Wafer operation device of vacuum evaporator

Abstract

The utility model discloses a wafer transfer device of a vacuum evaporator, which belongs to the technical field of wafer evaporation and comprises a mechanical arm and a tray clamping device connected with the mechanical arm, and the tray clamping device comprises a fixing frame, a clamping jaw assembly and a suction assembly. The clamping jaw assembly adjusts an air rod to move up and down through an air cylinder, meanwhile, negative pressure of the air rod is combined to suck a pressing plate, a wafer to be evaporated is covered with the pressing plate under operation of a mechanical arm, and automatic rotation of the pressing plate is achieved. Secondly, the iris mechanism is arranged at the bottom of the fixing frame, the iris mechanism can drive the multiple clamping jaws to reciprocate in the radial direction of the tray, locking and unlocking of the tray are achieved, and automatic transfer of the tray can be achieved through the mechanical disc when the tray is in the locked state; according to the device, the suction assembly of the pressing plate and the clamping assembly of the tray are combined on one mechanical arm, the number of the mechanical arms is reduced, meanwhile, the working area during working is reduced, and the rotating efficiency of the tray and the pressing plate is greatly improved; and finally, the suction cup mechanical arm is combined, automatic operation of the wafer, the tray and the pressing plate is mechanically achieved, the evaporation efficiency of the wafer is improved, and the evaporation cost of the wafer is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to a wafer operating device of a vacuum evaporation machine. Background Art

[0002] The wafer needs surface evaporation treatment during the processing. The current practice is that the operator uses a vacuum pen or a robotic arm to suck the wafer onto a tray, and then places a pressure plate on the top of the wafer, and then places the tray with the wafer and the pressure plate in the tray mounting hole of the pot. After the evaporation is completed, the pressure plate and the wafer are removed in turn and placed in designated positions respectively. The above process is completely manually operated and requires the cooperation of multiple people, resulting in a high evaporation cost for the wafer. At the same time, the wafer needs to be operated in a dust-free environment. Too many operators also affect the cleanliness of the operating environment, which can easily cause the wafer to be damaged.

[0003] Although the use of robotic arms can achieve automatic loading and unloading of wafers and improve efficiency to a certain extent, the trays and pressure plates are still manually operated. In order to improve the evaporation efficiency of wafers, it is necessary to design a fully automatic production line to realize automatic clamping of wafers, trays and pressure plates in the pot. Therefore, the automatic grasping of trays and pressure plates is the core content of the production line, and it is necessary to design an automatic grasping device to realize the automatic operation of trays and pressure plates. Utility Model Content

[0004] In view of the problems existing in the prior art, the utility model provides a wafer operation device for a vacuum evaporation machine, which realizes automatic disassembly and assembly of a tray and a pressure plate through the cooperation of a mechanical arm and a gripping device, thereby improving the efficiency of an automatic production line.

[0005] Automatic wafer grabbing before and after evaporation is realized, greatly improving the evaporation efficiency of the wafer.

[0006] The utility model is realized by the following technical solutions:

[0007] A wafer operation device of a vacuum evaporation machine comprises a mechanical arm and a tray clamping device connected thereto, wherein the tray clamping device comprises a fixing frame, a clamping claw assembly and a suction assembly;

[0008] The fixing frame is connected to the mechanical arm;

[0009] The suction assembly comprises a cylinder, a gas rod fixing plate and a gas rod;

[0010] The cylinder is arranged in a fixed frame, the piston of the cylinder is connected to the cylinder fixed plate, a plurality of gas rods are circumferentially distributed on the edge of the cylinder fixed plate, the lower end of the gas rod is connected to a gas pressure diaphragm, the gas rod is connected to the gas source and adsorbs the pressure plate under the action of negative pressure;

[0011] The clamping jaw assembly comprises a gear ring and a clamping jaw;

[0012] The gear ring is rotatably connected to the bottom plate of the fixing frame, and is connected to a plurality of clamping claws through an iris mechanism. The plurality of clamping claws are arranged circumferentially, and the clamping claws are slidably arranged at the bottom of the bottom plate. The iris mechanism can enable the plurality of clamping claws to move synchronously toward the edge of the tray.

[0013] Preferably, a plurality of fixing parts are provided on the side wall of the gas rod fixing plate, the upper end of the gas rod is connected to the fixing part, and the lower end extends downward through the bottom plate, and the circular diameter formed by the plurality of gas rods is smaller than the diameter of the pressure plate.

[0014] Preferably, the gas rods and clamping jaws are alternately distributed around the circumference.

[0015] Preferably, the iris mechanism comprises a linear slide groove and an arc groove;

[0016] The plurality of arc grooves are circumferentially distributed on the gear ring, the plurality of arc grooves have the same rotation direction, one end of the arc groove is close to the center of the gear ring, and the other end extends to the edge of the gear ring, and the gear ring is meshed with the output shaft of the motor;

[0017] The multiple linear slide grooves are arranged on the bottom plate of the fixing frame and are distributed radially. The linear slide grooves are connected with a partial area of ​​the arc groove. A guide part is arranged on the top of the clamping jaw. The upper part of the clamping jaw is arranged in the linear slide groove, and the guide part is located in the arc groove.

[0018] Preferably, the guide portion is a roller arranged on the top of the clamping jaw.

[0019] Preferably, the clamping jaw is connected to the base plate via a guide rail, a guide block is provided at the bottom of the clamping jaw, the guide hole is located in the linear slide groove, and the guide portion is provided on the top of the guide block.

[0020] Preferably, a clamping groove cooperating with a convex ring of the tray is provided at the lower end of the clamping claw and on one side close to the tray.

[0021] Preferably, the fixing frame is provided with a plurality of locking control components, including a fixing base, a lifting module, a clamping arm and a composite cylinder;

[0022] The fixed base is connected to the fixed frame, the composite cylinder is connected to the lifting module, the lifting module is connected to the fixed base, the lower end of the composite cylinder is connected to two clamping arms, and the composite cylinder is used to control the two clamping arms to clamp and rotate the lock buckle.

[0023] Preferably, an image acquisition device is provided at the bottom of the fixing frame for acquiring an image of the tray.

[0024] Preferably, the suction cup robot arm includes a robot arm and a suction cup connected thereto, and the suction cup is used to suck up the wafer.

