Vertical moving platform with high-precision positioning function

Abstract

The vertical moving platform with the high-precision positioning function comprises a base, vertical beams are fixedly connected to the left side and the right side of the upper end face of the base, longitudinal moving devices are arranged on the left vertical beam and the right vertical beam, a cross beam is movably connected to the upper portions of the vertical beams, and a transverse moving device is arranged in the cross beam; a supporting seat is movably connected to the middle of the transverse moving device, air flotation devices are fixedly connected to the four corners of the upper end face of a transverse plate on the lower portion of the supporting seat, a platform is fixedly connected to the upper portions of the air flotation devices, and lifting devices are arranged on the left side and the right side of the upper end face of the transverse plate on the lower portion of the supporting seat. The upper portion of the lifting device is fixedly connected with the lower end face of the platform, an air conveying device is arranged in a transverse plate on the lower portion of the supporting seat, the device is simple in structure and convenient to operate, and the stability of the vertical moving platform is effectively improved.

Description

Technical Field

[0001] The present disclosure specifically discloses the technical field of precision instruments, and in particular relates to a vertical moving platform with high-precision positioning. Background Art

[0002] Modern manufacturing technology is developing towards high speed, precision and modularization. High-tech manufacturing industries such as information not only put forward higher and higher requirements on the performance of processing equipment, such as positioning accuracy and speed, but also put forward more and more stringent requirements on production. For example, optoelectronic devices, semiconductor chips and other microelectronic products all require processing and production in an ultra-clean environment.

[0003] According to application number 202311398656.9, a vertical moving platform with high-precision positioning is disclosed, which relates to the technical field of precision instruments. A vertical moving platform with high-precision positioning includes a base and a second moving module, two first moving modules are arranged opposite to each other on the top side of the base, two ends of the second moving module are slidably installed above the two first moving modules, the second moving module is provided with a third moving module, a loading platform is movably provided on the third moving module, the loading platform is arranged horizontally, and the first moving module, the second moving module and the third moving module can realize the three-dimensional movement of the loading platform;

[0004] The existing vertical moving platform can only perform simple three-dimensional movement, which is easy to cause shaking or jittering during the lifting process, thus affecting the accuracy of the processed workpiece. In addition, the existing air flotation device cannot achieve uniform air supply and cannot achieve stable support for the displacement mechanism. Therefore, we propose a vertical moving platform with high-precision positioning. Summary of the invention

[0005] In view of the above-mentioned defects or deficiencies in the prior art, the present application aims to provide a structure that integrates an air floating support and a lifting device.

[0006] A vertical movable platform with high-precision positioning comprises a base, wherein the left and right sides of the upper end surface of the base are fixedly connected with vertical beams, the left and right vertical beams are provided with longitudinal movable devices, the upper parts of the vertical beams are movably connected with cross beams, the longitudinal movable devices are movably connected with the cross beams, a transverse movable device is arranged inside the cross beams, a support seat is movably connected with an air flotation device at the middle part of the transverse movable device, the four corners of the upper end surface of the lower cross plate of the support seat are fixedly connected with the air flotation device, the upper part of the air flotation device is fixedly connected with a platform, the left and right sides of the upper end surface of the lower cross plate of the support seat are provided with lifting devices, the upper part of the lifting device is fixedly connected with the lower end surface of the platform, and an air transmission device is arranged inside the lower cross plate of the support seat.

[0007] According to the technical solution provided in the embodiment of the present application, the flotation device includes a pneumatic diaphragm, a telescopic rod and a support sleeve. The support sleeve is fixedly connected to the four corners of the upper end surface of the lower horizontal plate of the support seat, the bottom end surface of the inner circle of the support sleeve is fixedly connected to the telescopic rod, the upper end surface of the telescopic rod is fixedly connected to the four corners of the lower end surface of the platform, the outer circle of the upper end surface of the support sleeve is evenly opened with through holes, and the upper end surface of the support sleeve is evenly fixedly connected with a pneumatic diaphragm, and the pneumatic diaphragm covers the outside of the through holes.

