A new type of felt ring structure for the bottom of the hot field of a single crystal furnace

Abstract

The utility model discloses a novel single crystal furnace thermal field bottom felt ring structure, specifically relates to the technical field of bottom felt rings, including a furnace bottom felt ring body for support, the furnace bottom felt ring body is provided with a connecting assembly, the connecting assembly includes a protective sleeve body sleeved on the outside of the furnace bottom felt ring body. The utility model supports the furnace guard through the protective sleeve body and the furnace bottom felt ring body by setting the connecting assembly, so that it is not corroded by heat and chemical substances, and at the same time improves the wear resistance and heat resistance of the furnace bottom, and through the setting of the hollow heat insulation cavity in the middle of the furnace bottom felt ring body, the heat conduction of the thermal field can be reduced, and the power consumption of the single crystal furnace can be reduced, and the number of pressure plate felt layers can be additionally increased, and the vacuum design can isolate the temperature, which greatly improves the thermal insulation of the single crystal furnace thermal field and reduces the power consumption of the single crystal furnace, and through the setting of the reinforced positioning ring and the reinforced external support extension rod, the furnace guard can be supported to ensure the stability of the furnace guard installation.

Description

Technical Field

[0001] The utility model relates to the technical field of bottom solid felt rings, and more specifically to a novel bottom solid felt ring structure of a single crystal furnace thermal field. Background Art

[0002] The single crystal furnace hot field bottom solid felt ring structure is a special structure installed at the bottom of the single crystal furnace hot field, used to protect the furnace bottom and improve the performance of the furnace bottom. The single crystal furnace is a device used to produce single crystal materials, and its furnace bottom is subjected to harsh working conditions such as high temperature and chemical corrosion;

[0003] In the process of growing single crystal silicon, the polysilicon raw material must first be placed in a quartz crucible and melted at a temperature above 1420°C. After the temperature stabilizes to the target temperature, the single crystal silicon seed crystal with a determined crystal orientation is melted with the melt and then seeded. The growth process of the single crystal silicon is completed through steps such as shoulder release, shoulder rotation, equal diameter, finishing, and cooling.

[0004] Among them, it was found through searching that the utility model patent with patent application number CN202121895662.1 discloses a furnace bottom solid felt for single crystal thermal field centering, which is arranged on the furnace bottom of the single crystal furnace, and mainly includes a solid felt body, a fixed groove is provided on the upper surface of the solid felt body, and the solid felt body is also provided with exhaust holes, electrode through holes and support rod through holes that penetrate the solid felt body, and there are positioning blocks around the solid felt body, wherein: the solid felt body is a disc-shaped structure, and the solid felt body is located at the lower end of the bottom protection pressure plate in the single crystal furnace; the fixed groove forms a circular structure on the solid felt body; the support rod through hole is arranged at the center of the solid felt body, the exhaust holes are symmetrically arranged on both sides of the support rod through hole, and the electrode through holes are evenly distributed around the support rod through hole, and the exhaust holes, electrode through holes and support rod through holes are all located in the fixed grooves on the solid felt body;

[0005] When this structure is used, the positioning blocks are evenly distributed in the circumferential direction of the solid felt body, and the solid felt body is clamped on the bottom of the single crystal furnace through the positioning blocks. The solid felt structure is simple and easy to use. It can effectively solve the problem of thermal field installation deviation and improve the thermal field installation efficiency. However, the thermal conductivity performance of this structure is low when in use, and the high consistency of the thermal field cannot be ensured, and the thermal insulation performance is low. Utility Model Content

[0006] In order to overcome the above defects of the prior art, the utility model provides a novel single crystal furnace thermal field bottom solid felt ring structure, aiming to solve the problems raised in the above background technology.

[0007] The utility model is implemented in this way. The utility model provides the following technical solutions: a novel single crystal furnace thermal field bottom felt ring structure, comprising a furnace bottom felt ring body for support, wherein the furnace bottom felt ring body is provided with a connecting assembly;

[0008] The connecting assembly comprises a protective sleeve body sleeved on the outside of the furnace bottom felt ring body, the cross-sectional shapes of the protective sleeve body and the furnace bottom felt ring body are both set to be annular, and a plurality of heat dissipation holes and grooves are opened through the outside of the protective sleeve body;

[0009] A reinforcing positioning ring is provided in the middle of the protective sleeve body;

[0010] It can be seen that in the above technical solution, the furnace guard is supported by the protective sleeve and the furnace bottom felt ring body, so that it is not corroded by heat and chemicals, and the wear resistance and heat resistance of the furnace bottom are improved. In addition, the protective sleeve and the heat dissipation hole groove are arranged, so that the friction between the furnace guard and the furnace bottom felt ring body is improved by the protective sleeve, and the heat dissipation hole groove is arranged to facilitate the heat to be dissipated through the heat dissipation hole groove when heat is dissipated.

