Quartz boat turnover mechanism

By designing a quartz boat flip mechanism containing a rotating mechanism, the problem that existing equipment cannot perform horizontal rotation is solved, and more efficient silicon wafer purge and insertion operation is achieved, improving the insertion efficiency and accuracy.

CN222734960UActive Publication Date: 2025-04-08YILI HONGKUN PHOTOVOLTAIC NEW MATERIAL TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202421190238.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-29
Publication Date
2025-04-08
Estimated Expiration
2034-05-29

AI Technical Summary

Technical Problem

The existing quartz boat insertion equipment cannot rotate the quartz boat horizontally, resulting in incomplete purge after insertion of the silicon wafer, and the robot needs to adjust the horizontal position, which affects the accuracy and efficiency of the insertion.

Method used

A quartz boat flip mechanism is designed, including a flip mechanism base, support column, support table, horizontal moving slide table and rotary mechanism. The driving gear and driven gear are driven by a rotating power mechanism (stepper motor) to achieve horizontal rotation of the quartz boat by 180°.

Benefits of technology

The horizontal rotation of the quartz boat is achieved, the efficiency and thoroughness of silicon wafer purge is improved, the waiting time during the robot picking and placing the insertion film is reduced, the operation efficiency of the insertion film is improved, and the limit fixation is adapted to quartz boats of different sizes.

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Abstract

The utility model relates to a quartz boat turnover mechanism, which comprises a turnover mechanism base, a supporting column rotatably mounted on the turnover mechanism, a supporting table fixedly mounted on the top surface of the supporting column, a horizontal moving sliding table mounted on the top surface of the supporting table, and a quartz boat limiting mechanism arranged on the top surface of the horizontal moving sliding table, a telescopic mechanism and a rotating mechanism are further arranged, the rotating mechanism comprises a rotating power mechanism, a driving gear is fixedly installed at the power output end of the rotating power mechanism, and a driven gear is fixedly arranged on the peripheral face of the middle of the supporting column. The quartz boat turnover mechanism can horizontally turn over the quartz boat, on one hand, the quartz boat can be purged from two directions when the quartz boat is purged by factory wind, and on the other hand, when a silicon wafer is inserted into the quartz boat through a manipulator, the rotating mechanism can drive the quartz boat to horizontally rotate by 180 degrees; therefore, the right non-sheet-inserting area of the quartz boat is located right below the previous station of the manipulator, and the sheet inserting operation efficiency is improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of quartz boat inserts, in particular to a quartz boat turning mechanism. Background Art

[0002] After inserting the silicon wafer into the quartz boat, the current silicon wafer inserting equipment generally needs to perform a purge operation on the quartz boat with the inserted wafer. This is because some particles and dust may be attached to the surface of the silicon wafer and the quartz boat after the wafer is inserted, so the attached particles and dust can be blown off by one or more purges. However, the silicon wafer inserting machine can generally only transport the quartz boat forward and backward or left and right, but cannot rotate the quartz boat in the horizontal direction, so that the silicon wafer can only be purged from the front end to the rear end, but cannot be purged in the other direction, which easily causes incomplete purging.

[0003] On the other hand, when inserting wafers into the quartz boat, generally, after inserting wafers into the left area of ​​the quartz boat, it is necessary to adjust the horizontal position of the manipulator used for inserting silicon wafers, so as to insert wafers into the right area of ​​the quartz boat. If the horizontal position of the manipulator is not adjusted, but the quartz boat is horizontally rotated 180°, the horizontal position adjustment of the manipulator is not required, and the accuracy can be improved.

[0004] Therefore, we improved the existing equipment to meet the operational requirements of efficient quartz boat insertion. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a quartz boat turning mechanism which can horizontally rotate the quartz boat and improve the efficiency of inserting slices, in view of the deficiencies of the prior art.

[0006] The technical problem to be solved by the utility model is achieved through the following technical solutions: a quartz boat flipping mechanism, which includes a flipping mechanism base, a support column is rotatably installed on the top surface of the flipping mechanism base, a support platform is fixedly installed on the top surface of the support column, a horizontal movable slide for carrying the quartz boat is slidably installed on the top surface of the support platform, a quartz boat limiting mechanism for fixing the quartz boat is arranged on the top surface of the horizontal movable slide, the quartz boat limiting mechanism is arranged in two groups in the horizontal and longitudinal directions, so as to limit the length direction and width direction of the quartz boat, a telescopic mechanism for horizontally moving the horizontal movable slide is also arranged between the support platform and the horizontal movable slide, so as to adjust the horizontal position of the quartz boat, one end of the telescopic mechanism is fixed on the side wall of the support platform, and the other end is fixed on the side wall of the horizontal movable slide, the flipping mechanism base is also provided with a rotating mechanism, the rotating mechanism includes a rotating power mechanism installed on the flipping mechanism base, a driving gear is fixedly installed on the power output end of the rotating power mechanism, and a driven gear meshing with the driving gear is fixedly provided on the outer peripheral surface of the middle part of the support column.