[0008] According to the technical solution provided in the embodiment of the present application, the lifting device includes a vertical plate, a servo motor, a bidirectional screw rod, a limit rod, a moving block, a connecting seat and a support rod, and two groups of vertical plates with the same structure are fixedly connected to the left and right sides of the upper end surface of the lower horizontal plate of the support seat, the front end surface of the front vertical plate is fixedly connected to the servo motor, the motor shaft of the servo motor extends through and extends to the rear side of the front vertical plate and is fixedly connected to the bidirectional screw rod, the end of the bidirectional screw rod is movably connected to the front end surface of the rear vertical plate, and a limit rod is provided on the side close to the bidirectional screw rod, and moving blocks are sleeved on the front and rear sides of the outer walls of the bidirectional screw rod and the limit rod, the upper end surfaces of the front and rear moving blocks and the lower end surface of the platform are fixedly connected to the connecting seat, and the inner cavities of the upper connecting seat and the lower connecting seat are movably connected to the support rod.

[0009] According to the technical solution provided in the embodiment of the present application, threaded holes matching the front and rear threads on the outside of the bidirectional screw rod are respectively provided on the sides of the inner cavities of the front and rear moving blocks away from each other, and through holes matching the limit rod are provided on the sides of the inner cavities of the front and rear moving blocks close to each other.

[0010] According to the technical solution provided in the embodiment of the present application, the gas delivery device includes an air inlet pipe, an air outlet pipe, a gas collecting cylinder, an air delivery pipe and an opening. A gas collecting cylinder is opened in the middle of the inner cavity of the lower horizontal plate of the support seat, and an air inlet pipe and an air outlet pipe are opened in the middle of the front and rear end surfaces of the lower horizontal plate of the support seat respectively. The ends of the air inlet pipe and the air outlet pipe are connected with the gas collecting cylinder. Openings are opened at the four corners of the upper end surface of the lower horizontal plate of the support seat, and the openings are connected with the inner cavity of the support sleeve. A gas delivery pipe is opened between the opening and the gas collecting cylinder.

[0011] According to the technical solution provided in the embodiment of the present application, the rear end surface of the platform is in contact with the vertical plate of the support seat, and the upper end surface of the platform is evenly provided with grooves.

[0012] In summary, the present application discloses a vertical moving platform with high-precision positioning.

[0013] Beneficial effects:

[0014] 1. Through the vertical beam, horizontal beam, support seat, longitudinal moving device and horizontal moving device, start the longitudinal moving device and the horizontal moving device to drive the horizontal beam to move forward and backward, and at the same time drive the support seat to move left and right, ensuring that the workpiece is located below the processing tool, thereby improving the applicability of the platform.

[0015] 2. Through the cooperation of the air flotation device and the lifting device, the stable support of the platform is achieved, the precise movement of the platform is guaranteed, and the problem of interference with the platform due to external vibration is avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

[0017] Figure 1 It is a schematic diagram of a vertical mobile platform for high-precision positioning in this application;

[0018] Figure 2 It is a schematic diagram of the top view of the vertical mobile platform for high-precision positioning in this application;

[0019] Figure 3 This application Figure 2 The enlarged structural diagram at A in the middle;

[0020] Figure 4 It is a schematic diagram of the internal structure of the support base in this application.

[0021] In the figure: 1. base; 2. vertical beam; 3. longitudinal moving device; 4. horizontal beam; 5. horizontal moving device; 6. support seat; 7. air flotation device; 71. pneumatic film; 72. telescopic rod; 73. supporting sleeve; 8. air supply device; 81. air inlet pipe; 82. air outlet pipe; 83. air collecting cylinder; 84. air supply pipe; 85. opening; 9. platform; 10. vertical plate; 11. servo motor; 12. bidirectional screw rod; 13. limit rod; 14. moving block; 15. connecting seat; 16. support rod. DETAILED DESCRIPTION

[0022] The present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the relevant invention, rather than to limit the invention. It is also necessary to explain that, for ease of description, only the parts related to the invention are shown in the accompanying drawings.