[0011] Optionally, in a possible embodiment, the cross-sectional shapes of the protective sleeve body and the furnace bottom felt ring body are both set to be annular, the protective sleeve body is sleeved on the outside of the furnace bottom felt ring body and is detachably connected to the furnace bottom felt ring body, the reinforcing positioning ring is detachably connected to the protective sleeve body, a plurality of reinforcing external support extension rods are distributed in the middle of the reinforcing positioning ring and along the circumference of the axis point of the reinforcing positioning ring, one end of each of the plurality of reinforcing external support extension rods extends to the inner wall of the reinforcing positioning ring and is detachably connected to the reinforcing positioning ring, and a hollow heat-insulating cavity for isolating heat conduction is provided in the middle of the furnace bottom felt ring body;

[0012] It can be seen that in the above technical solution, the setting of the hollow insulation cavity in the middle of the main body of the furnace bottom solid felt ring can reduce heat conduction of the thermal field and reduce the power consumption of the single crystal furnace. At the same time, the number of pressure plate felt layers can be increased. The vacuum design can isolate the temperature, greatly improve the thermal insulation of the single crystal furnace thermal field and reduce the power consumption of the single crystal furnace. In addition, by strengthening the positioning ring and strengthening the external support extension rod, the furnace guard can be supported to ensure the stability of the furnace guard installation.

[0013] Technical effects and advantages of the utility model:

[0014] By setting the connection assembly, compared with the prior art, the overall design is simple and the structure is reasonable. Through the corresponding coordination of various structures, the furnace guard is supported by the protective sleeve body and the furnace bottom felt ring body, so that it is not corroded by heat and chemical substances, and the wear resistance and heat resistance of the furnace bottom are improved.

[0015] And through the arrangement of the protective sleeve and the heat dissipation hole groove, the protective sleeve body increases the friction between the furnace guard and the furnace bottom solid felt ring body, and the arrangement of the heat dissipation hole groove facilitates the heat to be dissipated through the heat dissipation hole groove during heat dissipation;

[0016] By setting the hollow insulation cavity in the middle of the main body of the furnace bottom felt ring, the heat conduction of the thermal field can be reduced, and the power consumption of the single crystal furnace can be reduced. At the same time, the number of pressure plate felt layers can be increased. The vacuum design can isolate the temperature, greatly improving the thermal insulation of the single crystal furnace and reducing the power consumption of the single crystal furnace. In addition, by strengthening the positioning ring and strengthening the external support extension rod, the furnace guard can be supported to ensure the stability of the furnace guard installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the present disclosure, the following briefly introduces the drawings required to be used in some embodiments of the present disclosure. Obviously, the drawings described below are only drawings of some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can also be obtained based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams, and are not limitations on the actual size of the product involved in the embodiments of the present disclosure, the actual process of the method, the actual timing of the signal, etc.

[0018] Figure 1 It is the front view of the overall structure of the utility model.

[0019] Figure 2 It is a top view of the overall structure of the utility model.

[0020] Figure 3 It is a cross-sectional view of the main body of the furnace bottom felt fixing ring of the utility model.

[0021] Figure 4 This is a front view of the reinforced positioning ring and the reinforced external support extension rod of the utility model.

[0022] Figure 5 It is the front view of the protective sleeve of the utility model.

[0023] The accompanying drawings are marked as follows: 1. furnace bottom felt ring body; 2. protective sleeve; 3. heat dissipation hole groove; 4. hollow insulation cavity; 5. reinforced positioning ring; 6. reinforced external support extension rod. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] As attached Figure 1-4The novel single crystal furnace thermal field bottom solid felt ring structure shown in the figure supports the furnace guard through the connecting assembly arranged on the furnace bottom solid felt ring body 1 through the protective sleeve body 2 and the furnace bottom solid felt ring body 1, so that it is not corroded by heat and chemical substances, and at the same time improves the wear resistance and heat resistance of the furnace bottom. The hollow heat insulation cavity 4 in the middle of the furnace bottom solid felt ring body 1 can reduce the heat conduction of the thermal field and reduce the power consumption of the single crystal furnace. At the same time, the number of pressure plate felt layers can be increased. The vacuum design can isolate the temperature, greatly improve the thermal insulation of the single crystal furnace thermal field and reduce the power consumption of the single crystal furnace. In addition, the furnace guard can be supported by the arrangement of the reinforced positioning ring 5 and the reinforced external support extension rod 6 to ensure the stability of the furnace guard installation, and the specific structural arrangement of the assembly is as follows;

[0026] The connecting assembly comprises a protective sleeve 2 which is sleeved on the outside of the furnace bottom felt ring body 1. The cross-sectional shapes of the protective sleeve 2 and the furnace bottom felt ring body 1 are both set to be annular. A plurality of heat dissipation holes 3 are formed through the outside of the protective sleeve 2.