[0025] Compared with the prior art, the utility model has the following beneficial technical effects:

[0026] The utility model provides a wafer operation device of a vacuum evaporation machine, comprising a mechanical arm and a tray clamping device connected thereto, wherein the tray clamping device comprises a fixing frame, a clamping claw assembly and a suction assembly; the clamping claw assembly mobilizes the gas rod to move up and down through the cylinder, and at the same time, the negative pressure of the gas rod is combined to suck the pressure plate, and the pressure plate is covered on the wafer with evaporation under the operation of the mechanical arm, so as to realize the automatic rotation of the pressure plate; secondly, an iris mechanism is arranged at the bottom of the fixing frame, and the iris mechanism can drive a plurality of clamping claws to reciprocate along the radial direction of the tray, so as to realize the locking and unlocking of the tray, and the tray can realize the automatic transportation of the tray through the mechanical disk in the locked state, and the device combines the suction assembly of the pressure plate and the clamping assembly of the tray on one mechanical arm, thereby reducing the number of mechanical arms and the working area during operation, and greatly improving the rotation efficiency of the tray and the pressure plate; finally, in combination with the suction cup mechanical arm, the automatic operation of the wafer, the tray and the pressure plate is mechanically realized, the evaporation efficiency of the wafer is improved, and the evaporation cost of the wafer is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is the appearance diagram of the fully automatic evaporation device of the utility model;

[0028] Figure 2 This is the internal structure diagram of the fully automatic evaporation device of the utility model;

[0029] Figure 3 This is a plan view of the fully automatic evaporation device of the utility model;

[0030] Figure 4 This is a schematic diagram of the structure of the image acquisition device of the utility model;

[0031] Figure 5 This is a schematic diagram of the structure of the wafer bin group of the utility model;

[0032] Figure 6 This is a structural schematic diagram of the tray rack and the pressure plate rack of the utility model;

[0033] Figure 7 This is a structural schematic diagram of the press plate frame of the utility model;

[0034] Figure 8 This is a schematic diagram of the structure of the tray rack of the utility model;

[0035] Fig. 9 This is a schematic diagram of the structure of the tray clamp of the utility model;

[0036] Fig.10 This is a schematic diagram of the structure of the pallet splint of the utility model;

[0037] Fig.11 This is a schematic diagram of the structure of the tray clamp motor of the utility model;

[0038] Fig.12 It is a schematic diagram of the positions of the mechanical arm, the tray rack and the pressure plate rack of the utility model;

[0039] Fig.13 This is a schematic diagram of the structure of the suction cup mechanical arm of the utility model;

[0040] Fig.14 This is a schematic diagram of the structure of the suction cup of the utility model;

[0041] Fig.15 This is a structural schematic diagram of the pallet mechanical arm of the utility model;

[0042] Fig.16 It is a structural schematic diagram of the tray and pressure plate clamping device of the utility model;

[0043] Fig.17 This is a schematic diagram of the internal structure of the clamping device of the utility model;

[0044] Fig.18 It is a structural schematic diagram of the bracket clamping jaw assembly of the utility model;

[0045] Fig.19 It is a schematic diagram of the sliding structure of the clamping jaw of the utility model;

[0046] Fig. 20 This is a structural schematic diagram of the pressure plate suction assembly of the utility model;

[0047] Fig.21 This is a schematic diagram of the structure of the clamping jaw assembly of the utility model;

[0048] Fig. 22 This is a schematic diagram of the installation of the clamping jaw assembly of the utility model;

[0049] Fig.23 This is a schematic diagram of the structure of the toothed disc of the utility model;

[0050] Fig.24 This is a schematic diagram of the structure of the clamping jaws of the utility model;

[0051] Fig.25 This is a schematic diagram of the structure of the toothed disc and the motor of the utility model;

[0052] Fig.26 This is a schematic diagram of the structure of the lock opening and closing assembly of the utility model;

[0053] Fig. 27 This is a structural schematic diagram of the lifting mechanism of the utility model;

[0054] Fig.28 This is a schematic diagram of the structure of the pot and tripod assembly of the utility model;

[0055] Fig.29 This is a schematic diagram of the structure of the pot fixing assembly of the utility model;

[0056] Fig.30 This is a top view of the pot tripod of the utility model;

[0057] Fig.31 It is a structural schematic diagram of the camera assembly of the utility model;

[0058] Fig.32 It is a plan view of the pot tripod locking assembly of the utility model;

[0059] Fig.33 This is a schematic diagram of the structure of the locking device of the utility model;

[0060] Fig.34 This is a schematic diagram of the structure of the locking assembly of the utility model;

[0061] Fig.35 This is a schematic diagram of the structure of the pot tripod moving device of the utility model;

[0062] Fig.36 This is a schematic diagram of the structure of the tray of the utility model;

[0063] Fig.37 This is a schematic diagram of the installation of the lock and tray of the utility model;

[0064] Fig.38 This is a schematic diagram of the structure of the lock buckle of the utility model;

[0065] Fig.39 It is a schematic diagram of the structure of the spring hole inside the lock buckle of the utility model.

[0066] In the figure: workbench 1, pot trip moving device 2, tray robot arm 3, pressure plate frame 4, tray frame 5, suction cup robot arm 6, image acquisition device 7, wafer bin group 8, wafer 9, pressure plate 10, tray 11, suction cup 12, camera 13, tray clamping device 14; camera 15; pot trip 21, camera assembly 22, lock block 23, moving assembly 24, base plate 25, connecting rod structure 26, lock 27, motor 41, slider 42, moving plate 43, base 44, pulley 45, fixed plate 46, support arm 51, motor 52, clamping plate 53, chuck 54, cam 55, cam groove 56, fixed frame 71, first camera 72, light source 73, light plate 74, second camera 75, motor 81, fixed seat 82, rotating shaft 83, wafer bin 84, flange 141, lock control assembly 142, clamping claw assembly 14 3, suction assembly 144, camera 221, connecting plate 222, support ring sleeve 241, push rod 242, cylinder plate 261, cylinder 262, pull rod 263, adjustment ring 264, hinge seat 265, connecting rod 266, crank arm 267, fixed shaft 268, sliding seat 269, bolt 271, rotating shaft 272, pressure head 237, upper fixing plate 1412, lower fixing plate 1413, cylinder 14 21. Air rod fixing plate 1422. Air rod 1423. Suction cup 1424. Motor 1431. Gear ring 1432. Clamp 1433. Slot 1434. Slider 1435. Roller 1436. Arc groove 1437. Gear 1438. Fixed base 1441. Screw 1442. Slider 1443. Clamp arm 1444. Rotating shaft 1445. Composite cylinder 1446. Motor 1447. DETAILED DESCRIPTION

[0067] The present invention will be further described in detail below in conjunction with the accompanying drawings, which are intended to explain the present invention rather than to limit it.

