (83) is fixed at the center of the sealing cover (8), and an airtight pad (81) is fixed on the inner periphery of the sealing cover (8).

4. A nitrogen flow control device according to claim 1, characterized in that: The fixing assembly (9) comprises an inserting plate (91), a fixing plate (92) and a fixing frame (94); the inserting plate (91) is fixed to a side of the sealing cover (8) away from the hinge and is symmetrically distributed; the fixing plate (92) is fixed to the bottom of the sealing box (2) and is aligned with the inserting plate (91); a side sliding plate (93) is slidably connected to the outer side of the fixing plate (92); an end of the side sliding plate (93) is fixedly connected to the fixing frame (94); and the inserting plate (91) and the fixing plate (92) are both inserted into the fixing frame (94).

5. A nitrogen flow control device according to claim 4, characterized in that: The fixing frame (94) is a U-shaped structure, and an anti-slip pad (98) is fixed to the inner wall.

6. A nitrogen flow control device according to claim 4, characterized in that: A sliding groove (95) is provided on the outer wall of the fixed plate (92) at a position corresponding to the side sliding plate (93); a sliding block (96) is slidably connected in the sliding groove (95); the outer side of the sliding block (96) is fixed to the side sliding plate (93); and a fixing spring (97) is fixed between the sliding block (96) and the inner wall of the sliding groove (95).

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