Online sterilization and monitoring module for pure water system in semiconductor workshop

Abstract

The utility model discloses an online sterilization and monitoring module for a semiconductor workshop pure water system, comprising a sterilization barrel; a water inlet pipe is provided at the water inlet hole at the lower end of the outer arc surface of the sterilization barrel, a conical shell is provided in the middle of the sterilization barrel through a support rod, a collecting pipe is provided at the lower end of the conical shell, a liquid outlet pipe is provided at the lower end of the collecting pipe, the right end of the liquid outlet pipe extends out of the sterilization barrel and is provided with a "J"-shaped pipe at the end, an online chloride ion analyzer is provided inside the "J"-shaped pipe, an upper cover is provided at the upper end of the sterilization barrel, a diaphragm metering pump is provided on the upper surface of the upper cover, and a dosing pipe is provided in the middle of the upper cover through a support plate. The online sterilization and monitoring module for the semiconductor workshop pure water system can disperse and mix the water flow and disinfectant, and then stir them, which has a good sterilization effect on the water body, and can monitor the flow rate of the water body and the content of chloride ions, thereby improving the efficiency of sterilization of the semiconductor workshop pure water system.

Description

Technical Field

[0001] The utility model relates to the technical field of pure water production, in particular to an online sterilization and monitoring module for a pure water system in a semiconductor workshop. Background Art

[0002] With the increasing demand for electronic products, the semiconductor industry has become one of the important industries in today's society. Semiconductor production workshops need pure water with a purity that meets the production requirements of semiconductor components. Therefore, a pure water system is needed to achieve impurity filtration, sterilization, deoxygenation, pH adjustment, etc.

[0003] At present, the online sterilization and monitoring module generally detects the flow rate first, and then adds disinfectant in proportion through a diaphragm metering pump for disinfection. It has a simple structure and low cost, but the content of the liquid medicine cannot be detected after adding the medicine. When there is an error in adding the medicine, it cannot be discovered and corrected in time. At the same time, the mixing effect of the disinfectant and the water body is poor, and the sterilization effect is general. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the existing defects and provide an online sterilization and monitoring module for a pure water system in a semiconductor workshop. The module can disperse and mix water flow and disinfectant, and then stir them, which has a good sterilization effect on the water body. The flow rate of the water body and the content of chloride ions can be monitored, thereby improving the efficiency of sterilization of the pure water system in the semiconductor workshop and effectively solving the problems in the background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an online sterilization and monitoring module for a pure water system in a semiconductor workshop, including a sterilization barrel;

[0006] Sterilization barrel: A water inlet pipe is provided at the water inlet hole at the lower end of its outer arc surface, a conical shell is provided in the middle of the sterilization barrel through a support rod, a collecting pipe is provided at the lower end of the conical shell, a liquid outlet pipe is provided at the lower end of the collecting pipe, the right end of the liquid outlet pipe extends out of the sterilization barrel and is provided with a "J"-shaped pipe at the end, an online chloride ion analyzer is provided inside the "J"-shaped pipe, an upper cover is provided at the upper end of the sterilization barrel, a diaphragm metering pump is provided on the upper surface of the upper cover, a dosing pipe is provided in the middle of the upper cover through a support plate, the liquid outlet end of the diaphragm metering pump is fixedly connected to the upper end of the dosing pipe, and the dosing pipe is fixedly connected to the upper end of the dosing pipe. A nozzle is provided at the lower end of the medicine tube, and the nozzle is located above the conical shell. The online chloride ion analyzer is electrically connected to the external controller in both directions, and the input end of the diaphragm metering pump is electrically connected to the output end of the external controller. When in use, the water flow and the disinfectant can be dispersed and mixed, and then stirred. Therefore, the pure water system of the semiconductor workshop has a good sterilization effect on the water body, and can monitor the flow rate of the water body and the chloride ion content, which is convenient for the automatic adjustment and control of the dosage of the diaphragm metering pump, thereby improving the efficiency of sterilization of the pure water system of the semiconductor workshop.

[0007] Furthermore, a support tube is provided inside the circular hole in the middle of the upper surface of the upper cover, and a rotating tube is rotatably connected to the inside of the support tube through a bearing. The lower end of the rotating tube is fixedly connected to the upper end of the stirring frame, and the stirring frame is located inside the conical shell to facilitate the stirring of the water.