[0068] On one hand, the utility model provides a wafer operation device of a vacuum evaporation machine, including a suction cup mechanical arm and a tray mechanical arm;

[0069] The suction cup robot arm comprises a robot arm and a suction cup connected thereto, and the suction cup is used for sucking a wafer.

[0070] The pallet robot arm includes a robot arm and a pallet clamping device connected thereto, and the pallet clamping device includes a fixing frame, a locking control component, an image acquisition device, a clamping claw component and a suction component;

[0071] The fixing frame is connected to the mechanical arm;

[0072] The suction assembly comprises a cylinder, a gas rod fixing plate and a gas rod;

[0073] The cylinder is arranged in a fixed frame, and the piston of the cylinder is connected to the cylinder fixed plate. A plurality of fixing parts are arranged on the side wall of the gas rod fixed plate. The upper end of the gas rod is connected to the fixing part, and the lower end extends downward through the bottom plate. The circular diameter formed by the plurality of gas rods is smaller than the diameter of the pressure plate. The lower end of the gas rod is connected to a gas pressure diaphragm. The gas rod is connected to an air source and adsorbs the pressure plate under the action of negative pressure.

[0074] The clamping jaw assembly comprises a gear ring and clamping jaws, and the gas rods and the clamping jaws are alternately distributed around the circumference.

[0075] The gear ring is rotatably connected to the bottom plate of the fixing frame, and is connected to a plurality of clamping claws through an iris mechanism. The plurality of clamping claws are arranged circumferentially, and the clamping claws are slidably arranged at the bottom of the bottom plate. The iris mechanism can enable the plurality of clamping claws to move synchronously toward the edge of the tray.

[0076] The iris mechanism includes a linear slide groove and an arc groove;

[0077] The image acquisition device is arranged at the bottom of the fixing frame and is used for acquiring the image of the tray.

[0078] In some embodiments, the multiple arc grooves are distributed circumferentially on the gear ring, the multiple arc grooves have the same rotation direction, one end of the arc groove is close to the center of the gear ring, and the other end extends to the edge of the gear ring, and the gear ring is meshed with the output shaft of the motor; the multiple linear slide grooves are arranged on the bottom plate of the fixed frame and are radially distributed, the linear slide grooves are connected with partial areas of the arc grooves, a guide portion is arranged on the top of the clamp, the upper part of the clamp is arranged in the linear slide groove, and the guide portion is located in the arc groove.

[0079] In some embodiments, the clamp is connected to the base plate through a guide rail, a guide block is provided at the bottom of the clamp, the guide hole is located in the linear slide groove, the guide part is provided at the top of the guide block, and the guide part is a roller provided on the top of the clamp. The sliding friction resistance between the clamp and the arc-shaped slide groove is reduced through the rolling path. A clamping groove that cooperates with the convex ring of the pallet is provided at the lower end of the clamp and close to the side of the pallet. When the clamp is in the clamping state, the clamping groove is clamped on the flange of the pallet.

[0080] The lock control component includes a fixed base, a lifting module, a clamping arm and a composite cylinder; the fixed base is connected to the fixed frame, the composite cylinder is connected to the lifting module, the lifting module is connected to the fixed base, the lower end of the composite cylinder is connected to two clamping arms, and the composite cylinder is used to control the two clamping arms to clamp and rotate the lock.

[0081] The wafer operation device of the vacuum evaporation machine comprises a suction cup mechanical arm and a tray mechanical arm; the suction cup mechanical arm adopts a suction cup to absorb the wafer, and realizes high-efficiency movement through the mechanical arm, so that the wafer is moved to a target position; at the same time, the tray clamping device adopts a gas rod to absorb the pressure plate, and adopts an iris mechanism to drive multiple clamps to move back and forth along the radial direction of the tray, so as to realize locking and unlocking of the tray, and transport it through the mechanical arm, so as to realize the automatic operation of the wafer, the tray and the pressure plate, thereby improving the evaporation efficiency of the wafer and reducing the evaporation cost of the wafer.

[0082] On the other hand, the utility model provides a fully automatic evaporation device for wafers, which is used to install the wafers on a pot before evaporation, and then move the pot to a vacuum evaporation machine to coat the wafers. After the evaporation is completed, the pot is moved to the evaporation device to automatically take the evaporated wafers. The fully automatic evaporation device for wafers includes the wafer operation device of the above-mentioned vacuum evaporation machine.

[0083] See also Figure 1-30 A fully automatic wafer evaporation device includes a studio, a workbench is arranged in the middle of the studio, a pot moving device 2, a tray robot arm 3, a pressure plate rack 4, a tray rack 5, a suction cup robot arm 6 and an image acquisition device 7 are arranged on the workbench, and the pot device 2, the pressure plate rack 4, the tray rack 5 and the image acquisition device 7 are located within the motion trajectory range of the robot arm.

[0084] The tray rack 5 is provided with trays 11 stacked up and down, the suction cup robot arm 6 places the wafer in the tray through the suction cup, and the pressure plate rack is provided with pressure plates 10 stacked up and down. The tray robot arm 3 places the pressure plate in the tray and is located on the top of the wafer, and then the wafer is transferred to the tray installation position of the pot by the tray robot arm 3, and the tray is fixed with a lock. After all the tray positions of the pot are placed with trays with wafers, the pot device is moved to the positive air evaporation machine to coat the wafer. After the evaporation is completed, the pot is moved to the workbench, and then the tray is removed from the pot by the robot arm, the pressure plate is removed by the robot arm and the evaporated wafer is placed in the corresponding wafer bin to realize automatic evaporation of the wafer.

[0085] See also Figure 5 In this embodiment, two wafer bin groups 8 are included, one group is used to place wafers to be evaporated, and the other group is used to place wafers 9 after evaporation; the wafer bin group includes multiple wafer bins 84, and the multiple wafer bins are stacked in sequence from top to bottom, and the wafer bins are detachably connected. The bottom wafer bin is placed on a rotating device, and the wafer bin is rotated to facilitate the disassembly and assembly of the wafer bin.

