Detection equipment

Abstract

The utility model discloses a detection device. The detection equipment comprises a detection mechanism and a manipulator, the detection mechanism comprises a detection assembly and a supporting assembly, the detection assembly is arranged on the supporting assembly, and the detection assembly is configured to be used for bearing a detected piece and detecting the detected piece; and the manipulator is arranged near the detection mechanism, and the manipulator is configured to receive the detected piece and turn over the detected piece so as to switch the detected surface of the detected piece.

Description

Technical Field

[0001] The present application relates to the field of semiconductor detection technology, and more specifically, to a detection device. Background Art

[0002] Wafer defect detection equipment is widely used in the semiconductor industry. During the production process, wafers often have certain defects on their surfaces. The existence of these defects will directly affect the subsequent chip production yield and chip quality. Therefore, wafer surface defect detection is a crucial procedure, and improving the accuracy and efficiency of wafer surface defect detection is an important technical point in semiconductor production.

[0003] Wafer inspection equipment in the prior art can often only inspect one surface of the wafer, which reduces the accuracy of the inspection.

[0004] In view of this, it is necessary to propose a new technical solution to solve the above technical problems. Utility Model Content

[0005] One purpose of the present application is to provide a new technical solution for a detection device.

[0006] According to a first aspect of the present application, a detection device is provided, the detection device comprising:

[0007] A detection mechanism, the detection mechanism comprising a detection component and a support component, the detection component is arranged on the support component, and the detection component is configured to carry and detect the object under test;

[0008] A manipulator is arranged near the detection mechanism, and is configured to receive the object to be tested and flip the object to be tested to switch the tested surface of the object to be tested.

[0009] Optionally, the detection mechanism also includes a lifting assembly, which is arranged on the supporting assembly, and the lifting assembly is configured to lift the test piece along a first direction; when the test piece is lifted by the lifting assembly along the first direction, the manipulator receives the test piece and flips it over to switch the test surface of the test piece.

[0010] Optionally, the lifting assembly includes a first driving member and a suction member, the suction member is installed on the first driving member, the first driving member drives the suction member to move along a first direction to lift the suction member, and the suction member is used to absorb the measured object.

[0011] Optionally, the detection assembly comprises a first light source and a visual unit which are arranged at intervals, and the visual unit and the first light source are respectively arranged on two sides of the object to be tested;

[0012] The first light source is used to carry the test piece and emit detection light to the test piece, and the visual unit is used to detect surface defects of the test piece.

[0013] Optionally, the visual unit is arranged above the first light source.

[0014] Optionally, the visual unit includes a second driving member and a visual camera, the visual camera is disposed on the second driving member, and the second driving member drives the visual camera to move along a first direction to focus the visual camera.

[0015] Optionally, the visual unit further includes an adapter plate, the adapter plate is mounted on the second driving member, and the visual camera is connected to the adapter plate.

[0016] Optionally, the detection component includes a visual unit and a second light source, and the visual unit and the second light source are arranged on the same side of the test piece; the second light source is used to emit detection light to the test piece, and the visual unit is used to detect surface defects of the test piece.

[0017] Optionally, the detection component includes a first light source, a visual unit and a second light source that are arranged at intervals, and the second light source is arranged between the first light source and the visual unit; the first light source is used to carry the test piece and emit detection light to the test piece, the second light source is used to emit detection light to the test piece from above the test piece, and the visual unit is used to detect surface defects of the test piece.

[0018] Optionally, the detection assembly further comprises a translation mechanism, the translation mechanism is arranged on the support assembly, the first light source is arranged on the translation mechanism, and the translation mechanism can drive the first light source to translate along the second direction and / or the third direction;

[0019] The first direction, the second direction and the third direction form a predetermined angle between each other.

[0020] Optionally, the support assembly includes a support base and a support frame connected to each other, and the support frame is arranged on the upper part of the support base.

[0021] Optionally, the detection device further comprises a packing mechanism, the packing mechanism comprises a material box assembly, and the manipulator can take and place the test piece from the material box assembly.

