A medium frequency heating evaporation coating equipment

Abstract

The utility model discloses a medium frequency heating evaporation coating equipment, including: a preheating part, a heating part for heating, a medium frequency heater, a coating part, a thickness gauge, and a vacuum pump; the preheating part includes: a heating sleeve, a slide rail, a hopper, a glass tube, and a sealing sleeve; the heating sleeve, the upper heat core, and the lower heat core are connected to the heating end of the medium frequency heater; the coating part includes: a coating tank, a vacuum tube, a rotating disk, and a supporting platform. The medium frequency heating evaporation coating equipment provided by the utility model uses a medium frequency heater as a heat source, which can quickly heat the metal evaporation material, thereby realizing a rapid evaporation and coating process, and is energy-saving and environmentally friendly; through the inclined design of the hopper and the glass tube, and the application of the diverter plate, the evaporation material can be uniformly vaporized and deposited on the substrate, thereby improving the uniformity of the coating; the design of multiple preheating parts and quick-tightening sealing sleeves facilitates users to quickly replace evaporation materials, thereby improving the convenience of operation.

Description

Technical Field

[0001] The utility model relates to the field of coating equipment, in particular to medium frequency heating evaporation coating equipment. Background Art

[0002] The principle of evaporation coating equipment is mainly based on physical evaporation and condensation processes. Evaporation coating equipment is widely used in optical thin films, electronic devices, decoration fields and photovoltaic materials. In a vacuum environment, the material is evaporated into gaseous particles by heating, and these particles are then condensed on the surface of the substrate to form a thin film. The process of evaporation coating includes the following steps: Heating evaporation: The coating material is placed in a vacuum chamber and heated by resistance, electron beam, laser and other methods to evaporate or sublimate it into gaseous particles. Gaseous transmission: Gaseous particles are transmitted to the substrate in a vacuum in a linear motion with basically no collision. Particle condensation: Particles reaching the surface of the substrate are adsorbed and diffused on the surface, forming clusters and gradually growing, and finally forming a continuous film. However, heating metals by resistance, electron beam, laser and other methods often takes a long time, which requires a more efficient heating method for the coating process of the metal evaporation source.

[0003] Medium frequency heating technology is an efficient heat treatment method that uses the principle of electromagnetic induction to heat metal materials. This technology has the advantages of fast heating speed, high heating efficiency, low energy consumption, environmental protection and energy saving. Medium frequency heating technology has been widely used in many fields such as metal smelting, bar heating, surface quenching of industrial metal parts, etc. Especially in metal smelting, medium frequency heating can heat the metal to above the melting point in a short time and achieve rapid smelting. This is of great significance to improving production efficiency and reducing production costs. Utility Model Content

[0004] In view of the above problems, the utility model provides a medium frequency heating evaporation coating equipment, comprising: a preheating part for preheating evaporation material, a heating part for heating the evaporation material, a medium frequency heating machine for heating the preheating part, a coating part for coating a workpiece to be coated, a thickness meter for detecting the thickness of the film layer of the workpiece to be coated, and a vacuum pump; the preheating part comprises: a heating sleeve, a slide rail for carrying the preheating part, a hopper for storing the evaporation material, a glass tube for carrying the liquid evaporation material, and a sealing sleeve for sealing the first end of the glass tube; the heating part comprises: an upper heat core, a lower heat core, an upper heat core cover and a lower heat core cover; the heating sleeve, the upper heat core and the lower heat core are connected to the heating end of the medium frequency heating machine; the coating part comprises: a coating tank, a vacuum tube, a rotating disk, and a supporting platform for supporting a substrate; the second end of the glass tube is airtightly connected to the coating tank; the vacuum tube is airtightly connected to the vacuum pump; and the supporting platform is fixedly connected to the rotating disk.

[0005] In this technical solution, the user places the substrate on the supporting platform and seals the vacuum tank; turns on the vacuum pump, which evacuates the inside of the vacuum tank; then, the user adds the evaporating material into the hopper, pushes the hopper into the glass tube, and installs the sealing sleeve; then, the heating sleeve is placed on the slide rail and pushed into the first end of the glass tube; turns on the medium frequency heater, which heats the preheating part and the heating part; the evaporating material sublimates into a gas in the glass tube, the temperature in the glass tube increases, the pressure increases, and the pressure in the vacuum tank is relatively small; the evaporating material will flow to the vacuum tank and be deposited on the surface of the substrate, and when the thickness meter detects that the film thickness on the substrate reaches the set value, the medium frequency heater stops heating; the coating process is completed; the medium frequency heater can quickly heat the evaporating material of the metal type, improve the thermal efficiency of the coating process, and save energy and protect the environment.

[0006] In a specific embodiment, the hopper is inclined toward the second end of the glass tube, and the glass tube is inclined toward the vacuum tank.

[0007] In this technical solution, the evaporating material can be liquefied and then vaporized during the heating process. By tilting the hopper and the glass tube, the evaporating material can flow to the inner wall of the glass tube during the process of being converted into liquid, which is beneficial to the uniform vaporization of the evaporating material and increases the coating efficiency.