[0086] The rotating device includes a motor 81, a fixed seat 82, a rotating shaft 83 and a wafer bin 84. The fixed seat 82 is fixed on the workbench, the rotating shaft 83 is installed in the fixed seat, the motor is installed on one side of the fixed seat, the output shaft of the motor is meshed with the rotating shaft through a gear, a fixed plate is arranged on the top of the rotating shaft 83, the wafer bins are stacked on the fixed plate in sequence, and multiple wafer bins are fixed by detachable connecting parts. During the installation process, the open side of the wafer bin must face the operator. Therefore, before installation, the fixed plate is rotated by the motor so that the installation position is located outside the studio. After the wafer bin is installed, the wafer bin is rotated 180° by the rotating device so that the open side of the wafer bin is located on one side of the robotic arm, so that the robotic arm can easily take the wafer.

[0087] See also Figure 6 and 12 The pressure plate rack 4 and the tray rack 5 are located between the two robotic arms. The pressure plate rack 4 is located on a side close to the tray robotic arm 3, and the tray rack 5 is located on a side close to the suction cup robotic arm 6.

[0088] See also Figure 7 The platen frame 4 includes a base and a lifting device arranged on one side thereof, the lifting device is located on a side close to the wafer bin, and the lifting device includes a motor 41, a slider 42, a movable plate 43, a pulley 45 and a fixed plate 46; the base 44 is vertically fixed on the workbench, the motor 41 is fixed to the bottom of the base 44, the fixed plate 46 is connected to the base and is located on the top of the motor, the pulley 45 is arranged on the top of the base and is connected to the motor through a belt, the slider is arranged on the base through a guide rail and is fixed to one side of the belt, and a plurality of upper and lower The extended guide column, the edge of the movable plate is sleeved on the guide column, and the movable plate is connected to the slider 42. The pressure plate 10 is placed on the movable plate and is located between multiple guide columns. The motor drives the belt to move, and then drives the movable plate to move through the slider, so that the uppermost pressure plate of the movable plate is in the working position, which is the top of the guide column. That is, each time a pressure plate is taken, the movable plate moves a distance of the thickness of the pressure plate, so that the lower pressure plate is in the working position, which is convenient for the robot arm to absorb the pressure plate. The pressure plate is a disc structure, which is used to cover the non-evaporation side of the wafer.

[0089] See also Figure 8-11 The pallet rack 5 includes a base and a lifting device and a pallet fixing device arranged on one side thereof; the structure of the lifting device is the same as the lifting device structure of the pressure plate rack, and the difference lies in the installation method of the pallet on the guide column.

[0090] See also Fig.36 The tray is a circular ring structure, and a ring-shaped raised fixing platform is arranged at the lower end of its inner wall. The wafer is supported on the arc-shaped raised platform. A radially extending raised ring is arranged at the upper end of the outer wall of the tray, and the raised ring is used for the tray fixing device and the robot arm to clamp the tray.

[0091] The tray is sleeved on the outside of multiple guide pillars, and multiple trays are stacked up and down, with the bottom tray located on the movable plate. The tray fixing device includes two fixing parts, and the two fixing plates are fixed on the upper end of the base and symmetrically arranged on both sides of the tray along the center of the tray.

[0092] The fixing part includes a support arm 51, a motor 52, a clamping plate 53, a clamping head 54, a cam 55 and a cam groove 56; the support arm 51 is horizontally arranged, one end of which is connected to the base, and the other end extends to a side away from the base, the motor 52 is arranged at the bottom of the support arm, the clamping plate 53 is installed on the top of the support arm through a guide rail, and can move back and forth in the direction of the tray, and the output shaft of the motor passes through the support arm and is connected to the clamping plate through an eccentric wheel structure.

[0093] The eccentric wheel structure consists of a cam 55 and a cam groove 56. The cam is arranged on the upper end surface of the motor output shaft to form an eccentric wheel. The cam groove 56 is a strip groove. The length direction of the strip groove is arranged along the length direction of the support arm. The cam is located in the cam groove. The rotation of the cam causes the splint to reciprocate.

[0094] The chuck 54 is arranged at one end of the clamp close to the tray. The chuck is a support plate formed with a protrusion at the end of the overtime. When clamping the tray, the clamp moves toward the tray under the action of the eccentric wheel, so that the chuck is supported on the bottom of the convex ring of the tray on the working position, and then the lifting device moves down, the tray is separated from the guide column, and the wafer and the pressure plate are placed in the tray in turn by the robot, the pressure plate covers the wafer, and finally the tray is moved to the tray working position of the pot by the robot; similarly, after the electroplating is completed, the tray is placed on the tray rack and fixed with a tray fixing device, and then the pressure plate and the wafer are taken in turn by the robot, the pressure plate is placed on the pressure plate rack, and the wafer is placed in the wafer bin, and finally the lifting device moves up and the tray is sleeved on the guide column.

[0095] See also Fig.13 and 14 The suction cup robot arm 6 includes a robot arm, a suction cup and a camera 13. The fixed end of the robot arm is connected to the workbench, the free end of the robot arm is connected to the cantilever, the other end of the cantilever is connected to the suction cup, the cantilever is arranged at a right angle to the base plate, the camera 13 is arranged on the cantilever, and the camera, the robot arm and the controller are connected. When the robot arm takes the wafer, the camera collects the image of the current wafer bin, the controller analyzes the position of the wafer in the wafer bin, and absorbs it according to the position of the topmost wafer or the bottommost wafer.

[0096] The controller determines the number and position of wafers in the wafer bin based on the collected photos and in combination with the image recognition method. For example, based on the edge information detection method, a contour matching algorithm is used to identify and locate objects in the image. This method searches for the edge contours of the objects and matches these contours with known templates to determine the number of wafers. Since the number of wafers is taken and placed in a certain order, once the number of wafers is determined, the position of the space and the position of the wafer can be determined; or an image detection method. In this embodiment, a computer vision image analysis method is adopted. The camera captures the real-time picture of the wafer bin, and then analyzes the wafers through computer vision to calculate their position and deviation. The controller adjusts the corresponding posture of the robotic arm to perform the wafer picking operation.

[0097] The suction cup is provided with multiple air cavities, which are connected by air channels. The input end of the air channels is connected to an air pump. The air channels input gas into the air cavities. The airflow flows tangentially along the air cavities to form vortices inside the air cavities. A negative pressure zone is formed at the center of the vortex, so that the wafer is adsorbed on the suction cup and an air film is formed between the wafer and the suction cup, thereby realizing non-contact picking up of the wafer.

