Wafer number scanning device

Abstract

The utility model provides a wafer number scanning device which comprises a platform, a wafer box fixing seat is arranged on the platform, a driving assembly and a push rod assembly are arranged on the side portion of the platform, and a CCD camera is installed on the driving assembly through a three-axis adjusting platform. Through the driving assembly and the push rod assembly, the wafers in the wafer box can be automatically and rapidly pushed out and reset in a stable and high-precision manner, so that side surface contact in the wafer number scanning, pushing-out and reset processes is performed, product pollution can be prevented, the operation is simplified, workers can operate on a machine after simple training, and the labor cost is effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing and photolithography process, in particular to a wafer number scanning device. Background Art

[0002] Traditional scanning equipment is currently imported from abroad. The product is taken out manually using a vacuum pen, the number position is aligned with the camera, and then the scan button on the computer monitor is pressed to scan and enter the product.

[0003] However, the following problems were found in actual use:

[0004] 1. Imported scanning equipment is expensive, and the communication encryption with the scanning program is set up, which is not compatible with new institutions.

[0005] 2. The fully automatic wafer scanning mechanism replaces manual operation during the scanning process with high precision and high speed. It reduces labor costs and improves the stability and accuracy of scanning. Although the fully automatic wafer scanning mechanism replaces surface contact with the side contact wafer during the scanning process to prevent contact contamination on the front and back of the wafer, it still requires manual vacuum suction to remove the product. Manual operation is slow and easily causes contamination on the wafer surface. It can also cause the vacuum pen to fail to completely absorb the wafer, causing the wafer to fall and the product to be scrapped.

[0006] Therefore, there is an urgent need for a wafer number scanning device that can solve the above problems. Utility Model Content

[0007] The utility model aims to provide a wafer number scanning device to solve the problems existing in the above-mentioned prior art.

[0008] To achieve the above purpose, the utility model provides the following solutions:

[0009] The utility model provides a wafer number scanning device, comprising a platform, wherein a wafer box fixing seat is arranged on the platform, a driving assembly and a push rod assembly are arranged on the side of the platform, and a CCD camera is installed on the driving assembly through a three-axis adjustment platform.

[0010] Preferably, the driving assembly includes a screw rod, which is rotatably arranged on the side of the platform through a stepping motor, and the screw rod is matched with a frame, and the frame is liftably arranged on the screw rod through a limit frame, and the push rod assembly is arranged at both ends of the frame.

[0011] Preferably, the push rod assembly includes a first electric push rod and a second electric push rod, and the first electric push rod and the second electric push rod are arranged opposite to each other and are respectively located on two sides of the wafer box fixing seat.

[0012] Preferably, a wafer contact portion is provided at the end of each of the first electric push rod and the second electric push rod.

[0013] Preferably, the wafer contact portion is made of Teflon.

[0014] Compared with the prior art, the utility model has achieved the following beneficial technical effects:

[0015] The utility model provides a wafer number scanning device, comprising a platform, a wafer box fixing seat is arranged on the platform, a driving assembly and a push rod assembly are arranged on the side of the platform, a CCD camera is installed on the driving assembly through a three-axis adjustment platform; the driving assembly and the push rod assembly can automatically and quickly push out and reset the wafer in the wafer box stably and with high precision, so as to scan the wafer number; the pushing out and resetting process is contacted on the side, which can prevent product contamination and simplify the operation; employees can operate the machine after simple training, which effectively reduces the labor cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0017] Figure 1 A side view of a wafer number scanning device provided by the utility model;

[0018] Figure 2 A top view of a wafer number scanning device provided by the utility model;

[0019] Figure 3 A schematic diagram of a wafer number scanning device provided by the utility model in a state of being pushed out;

[0020] Figure 4 The utility model is a schematic diagram of a wafer number scanning device in a reset state. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] The utility model aims to provide a wafer number scanning device to solve the problems existing in the prior art.

