Tooling device for assembling and detecting water scrubber

Abstract

The utility model discloses a tool device for assembling and detecting a water scrubber, and belongs to tool devices for assembling and detecting water scrubbers. Comprising a water washing tower body and a mounting seat, a base is fixedly connected to the bottom surface of the water washing tower body, a positioning groove is formed in the mounting seat, the outer surface of the base makes contact with the inner wall of the positioning groove, two supporting plates are mounted on the upper surface of the mounting seat, and inserting blocks are slidably connected into the two supporting plates; two limiting grooves are formed in the outer surface of the water washing tower main body, the water washing tower main body can be further positioned through cooperation of a short threaded rod, a long threaded rod, a flange plate and a flange screw hole, and the positions of the base and the water washing tower main body can be further corrected through cooperation of a supporting plate, an inserting block and the limiting grooves; therefore, the water scrubber is more accurate when being assembled, and subsequent detection is facilitated.

Description

Technical Field

[0001] The utility model relates to a tooling device for assembling and detecting a water washing tower, in particular to a tooling device for assembling and detecting a water washing tower. Background Art

[0002] The water scrubber is a type of scrubbing tower used in semiconductor manufacturing auxiliary equipment. Due to the high requirements for installation conditions, especially the assembly fit, air tightness, PM portability, etc., the scrubber must meet the assembly and process requirements after production.

[0003] At present, the following problems are often encountered when welding, manufacturing, and assembling water scrubbers: 1. The dimensions are difficult to measure; 2. The assembly error is difficult to control. Therefore, a special device is required to assemble the water scrubber to facilitate the inspection of the water scrubber. Utility Model Content

[0004] The utility model aims to solve the problem that the prior art is inconvenient to measure the dimensions of a water washing tower and the error is difficult to control during assembly, and proposes a tooling device for assembling and detecting a water washing tower.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] The cam is provided with a plurality of support plates, the support plates are provided with a plurality of support plates, the support plates are provided with a plurality of support plates respectively.

[0007] Preferably, two connecting rods are fixedly connected to the outer surface of the water washing tower body, and a horizontal connecting plate is arranged on the front side of the water washing tower body. The ends of the two connecting rods away from the water washing tower body are fixedly connected to the outer surface of the horizontal connecting plate, and the outer surface of the horizontal connecting plate has two internal screw holes.

[0008] Preferably, two external screw holes are provided inside the positioning plate, and the two external screw holes correspond to the two internal screw holes respectively.

[0009] Preferably, a vent is provided on the outer surface of the water washing tower body, and an interference avoiding interface is provided inside the positioning plate.

[0010] Preferably, a top plate is provided above the water washing tower body, the short threaded rod and the two long threaded rods are threadedly connected to the top plate, and the bottom surface of the top plate is in contact with the top end of the water washing tower body.

[0011] Compared with the prior art, the utility model provides a water washing tower assembly and detection tooling device, which has the following beneficial effects:

[0012] 1. The utility model can realize the preliminary positioning of the water washing tower body by using the cooperation of the base, the mounting seat and the positioning groove, and can further position the water washing tower body by using the cooperation between the short threaded rod, the long threaded rod, the flange plate and the flange screw hole, and can further correct the position of the base and the water washing tower body by using the cooperation between the support plate, the insertion block and the limit groove, so that the assembly of the water washing tower is more accurate and convenient for subsequent detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0014] Figure 2 It is a three-dimensional structural schematic diagram of the utility model hidden water washing tower body, short threaded rods, long threaded rods and top plate;

[0015] Figure 3 It is a three-dimensional structural schematic diagram of the water washing tower body, flange plate and flange screw holes of the utility model;

[0016] Figure 4 For this utility model Figure 3 Enlarged view of point A in .

[0017] In the figure:

[0018] 1. Water washing tower body; 2. Base; 3. Mounting seat; 4. Positioning groove; 5. Support plate; 6. Insert block; 7. Limiting groove; 8. Positioning plate; 9. Short threaded rod; 10. Long threaded rod; 11. External screw hole; 12. Connecting rod; 13. Horizontal connecting plate; 14. Internal screw hole; 15. Vent; 16. Interference avoidance interface; 17. Top plate; 18. Flange plate; 19. Flange screw hole. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0020] Reference Figure 1-4 A tooling device for assembling and testing a water washing tower comprises a water washing tower body 1 and a mounting seat 3. The bottom surface of the water washing tower body 1 is fixedly connected with a base 2. A positioning groove 4 is provided inside the mounting seat 3. An annular protruding plate adapted to the positioning groove 4 is provided at the bottom of the base 2 for easy insertion into the positioning groove 4. The outer surface of the base 2 contacts the inner wall of the positioning groove 4.

[0021] Two support plates 5 are installed on the upper surface of the mounting seat 3, and the two support plates 5 are slidably connected with insertion blocks 6 inside. Two limiting grooves 7 are provided on the outer surface of the base 2, and the two insertion blocks 6 are inserted into the inside of the two limiting grooves 7. The inner diameter of the limiting groove 7 is adapted to the outer surface of the insertion block 6, so that the insertion block 6 can be freely inserted into the inside of the limiting groove 7.