[0098] See also Figure 4 The image acquisition device is used to acquire the code of the wafer. Each wafer has a unique identification code, which is formed on the surface of the wafer. The image acquisition device includes a fixing frame 71, a first camera 72, a light source 73, a light board 74 and a second camera 75.

[0099] The fixing frame is set on the workbench and is located on the opening side of the wafer bin group, that is, the position where the wafers are taken. The first camera is set on the top of the fixing frame, the light board 74 is set at the bottom of the fixing frame, and the second camera is set below one side of the light board 74. The two light sources 73 are set on both sides of the light board symmetrically. The two light sources and the light board form multi-directional illumination of the wafer to improve the imaging quality of the two cameras.

[0100] The first camera 72 and the second camera 75 are connected to the controller respectively, and the edge damage of the wafer is detected according to the image captured by the first camera, and the code of the wafer is identified according to the image captured by the second camera. The code is located at the same time and can also be identified according to the image of the first camera. A program for wafer defect and model identification method is preset in the controller, and the program analyzes the image of the wafer, obtains the code and damage data of the wafer, and performs evaporation if the wafer is normal.

[0101] See also Fig.28 and 29 The pot tripod moving device 2 includes a fixed shaft 268, a pot tripod 21, a camera, a locking block 23, a fixing device, a moving component 24, a base plate 25 and a rotating device.

[0102] The center of the base plate 25 is installed on the fixed shaft through a sleeve. The base plate is set on the top surface of the workbench. The lower end of the fixed shaft passes through the base plate and is connected to the moving device. The moving device is fixed to the bottom surface of the workbench. The rotating device is set on the moving device and connected to the sleeve.

[0103] The fixing device includes a locking device, an adjusting ring 264, a plurality of connecting rod structures and a locking block 23; the adjusting ring is sleeved on the fixed shaft and connected to the opening and closing device, the adjusting ring can move up and down along the fixed shaft, a plurality of connecting rod structures 26 are evenly distributed on the base plate with the fixed shaft as the center circumference, one end of the connecting rod structure is connected to the adjusting ring, and the other end is slidably connected to the base plate, and the sliding direction is the radial direction of the base plate, the locking block is arranged at the end of the connecting rod structure away from the fixed shaft, the pot tripod 21 is arranged on the top of the locking block 23, and the plurality of locking blocks are used to apply annular locking force to the edge of the pot tripod to fix the pot tripod.

[0104] See also Fig.33 and 34 The locking device includes a cylinder plate 261, a cylinder 262, a pull rod 263 and an adjusting ring 264; a cylinder fixing plate is provided on the top of the fixed shaft, the cylinder 262 is fixed on the top surface of the cylinder fixing plate, and the piston of the cylinder extends upward, the top of the piston is connected to the cylinder plate 261, and a plurality of pull rods 263 are provided on the edge of the cylinder plate 261, and the lower end of the pull rod 263 is connected to the adjusting ring, the cylinder drives the adjusting ring to move up and down along the axial direction of the fixed shaft, the adjusting ring moves upward, and the connecting rod structure drives the locking block to move toward the center of the pot tripod to fix the edge of the pot tripod.

[0105] See also Fig.34 , the connecting rod structure 26 includes an articulated seat 265, a connecting rod 266, a crank arm 267 and a sliding seat 269;

[0106] The hinged seat is fixed on the base plate and is located on the outside of the fixed axis. The crank arm 267 is an L-shaped structure. The upper end of the crank arm is a horizontal arm and the lower part is a vertical wall. The turning point of the crank arm 267 is rotatably connected to the upper end of the hinged seat, the end of the horizontal arm is movably connected to the adjustment ring, the lower end of the vertical arm is hinged to one end of the connecting rod, and the other end of the connecting rod 266 is connected to the sliding seat 269. The sliding seat is installed on the base plate 25 through a guide rail and can move radially along the fixed axis. The locking block is set on the top of the sliding seat.

[0107] The top of the locking block 23 is provided with an arc-shaped locking portion, and the arc of the locking portion is the same as the edge of the pot tripod. When the adjustment ring moves downward, the crank arm drives the connecting rod and the sliding seat to move toward the edge of the base plate. It should be noted that when the locking block moves to the outer limit position, the diameter formed by the inner walls of the multiple locking blocks is smaller than the edge diameter of the pot tripod, ensuring that the pot tripod can be overlapped on the top of the locking block. When the adjustment ring moves upward, the sliding seat drives the locking block to move toward the center of the fixed axis, and the inner wall of the locking portion of the locking block abuts against the edge of the pot tripod to fix the pot tripod.

[0108] See also Fig.30 and 37 The pot tripod is a circular dome structure, with a plurality of tray holes evenly distributed on the circumference of its lower part with the center of the pot tripod. The tray is installed in the tray hole, and the top convex ring of the tray overlaps the surface of the pot tripod. The edge of the tray hole is provided with a plurality of rotatable lock buckles 27, and the ends of the lock buckles are used for pressing on the pressure plate inside the tray to fix the tray. The plurality of lock buckles are evenly distributed along the central circumference of the tray hole.

[0109] See also Fig.38 and 39 The lock buckle 27 includes a bolt 271, a rotating shaft 272 and a pressure head 237. The rotating shaft is a hollow structure. The end of the bolt 271 passes through the rotating shaft 272 and is connected to the pot tripod. A spring is sleeved on the bolt and is located in the axial hole of the rotating shaft. A pressure arm is provided on the rotating shaft, and the pressure head is arranged at the end of the pressure arm. When in use, the bolt is required to lift the rotating shaft upward. At this time, the spring is compressed, and the rotating shaft is rotated so that the pressure head is located above the pressure plate of the tray. The rotating shaft is released and the spring is reset. Under the action of the elastic force, the pressure head is pressed on the pressure plate.

[0110] During the evaporation process, the pot fully loaded with wafers is moved to the vacuum evaporation machine for evaporation. After the evaporation is completed, the pot needs to be placed on the pot moving device 2 again. Since the pot has a circular structure, in order to facilitate the robot arm to accurately remove the tray, the position of the pot needs to be adjusted so that the tray is located in the working position. Therefore, the pot needs to be driven to rotate by the base plate so that the tray is located in the working position of the machine wall.