[0022] Optionally, the packaging mechanism includes at least three material box assemblies, and the at least three material box assemblies are arranged around the manipulator, and each of the material box assemblies is used to hold test pieces with the same properties.

[0023] Optionally, any of the material box assemblies comprises a material box body, the material box body having a plurality of partition plates arranged at intervals, and a gap between two adjacent partition plates is used for placing the test piece.

[0024] Optionally, any of the material box assemblies further comprises two positioning members, and the two positioning members are respectively abutted against two sides of the material box body.

[0025] Optionally, the detection device further includes a subpackaging mechanism and an equipment box, and the detection mechanism, the manipulator and the subpackaging mechanism are all arranged in the equipment box.

[0026] Optionally, the equipment box includes an upper box and a lower box, and the detection mechanism, the manipulator and the packaging mechanism are all arranged in the upper box;

[0027] The detection device also includes an electric control mechanism, and the electric control mechanism is arranged in the lower box.

[0028] Optionally, a metamaterial layer is attached to the inner wall of the lower box.

[0029] Optionally, at least a portion of the side wall of the upper box is configured as a transparent area.

[0030] The technical solution adopted in this application can achieve the following beneficial effects:

[0031] In the detection device provided in the embodiment of the present application, through the cooperation between the detection mechanism and the manipulator, the two surfaces of the object to be detected can be detected, thereby improving the accuracy of the detection.

[0032] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the application and, together with the description, serve to explain the principles of the application.

[0034] Figure 1 is a schematic diagram of the overall structure of a detection device according to an embodiment of the present application;

[0035] Figure 2 The structure of the detection mechanism in the detection device according to one embodiment of the present application is shown in FIG. Figure 1 ;

[0036] Figure 3 The structure of the detection mechanism in the detection device according to one embodiment of the present application is shown in FIG. Figure 2 ;

[0037] Figure 4 The structure diagram of the manipulator and the packaging mechanism in the detection device according to one embodiment of the present application is shown in FIG. Figure 1 ;

[0038] Figure 5 The structure of the manipulator and the packaging mechanism in the detection device according to one embodiment of the present application is shown in FIG. Figure 2 ;

[0039] Figure 6 is a schematic structural diagram of a material box body in a detection device according to an embodiment of the present application;

[0040] Figure 7 It is a schematic diagram of the arrangement of the electric control mechanism in the detection equipment according to one embodiment of the present application.

[0041] Description of reference numerals:

[0042] 1. Detection mechanism; 10. Support assembly; 100. Support seat; 101. Support frame; 11. Lifting assembly; 111. First driving member; 112. Suction member; 12. First light source; 13. Visual unit; 131. Second driving member; 132. Visual camera; 133. Adapter plate; 14. Second light source; 15. Translation mechanism;

[0043] 2. Manipulator; 21. Manipulator body; 22. Suction gripper; 23. Base; 24. Protective plate;

[0044] 3. Packing mechanism; 31. Material box assembly; 311. Material box body; 3110. Separation plate; 312. Positioning member; 3121. Positioning plate; 3122. Clamp; 313. Material box bracket;

[0045] 4. Equipment box; 41. Upper box; 42. Lower box; 51. Electrical installation board; 52. Cooling fan; 53. Main power switch; 54. Power aviation socket; 50. Metamaterial layer; 6. Display screen; 7. Operation button. DETAILED DESCRIPTION

[0046] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present application.

[0047] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present application, its application, or uses.

[0048] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0049] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0050] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0051] Reference Figure 1-Figure 7 As shown, according to an embodiment of the present application, a detection device is provided. The detection device includes a detection mechanism 1 and a manipulator 2, wherein the detection mechanism 1 includes a detection component and a support component 10, wherein the detection component is disposed on the support component 10, and the detection component is configured to carry a test piece and detect the test piece;

[0052] The manipulator 2 is disposed near the detection mechanism 1 , and is configured to receive the object to be tested and flip the object to be tested to switch the tested surface of the object to be tested.