[0008] In a specific embodiment, the coating tank is further provided with a diverter plate.

[0009] In this technical solution, the evaporated material flows through the diverter plate, and under the influence of the flow channel of the diverter plate, it can flow into the vacuum tank more evenly, which is beneficial to improve the uniformity of the coating process.

[0010] In a specific embodiment, the coating equipment has a plurality of preheating sections.

[0011] In this technical solution, providing a plurality of the preheating parts is beneficial for users to quickly replace the evaporation material and improve the continuity of the coating process.

[0012] In a specific embodiment, the coating tank is provided with an observation window.

[0013] In this technical solution, the coating tank is useful for observing the coating condition in the vacuum tank so as to confirm the equipment status and adjust the equipment parameters.

[0014] In a specific embodiment, boron nitride is filled between the hopper and the glass tube.

[0015] In this technical solution, the boron nitride has good thermal conductivity. Filling the gap between the hopper and the glass tube with boron nitride is beneficial to improving the uniform heating of the preheating part during heating and improving the evaporation efficiency of the evaporating material.

[0016] In a specific embodiment, the hopper is provided with a handle; the sealing sleeve comprises: an aluminum sleeve, a copper sheet, and a silicone sheet; the silicone sheet is fixed to the aluminum sleeve through the copper sheet thread; and the aluminum sleeve is provided with a quick-tightening thread.

[0017] In this technical solution, the sealing sleeve adopts a quick-twist design, which is convenient for users to quickly replace the evaporation material.

[0018] The beneficial effects of the utility model are as follows: the medium frequency heating method is adopted, so that the evaporation material can be heated and vaporized in a short time, thereby realizing a rapid evaporation and coating process, and saving energy and being environmentally friendly; through the inclined design of the hopper and the glass tube, and the application of the diverter plate, the evaporation material can be uniformly vaporized and deposited on the substrate, thereby improving the uniformity of the coating; the design of multiple preheating parts and quick-tightening sealing sleeves facilitates users to quickly replace the evaporation material, thereby improving the convenience of operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a front view of the overall structure of a medium frequency heating evaporation coating device in a specific implementation of the utility model;

[0020] Figure 2 It is a front view of a preheating part and a heating part of a medium frequency heating evaporation coating device in a specific implementation of the utility model;

[0021] Figure 3 It is a cross-sectional view of a glass tube of a medium frequency heating evaporation coating device in a specific implementation of the utility model.

[0022] Figure 4 This is a detailed cross-sectional view of a sealing sleeve of a medium frequency heating evaporation coating device in a specific implementation of the utility model.

[0023] Figure 5 This is a top view of a coating tank of a medium frequency heating evaporation coating device in a specific implementation of the utility model. DETAILED DESCRIPTION

[0024] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0025] like Figure 1-Figure 5In the first embodiment of the utility model, a medium frequency heating evaporation coating device is provided, comprising: a preheating part 100 for preheating evaporation material, a heating part 200 for heating the evaporation material, a medium frequency heating machine 300 for heating the preheating part 100 and the heating part 200, a coating part 400 for coating a workpiece to be coated, a thickness meter 500 for detecting the thickness of the film layer of the workpiece to be coated, and a vacuum pump 600; the preheating part 100 comprises: a heating jacket 101, a slide rail 102 for carrying the preheating part 100, a hopper 103 for storing the evaporation material, a glass tube 104 for carrying the liquid evaporation material, and a glass tube 105 for sealing the glass tube 106. The sealing sleeve 105 of the first end portion 1001 of the glass tube 104; the heating part 200 includes: an upper heat core 201, a lower heat core 202, an upper heat core cover 203 and a lower heat core cover 204; the heating sleeve 101, the upper heat core 201 and the lower heat core 202 are connected to the heating end of the medium frequency heating machine 300; the coating part 400 includes: a coating tank 401, vacuum tubes 402, 403, and 404 for supporting the substrate; the second end portion 1002 of the glass tube 104 is airtightly connected to the coating tank 401; the vacuum tube 402 is airtightly connected to the vacuum pump 600; the 404 is fixedly connected to the 403.

[0026] Further, the user places the substrate in the 404 and seals the vacuum tank; turns on the vacuum pump 600, and the vacuum pump 600 evacuates the vacuum tank; then, the user adds the evaporation material into the hopper 103, pushes the hopper 103 into the glass tube 104, and installs the sealing sleeve 105; then, the heating sleeve 101 is placed on the slide rail 102, and the first end 1001 of the glass tube 104 is pushed in; turns on the intermediate frequency heating machine 300, and the intermediate frequency heating machine 300 heats the preheating section 10 0 and the heating part 200 are heated; the evaporating material is sublimated into gas in the glass tube 104, the temperature in the glass tube 104 increases, the pressure increases, and the pressure in the vacuum tank is relatively small; the evaporating material will flow to the vacuum tank and be deposited on the surface of the substrate. When the thickness meter 500 detects that the film thickness on the substrate reaches the set value, the medium frequency heating machine 300 stops heating; the coating process is completed; the medium frequency heating machine 300 can quickly heat the evaporating material of the metal type, improve the thermal efficiency of the coating process, and save energy and protect the environment.