[0111] See also Fig.31 A camera 221 and a position detection device are provided on the fixed shaft. The camera 221 is provided on a connecting plate 222. One end of the connecting plate 222 is connected to the upper end of the fixed shaft, and the other end is tilted so that the camera 221 faces the axial direction of the tray hole. The image of the pot is collected by the camera. The controller is connected to the camera. The controller obtains the angle between the center of the tray and the camera according to a preset image processing and computer vision technology program, and controls the rotation of the rotating device according to the angle to move the tray to the working position.

[0112] The controller loads the image file into the memory and converts the image into a grayscale image to reduce the computational complexity. Use edge detection algorithms (such as the Canny algorithm) to find the edges in the image, find the contours in the image after edge detection, and use the Hough Circle Transform to identify the circular contours. For each detected circle, the Hough Circle Transform will provide a center coordinate, calculate the angle based on the center coordinate and the camera coordinate, and then control the rotation of the base plate.

[0113] See also Fig.35, including a moving assembly 24 including a moving plate, an axis fixing seat and a push rod 242; both sides of the top surface of the moving plate are slidably connected to the bottom surface of the workbench through tracks, the piston of the push rod is connected to the end surface of the moving plate, the cylinder body of the push rod is connected to the bottom surface of the workbench through a connecting seat, the axis fixing seat is fixed on the moving plate, the lower end of the fixed shaft passes through the workbench and extends into the axis fixing seat and is fixed, the push rod drives the moving plate to slide, and the moving plate drives the base plate to move, thereby realizing the movement of the entire pot tripod moving device.

[0114] Since the pot moving device is located in the middle of the workbench in the studio, it is located in a dust-free environment for wafer picking operations. When moving the pot for evaporation, the closed door of the studio is opened, and then the pot is moved to the edge of the studio through the moving assembly to facilitate the picking up of the entire pot.

[0115] The rotating device includes a servo motor, a support ring sleeve 241 and a shaft sleeve; the shaft sleeve is hollowly sleeved on the fixed shaft and is located at the bottom of the base plate, the upper end of the shaft sleeve is fixedly connected to the base plate, the support ring sleeve 241 is sleeved on the fixed shaft and arranged on the upper part of the shaft fixing seat, the outer cylindrical surface of the support ring sleeve 241 is an outer gear ring, the upper end of the support ring sleeve 241 is connected to the lower end of the shaft sleeve, and the lower end is rotatably connected to the shaft fixing seat, the servo motor is fixed to the bottom surface of the movable plate, and the output shaft of the servo motor is meshed with the support ring sleeve 241 through a gear.

[0116] See also Fig.15 The tray robot arm 3 includes a robot arm and a tray clamping device 14. The lower end of the robot arm is connected to the workbench. The tray clamping device 14 is connected to the moving end of the robot arm through a flange. The tray clamping device 14 is used to place the pressure plate on the wafer and fix the tray clamp to move to the target position.

[0117] See also Figure 16-27 The pallet clamping device 14 includes a flange 141, a fixing frame, a locking control assembly 142, a clamping claw assembly 143 and a suction assembly 144; the top of the flange is connected to the robot arm, the fixing frame is connected to the bottom of the flange, the suction assembly 144 is arranged in the fixing frame, and a plurality of gas rods 1423 are formed on the suction assembly 144, and the lower ends of the gas rods pass through the fixing frame for sucking the pressure plate.

[0118] The clamping jaw assembly 143 is arranged at the bottom of the fixing frame. The clamping jaw assembly 143 includes an iris mechanism and a plurality of clamping jaws. The plurality of clamping jaws are connected to the iris mechanism and are distributed circumferentially. The iris mechanism enables the plurality of clamping jaws to move synchronously along the radial direction of the tray. A slot is arranged at the bottom of the clamping jaw for clamping on the edge of the convex ring of the tray.

[0119] The lock control assembly 142 includes a plurality of control devices connected to a fixing frame, the plurality of control devices are distributed circumferentially, the control device includes a composite cylinder and a clamping arm connected thereto, the clamping arm is used to clamp and rotate the lock block.

[0120] See also Fig.17 and 20 The fixing frame includes an upper fixing plate 1412 and a lower fixing plate 1413 which are spaced apart. The upper fixing plate 1412 and the lower fixing plate 1413 are connected by a plurality of support columns which are located at the edge of the fixing plate. The upper fixing plate is connected to the flange.

[0121] The suction assembly includes a cylinder 1421 , a gas rod fixing plate 1422 , a gas rod 1423 and a suction cup 1424 .

[0122] The 1421 is arranged on the bottom surface of the upper fixed plate, the gas rod fixing plate 1422 is connected to the cylinder piston, and a plurality of cantilevers extending radially are arranged on the gas rod fixing plate 1422. The upper end of the gas rod 1423 is connected to the cantilever, and the lower end of the gas rod passes through the lower fixed plate. The upper end of the gas rod is connected to the gas source through a pipeline, and the lower end of the gas rod has its own suction cup for adsorbing the pressure plate. The suction cup is preferably a circular air pressure diaphragm, and the diameter formed by the plurality of gas rods is smaller than the diameter of the pressure plate; when the manipulator moves to above the pressure plate, the cylinder drives the gas rod to move downward, and the gas rod absorbs the pressure plate through the suction cup.

[0123] See also Figure 18-25 The iris mechanism includes a motor 1431, a gear ring 1432, a linear slide groove and an arc groove 1437; the center of the gear ring is installed on the top surface of the lower fixed plate through a rotating shaft, the outer ring wall of the gear ring is a toothed surface, the motor 1431 is fixed on the lower fixed plate, and the motor output shaft is meshed with the tooth surface of the gear ring through a gear 1438. A plurality of arc grooves 1437 are circumferentially distributed on the end surface of the gear ring and penetrate the gear ring. The rotation direction of the plurality of arc grooves is the same, one end of the arc groove is close to the center of the gear ring, and the other end extends to the edge of the gear ring.

[0124] Referring to 22 and 23, the plurality of linear slide grooves are circumferentially distributed on the lower fixed plate and are radially arranged. The linear slide grooves are connected to a partial area of ​​the arc groove. The circumferences of the plurality of clamping jaws are respectively connected to the linear slide grooves through sliders, and the sliding direction of the slider is consistent with that of the linear slide groove.