[0023] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0024] As mentioned in the background technology, the vertical moving platform in the prior art can only perform simple three-dimensional movement, which is prone to shaking or jittering during the lifting process, thereby affecting the accuracy of the processed workpiece. In addition, the existing air flotation device cannot achieve uniform air supply and cannot provide stable support for the displacement mechanism. The present disclosure proposes a structure that combines air flotation support and a lifting device.

[0025] Example 1

[0026] See also Figure 1 A vertical movable platform with high-precision positioning includes a base 1, vertical beams 2 are fixedly connected to the left and right sides of the upper end surface of the base 1, and the vertical beams 2 extend to the right side of the upper end surface of the base 1, and a longitudinal movable device 3 is arranged on the left and right vertical beams 2, and a cross beam 4 is movably connected to the upper part of the vertical beam 2, and the longitudinal movable device 3 is movably connected to the cross beam 4, and the cross beam 4 is driven to move forward and backward by starting the longitudinal movable device 3, thereby driving the platform 9 to move forward and backward, and a transverse movable device 5 is arranged inside the cross beam 4, and a support seat 6 is movably connected to the middle part of the transverse movable device 5, and the support seat 6 is a vertical Z-shaped structure, and the upper transverse plate and the vertical plate of the support seat 6 are respectively in contact with the upper end surface and the front side surface of the cross beam 4, so as to effectively ensure the stability of the support seat 6.

[0027] See also Figure 1 In order to ensure the stable vertical movement of the platform 9, air flotation devices 7 are fixedly connected to the four corners of the upper end surface of the lower horizontal plate of the support seat 6, and the platform 9 is fixedly connected to the upper part of the air flotation device 7. In order to further ensure the stability of the platform 9, lifting devices are provided on both sides of the upper end surface of the lower horizontal plate of the support seat 6, and the upper part of the lifting device is fixedly connected to the lower end surface of the platform 9. In order to ensure that the air flotation device 7 can evenly supply air, an air supply device 8 is provided inside the lower horizontal plate of the support seat 6 to ensure that the platform 9 can move up and down stably.

[0028] See also Figure 2 In order to ensure the stability of the platform 9 itself and to ensure the horizontal performance of the platform 9 in the initial position, an air flotation device 7 is formed by a pneumatic film sheet 71, a telescopic rod 72 and a support sleeve 73. Support sleeves 73 are fixedly connected at the four corners of the upper end surface of the lower horizontal plate of the support seat 6, and the support sleeve 73 is an annular sleeve. The bottom end surface of the inner circle of the support sleeve 73 is fixedly connected with the telescopic rod 72, and the upper end surface of the telescopic rod 72 is fixedly connected to the four corners of the lower end surface of the platform 9. In order to achieve stable support of the platform 9, through holes are evenly opened on the outer circle of the upper end surface of the support sleeve 73, and the through holes are connected to the support sleeve 73. A pneumatic film sheet 71 is evenly fixedly connected to the upper end surface of the support sleeve 73, and the pneumatic film sheet 71 covers the outside of the through holes. The gas is inflated through the support sleeve 71 and the through holes, and the pneumatic film sheet 71 expands, driving the telescopic rod 72 to automatically extend, thereby achieving stable support of the platform 9.

[0029] See also Figure 3 In order to further ensure the stability of the platform 9, a lifting device is formed by a vertical plate 10, a servo motor 11, a bidirectional screw rod 12, a limit rod 13, a moving block 14, a connecting seat 15 and a support rod 16. Two sets of vertical plates 10 with the same structure are fixedly connected to the left and right sides of the upper end surface of the horizontal plate at the bottom of the support seat 6, and the two sets of vertical plates 10 are arranged correspondingly in front and back. The front end surface of the front side vertical plate 10 is fixedly connected to the servo motor 11, and the motor shaft of the servo motor 11 extends through and extends to the rear side of the front side vertical plate 10 and is fixedly connected to the bidirectional screw rod 12, and the end of the bidirectional screw rod 12 is movably connected to the front end surface of the rear side vertical plate 10, and a limit rod 13 is arranged on the side close to the bidirectional screw rod 12, and the limit rod 1 The front and rear end surfaces are respectively fixedly connected to the right sides of the opposite surfaces of the front and rear upright plates 10, and the moving blocks 14 are sleeved on the front and rear sides of the outer walls of the bidirectional screw rod 12 and the limiting rod 13. The upper end surfaces of the front and rear moving blocks 14 and the lower end surface of the platform 9 are fixedly connected with connecting seats 15, and the upper connecting seats 15 are provided with two groups. The inner cavities of the upper connecting seats 15 and the lower connecting seats 15 are movably connected with support rods 16. By starting the servo motor 11, the bidirectional screw rod 12 is driven to rotate, and the limiting rod 13 is used to limit the position, so as to drive the two groups of moving blocks 14 to approach or move away from each other, thereby driving the support rod 16 to swing, and adjusting the inclination angle of the support rod 16. The platform 9 is supported by the support rod 16, and the stability of the platform 9 is effectively guaranteed.