[0007] The technical problem to be solved by the utility model can also be achieved through the following technical solutions: the above-mentioned quartz boat flipping mechanism has a slide rail fixed on the top surface of the support platform, and a slideway movable along the slide rail is provided on the bottom surface of the horizontal movable slide.

[0008] The technical problem to be solved by the utility model can also be achieved through the following technical solutions: a quartz boat flipping mechanism described above, wherein the quartz boat limiting mechanism comprises a fixed limiting block and a movable limiting block, wherein the fixed limiting block and the movable limiting block are spaced apart and arranged on the two edges of the top surface of the horizontal moving slide, wherein the fixed limiting block is fixedly connected to the top surface of the horizontal moving slide, a bolt hole is provided on the edge of the top surface of the horizontal moving slide, and a waist-shaped groove is provided on the movable limiting block, wherein the movable limiting block is fixed to the edge of the top surface of the horizontal moving slide by a bolt fastener which passes through the waist-shaped groove and the bolt hole in sequence.

[0009] The technical problem to be solved by the utility model can also be achieved through the following technical scheme: in the above-mentioned quartz boat flipping mechanism, each movable limit block is provided with two mutually parallel waist-shaped grooves at intervals, and a bolt hole is provided on the horizontal movable slide below each waist-shaped groove.

[0010] The technical problem to be solved by the utility model can also be achieved through the following technical scheme. The above-mentioned quartz boat flipping mechanism has a mounting groove on the middle top surface of the flipping mechanism base, and a rotating bearing is fixedly installed in the mounting groove. The bottom outer peripheral surface of the support column is fixed on the inner ring of the rotating bearing.

[0011] The technical problem to be solved by the utility model can also be achieved through the following technical solutions: in the above-mentioned quartz boat turning mechanism, the telescopic mechanism is an electric telescopic rod.

[0012] The technical problem to be solved by the utility model can also be achieved through the following technical solutions: the above-mentioned quartz boat flipping mechanism has a rotating power mechanism installation groove on the top edge of the flipping mechanism base, and the rotating power mechanism is installed in the rotating power mechanism installation groove.

[0013] The technical problem to be solved by the utility model can also be achieved through the following technical solutions: in the above-mentioned quartz boat turning mechanism, the rotating power mechanism is a stepping motor.

[0014] The technical problem to be solved by the utility model can also be achieved through the following technical solutions: the above-mentioned quartz boat turning mechanism has an equipment compartment in the middle of the turning mechanism base, and a push-pull drawer is installed on the edge of the equipment compartment.

[0015] Compared with the prior art, the beneficial technical effects of the utility model are:

[0016] (1) The quartz boat flipping mechanism can flip the quartz boat horizontally, that is, rotate it horizontally 180°. On the one hand, when the quartz boat is blown by the factory wind, it can be blown from two directions, that is, from the front to the back and from the back to the front, so that the blowing operation is more complete. In addition, when the silicon wafer is inserted into the quartz boat by the robot, when the robot completes the wafer insertion operation on the left area of ​​the quartz boat, when the robot returns to take the silicon wafer, the rotating mechanism can drive the quartz boat to rotate horizontally 180°, so that the uninserted area on the right side of the quartz boat is located directly below the previous station of the robot. When the quartz boat completes the horizontal rotation, the robot also completes the silicon wafer removal process. At this time, the robot only needs to go down to insert the silicon wafer to complete the quartz boat insertion operation. This process reduces the waiting time during the robot's insertion and insertion, and improves the efficiency of the insertion operation;

[0017] (2) A quartz boat limiting mechanism is fixedly provided on the top surface of the horizontal movable slide, and the quartz boat limiting mechanism limits the front, rear, left and right directions of the quartz boat. In addition, a waist-shaped groove is provided on the movable limiting block of the quartz boat limiting mechanism, which can be adjusted automatically according to the size of the quartz boat. The operability is strong, and quartz boats of different widths can be limited and fixed, so as to coordinate the silicon wafer insertion operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the main structure of the utility model before use;

[0019] Figure 2 This is a schematic diagram of the main structure of the utility model when in use;

[0020] Figure 3 It is a schematic diagram of the top view of the structure of the horizontal movable slide of the utility model.