[0053] In the detection device provided in the embodiment of the present application, the support assembly 10 in the detection mechanism 1 plays the role of overall installation and manufacturing. The detection assembly in the detection mechanism 1 is used to carry the test piece and detect the test piece, and the manipulator 2 can take the test piece and flip the test piece. The test piece is, for example, a pressure-resistant substrate, which is a wafer-level substrate.

[0054] When the detection equipment is working, the manipulator 2 places the piece to be tested in the area where the detection component is located. At this time, the piece to be tested is in a state with the first measured surface facing upward, and the detection component first detects the first measured surface of the piece to be tested. After the detection of the first measured surface is completed, the piece to be tested is flipped by the manipulator 2. At this time, the positions of the first measured surface and the second measured surface of the piece to be tested are swapped, and the piece to be tested is switched to a state with the second measured surface facing upward. Then, the manipulator 2 places the piece to be tested again in the area where the detection component is located, so that the detection component can detect the second measured surface of the piece to be tested.

[0055] In summary, in the detection device provided in the embodiment of the present application, through the cooperation between the detection mechanism and the manipulator 2, the two surfaces of the object to be detected can be detected, thereby improving the accuracy of the detection.

[0056] Reference Figure 1-Figure 7As shown, in one embodiment, the detection mechanism 1 also includes a lifting assembly 11, and the lifting assembly 11 is arranged on the supporting assembly 10 and the lifting assembly 11 is located next to the detection assembly, and the lifting assembly 11 is configured to lift the test piece along a first direction; when the test piece is lifted by the lifting assembly 11 along the first direction, the manipulator 2 receives the test piece and flips it over to switch the test surface of the test piece.

[0057] In this specific example, the test piece can be lifted by the lifting assembly 11, so that the manipulator 2 can take the test piece and flip it over. Specifically, when the detection device is working, the manipulator 2 places the test piece in the area where the detection assembly is located. At this time, the test piece is in a state where the first test surface is facing upward, and the detection assembly first detects the first test surface of the test piece; after the first test surface is detected, the test piece is lifted by the lifting assembly 11, and then the manipulator 2 takes the test piece from the lifting assembly 11 and flips it over. At this time, the first test surface and the second test surface of the test piece are swapped, and the test piece is switched to a state where the second test surface faces upward, and then the manipulator 2 places the test piece again in the area where the detection assembly is located, so that the detection assembly can detect the second test surface of the test piece.

[0058] Through the mutual cooperation of the lifting assembly 11 and the manipulator 2, the surface of the test piece can be automatically switched without manual flipping of the test piece; thereby improving the detection efficiency, saving labor costs, and avoiding abnormal situations such as missed flipping, so the detection equipment has a high degree of automation.

[0059] Reference Figure 2 , Figure 3 As shown, in one embodiment, the lifting assembly 11 includes a first driving member 111 and a suction member 112, the suction member 112 is installed on the first driving member 111, the first driving member 111 drives the suction member 112 to move along a first direction to lift the suction member 112, and the suction member 112 is used to absorb the test piece.

[0060] In this specific example, when the first driving member 111 drives the suction member 112 to move along the first direction and lowers the suction member 112, the suction member 112 can contact and absorb the measured object; then the first driving member 111 drives the suction member 112 to move along the first direction and lifts the suction member 112, and the suction member 112 is lifted to a certain height together with the measured object, so as to facilitate the manipulator 2 to pick up the measured object and then flip the measured object.

[0061] Optionally, the first driving member 111 may be, for example, a linear motor, an electric cylinder, a pneumatic cylinder, etc.; the suction member 112 may be, for example, a seamless vacuum suction cup.

[0062] Reference Figure 2 As shown, in one embodiment, the detection assembly includes a first light source 12 and a visual unit 13 which are arranged at intervals, and the visual unit 13 and the first light source 12 are respectively arranged on both sides of the test piece; for example, the visual unit 13 is arranged above the first light source 12;

[0063] The first light source 12 is used to carry the test piece and emit detection light to the test piece, and the visual unit 13 is used to detect surface defects of the test piece.

[0064] In this specific example, when the detection component detects the piece under test, the piece under test is placed on the first light source 12, the first light source 12 is used to emit multiple types of detection light to the piece under test, and the visual unit 13 is used to perform defect detection on the area illuminated by the detection light in real time.