[0030] See also Figure 3 In order to ensure the stability of the moving block 14, threaded holes matching the front and rear threads on the outside of the bidirectional screw rod 12 are respectively opened on the side away from the inner cavity of the front and rear moving blocks 14, and through holes matching the limit rod 13 are provided on the side close to the inner cavity of the front and rear moving blocks 14 to ensure the stable movement of the front and rear moving blocks 14, thereby avoiding the phenomenon of jamming of the moving blocks 14 and ensuring the stability of the platform 9.

[0031] See also Figure 4 In order to ensure that the height at which the starting film 71 is extended is consistent, a gas delivery device 8 is formed by an air inlet pipe 81, an air outlet pipe 82, an air collecting cylinder 83, an air delivery pipe 84 and an opening 85. A air collecting cylinder 83 is opened in the middle of the inner cavity of the lower horizontal plate of the support seat 6, and an air inlet pipe 81 and an air outlet pipe 82 are opened in the middle of the front and rear end surfaces of the lower horizontal plate of the support seat 6 respectively, and the ends of the air inlet pipe 81 and the air outlet pipe 82 are connected to the air collecting cylinder 83, and openings 85 are opened at the four corners of the upper end surface of the lower horizontal plate of the support seat 6, and the openings 85 are connected to the inner cavity of the support sleeve 73, and an air delivery pipe 84 is opened between the opening 85 and the air collecting cylinder 83, and the air delivery pipe 84 has the same length.

[0032] Example 2

[0033] See also Figure 2In order to ensure the stability of the workpiece on the upper end of the platform 9, the rear end of the platform 9 is fitted with the vertical plate of the support seat 6, and grooves are evenly opened on the upper end of the platform 9. The grooves can collect processing waste chips to avoid deviation in the installation of the workpiece and affect the accuracy of the workpiece.

[0034] Working principle: When in use, according to the processing requirements, use an external power supply connection to start the longitudinal moving device 3 and the transverse moving device 5, drive the crossbeam 4 to move forward and backward, and at the same time drive the support seat 6 to move left and right to ensure that the workpiece is located below the processing tool. According to the height of the workpiece from the tool, it is connected to the air inlet pipe 81 through the air pipe, and the gas is inflated through the support sleeve 71 and the through hole. The pneumatic film 71 expands, driving the telescopic rod 72 to automatically extend, and at the same time starting the left and right servo motors 11. The motor shafts of the servo motors 11 rotate simultaneously and in the same direction, driving the bidirectional screw rod 12 to rotate, and are limited by the limit rod 13, driving the two groups of moving blocks 14 to move closer or farther away, thereby driving the support rod 16 to swing, and adjusting the inclination angle of the support rod 16. The platform 9 is supported by the support rod 16 to effectively ensure the stability of the platform 9.

[0035] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept. For example, the above features are replaced with the technical features with similar functions disclosed in this application (but not limited to) by each other.