[0008] Furthermore, evenly distributed grooves are provided on the inner side wall of the stirring frame close to the conical shell to facilitate the diversion of water.

[0009] Furthermore, a stirring shaft is provided at the lower end of the stirring frame, and the stirring shaft is located inside the collecting tube, so as to stir the water and the disinfectant.

[0010] Furthermore, a motor is provided on the upper surface of the upper cover, the output shaft of the motor passes through the lower surface of the upper cover and is provided with a gear 1 at the end, a gear 2 is provided in the middle of the outer arc surface of the rotating tube, gear 1 is meshed and connected with gear 2, and the input end of the motor is electrically connected to the output end of the external controller, so as to facilitate the control of the rotation of the stirring frame.

[0011] Furthermore, a flow sensor is provided on the outer arc surface of the water inlet pipe, and the output end of the flow sensor is electrically connected to the input end of the external controller to facilitate the detection of the flow rate.

[0012] Furthermore, the highest point of the inner arc wall of the "X"-shaped tube is flush with the upper end of the collecting tube, which facilitates the gathering of water inside the collecting tube and has a good mixing effect.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The water flow will enter the inside of the conical shell from one circle of the conical shell. At the same time, the diaphragm metering pump will draw the external chlorine-containing disinfectant into the inside of the dosing tube, and then the chlorine-containing disinfectant will be sprayed into the inside of the conical shell through the nozzle to contact with the water flow for sterilization. At the same time, the output shaft of the motor drives gear one to rotate, and gear one drives the rotating tube to rotate through gear two, and the rotating tube drives the stirring frame to rotate. The stirring frame stirs the water flow on the inner wall of the conical shell, and the groove guides and disperses the water flow to facilitate the contact between the water flow and the chlorine-containing disinfectant. Then the water flow and the disinfectant converge into the inside of the collecting tube, and the stirring shaft that rotates synchronously with the stirring frame stirs the water flow and the disinfectant, which can be fully sterilized. When in use, the water flow and the disinfectant can be dispersed and mixed, and then stirred, so that the pure water system of the semiconductor workshop has a good sterilization effect on the water body;

[0015] 2. Water flows into the sterilization barrel through the water inlet pipe. At the same time, the flow sensor monitors the flow of the water inlet pipe and transmits it to the external controller. The sterilized water is discharged to the outside through the liquid outlet pipe and the "J"-shaped pipe. At the same time, the online chloride ion analyzer monitors the chloride ion value of the water body, which is convenient for the detection of sterilization quality and subsequent processing. When in use, the flow rate of the water body and the chloride ion content can be monitored, which is convenient for the automatic adjustment and control of the dosage of the diaphragm metering pump, thereby improving the efficiency of sterilization of the pure water system in the semiconductor workshop. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0017] Figure 2 It is a schematic cross-sectional view of the sterilization barrel of the utility model.

[0018] In the figure: 1 sterilization barrel, 2 water inlet pipe, 3 upper cover, 4 conical shell, 5 collecting tube, 6 liquid outlet pipe, 7 X-shaped tube, 8 online chloride ion analyzer, 9 diaphragm metering pump, 10 dosing tube, 11 nozzle, 12 support tube, 13 rotating tube, 14 stirring frame, 15 groove, 16 stirring shaft, 17 motor, 18 gear 1, 19 gear 2, 20 flow sensor. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1-2 This embodiment provides a technical solution: an online sterilization and monitoring module for a pure water system in a semiconductor workshop, including a sterilization barrel 1.

[0021] Among them, a water inlet pipe 2 is provided at the water inlet hole at the lower end of the outer arc surface of the sterilization barrel 1, and water flows into the interior of the sterilization barrel 1 through the water inlet pipe 2. A conical shell 4 is provided in the middle of the sterilization barrel 1 through a support rod. As the liquid level inside the sterilization barrel 1 rises, the liquid level will submerge the conical shell 4, and the water will enter the interior of the conical shell 4 from a circle of the conical shell 4. A collecting pipe 5 is provided at the lower end of the conical shell 4, and the water flow and disinfectant converge into the interior of the collecting pipe 5. A liquid outlet pipe 6 is provided at the lower end of the collecting pipe 5. The right end of the liquid outlet pipe 6 extends out of the sterilization barrel 1 and is provided with a "J"-shaped pipe 7 at the end. The sterilized water is discharged to the outside through the liquid outlet pipe 6 and the "J"-shaped pipe 7. An online chloride ion analyzer 8 is provided inside the "J"-shaped pipe 7. The online chloride ion analyzer 8 monitors the chloride ion value of the water body, which is convenient for the detection of the sterilization quality and the subsequent processing.