[0065] Reference Figure 2 As shown, in one embodiment, the visual unit 13 includes a second driving member 131 and a visual camera 132 , the visual camera 132 is disposed on the second driving member 131 , and the second driving member 131 drives the visual camera 132 to move along a first direction to focus the visual camera 132 .

[0066] In this specific example, the visual camera 132 in the visual unit 13 is used to take pictures of the measured object; generally speaking, for each measured surface, the visual camera 132 will take pictures multiple times to improve the comprehensiveness and accuracy of the detection. The second driving member 131 can drive the visual camera 132 to move along the first direction to approach or move away from the measured object, thereby improving the clarity of the pictures taken of the measured object. The first direction is the direction in which the visual camera 132 and the first light source 12 are relatively arranged. The second driving member 131 can be, for example, a linear motor, an electric cylinder, a pneumatic cylinder, etc.

[0067] Reference Figure 2 As shown, in one embodiment, the visual unit 13 further includes an adapter plate 133 , the adapter plate 133 is mounted on the second driving member 131 , and the visual camera 132 is connected to the adapter plate 133 .

[0068] In this specific example, the visual camera 132 is installed on the second driving member 131 through the adapter plate 133, so that the visual camera 132 can be installed more conveniently.

[0069] Reference Figure 2As shown, in one embodiment, the detection component further includes a second light source 14, which is disposed between the first light source 12 and the visual unit 13. Specifically, the second light source 14 is disposed between the first light source 12 and the visual camera 132, and the second light source 14 is used to emit detection light from above the measured object to the measured object. The visual unit 13 and the first light source 12 are respectively disposed on both sides of the measured object, and the visual unit 13 and the second light source 14 are disposed on the same side of the measured object.

[0070] In this specific example, the second light source 14 and the first light source 12 illuminate the piece under test from the upper and lower directions respectively, and the second light source 14 and the first light source 12 respectively emit detection light of different wavelengths to the piece under test, utilizing the fact that detection light of different wavelengths has different sensitivities to different types of defects, thereby providing a more comprehensive detection for the piece under test and improving the accuracy of detection.

[0071] Reference Figure 2 , Figure 3 As shown, in one embodiment, the detection component also includes a translation mechanism 15, the translation mechanism 15 is arranged on the support component 10, the first light source 12 is arranged on the translation mechanism 15, and the translation mechanism 15 can drive the first light source 12 to translate along the second direction and / or the third direction; the first direction, the second direction and the third direction form a predetermined angle between each other.

[0072] In this specific example, the first light source 12 is arranged on the translation mechanism 15, and the translation mechanism 15 can drive the first light source 12 to translate along the second direction and / or the third direction. When the test piece is placed on the first light source 12, the test piece moves translationally along the second direction and / or the third direction together with the first light source 12 under the driving action of the translation mechanism 15; when the visual camera 132 takes pictures of the test piece, the test piece and the first light source 12 move translationally along the second direction and / or the third direction, so that the visual camera 132 can make the photo detection of the test piece more comprehensive.

[0073] In addition, before the lifting assembly 11 lifts the piece under test, the first light source 12 and the piece under test placed on the first light source 12 can be driven to translate along the second direction and / or the third direction through the translation mechanism 15, so that the lifting assembly 11 can be aligned with the piece under test, thereby accurately attracting and lifting the piece under test.

[0074] Reference Figure 2 As shown, the first direction is Figure 2 The a direction in the second direction is Figure 2 The b direction in the figure is Figure 2 The c direction in .

[0075] Reference Figure 2 , Figure 3 As shown, in one embodiment, the support assembly 10 includes a support base 100 and a support frame 101 that are connected to each other, and the support frame 101 is arranged on the upper part of the support base 100.

[0076] In this specific example, the support assembly 10 is the main support structure in the detection mechanism 1, wherein the support frame 101 is connected to the upper part of the support base 100. The translation mechanism 15 and the first light source 12 are arranged on the support base 100, and the visual unit 13, the second light source 14 and the lifting assembly 11 are arranged on the support frame 101.