[0021] In the figure, 1. flip mechanism base; 2. support column; 3. installation groove; 4. rotating bearing; 5. support platform; 6. horizontal moving slide; 7. slide rail; 8. slideway; 9. quartz boat; 10. fixed limit block; 11. movable limit block; 12. bolt hole; 13. waist-shaped groove; 14. telescopic mechanism; 15. rotating power mechanism; 16. rotating power mechanism installation groove; 17. driving gear; 18. driven gear; 19. equipment warehouse. DETAILED DESCRIPTION

[0022] The specific technical solutions of the present invention are further described below with reference to the accompanying drawings, so as to facilitate further understanding of the present invention by those skilled in the art, and do not constitute any limitation to the rights thereof.

[0023] Example 1, reference Figure 1-3A quartz boat flipping mechanism, the flipping mechanism comprises a flipping mechanism base 1, the flipping mechanism base 1 is formed as a roughly square base, a support column 2 is rotatably installed on the top surface of the flipping mechanism base 1, the support column 2 is formed as a roughly cylindrical structure, a mounting groove 3 is opened on the middle top surface of the flipping mechanism base 1, the mounting groove 3 is formed as a roughly circular groove body structure, a rotating bearing 4 is fixedly installed in the mounting groove 3, the bottom outer peripheral surface of the support column 2 is fixed on the inner ring of the rotating bearing 4, a supporting platform 5 is fixedly installed on the top surface of the support column 2, the supporting platform 5 is formed as a roughly square table surface, and a horizontal movable slide 6 for carrying the quartz boat is slidably installed on the top surface of the support platform 5, and the horizontal movable slide 6 is formed as a roughly square table surface;

[0024] In order to ensure that the horizontal movable slide 6 can slide on the top surface of the support platform 5, a slide rail 7 is fixed on the top surface of the support platform 5, and a slideway 8 that can move along the slide rail 7 is opened on the bottom surface of the horizontal movable slide 6, that is, the horizontal movable slide 6 is slidably arranged on the support platform 5 through the slide rail 7 and the slideway 8;

[0025] In order to limit the quartz boat on the horizontal movable slide 6, a quartz boat limiting mechanism for fixing the quartz boat 9 is provided on the top surface of the horizontal movable slide 6. The quartz boat limiting mechanism has two groups arranged horizontally and vertically to limit the length direction and width direction of the quartz boat 9.

[0026] The quartz boat limiting mechanism includes a fixed limiting block 10 and a movable limiting block 11, which are arranged at intervals on the two edges of the top surface of the horizontal moving slide 6, and the fixed limiting block 10 is fixedly connected to the top surface of the horizontal moving slide 6. The fixed limiting block 10 is formed into a roughly square block structure, and a bolt hole 12 is opened on the edge of the top surface of the horizontal moving slide 6, and a waist groove 13 is opened on the movable limiting block 11. The movable limiting block 11 is fixed to the edge of the top surface of the horizontal moving slide 6 by a bolt fastener that passes through the waist groove 13 and the bolt hole 12 in sequence.

[0027] In order to ensure that quartz boats 9 of different sizes can be limited on the horizontal moving slide 6, two parallel waist grooves 13 are arranged on each movable limit block 11, and a bolt hole 12 is arranged on the horizontal moving slide 6 below each waist groove 13;

[0028] It should be noted that two parallel waist grooves 13 are provided on each horizontal movable slide 6, and the design purpose is also to limit and guide the moving direction of the movable limit block 11, so that the movable limit block 11 can only move along a straight line motion trajectory;

[0029] A telescopic mechanism 14 is also provided between the support platform 5 and the horizontal movable slide 6 to horizontally move the horizontal movable slide 6 so as to adjust the horizontal position of the quartz boat 9. One end of the telescopic mechanism 14 is fixed on the side wall of the support platform 5, and the other end is fixed on the side wall of the horizontal movable slide 6. The telescopic mechanism 14 is an electric telescopic rod, and its model and specification can be selected according to the use requirements. A rotating mechanism is also provided on the flip mechanism base 1. The rotating mechanism includes a rotating power mechanism 15 installed on the flip mechanism base 1. The rotating power mechanism 15 is a stepping motor. A rotating power mechanism mounting groove 16 is provided on the top surface edge of the flip mechanism base 1. The rotating power mechanism mounting groove 16 is formed into a roughly square groove body. Its design purpose is only to place and install the rotating power mechanism 15. The rotating power mechanism 15 is installed in the rotating power mechanism mounting groove 16. A driving gear 17 is fixedly installed on the power output end of the rotating power mechanism 15, and a driven gear 18 meshing with the driving gear 17 is fixedly provided on the outer peripheral surface of the middle part of the support column 2.

