Conveyor belt type magnetorheological polishing machine

Abstract

The utility model discloses a conveyor belt type magneto-rheological polishing machine, which relates to the technical field of polishing machines and comprises a machine frame, and a polishing platform and a magneto-rheological polishing liquid spraying and conveying device are arranged on the horizontal portion of the machine frame. The polishing platform is in contact connection with the lower surface of an ascending belt of a conveying belt in the magneto-rheological polishing liquid spraying and conveying device, a polishing device is arranged on the vertical portion of the rack, and a workpiece adsorption disc on the polishing device corresponds to the top face of the conveying belt in the magneto-rheological polishing liquid spraying and conveying device. The conveyor belt type magneto-rheological polishing machine adopting the structure is high in polishing efficiency and small in damage to the lower surface of an optical element.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing machines, in particular to a conveyor belt type magnetorheological polishing machine. Background Art

[0002] With the development of modern science and technology, the requirements for optical components used in various optical systems are getting higher and higher. In the fields of aviation, aerospace and defense industries, various instruments and equipment have an increasing demand for optical materials such as optical glass and glass ceramics. The requirements for the surface quality and precision of optical materials are also increasing, and the demand is also increasing. In important economic industries such as nuclear energy, aerospace, etc., optical parts with ultra-smooth surfaces are also widely used.

[0003] Generally speaking, the final production of optical components requires high surface accuracy, good surface quality and minimal subsurface damage. High surface accuracy ensures good image quality, smooth surfaces reduce scattering, and low subsurface damage can avoid damage in high-energy applications. Therefore, the performance of optical components depends largely on the quality of the manufacturing process. Therefore, a variety of processing methods have been developed to obtain high-precision processing surfaces, among which the typical processing methods are plastic grinding, chemical polishing, floating polishing, elastic discharge processing, particle beam polishing, jet polishing, etc. These processing methods either have too low polishing efficiency, or produce large subsurface damage, or polishing is difficult to control. Therefore, it is necessary to provide a polishing equipment with high polishing efficiency and low subsurface damage. Utility Model Content

[0004] The utility model aims to provide a conveyor belt type magnetorheological polishing machine with high polishing efficiency and little damage to the subsurface of optical elements.

[0005] To achieve the above-mentioned purpose, the utility model provides a conveyor belt type magnetorheological polishing machine, comprising a frame, a polishing platform and a magnetorheological polishing liquid spraying and conveying device are provided on the horizontal part of the frame, the polishing platform is in contact and connected with the lower surface of the upward belt of the conveyor belt in the magnetorheological polishing liquid spraying and conveying device, a polishing device is provided on the vertical part of the frame, and a workpiece adsorption plate on the polishing device is arranged corresponding to the top surface of the conveyor belt in the magnetorheological polishing liquid spraying and conveying device.

[0006] Preferably, the magnetorheological polishing liquid spraying and conveying device includes two supporting frames arranged opposite to each other, wherein an active roller is provided on one of the supporting frames, and a driven roller is provided on the other supporting frame, the active roller is connected to the first rotation driving device, the conveyor belt is sleeved between the active roller and the driven roller, one end of the conveyor belt is provided with an injection plate located above its upward belt, and the other end of the conveyor belt is provided with a liquid pool located below its downward belt, the liquid pool is connected to the injection plate through a conveying pipe, and a conveying pump is provided on the conveying pipe.

[0007] Preferably, nozzles evenly distributed in the entire width direction of the conveyor belt are provided on the side surface of the injection plate, and electromagnetic control valves are provided on the nozzles.

[0008] Preferably, the support frame is provided with a scraper located above the liquid pool, and the scraper is in contact and connected with the downward belt of the conveyor belt.

[0009] Preferably, a partition plate is provided in the middle of the liquid pool, one side of the partition plate is a recovery chamber, the recovery chamber is located below the scraper, and the other side of the partition plate is a new liquid chamber, the new liquid chamber is connected to the liquid inlet end of the delivery pipe, and magnetorheological polishing liquid is provided in the new liquid chamber.