[0022] A positioning plate 8 is fixedly connected to the upper surface of the mounting seat 3, a short threaded rod 9 is fixedly connected to the upper surface of the positioning plate 8, two long threaded rods 10 are fixedly connected to the upper surface of the mounting seat 3, a flange plate 18 is fixedly connected to the outer surface of the water washing tower body 1, three flange screw holes 19 are opened inside the flange plate 18, the short threaded rod 9 and the two long threaded rods 10 all penetrate the flange screw holes 19 and extend to the top of the flange screw holes 19, and the short threaded rod 9 and the two long threaded rods 10 are threadedly connected to the three flange screw holes 19 respectively, and the use of the short threaded rod 9 and the two long threaded rods 10 can guide the position of the flange screw holes 19, so that the flange plate 18 can drive the water washing tower body 1 to rotate to a more precise position.

[0023] A vent 15 is provided on the outer surface of the water washing tower body 1 , and an interference avoidance opening 16 is provided inside the positioning plate 8 .

[0024] Two connecting rods 12 are fixedly connected to the outer surface of the water washing tower body 1, and a horizontal connecting plate 13 is arranged on the front of the water washing tower body 1. The ends of the two connecting rods 12 away from the water washing tower body 1 are fixedly connected to the outer surface of the horizontal connecting plate 13. The connecting rods 12 and the horizontal connecting plate 13 should be arranged to avoid interfering with the vent 15 to avoid affecting the ventilation of the vent 15 itself.

[0025] Two external screw holes 11 are provided inside the positioning plate 8, and two internal screw holes 14 are provided on the outer surface of the horizontal connecting plate 13. The two external screw holes 11 correspond to the two internal screw holes 14 respectively. By using bolts, the external screw holes 11 and the internal screw holes 14 can be connected, so that the connection between the positioning plate 8 and the water washing tower body 1 is more firmly.

[0026] A top plate 17 is arranged above the water washing tower body 1, and the short threaded rod 9 and the two long threaded rods 10 are threadedly connected to the top plate 17. The bottom surface of the top plate 17 is in contact with the top of the water washing tower body 1. By using the top plate 17, debris can be prevented from entering the interior of the water washing tower body 1. The threaded connection method can facilitate the disassembly and assembly of the top plate 17 as required.

[0027] Working principle: When the water washing tower needs to be assembled, first align the base 2 with the positioning groove 4 opened on the mounting seat 3, and screw the short threaded rod 9 and the two long threaded rods 10 into the flange screw hole 19 and extend to the top of the flange screw hole 19. By pushing the two insertion blocks 6, the two insertion blocks 6 can be inserted into the two limit grooves 7 opened on the outside of the base 2, so that the position of the water washing tower body 1 can be further corrected. By using the bolt column to pass through the external screw hole 11, the external screw hole 11 is connected with the internal screw hole 14, and then the top plate 17 is installed above the short threaded rod 9 and the two long threaded rods 10, the water washing tower can be finally assembled.

[0028] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

[0029] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0030] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations of the present invention. Ordinary technicians in the field can change, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A water washing tower assembly and testing tooling device, comprising a water washing tower body (1) and a mounting seat (3), characterized in that: The bottom surface of the water washing tower body (1) is fixedly connected to a base (2), a positioning groove (4) is provided inside the mounting seat (3), the outer surface of the base (2) is in contact with the inner wall of the positioning groove (4), two support plates (5) are installed on the upper surface of the mounting seat (3), the inside of the two support plates (5) are slidably connected with an insertion block (6), the outer surface of the base (2) is provided with two limit grooves (7), the two insertion blocks (6) are inserted into the inside of the two limit grooves (7), and the upper surface of the mounting seat (3) is fixedly connected to a positioning plate (8) ), the upper surface of the positioning plate (8) is fixedly connected with a short threaded rod (9), the upper surface of the mounting seat (3) is fixedly connected with two long threaded rods (10), the outer surface of the water washing tower body (1) is fixedly connected with a flange plate (18), the interior of the flange plate (18) is provided with three flange screw holes (19), the short threaded rod (9) and the two long threaded rods (10) all penetrate the flange screw holes (19) and extend to the top of the flange screw holes (19), and the short threaded rod (9) and the two long threaded rods (10) are respectively threadedly connected to the three flange screw holes (19).

2. A water washing tower assembly and detection tooling device according to claim 1, characterized in that: Two connecting rods (12) are fixedly connected to the outer surface of the water washing tower body (1), and a transverse connecting plate (13) is arranged on the front of the water washing tower body (1). The ends of the two connecting rods (12) away from the water washing tower body (1) are fixedly connected to the outer surface of the transverse connecting plate (13), and the outer surface of the transverse connecting plate (13) is provided with two internal screw holes (14).

3. A water washing tower assembly and detection tooling device according to claim 2, characterized in that: Two external screw holes (11) are provided inside the positioning plate (8), and the two external screw holes (11) correspond to the two internal screw holes (14) respectively.

4. A water washing tower assembly and testing tooling device according to claim 1, characterized in that: The outer surface of the water washing tower body (1) is provided with a vent (15), and the interior of the positioning plate (8) is provided with an interference avoidance opening (16).

5. A water washing tower assembly and testing tooling device according to claim 1, characterized in that: A top plate (17) is arranged above the water washing tower body (1), the short threaded rod (9) and the two long threaded rods (10) are both threadedly connected to the top plate (17), and the bottom surface of the top plate (17) is in contact with the top end of the water washing tower body (1).

Images