Wedge error compensation device
By adopting a design that does not require complex optical design and precision manufacturing process in the wedge error compensation device, combined with the series connection of the ring-shaped structure and passive active compensation unit, the shortcomings of wedge error compensation in the prior art are solved, and higher compensation accuracy and range are achieved, as well as stability and performance for changes in environmental conditions.
Patent Information
- Application Number
- CN202421453680.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-25
- Publication Date
- 2025-04-11
- Estimated Expiration
- 2034-06-25
AI Technical Summary
When solving wedge errors, the prior art has the problem of being sensitive to changes in environmental conditions, and the compensation range and accuracy are limited, making it difficult to effectively compensate in various situations.
Using a wedge error compensation device that does not require complex optical design and precision manufacturing processes, space is saved through the annular structure, and the compensation accuracy and range are improved through the passive and active wedge error compensation unit in series.
It reduces the cost and complexity of the system, improves the stability and performance of environmental conditions changes, enhances the compensation accuracy and range, and solves the shortcomings of wedge error compensation in the prior art.
Smart Images
Figure CN222749470U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of wafer processing, and particularly relates to a wedge error compensation device. Background Art
[0002] In wafer processing, wedge error refers to the non-flatness or non-uniformity of the wafer surface, which is usually manifested as a slight tilt or thickness variation at the edge or diameter of the wafer. This error may be caused by a variety of factors, including mechanical stress during wafer manufacturing, cutting machine deviation during the cutting process, and unstable clamping system. When the wafer is cut into chips or devices, the wedge error may cause the size, shape or thickness of the cut chips or devices to be inconsistent, thus affecting their performance and reliability.
[0003] In order to solve the problems caused by wedge error, a series of measures need to be taken during wafer processing to reduce or compensate for this error. The current common wedge error compensation method is to introduce specific optical elements, such as wedge lenses or prisms, into the optical system to adjust the optical path to offset the error caused by gaps or misalignments, or to adjust the optical path in real time by accurately controlling the position or angle of the optical element through a dynamic adjustment system to eliminate the wedge error. For example, a piezoelectric ceramic or motor-driven adjustment device can achieve small adjustments. Although these technologies can reduce the wedge error to a certain extent, they still have some defects or shortcomings, including: (1) Some wedge error compensation technologies are sensitive to changes in environmental conditions (such as temperature, vibration, etc.), thereby affecting the stability and performance of the system; (2) Some wedge error compensation technologies are often limited by the dynamic range and can only achieve effective compensation under limited conditions, and may not be flexible or applicable in some cases. Therefore, in view of the above problems, a wedge error compensation device provided by the utility model is of great significance. Utility Model Content
[0004] The utility model provides a wedge error compensation device, which does not require complex optical design and precise manufacturing process, thereby effectively reducing the cost and complexity of the system, and has low sensitivity to changes in environmental conditions such as temperature and vibration, thereby ensuring the stability and performance of the system; by adopting a circular ring structure, space is effectively saved, and by connecting passive and active wedge error compensation units in series, the compensation accuracy and compensation range are greatly improved, and the problems in the background technology are solved in summary.
[0005] In order to solve the above technical problems, the utility model is achieved through the following technical solutions:
[0006] The utility model provides a wedge error compensation device, comprising a horizontal auxiliary unit, a wedge error compensation unit is arranged directly below the horizontal auxiliary unit, and a chuck unit is arranged on the wedge error compensation unit;
[0007] The horizontal auxiliary unit includes a base body, which is circular, with a reference plate arranged below it, and a plurality of position sensors and a rotary cylinder arranged on the base body, a spring sheet is fixedly connected to one end of the rotary cylinder, and a small ball is arranged at the other end of the spring sheet, and the small ball is in contact with the reference plate;
[0008] The wedge error compensation unit includes a passive error compensation module and a hexapod, the hexapod is located below the wedge error compensation unit, the passive error compensation module is located above the hexapod, and a pressure sensor is installed between the passive error compensation module and the hexapod;
[0009] The passive error compensation module includes a lower base plate and a middle base plate. The lower base plate is provided with a socket, in which a tension spring is installed. The lower base plate is also provided with a hole for installing a low-friction cylinder, in which a low-friction cylinder is installed. A floating joint is provided at one end of the low-friction cylinder, one end of the floating joint is connected to the middle base plate, and the other end of the floating joint is connected to the lower base plate. The middle base plate is installed on the lower base plate through a tension spring. A guide plate is installed on the middle base plate, and a guide bearing is provided on the guide plate. The guide bearing is in contact with the lower base plate.
[0010] Furthermore, there are three position sensors, and the angle between every two adjacent position sensors is 120°.