[0022] An upper cover 3 is provided at the upper end of the sterilization barrel 1, and the upper cover 3 provides an installation position for other components. A diaphragm metering pump 9 is provided on the upper surface of the upper cover 3, and a dosing pipe 10 is provided in the middle of the upper cover 3 through a support plate. The liquid outlet end of the diaphragm metering pump 9 is fixedly connected to the upper end of the dosing pipe 10, and a nozzle 11 is provided at the lower end of the dosing pipe 10. The nozzle 11 is located above the conical shell 4. The diaphragm metering pump 9 draws external chlorine-containing disinfectant into the inside of the dosing pipe 10, and then the chlorine-containing disinfectant is sprayed into the inside of the conical shell 4 through the nozzle 11 to contact with the water flow for sterilization;

[0023] The online chloride ion analyzer 8 is bidirectionally electrically connected to the external controller, the input end of the diaphragm metering pump 9 is electrically connected to the output end of the external controller, a support tube 12 is provided inside the circular hole in the middle of the upper surface of the upper cover 3, and a rotating tube 13 is rotatably connected inside the support tube 12 through a bearing, and the lower end of the rotating tube 13 is fixedly connected to the upper end of the stirring frame 14, the stirring frame 14 is located inside the conical shell 4, and the rotating tube 13 drives the stirring frame 14 to rotate, and the stirring frame 14 stirs the water flow on the inner wall of the conical shell 4, and the stirring frame 14 is provided with evenly distributed grooves 15 on the inner side wall close to the conical shell 4, and the grooves 15 guide and disperse the water flow to facilitate the contact between the water flow and the chlorine-containing disinfectant, and the lower end of the stirring frame 14 is provided with a stirring shaft 16, and the stirring shaft 16 is located inside the collecting tube 5, and the stirring shaft 16 rotating synchronously with the stirring frame 14 stirs the water flow and the disinfectant;

[0024] A motor 17 is provided on the upper surface of the upper cover 3, and the output shaft of the motor 17 passes through the lower surface of the upper cover 3 and is provided with a gear 18 at the end. A gear 2 19 is provided in the middle of the outer arc surface of the rotating tube 13, and the gear 1 18 is meshed and connected with the gear 2 19. The input end of the motor 17 is electrically connected to the output end of the external controller, and the output shaft of the motor 17 drives the gear 18 to rotate, and the gear 18 drives the rotating tube 13 to rotate through the gear 2 19. A flow sensor 20 is provided on the outer arc surface of the water inlet pipe 2, and the output end of the flow sensor 20 is electrically connected to the input end of the external controller. The flow sensor 20 monitors the flow of the water inlet pipe 2 and transmits it to the external controller. The highest point of the inner arc wall of the "X"-shaped tube 7 is flush with the upper end of the collecting pipe 5, which is convenient for the aggregation of the water body inside the collecting pipe 5 and has a good mixing effect.

[0025] The working principle of the utility model is as follows:

[0026] When in use, water flows into the interior of the sterilization barrel 1 through the water inlet pipe 2. At the same time, the flow sensor 20 monitors the flow of the water inlet pipe 2 and transmits it to the external controller. The external controller regulates the diaphragm metering pump 9. As the liquid level inside the sterilization barrel 1 rises, the liquid level will submerge the conical shell 4, and the water will flow from the conical shell 4 around to the inside of the conical shell 4. At the same time, the diaphragm metering pump 9 draws the external chlorine-containing disinfectant into the inside of the dosing pipe 10, and then the chlorine-containing disinfectant is sprayed into the inside of the conical shell 4 through the nozzle 11 to contact with the water flow for sterilization. At the same time, the output shaft of the motor 17 drives the gear 18 to rotate, and the gear 18 The rotating tube 13 is driven to rotate by the gear 2 19, and the rotating tube 13 drives the stirring frame 14 to rotate. The stirring frame 14 stirs up the water flow on the inner wall of the conical shell 4, and the groove 15 guides and disperses the water flow to facilitate the contact between the water flow and the chlorine-containing disinfectant. Then the water flow and the disinfectant converge into the inside of the collecting tube 5, and the stirring shaft 16 that rotates synchronously with the stirring frame 14 stirs the water flow and the disinfectant to fully sterilize. The sterilized water flow is discharged to the outside through the liquid outlet pipe 6 and the cross-shaped pipe 7. At the same time, the online chloride ion analyzer 8 monitors the chloride ion value of the water body, which is convenient for the detection of the sterilization quality and the subsequent processing.