[0010] Preferably, the polishing device includes a horizontal guide assembly, a lifting guide assembly and a polishing assembly, the horizontal guide assembly includes a second rotary drive motor fixed to the frame, the second rotary drive motor is connected to a horizontally arranged first ball screw, the nut seat of the first ball screw is connected to a mounting plate in the lifting guide assembly, the lifting guide assembly includes the mounting plate, a third rotary drive motor is fixedly connected to the mounting plate, the third rotary drive motor is connected to a vertically arranged second ball screw, the nut seat of the second ball screw is connected to a lifting cylinder in the polishing assembly, a rotating shaft is provided in the lifting cylinder, the top end of the rotating shaft is connected to a fourth rotary power device fixed to the lifting cylinder, the bottom end of the rotating shaft passes through the lifting cylinder and is connected to a three-clamp chuck, the three-clamp chuck is connected to a workpiece adsorption disk, a permanent magnet is provided in the workpiece adsorption disk, and a workpiece adsorption groove is provided on the bottom surface of the workpiece adsorption disk.

[0011] Preferably, a vacuum hole is provided at the bottom of the workpiece adsorption groove, and the vacuum hole is connected to a vacuum suction pump through a vacuum pipe.

[0012] Preferably, the delivery pump is a peristaltic pump, and the first rotation drive device, the second rotation drive device, the third rotation drive device and the fourth rotation drive device are all stepping motors.

[0013] Preferably, the delivery pump, the electromagnetic control valve, the first rotation drive device, the second rotation drive device, the third rotation drive device and the fourth rotation drive device are all connected to a remote controller.

[0014] Therefore, the utility model adopts the conveyor belt type magnetorheological polishing machine of the above structure, which has the following beneficial effects:

[0015] (1) The utility model can process hard and brittle workpieces, such as wafers. Compared with traditional grinding, the surface roughness of the surface processed by magnetorheological polishing is extremely high, and it will not damage the surface of the workpiece, and will not change the surface shape accuracy of the workpiece. The magnetic field source in the polishing wheel is provided by a permanent magnet, which can generate a larger magnetic field strength. The magnetic field strength is related to the shear stress of the polishing liquid. The larger the magnetic field strength, the greater the shear stress of the polishing liquid, thereby effectively increasing the removal efficiency of the workpiece surface material;

[0016] (2) The utility model uses a partition plate to divide the liquid pool into a recovery chamber and a new liquid chamber. The used magnetorheological polishing liquid can be recovered through the recovery chamber for subsequent treatment and reuse, and clean magnetorheological polishing liquid is provided for the polishing process through the new liquid chamber, thereby preventing the workpiece surface material removed during the processing from scratching the workpiece surface again;

[0017] (3) The utility model is based on magnetorheological polishing technology. The magnetorheological polishing fluid prepared by adding polishing abrasive particles into the magnetorheological fluid has a definite removal function, and the material is removed evenly without damaging the surface of the workpiece.

[0018] The technical solution of the utility model is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of an embodiment of the utility model conveyor belt type magnetorheological polishing machine;

[0020] Figure 2 It is a front view of a far embodiment of the conveyor belt type magnetorheological polishing machine of the utility model;

[0021] Figure 3 It is a cross-sectional view of the conveyor belt type magnetorheological polishing machine of the utility model.

[0022] Reference numerals

[0023] 1. Frame; 2. Polishing platform; 3. Active roller; 4. Driven roller; 5. First rotary drive device; 6. Conveyor belt; 7. Injection plate; 8. Liquid pool; 81. Partition plate; 82. Recovery chamber; 83. New liquid chamber; 9. Conveying pipe; 10. Conveying pump; 11. Second rotary drive motor; 12. First ball screw; 13. Mounting plate; 14. Third rotary drive motor; 15. Second ball screw; 16. Lifting cylinder; 17. Rotating shaft; 18. Fourth rotary power device; 19. Three-clamp chuck; 20. Workpiece suction plate. DETAILED DESCRIPTION

[0024] The technical solution of the utility model is further described below through the accompanying drawings and embodiments.

[0025] Example

[0026] like Figure 1-3 As shown, a conveyor-type magnetorheological polishing machine includes a frame 1, a polishing platform 2 and a magnetorheological polishing liquid spraying and conveying device are provided on the horizontal part of the frame 1, the polishing platform 2 is in contact and connected with the lower surface of the upward belt of the conveyor belt 6 in the magnetorheological polishing liquid spraying and conveying device, a polishing device is provided on the vertical part of the frame 1, and a workpiece adsorption plate 20 on the polishing device is arranged corresponding to the top surface of the conveyor belt 6 in the magnetorheological polishing liquid spraying and conveying device.

