Novel CVD diamond vertical layout hot wire device

Abstract

The utility model provides a novel CVD diamond vertical layout hot wire device which comprises two upper electrodes and a lower electrode, the two upper electrodes are vertically arranged in parallel, an upper electrode plate is arranged between the two upper electrodes, the upper electrode plate can slide along the upper electrodes, a lower electrode plate is arranged below the upper electrode plate, and the lower electrode plate can slide along the lower electrode plate. Upper electrodes are arranged at the bottom of the upper electrode plate, lower electrodes are arranged at the bottom of the lower electrode plate, a cross rod is connected between the tops of the two upper electrodes, a plurality of high-temperature springs are connected below the cross rod, a plurality of hooks are arranged on the top surface of the upper electrode plate, and the number of the hooks is consistent with that of the high-temperature springs. According to the novel CVD diamond vertical layout hot wire device, the upper electrode plate capable of moving up and down is arranged, the requirements of hot wires with different lengths can be met, the inner section of the upper electrode plate is approximately small, and when the upper electrode plate works and emits heat, the protruding part of the sliding block can be clamped, so that the upper electrode plate is more stable.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical vapor deposition diamond films, in particular to a novel CVD diamond vertical layout hot wire device. Background Art

[0002] Diamond has many excellent mechanical, thermal, acoustic, optical, electrical, and chemical properties. It has been applied and industrialized in many fields. However, naturally mined diamonds are not only limited in quantity, but also very expensive. Therefore, artificial synthesis of diamonds has become a hot topic today, and there are many ways to synthesize them. One of the methods for preparing diamond coatings is hot wire chemical vapor deposition (HFCVD), in which the hot wire is generally arranged horizontally. This wire arrangement method results in that only one side of the hot wire can be used each time diamond is prepared, and the hot wire on the other side cannot be effectively used, resulting in very low efficiency.

[0003] For example, the publication number: CN103981511B, "A multi-array hot wire device for preparing diamond film in a vertical layout", includes an upper wall plate of a vacuum chamber and a lower wall plate of a vacuum chamber, and is characterized in that: an upper electrode plate is fixedly connected to the upper wall plate of the vacuum chamber; at least two rows of hot wires are vertically distributed, the upper end of each row of hot wires is fixedly connected to its corresponding upper electrode plate, and the lower end of each row of hot wires is fixedly connected to its corresponding lower electrode plate; the lower end of the lower electrode plate is fixed on the hot wire force adjustment mechanism, and the hot wire force adjustment mechanism is fixed on the lower wall plate of the vacuum chamber. This patent adopts a multi-array hot wire vertical distribution, which can be used for double-sided large-area coating, reduce the cost of hot wires, and achieve uniform coating, but there are still problems. A hot wire force adjustment mechanism is installed on the lower electrode plate, but it can only adjust the hot wire tension, and cannot change the hot wire length, and cannot be applied to scenes that require different hot wire lengths.

[0004] This case was created to solve the above problems. Utility Model Content

[0005] 1. Technical issues to be solved

[0006] The purpose of the utility model is to provide a novel CVD diamond vertical layout hot wire device to solve the problems raised in the above background technology.

[0007] (II) Technical solution

[0008] To achieve the above objectives, the utility model is implemented through the following technical solutions: a new type of CVD diamond vertical layout hot wire device, including an upper electrode and a lower electrode, there are two upper electrodes and they are arranged vertically and parallel, an upper electrode plate is arranged between the two upper electrodes, the upper electrode plate can slide along the upper electrode, a lower electrode plate is arranged below the upper electrode plate, a lower electrode is arranged at the bottom of the lower electrode plate, a cross bar is connected between the tops of the two upper electrodes, a number of high-temperature springs are connected under the cross bar, a number of hooks are arranged on the top surface of the upper electrode plate, and the number of the hooks is consistent with the number of the high-temperature springs.

[0009] Preferably, it further comprises a slider, wherein the slider slides on the upper electrode, and the upper electrode plate is fixed between the sliders.

[0010] Preferably, a track is provided on the upper electrode, and a protruding portion engaged with the track is provided on the slider, the track cross section is larger inside and smaller inside, and the interface of the protruding portion is the same as the track cross section.

[0011] Preferably, a plurality of heating wires are arranged between the upper electrode plate and the lower electrode plate, and the heating wires are arranged perpendicular to the upper electrode plate and the lower electrode plate.

[0012] Preferably, the upper electrode plate and the lower electrode plate can be provided with different widths to arrange different numbers of columns of heating wires.