[0125] See also Fig.24 and 25 The clamping claw 1433 is an L-shaped structure, with a horizontal arm at the top, and the end of the horizontal arm away from the center of the gear ring is connected to the vertical arm. A slot 1434 is provided on the inner side of the lower end of the vertical wall for clamping on the edge of the outer convex ring of the tray; a guide block is provided on the top of the end of the horizontal arm close to the gear ring, and the guide block is located in the linear slide groove. A roller 1436 is provided on the top of the guide hole, and the roller extends into the arc slide groove.

[0126] During operation, the motor drives the gear ring to rotate, and the arc groove moves to drive the clamping jaw to move along the linear slide groove to realize the clamping operation of the clamping jaw. When the roller moves toward the center end of the arc slide groove, the clamping jaw closes, and when the roller moves toward the edge end of the arc slide groove, the clamping jaw opens.

[0127] The outer tooth surface of the gear ring is a tooth segment, that is, a tooth groove is set on the outer wall of the gear ring. When the gear is engaged with the two ends of the tooth segment, the roller is located at the two ends of the arc-shaped slide groove. At this time, the clamp is in the maximum opening distance, or in a closed state.

[0128] The lock control component 142 is used to control the locking state of the lock on the pot tripod. Since the tray needs to be fixed on the pot tripod by the lock, the rotating lock is fixed to the pressure plate through the pressure head, thereby stably fixing the tray on the pot tripod. At the same time, when taking the tray, the lock needs to be rotated in the opposite direction to contact the lock of the tray and then take the tray. The function of the lock control component 142 is to simulate the operation process of the worker lifting the lock and rotating the lock to realize the automatic opening and closing of the lock.

[0129] See also Fig.26 and 27 The control device includes a fixed base 1441, a lifting module, a clamping arm 1444, a rotating shaft 1445 and a compound cylinder 1446. A raised fixing portion is formed on the side wall of the upper fixed plate. The fixed base is connected to the fixing portion. The lifting module is vertically arranged. The compound cylinder 1446 is connected to the lifting module. The lower end of the compound cylinder 1446 is connected to the rotating shaft. The two clamping arms are slidably arranged at the lower end of the rotating shaft 1445. The compound cylinder can realize bidirectional movement of the clamping arms, and the clamping arms are driven to rotate through the rotating shaft. At the same time, the two clamping arms can move relative to or away from each other to realize opening and closing.

[0130] The upper end of the clamp arm is connected to the rotating shaft through a slider, the slider is connected to the operating mechanism of the composite cylinder, and the rotating shaft is connected to the rotating mechanism of the composite cylinder. A raised clamping plate is provided at the lower end of the clamp arm. During the operation of the pallet, the clamping plate is located at the bottom of the positioning ring of the rotating shaft of the lock, and the pressing arm is located between the two clamp arms.

[0131] The lifting module includes a screw rod 1442, a slide rail, a slider 1443 and a motor 1447; the motor is fixed on a fixed base 1441, the upper end of the slide rail is connected to the fixed base 1441, the upper ends of the screw rod 1442 are rotatably connected to the slide rail, the slider is installed on the slide rail and connected to the screw rod, the upper end of the screw rod is connected to the motor output shaft through a pulley, and the composite motor is fixed to the slider.

[0132] See also Fig.19A camera 15 is also provided at the bottom of the lower fixed plate. The camera is connected to the controller and is used to collect an image of the pallet. The controller determines the position of the pallet based on the image of the pallet, adjusts the position of the robotic arm based on the position of the pallet, and the gripper assembly accurately grips the pallet.

[0133] The following is a detailed description of the method for using the fully automatic wafer evaporation device provided by the utility model.

[0134] Open the closed door of the studio facing the wafer bin group, then rotate the fixed plate to the working position through the rotating device, install the full wafer bin on the fixed plate and fix it, and then reset the wafer bin through the rotating device. At this time, the open side of the wafer bin faces the robotic arm.

[0135] The suction cup mechanical disc operates the suction cup to suck up the wafer, and the suction cup moves to the opening of the wafer bin. The camera 13 collects the image of the wafer bin, and the controller determines the number and position of the wafers in the wafer bin based on the collected photos and combined with the image recognition method. The mechanical arm moves the suction cup to the top of the topmost wafer according to the position of the wafer, and the air pump works the suction cup to suck up the topmost wafer.

[0136] The suction cup robot moves the wafer to the image acquisition device and is located between the first camera and the second camera. The light source and the light panel provide multi-angle lighting. The two cameras capture images of both sides of the wafer. The edge damage of the wafer is detected according to the image captured by the first camera. The code of the wafer is identified according to the image captured by the second camera, and the code and damage data of the wafer are obtained. The controller records the wafer data. If the wafer is damaged, it is placed in the corresponding wafer bin through the suction cup robot.

[0137] During the wafer inspection process, the tray rack works synchronously. The lifting device moves upward under the action of the motor, and the top tray moves between the two fixed parts of the tray fixing device. Under the action of the cam, the clamp moves toward the tray, and the chuck is clamped at the bottom of the outer convex ring of the tray. At the same time, the lifting device descends, and the guide column tray is separated.

[0138] The suction cup robot arm drives the suction cup to move to the top of the tray and places the wafer in the tray, interrupting the airflow of the suction cup and separating the suction cup from the wafer.

[0139] The tray robot arm 3 moves to the top of the pressure plate frame 4, the tray clamping device 14 is located on the top of the pressure plate, and the lifting device of the pressure plate frame moves upward so that the uppermost laminate is flush with the top of the guide column. The cylinder 1421 moves the piston downward until the pneumatic suction cup at the lower end of the gas rod contacts the surface of the pressure plate, and the gas rod generates negative pressure to adsorb the pressure plate. Then the suction cup robot arm moves to the top of the tray frame, and the cylinder 1421 moves downward again to place the pressure plate on top of the wafer.

[0140] The tray robot moves to the top of the tray and moves downward until the clamping groove of the clamp is flush with the top edge of the tray, and the tray clamping device 14 works. The servo motor 1431 drives the ring gear to rotate, and the ring gear drives the clamping claw to move toward the center cabinet. The clamping groove at the lower end of the clamping claw is connected to the flange of the tray. Next, the tray robot arm 3 moves the tray with the pressure plate and the wafer to the working position of the pot.