[0077] Reference Figure 4 , Figure 5 As shown, in one embodiment, the testing device further comprises a packing mechanism 3 , the packing mechanism 3 comprises a material box assembly 31 , and the manipulator 2 can take and place the tested object from the material box assembly 31 .

[0078] In this specific example, the material box assembly 31 is used to store and place the test piece before and after the test.

[0079] Reference Figure 4 , Figure 5 As shown, in one embodiment, the packaging mechanism 3 includes at least three material box assemblies 31, and the at least three material box assemblies 31 are arranged around the manipulator 2, and each of the material box assemblies 31 is used to hold the test pieces with the same properties.

[0080] In this specific example, the packaging mechanism 3 includes at least three material box components 31 arranged around the manipulator 2, and each material box component 31 is used to hold the test pieces of the same attribute, so at least three material box components 31 can hold at least three types of test pieces. For example, one material box component 31 is used to place incoming materials, another material box component 31 is used to place good products, and the third material box component 31 is used to place defective products. In this way, the test pieces of different attributes can be clearly distinguished, avoiding the confusion between defective test pieces and non-defective test pieces, thereby facilitating later traceability.

[0081] Optionally, the number of material box assemblies 31 can be adjusted according to actual usage needs; for example, a total of five material box assemblies 31 are set, of which two material box assemblies 31 are used to place incoming materials, two material box assemblies 31 are used to place good products, and the other material box assembly 31 is used to place defective products.

[0082] In a specific example, the visual camera 132 takes a photo of the test piece and uploads the test result to the controller. The controller analyzes the test result in real time to determine whether the test piece is qualified. The controller controls the robot 2 to place the test piece into the corresponding material box assembly 31 according to the judgment result, thereby distinguishing good products from defective products.

[0083] Reference Figure 5 , Figure 6 As shown, in one embodiment, any of the material box components 31 includes a material box body 311 , and the material box body 311 has a plurality of spaced-apart partition plates 3110 , and the gap between two adjacent partition plates 3110 is used to place the tested object.

[0084] In this specific example, a material box body 311 can stack multiple test pieces, and the material box body 311 has a high storage capacity; and adjacent test pieces are separated by partition plates 3110 to avoid adhesion between the test pieces when the robot 2 picks up the test pieces.

[0085] Reference Figure 5 As shown, in one embodiment, any of the material box components 31 further includes two positioning members 312 , and the two positioning members 312 are respectively abutted against two sides of the material box body 311 .

[0086] In this specific example, the two positioning members 312 are respectively in contact with the two sides of the material box body 311 , thereby improving the stability of the material box body 311 and preventing the material box body 311 from shaking and shifting when the manipulator 2 takes and places the object to be tested.

[0087] Optionally, any material box assembly 31 further includes a material box bracket 313, and the material box body 311 is placed on the material box bracket 313 to better match the working height of the manipulator 2. The positioning member 312 includes a positioning plate 3121 and a clamp 3122, wherein the positioning plate 3121 is fixedly connected to the material box bracket 313, and the clamp 3122 is installed on the positioning plate 3121.

[0088] Optionally, the manipulator 2 includes a manipulator body 21, a suction gripper 22, a base 23 and a protective plate 24; wherein the manipulator body 21 is fixedly mounted on the base 23, the suction gripper 22 is connected to the manipulator body 21, and a protective plate 24 is provided on the periphery of the base 23. The manipulator is a multi-axis manipulator that can perform translational and rotational movements, and the suction gripper 22 can perform telescopic movements, and the end of the suction gripper 22 is a vacuum suction port that can suck the test piece.

[0089] Reference Figure 1As shown, in one embodiment, the detection device further includes a subpackaging mechanism 3 and an equipment box 4 , and the detection mechanism 1 , the manipulator 2 and the subpackaging mechanism 3 are all arranged in the equipment box 4 .

[0090] In this specific example, the detection mechanism 1, the manipulator 2 and the packaging mechanism 3 are all arranged in the equipment box 4, and the equipment box 4 provides protection for the detection mechanism 1, the manipulator 2 and the packaging mechanism 3. Such an arrangement makes the detection equipment more integrated and the detection equipment can be moved more conveniently.