[0027] The magnetorheological polishing liquid spraying and conveying device comprises two supporting frames arranged opposite to each other, wherein one supporting frame is provided with an active roller 3, and the other supporting frame is provided with a driven roller 4, the active roller 3 is connected to a first rotating driving device 5, and a conveyor belt 6 is sleeved between the active roller 3 and the driven roller 4, and the first rotating driving device 5 can make the conveyor belt 6 circulate between the active roller 3 and the driven roller 4. One end of the conveyor belt 6 is provided with an injection plate 7 located above its upward belt, and the side of the injection plate 7 is provided with nozzles evenly distributed in the entire width direction of the conveyor belt 6, and an electromagnetic control valve is provided on the nozzle. The other end of the conveyor belt 6 is provided with a liquid pool 8 located below its downward belt, and the liquid pool 8 is connected to the injection plate 7 through a conveying pipe 9, and a conveying pump 10 is provided on the conveying pipe 9, and the conveying pump 10 is a peristaltic pump. The conveying pump 10 can convey the magnetorheological polishing liquid in the liquid pool 8 to the injection plate 7, and then spray it on the surface of the conveyor belt 6 through the nozzle.

[0028] The support frame is provided with a scraper located above the liquid pool 8, and the scraper is in contact with the downward belt of the conveyor belt 6. The scraper can scrape off the magnetorheological polishing liquid on the conveyor belt 6 and allow the magnetorheological polishing liquid to flow into the recovery chamber 82 of the liquid pool 8. A partition plate 81 is provided in the middle of the liquid pool 8, and one side of the partition plate 81 is a recovery chamber 82, which is located below the scraper, and the other side of the partition plate 81 is a new liquid chamber 83, which is connected to the liquid inlet end of the conveying pipe, and the new liquid chamber 83 is provided with magnetorheological polishing liquid.

[0029] The polishing device includes a horizontal guide assembly, a lifting guide assembly and a polishing assembly. The horizontal guide assembly includes a second rotary drive motor 11 fixed on the frame 1. The second rotary drive motor 11 is connected to a horizontally arranged first ball screw 12, the nut seat of the first ball screw 12 is connected to a mounting plate 13 in the lifting guide assembly, and the second rotary drive motor 11 can drive the mounting plate 13 to move horizontally along the length direction of the first ball screw 12. The lifting guide assembly includes a mounting plate 13, a third rotary drive motor 14 is fixedly connected to the mounting plate 13, the third rotary drive motor 14 is connected to a vertically arranged second ball screw 15, the nut seat of the second ball screw 15 is connected to a lifting cylinder 16 in the polishing assembly, and the third rotary drive motor 14 can drive the lifting cylinder 16 to perform lifting and lowering motion along the length direction of the second ball screw 15. A rotating shaft 17 is arranged in the lifting cylinder 16, the top end of the rotating shaft 17 is connected to a fourth rotary power device 18 fixed on the lifting cylinder 16, and the bottom end of the rotating shaft 17 passes through the lifting cylinder 16 and is connected to a three-clamp chuck 19.

[0030] The three-clamp chuck 19 is connected to the workpiece adsorption disk 20, and the fourth rotary power device 18 can drive the three-clamp chuck 19 to rotate. A permanent magnet is arranged in the workpiece adsorption disk 20, and the permanent magnet can generate a magnetic field, so that the magnetorheological polishing fluid changes from a Newtonian fluid to a Bingham fluid. A workpiece adsorption groove is arranged on the bottom surface of the workpiece adsorption disk 20, and a vacuum hole is arranged at the bottom of the groove of the workpiece adsorption groove, and the vacuum hole is connected to a vacuum suction pump through a vacuum suction pipe. The vacuum suction pump allows the workpiece to be stably installed in the workpiece adsorption groove, so that the workpiece can be polished and polished by the magnetorheological polishing fluid during the movement of the workpiece adsorption disk 20.

[0031] The first rotary drive device 5, the second rotary drive device, the third rotary drive device and the fourth rotary drive device are all stepper motors. The delivery pump 10, the electromagnetic control valve, the first rotary drive device 5, the second rotary drive device, the third rotary drive device and the fourth rotary drive device are all connected to a remote controller.

[0032] During use, after the conveying pump 10 is turned on, the remote controller determines the opening of the electromagnetic control valves on the corresponding number of nozzles according to the size of the workpiece, so that the magnetorheological polishing liquid in the new liquid cavity 83 of the liquid pool 8 is evenly sprayed on the surface of the conveyor belt 6, and the first rotary drive device 5 is started to move the magnetorheological polishing liquid to the top of the polishing platform 2, and then the second rotary drive device is started to move the workpiece adsorption plate 20 horizontally to the top of the magnetorheological polishing liquid, the third rotary drive device is started to move the workpiece adsorption plate 20 downward and contact the magnetorheological polishing liquid that has become a Bingham fluid, and the fourth rotary drive device is started to rotate the workpiece adsorption plate 20 to achieve the polishing of the workpiece.