[0141] When the pot tripod is initially placed on the pot tripod moving device, its position is randomly placed and no tray is placed, that is, the tray hole of the pot tripod is in a non-working position. The camera 221 obtains an image of the tray hole of the pot tripod. The image of the tray hole on the pot tripod is collected by the camera. The controller obtains the angle between the center of the tray hole and the camera according to a preset image processing and computer vision technology program, and controls the rotation of the rotating device according to the angle to move the tray to the working position. Since the tray holes are evenly distributed around the circumference, any one of the tray holes is in the working position. After the tray is placed on the tray hole, it is rotated by a certain angle so that the adjacent tray hole is in the working position.

[0142] The tray robot arm 3 moves to the tray working position of the pot, places the tray in the tray hole, the iris mechanism rotates in the opposite direction, the clamping claw separates from the tray, and the lock control assembly 142 starts to work.

[0143] The lifting module moves downward, and the two clamping arms are in an open state. When the rotating shaft of the lock is located between the two clamping arms, under the action of the composite cylinder, the two clamping arms are closed to clamp the rotating shaft. At the same time, the clamping plate is located at the bottom of the positioning ring of the rotating shaft. The lifting module moves up and the spring is compressed. At the same time, the rotating shaft 1445 rotates, so that the pressure head of the lock is located on the top of the pressure plate. The composite cylinder moves downward and opens the clamping arms. Under the action of elastic force, the pressure head is pressed on the pressure plate. At this point, the installation of a wafer on the pot is completed.

[0144] The rotating device of the pot moving device drives the substrate to rotate so that the adjacent tray holes are located at the working position, and the above process is repeated until all the tray holes are installed with trays with wafers.

[0145] Open the closed door corresponding to the working room and the pot tripod moving device, and the moving component drives the part of the pot tripod moving device located above the workbench to move toward the workbench to open the closed door, and then the cylinder drives the adjusting sleeve to move, and the sliding seat and the locking block are driven to move through the connecting rod structure, contacting the lock of the pot tripod, and moving the pot tripod to the vapor deposition machine to coat the wafer.

[0146] After the coating is completed, the pot is moved to the pot moving device again, and the above actions are repeated in reverse. The tray is placed on the top of the tray rack, and then the pressure plate and wafer are sucked in turn, the wafer is placed in the wafer bin, the pressure plate is placed on the pressure plate rack, and the tray is placed on the tray rack to complete the automated electroplating operation of the wafer.

[0147] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0148] The above content is only for explaining the technical idea of ​​the utility model and cannot be used to limit the protection scope of the utility model. Any changes made on the basis of the technical solution in accordance with the technical idea proposed by the utility model shall fall within the protection scope of the claims of the utility model.

Claims

1. A wafer operation device for a vacuum evaporation machine, characterized in that: It includes a mechanical arm and a pallet clamping device connected thereto, wherein the pallet clamping device includes a fixing frame, a clamping claw assembly and a suction assembly; The fixing frame is connected to the mechanical arm; The suction assembly comprises a cylinder, a gas rod fixing plate and a gas rod; The cylinder is arranged in a fixed frame, the piston of the cylinder is connected to the cylinder fixed plate, a plurality of gas rods are circumferentially distributed on the edge of the cylinder fixed plate, the lower end of the gas rod is connected to a gas pressure diaphragm, the gas rod is connected to the gas source and adsorbs the pressure plate under the action of negative pressure; The clamping jaw assembly comprises a gear ring and a clamping jaw; The gear ring is rotatably connected to the bottom plate of the fixing frame, and is connected to a plurality of clamping claws through an iris mechanism. The plurality of clamping claws are arranged circumferentially, and the clamping claws are slidably arranged at the bottom of the bottom plate. The iris mechanism can enable the plurality of clamping claws to move synchronously toward the edge of the tray.

2. The wafer operation device of a vacuum evaporation machine according to claim 1, characterized in that: A plurality of fixing parts are arranged on the side wall of the gas rod fixing plate, the upper end of the gas rod is connected to the fixing part, and the lower end extends downward through the bottom plate, and the circular diameter formed by the plurality of gas rods is smaller than the diameter of the pressure plate.

3. The wafer operation device of a vacuum evaporation machine according to claim 1, characterized in that: The gas rods and the clamping jaws are alternately distributed around the circumference.

4. The wafer operation device of a vacuum evaporation machine according to claim 1, characterized in that: The iris mechanism includes a linear slide groove and an arc groove; The plurality of arc grooves are circumferentially distributed on the gear ring, the plurality of arc grooves have the same rotation direction, one end of the arc groove is close to the center of the gear ring, and the other end extends to the edge of the gear ring, and the gear ring is meshed with the output shaft of the motor; The multiple linear slide grooves are arranged on the bottom plate of the fixing frame and are distributed radially. The linear slide grooves are connected with a partial area of ​​the arc groove. A guide part is arranged on the top of the clamping jaw. The upper part of the clamping jaw is arranged in the linear slide groove, and the guide part is located in the arc groove.

5. The wafer operation device of a vacuum evaporation machine according to claim 4, characterized in that: The guide part is a roller arranged on the top of the clamping jaw.

6. The wafer operation device of a vacuum evaporation machine according to claim 4, characterized in that: The clamping jaw is connected to the bottom plate through a guide rail, a guide block is arranged at the bottom of the clamping jaw, a guide hole is located in the linear slide groove, and a guide portion is arranged on the top of the guide block.

7. The wafer operation device of a vacuum evaporation machine according to claim 1, characterized in that: A clamping groove matched with the convex ring of the tray is arranged at the lower end of the clamping claw and close to the side of the tray.

8. The wafer operation device of a vacuum evaporation machine according to claim 1, characterized in that: The fixing frame is provided with a plurality of locking control components, including a fixing base, a lifting module, a clamping arm and a composite cylinder; The fixed base is connected to the fixed frame, the composite cylinder is connected to the lifting module, the lifting module is connected to the fixed base, the lower end of the composite cylinder is connected to two clamping arms, and the composite cylinder is used to control the two clamping arms to clamp and rotate the lock buckle.

9. The wafer operation device of a vacuum evaporation machine according to claim 8, characterized in that: An image acquisition device is arranged at the bottom of the fixing frame for acquiring the image of the tray.

10. The wafer operation device of a vacuum evaporation machine according to claim 1, characterized in that: The robot arm comprises a robot arm and a suction cup connected thereto, and the suction cup is used for sucking a wafer.

Images