[0027] A reinforcing positioning ring 5 is provided in the middle of the protective sleeve body 2;

[0028] The cross-sectional shapes of the protective sleeve 2 and the furnace bottom felt ring body 1 are both set to be ring-shaped. The protective sleeve 2 is sleeved on the outside of the furnace bottom felt ring body 1 and is detachably connected to the furnace bottom felt ring body 1. The reinforcing positioning ring 5 is detachably connected to the protective sleeve 2. A plurality of reinforcing external support extension rods 6 are distributed in the middle part of the reinforcing positioning ring 5 and along the circumference of the axial point of the reinforcing positioning ring 5. One ends of the plurality of reinforcing external support extension rods 6 extend to the inner wall of the reinforcing positioning ring 5 and are detachably connected to the reinforcing positioning ring 5. A hollow insulating cavity 4 for isolating heat conduction is provided in the middle part of the furnace bottom felt ring body 1.

[0029] According to the above structure, when in use, the staff installs the device on the furnace bottom, and supports the furnace through the protective sleeve 2 and the furnace bottom felt ring body 1, so that it is not corroded by heat and chemicals, and at the same time improves the wear resistance and heat resistance of the furnace bottom;

[0030] And through the arrangement of the protective sleeve 2 and the heat dissipation hole groove 3, the protective sleeve 2 improves the friction between the furnace guard and the furnace bottom felt ring body 1, and the arrangement of the heat dissipation hole groove 3 facilitates the heat to be dissipated through the heat dissipation hole groove 3 during heat dissipation;

[0031] In addition, by setting the hollow insulating cavity 4 in the middle of the furnace bottom felt ring body 1, the heat conduction of the thermal field can be reduced, and the power consumption of the single crystal furnace can be reduced. At the same time, the number of pressure plate felt layers can be increased. The vacuum design can isolate the temperature, greatly improving the thermal insulation of the single crystal furnace and reducing the power consumption of the single crystal furnace. In addition, by setting the reinforced positioning ring 5 and the reinforced external support extension rod 6, the furnace guard can be supported to ensure the stability of the furnace guard installation.

[0032] Different from the prior art, the present application discloses a novel single crystal furnace thermal field bottom solid felt ring structure, which supports the furnace guard through the protective sleeve 2 and the furnace bottom solid felt ring body 1 to prevent it from being corroded by heat and chemicals, while improving the wear resistance and heat resistance of the furnace bottom. The hollow insulation cavity 4 in the middle of the furnace bottom solid felt ring body 1 can reduce the heat conduction of the thermal field and reduce the power consumption of the single crystal furnace. At the same time, the number of pressure plate felt layers can be increased. The vacuum design can isolate the temperature, greatly improve the thermal insulation of the single crystal furnace thermal field and reduce the power consumption of the single crystal furnace. In addition, the furnace guard can be supported by the arrangement of the reinforced positioning ring 5 and the reinforced external support extension rod 6 to ensure the stability of the furnace guard installation. The protective sleeve 2 and the heat dissipation hole groove 3 are arranged to increase the friction between the furnace guard and the furnace bottom solid felt ring body 1 by the protective sleeve 2, and the arrangement of the heat dissipation hole groove 3 makes it convenient for heat to be dissipated through the heat dissipation hole groove 3 during heat dissipation.

[0033] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A new type of single crystal furnace thermal field bottom solid felt ring structure, characterized by: It comprises a furnace bottom felt ring body (1) for supporting, wherein a connecting assembly is arranged on the furnace bottom felt ring body (1); The connection assembly comprises a protective sleeve (2) sleeved on the outside of a furnace bottom felt ring body (1); the cross-sectional shapes of the protective sleeve (2) and the furnace bottom felt ring body (1) are both arranged in an annular shape; and a plurality of heat dissipation holes (3) are provided through the outside of the protective sleeve (2); A reinforcing positioning ring (5) is provided in the middle of the protective sleeve body (2).

2. According to claim 1, a novel single crystal furnace thermal field bottom solid felt ring structure is characterized by: The cross-sectional shapes of the protective sleeve (2) and the furnace bottom felt ring body (1) are both arranged to be annular; the protective sleeve (2) is sleeved on the outside of the furnace bottom felt ring body (1) and is detachably connected to the furnace bottom felt ring body (1).

3. The novel single crystal furnace thermal field bottom solid felt ring structure according to claim 1 is characterized by: The reinforcing positioning ring (5) is detachably connected to the protective sleeve body (2), and a plurality of reinforcing external support extension rods (6) are distributed in the middle of the reinforcing positioning ring (5) and along the circumference of the axis point of the reinforcing positioning ring (5).

4. The novel single crystal furnace thermal field bottom solid felt ring structure according to claim 3 is characterized by: One end of each of the plurality of reinforced external support extension rods (6) extends to the inner wall of the reinforced positioning ring (5) and is detachably connected to the reinforced positioning ring (5).

5. The novel single crystal furnace thermal field bottom solid felt ring structure according to claim 1 is characterized by: A hollow heat-insulating cavity (4) for isolating heat conduction is provided in the middle of the furnace bottom felt ring body (1).

Images