[0033] Therefore, the utility model adopts the conveyor-belt magnetorheological polishing machine of the above structure, which has high polishing efficiency and little damage to the subsurface of the optical element.

[0034] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that they can still modify or replace the technical solution of the utility model with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the utility model.

Claims

1. A conveyor belt type magnetorheological polishing machine, characterized in that: It includes a frame, a polishing platform and a magnetorheological polishing liquid spraying and conveying device are provided on the horizontal part of the frame, the polishing platform is in contact and connected with the lower surface of the upward belt of the conveyor belt in the magnetorheological polishing liquid spraying and conveying device, and a polishing device is provided on the vertical part of the frame, and the workpiece adsorption plate on the polishing device is arranged corresponding to the top surface of the conveyor belt in the magnetorheological polishing liquid spraying and conveying device.

2. The conveyor belt type magnetorheological polishing machine according to claim 1, characterized in that: The magnetorheological polishing liquid spraying and conveying device includes two supporting frames arranged opposite to each other, one of which is provided with an active roller, and the other is provided with a driven roller, the active roller is connected to the first rotation driving device, the conveyor belt is sleeved between the active roller and the driven roller, one end of the conveyor belt is provided with an injection plate located above its upward belt, and the other end of the conveyor belt is provided with a liquid pool located below its downward belt, the liquid pool is connected to the injection plate through a conveying pipe, and the conveying pipe is provided with a conveying pump.

3. The conveyor belt type magnetorheological polishing machine according to claim 2, characterized in that: The side surface of the injection plate is provided with nozzles evenly distributed in the entire width direction of the conveyor belt, and the nozzles are provided with electromagnetic control valves.

4. The conveyor belt type magnetorheological polishing machine according to claim 3, characterized in that: The support frame is provided with a scraper located above the liquid pool, and the scraper is in contact with and connected to the downward belt of the conveyor belt.

5. The conveyor belt type magnetorheological polishing machine according to claim 4, characterized in that: A partition plate is provided in the middle of the liquid pool, one side of the partition plate is a recovery chamber, the recovery chamber is located below the scraper, and the other side of the partition plate is a new liquid chamber, the new liquid chamber is connected to the liquid inlet end of the delivery pipe, and magnetorheological polishing liquid is provided in the new liquid chamber.

6. The conveyor belt type magnetorheological polishing machine according to claim 5, characterized in that: The polishing device includes a horizontal guide assembly, a lifting guide assembly and a polishing assembly, the horizontal guide assembly includes a second rotary drive motor fixed to the frame, the second rotary drive motor is connected to a horizontally arranged first ball screw, the nut seat of the first ball screw is connected to a mounting plate in the lifting guide assembly, the lifting guide assembly includes the mounting plate, a third rotary drive motor is fixedly connected to the mounting plate, the third rotary drive motor is connected to a vertically arranged second ball screw, the nut seat of the second ball screw is connected to a lifting cylinder in the polishing assembly, a rotary shaft is provided in the lifting cylinder, the top end of the rotary shaft is connected to a fourth rotary power device fixed to the lifting cylinder, the bottom end of the rotary shaft passes through the lifting cylinder and is connected to a three-clamp chuck, the three-clamp chuck is connected to a workpiece adsorption disk, a permanent magnet is provided in the workpiece adsorption disk, and a workpiece adsorption groove is provided on the bottom surface of the workpiece adsorption disk.

7. The conveyor belt type magnetorheological polishing machine according to claim 6, characterized in that: A vacuum hole is provided at the bottom of the workpiece adsorption groove, and the vacuum hole is connected to a vacuum suction pump through a vacuum pipe.

8. The conveyor belt type magnetorheological polishing machine according to claim 7, characterized in that: The delivery pump is a peristaltic pump, and the first rotation drive device, the second rotation drive device, the third rotation drive device and the fourth rotation drive device are all stepping motors.

9. The conveyor belt type magnetorheological polishing machine according to claim 8, characterized in that: The delivery pump, the electromagnetic control valve, the first rotation drive device, the second rotation drive device, the third rotation drive device and the fourth rotation drive device are all connected to a remote controller.

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