[0023] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0024] Embodiment 1:

[0025] This embodiment provides a wafer number scanning device, such as Figure 1 and 2 As shown, it includes a platform 1, on which is a wafer box fixing seat 2, which can fix 4-, 5-, 6-, 8-, and 12-inch wafer boxes. A driving assembly 3 and a push rod assembly 4 are provided on the side of the platform 1, and a CCD camera 5 is installed on the driving assembly 3 through a three-axis adjustment platform 6.

[0026] Specifically, the driving assembly 3 includes a screw rod 31, which is rotatably arranged on the side of the platform 1 through a stepper motor 32. The screw rod 31 is equipped with a frame 33, and the frame 33 is liftably arranged on the screw rod 32 through a limit frame 34. The push rod assembly 4 is arranged at both ends of the frame.

[0027] Furthermore, the push rod assembly 4 includes a first electric push rod 41 and a second electric push rod 42 . The first electric push rod 41 and the second electric push rod 42 are arranged opposite to each other and are respectively located on two sides of the wafer box fixing seat 2 .

[0028] Furthermore, a wafer contact portion 43 is provided at the end of each of the first electric push rod 41 and the second electric push rod 42 .

[0029] Furthermore, the wafer contact portion 43 is made of Teflon material to avoid damage to the wafer.

[0030] The utility model provides a wafer number scanning device, such as Figure 3 and 4 As shown, the usage is:

[0031] 1. The operator puts the wafer box in;

[0032] 2. Turn on the power switch of the device, and the device will automatically reset after powering on;

[0033] 3. Press the start button, the first electric push rod 41 is pushed forward, the wafer push position is the engraving position directly below the CCD camera 5, then the first electric push rod 41 is reset to the initial position, and an electrical signal is given, the CCD camera 5 starts to take pictures after receiving the electrical signal, and the recognition system enters the data after recognition (because the CCD camera 5 and the rack 33 are on the same platform, and the interval between the wafers in the wafer box is also fixed, so the focal length is the same each time the rack 33 is raised, so there is no need to adjust the focal length during the scanning process);

[0034] 4. After the input is completed, the system gives an electrical signal, and the second electric push rod 42 pushes the scanned wafer into the wafer box, and then resets to the initial position;

[0035] 5. After the second electric push rod 42 is reset, the system gives an electrical signal, and the stepper motor 32 drives the lead screw 31 to rotate, so that the frame 33 steps up to the second wafer position, and gives an in-position signal. The system repeats the scanning action of the first wafer, and repeats this process until all wafers are scanned.

[0036] The utility model uses specific examples to illustrate the principle and implementation of the utility model. The above examples are only used to help understand the method and core idea of ​​the utility model. At the same time, for those skilled in the art, according to the idea of ​​the utility model, there will be changes in the specific implementation and application scope. In summary, the content of this specification should not be understood as limiting the utility model.

Claims

1. A wafer number scanning device, characterized in that: The invention comprises a platform, on which a wafer box fixing seat is arranged, a driving assembly and a push rod assembly are arranged on the side of the platform, and a CCD camera is installed on the driving assembly through a three-axis adjustment platform.

2. The wafer number scanning device according to claim 1, characterized in that: The driving assembly includes a screw rod, which is rotatably arranged on the side of the platform through a stepping motor, and a frame is matched on the screw rod. The frame is liftably arranged on the screw rod through a limiting frame, and the push rod assembly is arranged at both ends of the frame.

3. The wafer number scanning device according to claim 2, characterized in that: The push rod assembly includes a first electric push rod and a second electric push rod, wherein the first electric push rod and the second electric push rod are arranged opposite to each other and are respectively located at two sides of the wafer box fixing seat.

4. The wafer number scanning device according to claim 3, characterized in that: The ends of the first electric push rod and the second electric push rod are both provided with wafer contact parts.

5. The wafer number scanning device according to claim 4, characterized in that: The wafer contact portion is made of Teflon material.

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