[0030] In order to increase the storage space of the quartz boat turning mechanism, an equipment bin 19 is opened in the middle of the turning mechanism base 1 . The equipment bin 19 is formed into a roughly square bin body, and a push-pull drawer is installed on the edge of the equipment bin 19 .

[0031] When the quartz boat flipping mechanism is used, the quartz boat 9 is first placed on the top surface of the horizontal movable slide 6, and the quartz boat limiting mechanism is adjusted according to the size of the quartz boat 9, so that the quartz boat 9 can be limited by the fixed limiting block 10 and the movable limiting block 11. When the horizontal position of the quartz boat 9 needs to be adjusted, the horizontal movable slide 6 can be moved by the telescopic mechanism 14. After the quartz boat 9 is installed, the quartz boat inserting operation can be carried out. When the manipulator holding the silicon wafer externally places the silicon wafer in the right area of ​​the quartz boat 9, when the manipulator returns to its position to take the remaining silicon wafer for inserting, the stepper motor drives the support table 5 to rotate 180°, so that the left area of ​​the quartz boat 9, that is, the area where the inserting operation is not performed, is located directly below the last inserting station of the manipulator. When the quartz boat 9 completes the horizontal rotation, the manipulator also completes the silicon wafer taking process. At this time, the manipulator only needs to go down to insert the silicon wafer to complete the quartz boat 9 inserting operation. This process reduces the waiting time during the manipulator taking and placing the inserting wafer, and improves the inserting efficiency.

Claims

1. A quartz boat turning mechanism, characterized in that: The flipping mechanism comprises a flipping mechanism base, a support column is rotatably mounted on the top surface of the flipping mechanism base, a support platform is fixedly mounted on the top surface of the support column, a horizontal movable slide for carrying a quartz boat is slidably mounted on the top surface of the support platform, a quartz boat limiting mechanism for fixing the quartz boat is arranged on the top surface of the horizontal movable slide, the quartz boat limiting mechanism is arranged in two groups in the transverse and longitudinal directions to limit the length direction and width direction of the quartz boat, a telescopic mechanism for horizontally moving the horizontal movable slide to adjust the horizontal position of the quartz boat is also arranged between the support platform and the horizontal movable slide, one end of the telescopic mechanism is fixed on the side wall of the support platform, and the other end is fixed on the side wall of the horizontal movable slide, a rotating mechanism is also arranged on the flipping mechanism base, the rotating mechanism comprises a rotating power mechanism installed on the flipping mechanism base, a driving gear is fixedly mounted on the power output end of the rotating power mechanism, and a driven gear meshing with the driving gear is fixedly mounted on the middle outer peripheral surface of the support column.

2. A quartz boat turning mechanism according to claim 1, characterized in that: A slide rail is fixedly arranged on the top surface of the support platform, and a slideway which can move along the slide rail is arranged on the bottom surface of the horizontal movable slide platform.

3. The quartz boat turning mechanism according to claim 1, characterized in that: The quartz boat limiting mechanism includes a fixed limiting block and a movable limiting block, and the fixed limiting block and the movable limiting block are arranged at intervals on the two edges of the top surface of the horizontal moving slide. The fixed limiting block is fixedly connected to the top surface of the horizontal moving slide, a bolt hole is opened on the edge of the top surface of the horizontal moving slide, and a waist-shaped groove is opened on the movable limiting block. The movable limiting block is fixed to the edge of the top surface of the horizontal moving slide by a bolt fastener that passes through the waist-shaped groove and the bolt hole in sequence.

4. A quartz boat turning mechanism according to claim 3, characterized in that: Each of the movable limiting blocks is provided with two waist-shaped grooves which are parallel to each other at intervals, and a bolt hole is provided on the horizontal movable slide below each waist-shaped groove.

5. The quartz boat turning mechanism according to claim 1, characterized in that: A mounting groove is provided on the middle top surface of the turning mechanism base, a rotating bearing is fixedly installed in the mounting groove, and the bottom outer peripheral surface of the supporting column is fixed on the inner ring of the rotating bearing.

6. The quartz boat turning mechanism according to claim 1, characterized in that: The telescopic mechanism is an electric telescopic rod.

7. The quartz boat turning mechanism according to claim 1, characterized in that: A rotating power mechanism installation groove is provided on the top surface edge of the flip mechanism base, and the rotating power mechanism is installed in the rotating power mechanism installation groove.

8. The quartz boat turning mechanism according to claim 1, characterized in that: The rotating power mechanism is a stepping motor.

9. The quartz boat turning mechanism according to claim 1, characterized in that: An equipment compartment is provided in the middle of the turning mechanism base, and a push-pull drawer is installed on the edge of the equipment compartment.