[0013] (III) Beneficial effects

[0014] After adopting the above technical scheme, the utility model has the following advantages compared with the prior art: the utility model is a new type of CVD diamond vertical layout hot wire device, which can adapt to the requirements of hot wires of different lengths by setting an upper electrode plate that can move up and down, and the cross-section is set large and small. When it is working and generating heat, it will clamp the protruding part of the slider to make it more stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of the utility model;

[0016] Figure 2 It is a schematic diagram of the track cross section;

[0017] In the figure: 1 upper electrode, 2 lower electrode, 3 upper electrode plate, 4 lower electrode plate, 5 cross bar, 6 high temperature spring, 7 hook, 8 slider, 9 track. DETAILED DESCRIPTION

[0018] The utility model is further described in detail below through the drawings and embodiments.

[0019] The utility model embodiment provides a novel CVD diamond vertical layout hot wire device, such as Figure 1-2As shown, it includes an upper electrode 1 and a lower electrode 2, there are two upper electrodes 1 and they are arranged vertically and parallel, an upper electrode plate 3 is arranged between the two upper electrodes 1, the upper electrode plate 3 can slide along the upper electrode 1, a lower electrode plate 4 is arranged below the upper electrode plate 3, a lower electrode 2 is arranged at the bottom of the lower electrode plate 4, a cross bar 5 is connected between the tops of the two upper electrodes 1, a number of high-temperature springs 6 are connected under the cross bar 5, a number of hooks 7 are arranged on the top surface of the upper electrode plate 3, and the number of the hooks 7 is consistent with the number of the high-temperature springs 6.

[0020] By setting up an upper electrode plate 3 that can move up and down, it can adapt to the needs of hot wires of different lengths. At the same time, a hook 7 and a high-temperature spring 6 are set to provide tension for the hot wire between the two electrode plates. The hot wire itself does not have direct contact with the hook 7 and the high-temperature spring 6. This avoids the situation where the high-temperature spring 6 or the hook 7 fails to have elastic force due to excessive temperature during the heating process. The device can adapt to hot wires of different lengths. Since the tension provided by the high-temperature spring 6 will change when it is stretched, hot wires of different lengths will inevitably be stretched to different lengths. Therefore, several high-temperature springs 6 with different elastic force ranges can be set according to the length of the hot wire, so that the hook can be selected to hang the high-temperature spring 6 with the corresponding elastic force according to the length of the hot wire selected each time.

[0021] Reference Figure 1-2 , and also includes a slider 8, the slider 8 slides on the upper electrode 1, the upper electrode plate 3 is fixed between the sliders 8, the upper electrode 1 is provided with a track 9, the slider 8 is provided with a protruding part that is embedded with the track 9, the cross-section of the track 9 is large and small, and the interface of the protruding part is the same as the cross-section of the track 9. When the hot wire is working, the upper electrode 1 will also heat up. After heating, the track 9 will clamp the protruding part on the slider 8 to make it more stable and the tension of the hot wire is more stable.

[0022] A plurality of hot wires are arranged between the upper electrode plate 3 and the lower electrode plate 4. The hot wires are arranged perpendicularly to the upper electrode plate 3 and the lower electrode plate 4. The upper electrode plate 3 and the lower electrode plate 4 can be arranged with different widths to arrange hot wires of different numbers.

[0023] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A novel CVD diamond vertical layout hot wire device, characterized by: The invention comprises an upper electrode (1) and a lower electrode (2), wherein the upper electrodes (1) are two and arranged vertically and in parallel, an upper electrode plate (3) is arranged between the two upper electrodes (1), the upper electrode plate (3) can slide along the upper electrode (1), a lower electrode plate (4) is arranged below the upper electrode plate (3), a lower electrode (2) is arranged at the bottom of the lower electrode plate (4), a cross bar (5) is connected between the tops of the two upper electrodes (1), a plurality of high-temperature springs (6) are connected below the cross bar (5), and a plurality of hooks (7) are arranged on the top surface of the upper electrode plate (3), and the number of the hooks (7) is the same as the number of the high-temperature springs (6).

2. A novel CVD diamond vertical layout hot wire device according to claim 1, characterized in that: It also comprises a slider (8), the slider (8) slides on the upper electrode (1), and the upper electrode plate (3) is fixed between the sliders (8).

3. A novel CVD diamond vertical layout hot wire device according to claim 2, characterized in that: The upper electrode (1) is provided with a track (9), the slider (8) is provided with a protruding portion that engages with the track (9), the track (9) has a cross section that is larger than the track (9), and the interface of the protruding portion is the same as the cross section of the track (9).

4. A novel CVD diamond vertical layout hot wire device according to claim 1, characterized in that: A plurality of heating wires are arranged between the upper electrode plate (3) and the lower electrode plate (4), and the heating wires are arranged perpendicularly to the upper electrode plate (3) and the lower electrode plate (4).

5. A novel CVD diamond vertical layout hot wire device according to claim 4, characterized in that: The upper electrode plate (3) and the lower electrode plate (4) can be provided with different widths to arrange different numbers of rows of heating wires.

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