[0091] Optionally, the equipment box 4 is mainly made of aluminum alloy, which meets the requirements of strength and light weight. Aluminum alloy has good corrosion resistance and is easy to process; in addition, aluminum alloy has good sound insulation performance, which can effectively prevent internal noise from propagating outward, and the cost of aluminum alloy is low.

[0092] Reference Figure 1 As shown, in one embodiment, the equipment box 4 includes an upper box 41 and a lower box 42, and the detection mechanism 1, the manipulator 2 and the packaging mechanism 3 are all arranged in the upper box 41; the detection equipment also includes an electric control mechanism, and the electric control mechanism is arranged in the lower box 42.

[0093] In this specific example, the detection mechanism 1, the manipulator 2 and the dispensing mechanism 3 are arranged in the upper box 41 of the equipment box 4, and the electric control mechanism is arranged in the lower box 42 of the equipment box 4. This facilitates maintenance and avoids the working noise and heat of the electric control mechanism affecting the detection process.

[0094] Specifically, refer to Figure 7 As shown, the electric control mechanism includes an electrical installation board 51, on which the main electrical components are concentrated; a cooling fan 52, for example, four cooling fans 52 can be provided, and the cooling fan 52 is equipped with a noise reduction three-in-one dustproof net, which effectively solves the problem of wind noise generated during the heat dissipation process. A main power switch 53 is also included, which adopts an embedded structure design to avoid protruding from the whole machine; and a power aviation socket 54 is also included, which is more convenient to connect to the power supply.

[0095] In one embodiment, a metamaterial layer 50 is attached to the inner wall of the lower box.

[0096] In this specific example, an artificially designed periodic structure NVH metamaterial layer is attached to the inner wall of the lower box, which can effectively solve the noise and vibration problems generated by the electronic control mechanism during operation and avoid the adverse effects of the detection equipment on its use environment.

[0097] Reference Figure 1As shown, in one embodiment, at least a portion of the side wall of the upper box is configured as a transparent area.

[0098] In this specific example, at least part of the side wall of the upper box is set as a transparent area, which facilitates visual observation of the detection process. For example, at least two side walls of the upper box are made of acrylic plates with a light transmittance of 90%. The light transmitted by this material is relatively soft and visually clear; in addition, this material is light, not easy to break, and highly safe. The color of the acrylic plate can be light dark brown, and the transparency is translucent, so as to avoid the light emitted by the visual camera 132 during the detection process to stimulate the human eye, and the first light source 12 and the second light source 14 to cause discomfort to the human eye when working for a long time.

[0099] In addition, a display screen 6 for displaying the test results is installed on the upper part of one of the side walls of the upper box, and an operation button 7 is arranged next to the display screen 6.

[0100] The above embodiments focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0101] Although some specific embodiments of the present application have been described in detail by way of example, it should be understood by those skilled in the art that the above examples are only for illustration, not for limiting the scope of the present application. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present application. The scope of the present application is defined by the appended claims.

Claims

1. A detection device, characterized in that: The detection equipment comprises: A detection mechanism (1), the detection mechanism (1) comprising a detection component and a support component (10), the detection component being arranged on the support component (10), the detection component being configured to carry a test piece and to detect the test piece; A manipulator (2) is arranged near the detection mechanism (1), and the manipulator (2) is configured to receive the object to be tested and flip the object to be tested to switch the surface to be tested of the object to be tested.

2. The detection device according to claim 1, characterized in that: The detection mechanism (1) further comprises a lifting assembly (11), wherein the lifting assembly (11) is arranged on the supporting assembly (10), and the lifting assembly (11) is configured to lift the object to be tested along a first direction; when the object to be tested is lifted along the first direction by the lifting assembly (11), the manipulator (2) receives the object to be tested and flips the object to be tested to switch the tested surface of the object to be tested.

3. The detection device according to claim 2, characterized in that: The lifting component (11) comprises a first driving member (111) and an attracting member (112); the attracting member (112) is mounted on the first driving member (111); the first driving member (111) drives the attracting member (112) to move along a first direction to lift the attracting member (112); the attracting member (112) is used to attract the tested object.