[0011] Furthermore, the number of the rotating cylinders is the same as the position sensor, and the distribution position of each rotating cylinder corresponds one-to-one to the position sensor.
[0012] Furthermore, each of the position sensors is provided with a sensor protection column.
[0013] Furthermore, the middle base plate and the lower base plate are both in a circular ring shape, and a limiting screw is installed between the middle base plate and the lower base plate.
[0014] Furthermore, there are three low-friction cylinders, three tension springs and three guide bearings, and the angle between every two adjacent low-friction cylinders, three tension springs and three guide bearings is 120°.
[0015] Furthermore, the hexapod has six degrees of freedom in the directions of X, Y, Z, θx, θy, and θz.
[0016] Compared with the prior art, the utility model has the following beneficial effects:
[0017] (1) When in use, the wedge error compensation device of the utility model does not require complex optical design and precise manufacturing process, thereby effectively reducing the cost and complexity of the system, and is less sensitive to changes in environmental conditions such as temperature and vibration, thereby ensuring the stability and performance of the system;
[0018] (2) When in use, the wedge error compensation device of the utility model effectively saves space by adopting a circular ring structure, and greatly improves the compensation accuracy and compensation range by connecting passive and active wedge error compensation units in series.
[0019] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0021] Figure 1 It is a three-dimensional structural schematic diagram of a wedge error compensation device of the utility model;
[0022] Figure 2 It is a three-dimensional structural schematic diagram of the wedge error compensation unit in the utility model;
[0023] Figure 3 It is a structural cross-sectional view of the passive error compensation module in the utility model.
[0024] In the accompanying drawings, the components represented by the reference numerals are listed as follows:
[0025] 1. Horizontal auxiliary unit; 11. Position sensor; 12. Sensor protection column; 13. Rotary cylinder; 14. Small ball; 15. Base; 16. Reference plate; 17. Spring; 2. Chuck unit; 3. Wedge error compensation unit; 31. Lower base plate; 311. Tension spring; 315. Guide plate; 317. Limit screw; 32. Low friction cylinder; 33. Middle base plate; 37. Guide bearing; 38. Floating joint; 39. Pressure sensor; 4. Hexapod. DETAILED DESCRIPTION
[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0027] In the description of the present invention, it should be understood that terms such as "relative", "one end", "inside", "lateral", "end", "two ends", "both sides", "front", "one end face", "the other end face" and the like indicating orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.
[0028] See also Figure 1-3 As shown, a wedge error compensation device of the utility model comprises a horizontal auxiliary unit 1, a wedge error compensation unit 3 is arranged directly below the horizontal auxiliary unit 1, and a chuck unit 2 is arranged on the wedge error compensation unit 3;
[0029] The horizontal auxiliary unit 1 includes a base 15, which is circular, and a reference plate 16 is arranged below the base 15. A plurality of position sensors 11 and a rotary cylinder 13 are arranged on the base 15. A spring 17 is fixedly connected to one end of the rotary cylinder 13, and a small ball 14 is arranged at the other end of the spring 17. The small ball 14 contacts the reference plate 16.
[0030] The wedge error compensation unit 3 includes a passive error compensation module and a hexapod 4. The hexapod 4 is located below the wedge error compensation unit 3. When the hexapod 4 is lifted, the wedge error compensation unit 3 makes the chuck unit 2 touch the horizontal auxiliary unit 1. The passive error compensation module is located above the hexapod 4. A pressure sensor 39 is installed between the passive error compensation module and the hexapod 4. The pressure sensor 39 is connected to the passive error compensation module and the hexapod 4 through screws.
[0031] The passive error compensation module includes a lower base plate 31 and a middle base plate 33. The lower base plate 31 is provided with a socket, in which a tension spring 311 is installed. The lower base plate 31 is also provided with a hole for installing a low-friction cylinder, in which a low-friction cylinder 32 is installed. A floating joint 38 is provided at one end of the low-friction cylinder 32, one end of the floating joint 38 is connected to the middle base plate 33, and the other end of the floating joint 38 is connected to the lower base plate 31. The middle base plate 33 is installed on the lower base plate 31 through the tension spring 311. A guide plate 315 is installed on the middle base plate 33, and a guide bearing 37 is provided on the guide plate 315. The guide bearing 37 is in contact with the lower base plate 31.
[0032] There are three position sensors 11 , and the angle between every two adjacent position sensors 11 is 120°.
[0033] The number of the rotary cylinders 13 is the same as the position sensors 11 , and the distribution position of each rotary cylinder 13 corresponds to the position sensor 11 one by one.
[0034] Wherein, each position sensor 11 is provided with a sensor protection column 12 .