[0027] In this embodiment, the hopper 103 is inclined toward the second end 1002 of the glass tube 104 , and the glass tube 104 is inclined toward the vacuum tank.

[0028] Furthermore, the evaporating material is first liquefied and then vaporized during the heating process. By tilting the hopper 103 and the glass tube 104, the evaporating material can flow to the inner wall of the glass tube 104 during the process of being converted into liquid, which is beneficial to the uniform vaporization of the evaporating material and increases the coating efficiency.

[0029] In this embodiment, the coating tank 401 is further provided with a diverter plate 4002; the evaporation material flows through the diverter plate 4002, and can flow into the vacuum tank more evenly under the influence of the flow channel of the diverter plate 4002, which is beneficial to improve the uniformity of the coating process.

[0030] In this embodiment, the coating device has a plurality of preheating parts 100. Providing a plurality of preheating parts 100 is beneficial for the user to quickly replace the evaporation material and improve the continuity of the coating process.

[0031] In this embodiment, the coating tank 401 is provided with an observation window 4001, and the coating tank 401 is useful for observing the coating condition in the vacuum tank so as to confirm the equipment status and adjust the equipment parameters.

[0032] In this embodiment, boron nitride 1003 is filled between the hopper 103 and the glass tube 104 .

[0033] Furthermore, the boron nitride 1003 has good thermal conductivity. Filling the gap between the hopper 103 and the glass tube 104 with the boron nitride 1003 is beneficial to improving the uniform heating of the preheating part 100 during heating, thereby improving the evaporation efficiency of the evaporation material.

[0034] It is worth mentioning that boron nitride has different crystal states, such as: hexagonal boron nitride (HBN): the structure is similar to graphite, sometimes also called "white graphite"; rhombohedral boron nitride (RBN): also known as r-BN; cubic boron nitride (CBN): the structure is similar to diamond, and its hardness is second only to diamond.

[0035] Preferably, the utility model uses hexagonal boron nitride powder to fill the gap between the glass tube and the hopper; the hexagonal boron nitride powder has excellent thermal conductivity and heat resistance, and can work up to 2300°C under atmosphere protection.

[0036] In this embodiment, the hopper 103 is provided with a handle 1031; the sealing sleeve 105 includes: an aluminum sleeve 1051, a copper sheet 1052, and a silicone sheet 1053; the silicone sheet 1053 is threadedly fixed to the aluminum sleeve 1051 through the copper sheet 1052; and a quick-tightening thread is provided on the aluminum sleeve 1051. The sealing sleeve 105 adopts a quick-tightening design, which is convenient for users to quickly replace the evaporation material.

[0037] The preferred specific embodiments of the utility model are described in detail above. It should be understood that ordinary technicians in this field can make many modifications and changes based on the concept of the utility model without creative work. Therefore, all technical solutions that can be obtained by technicians in this technical field based on the concept of the utility model through logical analysis, reasoning or limited experiments on the basis of the existing technology should be within the scope of protection determined by the claims.

Claims

1. A medium frequency heating evaporation coating device, characterized in that: include: A preheating part for preheating the evaporation material, a heating part for heating the evaporation material, a medium frequency heating machine for heating the preheating part, a coating part for coating the workpiece to be coated, a thickness meter for detecting the thickness of the film layer of the workpiece to be coated, and a vacuum pump; the preheating part includes: a heating sleeve, a slide rail for carrying the preheating part, a hopper for storing the evaporation material, a glass tube for carrying the liquid evaporation material, and a sealing sleeve for sealing the first end of the glass tube; the heating part includes: an upper heat core, a lower heat core, an upper heat core cover and a lower heat core cover; the heating sleeve, the upper heat core and the lower heat core are connected to the heating end of the medium frequency heating machine; the coating part includes: a coating tank, a vacuum tube, a rotating disk, and a supporting platform for supporting a substrate; the second end of the glass tube is airtightly connected to the coating tank; the vacuum tube is airtightly connected to the vacuum pump; and the supporting platform is fixedly connected to the rotating disk.

2. The medium frequency heating evaporation coating equipment according to claim 1, characterized in that: The hopper is inclined toward the second end of the glass tube.

3. The medium frequency heating evaporation coating equipment according to claim 1, characterized in that: The coating tank is also provided with a diverter plate.

4. The medium frequency heating evaporation coating equipment according to claim 1, characterized in that: The coating equipment has multiple preheating parts.

5. The medium frequency heating evaporation coating equipment according to claim 1, characterized in that: The coating tank is provided with an observation window.

6. The medium frequency heating evaporation coating equipment according to claim 1, characterized in that: The space between the hopper and the glass tube is filled with boron nitride.

7. The medium frequency heating evaporation coating equipment according to claim 1, characterized in that: The hopper is provided with a handle, and the sealing sleeve comprises: an aluminum sleeve, a copper sheet, and a silicone sheet; the silicone sheet is fixed to the aluminum sleeve through the copper sheet thread; and the aluminum sleeve is provided with a quick-tightening thread.

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