[0027] It is worth noting that the online chloride ion analyzer 8, diaphragm metering pump 9, motor 17 and flow sensor 20 disclosed in the above embodiments can be freely configured according to the actual application scenario. The online chloride ion analyzer 8 can choose an online chloride ion analyzer with model PM8200I, the diaphragm metering pump 9 can choose a diaphragm metering pump with model DJL80 / 0.5, the motor 17 can choose a permanent magnet synchronous motor with model 68KTYZ, and the flow sensor 20 can choose a clamp-type flow sensor with model FD-Q50C. The external controller controls the operation of the online chloride ion analyzer 8, diaphragm metering pump 9, motor 17 and flow sensor 20 using methods commonly used in the prior art.

[0028] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. An online sterilization and monitoring module for a pure water system in a semiconductor workshop, characterized by: It includes a sterilization barrel (1); A water inlet pipe (2) is provided at the water inlet hole at the lower end of the outer arc surface of the sterilization barrel (1); a conical shell (4) is provided in the middle of the sterilization barrel (1) through a support rod; a collecting pipe (5) is provided at the lower end of the conical shell (4); a liquid outlet pipe (6) is provided at the lower end of the collecting pipe (5); the right end of the liquid outlet pipe (6) extends out of the sterilization barrel (1) and is provided with an "X"-shaped pipe (7) at the end; an online chloride ion analyzer (8) is provided inside the "X"-shaped pipe (7); an upper cover (3) is provided at the upper end of the sterilization barrel (1); ), a diaphragm metering pump (9) is provided on the upper surface of the upper cover (3), a dosing pipe (10) is provided in the middle of the upper cover (3) through a support plate, a liquid outlet end of the diaphragm metering pump (9) is fixedly connected to the upper end of the dosing pipe (10), a nozzle (11) is provided at the lower end of the dosing pipe (10), and the nozzle (11) is located above the conical shell (4), an online chloride ion analyzer (8) is bidirectionally electrically connected to an external controller, and an input end of the diaphragm metering pump (9) is electrically connected to an output end of the external controller.

2. The online sterilization and monitoring module for the pure water system of a semiconductor workshop according to claim 1, characterized in that: A support tube (12) is provided inside the circular hole in the middle of the upper surface of the upper cover (3), and a rotating tube (13) is rotatably connected inside the support tube (12) via a bearing. The lower end of the rotating tube (13) is fixedly connected to the upper end of a stirring frame (14), and the stirring frame (14) is located inside the conical shell (4).

3. The online sterilization and monitoring module for the pure water system of a semiconductor workshop according to claim 2, characterized in that: The inner side wall of the stirring frame (14) close to the conical shell (4) is provided with evenly distributed grooves (15).

4. The online sterilization and monitoring module for the pure water system of a semiconductor workshop according to claim 2, characterized in that: A stirring shaft (16) is provided at the lower end of the stirring frame (14), and the stirring shaft (16) is located inside the collecting tube (5).

5. The online sterilization and monitoring module for the pure water system of a semiconductor workshop according to claim 2, characterized in that: The upper surface of the upper cover (3) is provided with a motor (17), the output shaft of the motor (17) passes through the lower surface of the upper cover (3) and is provided with a gear 1 (18) at the end thereof, a gear 2 (19) is provided at the middle of the outer arc surface of the rotating tube (13), the gear 1 (18) is meshedly connected with the gear 2 (19), and the input end of the motor (17) is electrically connected to the output end of an external controller.

6. The online sterilization and monitoring module for the pure water system of a semiconductor workshop according to claim 1, characterized in that: A flow sensor (20) is provided on the outer arc surface of the water inlet pipe (2), and the output end of the flow sensor (20) is electrically connected to the input end of an external controller.

7. The online sterilization and monitoring module for the pure water system of a semiconductor workshop according to claim 1, characterized in that: The highest point of the inner arc wall of the X-shaped tube (7) is flush with the upper end of the collecting tube (5).

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