[0035] The middle base plate 33 and the lower base plate 31 are both in a circular ring shape, and a limiting screw 317 is installed between the middle base plate 33 and the lower base plate 31 .
[0036] There are three low-friction cylinders 32 , three tension springs 311 and three guide bearings 37 , and the angle between every two adjacent low-friction cylinders 32 , three tension springs 311 and three guide bearings 37 is 120°.
[0037] The hexapod 4 has six degrees of freedom in the directions of X, Y, Z, θx, θy, and θz.
[0038] The circuits, electronic components and chip modules involved in the utility model are all existing technologies and can be fully implemented by those skilled in the art. Needless to say, the content protected by the utility model does not involve improvements to software and methods.
[0039] The standard parts used in the application documents can all be purchased from the market. All the components in this application document can be customized according to the description in the specification and drawings. The specific connection methods of each part adopt mature conventional means such as bolts, rivets, welding, etc. in the prior art. Machinery, parts and equipment all adopt conventional models in the prior art. The electrical components appearing in this article are all electrically connected to the external main controller and 220V AC power, and the main controller can be a conventional known device that controls the LED lamp body, etc.
[0040] The working principle of the utility model is:
[0041] When the utility model is in use, the hexapod 4 is first lowered to the zero position, and the low-friction cylinder 32 is raised to a floating state until the position sensor 11 is retracted, and then the rotating cylinder 13 is opened, and the ball 14 is rotated to between the chuck unit 2 and the reference plate 16, and the hexapod 4 is raised. At this time, the chuck unit 2 contacts the ball 14, and the position sensor 11 is pushed out and moves upward again, so that the spring piece 17 is deformed, the ball 14 contacts the reference plate 16, and the pressure sensor 39 has a reading. At this time, the reference plate 16 and the chuck unit 2 are parallel, and then the position sensor 11 is cleared, and the low-friction cylinder 32 is pulled back to a fastened state, and the hexapod 4 is lowered to its original position, the rotating cylinder 13 returns to its original position, and the ball 14 follows it back to its original position. After that, the hexapod 4 rises again to the detection range of the position sensor 11. At this time, according to the value of the position sensor 11, the hexapod 4 is adjusted to make the value of the position sensor 11 consistent with the previous value, and the entire wedge error compensation work can be completed.
[0042] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.
Claims
1. A wedge error compensation device, characterized in that: It comprises a horizontal auxiliary unit, a wedge error compensation unit is arranged directly below the horizontal auxiliary unit, and a chuck unit is arranged on the wedge error compensation unit; The horizontal auxiliary unit includes a base body, which is circular, with a reference plate arranged below it, and a plurality of position sensors and a rotary cylinder arranged on the base body, a spring sheet is fixedly connected to one end of the rotary cylinder, and a small ball is arranged at the other end of the spring sheet, and the small ball is in contact with the reference plate; The wedge error compensation unit includes a passive error compensation module and a hexapod, the hexapod is located below the wedge error compensation unit, the passive error compensation module is located above the hexapod, and a pressure sensor is installed between the passive error compensation module and the hexapod; The passive error compensation module includes a lower base plate and a middle base plate. The lower base plate is provided with a socket, in which a tension spring is installed. The lower base plate is also provided with a hole for installing a low-friction cylinder, in which a low-friction cylinder is installed. A floating joint is provided at one end of the low-friction cylinder, one end of the floating joint is connected to the middle base plate, and the other end of the floating joint is connected to the lower base plate. The middle base plate is installed on the lower base plate through a tension spring. A guide plate is installed on the middle base plate, and a guide bearing is provided on the guide plate. The guide bearing is in contact with the lower base plate.
2. A wedge error compensation device according to claim 1, characterized in that: There are three position sensors, and the angle between every two adjacent position sensors is 120°.
3. A wedge error compensation device according to claim 1, characterized in that: The number of the rotary cylinders is the same as the position sensor, and the distribution position of each rotary cylinder corresponds to the position sensor one by one.
4. A wedge error compensation device according to claim 1, characterized in that: Each of the position sensors is provided with a sensor protection column.
5. The wedge error compensation device according to claim 1, characterized in that: The middle base plate and the lower base plate are both in annular shape, and limiting screws are installed between the middle base plate and the lower base plate.
6. A wedge error compensation device according to claim 1, characterized in that: The number of the low-friction cylinders, the tension springs and the guide bearings is three, and the angle between every two adjacent low-friction cylinders, the tension springs and the guide bearings is 120°.
7. A wedge error compensation device according to claim 1, characterized in that: The hexapod has six degrees of freedom in the directions of X, Y, Z, θx, θy, and θz.