Claims

1. A vertical moving platform with high-precision positioning, comprising a base (1), characterized in that: The left and right sides of the upper end surface of the base (1) are fixedly connected with vertical beams (2), and the left and right vertical beams (2) are provided with longitudinal movement devices (3). The upper part of the vertical beam (2) is movably connected with a horizontal beam (4), and the longitudinal movement device (3) is movably connected with the horizontal beam (4). A horizontal movement device (5) is provided inside the horizontal beam (4), and the middle part of the horizontal movement device (5) is movably connected with a support seat (6). The four corners of the upper end surface of the lower horizontal plate of the support seat (6) are fixedly connected with air flotation devices (7), and the upper part of the air flotation device (7) is fixedly connected with a platform (9). The left and right sides of the upper end surface of the lower horizontal plate of the support seat (6) are provided with lifting devices, and the upper part of the lifting device is fixedly connected to the lower end surface of the platform (9). The lower horizontal plate of the support seat (6) is provided with a gas transmission device (8).

2. A vertical moving platform with high-precision positioning according to claim 1, characterized in that: The air flotation device (7) comprises a pneumatic film (71), a telescopic rod (72) and a support sleeve (73); the support sleeve (73) is fixedly connected to the four corners of the upper end surface of the lower horizontal plate of the support seat (6); the bottom end surface of the inner circle of the support sleeve (73) is fixedly connected to the telescopic rod (72); the upper end surface of the telescopic rod (72) is fixedly connected to the four corners of the lower end surface of the platform (9); the outer circle of the upper end surface of the support sleeve (73) is evenly provided with through holes; the upper end surface of the support sleeve (73) is evenly fixedly connected to the pneumatic film (71); the pneumatic film (71) covers the outside of the through holes.

3. The vertical moving platform with high-precision positioning according to claim 1, characterized in that: The lifting device comprises a vertical plate (10), a servo motor (11), a bidirectional screw rod (12), a limit rod (13), a moving block (14), a connecting seat (15) and a supporting rod (16); two groups of vertical plates (10) with the same structure are fixedly connected to the left and right sides of the upper end surface of the lower horizontal plate of the supporting seat (6); the front end surface of the vertical plate (10) on the front side is fixedly connected to the servo motor (11); the motor shaft of the servo motor (11) extends through and extends to the rear side of the vertical plate (10) on the front side and is fixedly connected to the bidirectional screw rod (12), the end of the bidirectional screw rod (12) is movably connected to the front end surface of the rear vertical plate (10), a limit rod (13) is arranged on the side close to the bidirectional screw rod (12), and the front and rear sides of the outer walls of the bidirectional screw rod (12) and the limit rod (13) are sleeved with moving blocks (14), the upper end surfaces of the front and rear moving blocks (14) and the lower end surface of the platform (9) are fixedly connected with connecting seats (15), and the inner cavities of the upper connecting seat (15) and the lower connecting seat (15) are movably connected with support rods (16).

4. The vertical moving platform with high-precision positioning according to claim 3, characterized in that: The inner cavities of the front and rear moving blocks (14) are separated from each other by threaded holes that match the outer front and rear threads of the bidirectional screw rod (12), and the inner cavities of the front and rear moving blocks (14) are close to each other by through holes that match the limit rod (13).

5. The vertical moving platform with high-precision positioning according to claim 1, characterized in that: The gas delivery device (8) comprises an air inlet pipe (81), an air outlet pipe (82), an air collecting cylinder (83), an air delivery pipe (84) and an opening (85); a gas collecting cylinder (83) is provided in the middle of the inner cavity of the lower horizontal plate of the support seat (6); an air inlet pipe (81) and an air outlet pipe (82) are provided in the middle of the front and rear end surfaces of the lower horizontal plate of the support seat (6), respectively; the ends of the air inlet pipe (81) and the air outlet pipe (82) are both connected to the air collecting cylinder (83); openings (85) are provided at the four corners of the upper end surface of the lower horizontal plate of the support seat (6); the openings (85) are connected to the inner cavity of the support sleeve (73); and a gas delivery pipe (84) is provided between the opening (85) and the air collecting cylinder (83).

6. The vertical moving platform with high-precision positioning according to claim 1, characterized in that: The rear end surface of the platform (9) is in contact with the vertical plate of the support seat (6), and the upper end surface of the platform (9) is evenly provided with grooves.

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