4. The detection device according to claim 1, characterized in that: The detection component comprises a first light source (12) and a visual unit (13) which are arranged at intervals, and the visual unit (13) and the first light source (12) are respectively arranged on two sides of the object to be tested; The first light source (12) is used to carry the test piece and emit detection light to the test piece, and the visual unit (13) is used to detect surface defects of the test piece.

5. The detection device according to claim 4, characterized in that: The visual unit (13) is arranged above the first light source (12).

6. The detection device according to claim 4, characterized in that: The visual unit (13) comprises a second driving member (131) and a visual camera (132); the visual camera (132) is arranged on the second driving member (131); the second driving member (131) drives the visual camera (132) to move along a first direction to focus the visual camera (132).

7. The detection device according to claim 6, characterized in that: The visual unit (13) further comprises an adapter plate (133), wherein the adapter plate (133) is mounted on the second driving member (131), and the visual camera (132) is connected to the adapter plate (133).

8. The detection device according to claim 1, characterized in that: The detection component comprises a visual unit (13) and a second light source (14), wherein the visual unit (13) and the second light source (14) are arranged on the same side of the object to be tested; the second light source (14) is used to emit detection light to the object to be tested, and the visual unit (13) is used to detect surface defects of the object to be tested.

9. The detection device according to claim 1, characterized in that: The detection component comprises a first light source (12), a visual unit (13) and a second light source (14) which are arranged at intervals, wherein the second light source (14) is arranged between the first light source (12) and the visual unit (13); the first light source (12) is used to carry the object to be tested and emit detection light to the object to be tested, the second light source (14) is used to emit detection light to the object to be tested from above the object to be tested, and the visual unit (13) is used to detect surface defects of the object to be tested.

10. The detection device according to claim 4, characterized in that: The detection component further comprises a translation mechanism (15), wherein the translation mechanism (15) is arranged on the support component (10), the first light source (12) is arranged on the translation mechanism (15), and the translation mechanism (15) is capable of driving the first light source (12) to perform translational movement along the second direction and / or the third direction.

11. The detection device according to any one of claims 1 to 9, characterized in that: The support assembly (10) comprises a support base (100) and a support frame (101) which are connected to each other, and the support frame (101) is arranged on the upper part of the support base (100).

12. The detection device according to claim 1, characterized in that: The detection device further comprises a subpackaging mechanism (3), the subpackaging mechanism (3) comprises a material box assembly (31), and the manipulator (2) is capable of taking and placing the test piece from the material box assembly (31).

13. The detection device according to claim 12, characterized in that: The packaging mechanism (3) comprises at least three material box assemblies (31), and the at least three material box assemblies (31) are arranged around the manipulator (2), and each of the material box assemblies (31) is used to hold test pieces with the same properties.

14. The detection device according to claim 12, characterized in that: Any of the material box components (31) comprises a material box body (311), wherein the material box body (311) has a plurality of partition plates (3110) arranged at intervals, and a gap between two adjacent partition plates (3110) is used for placing a test piece.

15. The detection device according to claim 14, characterized in that: Any of the material box components (31) further comprises two positioning members (312), and the two positioning members (312) are respectively abutted against two sides of the material box body (311).

16. The detection device according to claim 1, characterized in that: The detection device further comprises a subpackaging mechanism (3) and a device box (4); the detection mechanism (1), the manipulator (2) and the subpackaging mechanism (3) are all arranged in the device box (4).

17. The detection device according to claim 16, characterized in that: The equipment box (4) comprises an upper box (41) and a lower box (42), and the detection mechanism (1), the manipulator (2) and the subpackaging mechanism (3) are all arranged in the upper box (41); The detection device further comprises an electric control mechanism, and the electric control mechanism is arranged in the lower box (42).

18. The detection device according to claim 17, characterized in that: A metamaterial layer is attached to the inner wall of the lower box.

19. The detection device according to claim 17, characterized in that: At least part of the side wall of the upper box is configured as a transparent area.

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