Temperature control fixing device and furnace tube equipment

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a temperature control fixing device and furnace tube equipment, and the temperature control fixing device comprises a sealing assembly, a connecting assembly and a temperature controller. The temperature controller is provided with an assembling part, and a groove is formed in the assembling part; the sealing assembly is arranged around the assembling part; the connecting assembly is connected with the furnace tube, and the connecting assembly is pressed on the sealing assembly so that at least one part of the sealing assembly can be located in the groove. The temperature control fixing device is used for fixing the temperature controller, so that the phenomenon of relative displacement of the temperature controller in the mounting hole when the furnace tube equipment is vacuumized repeatedly is improved, and the stability of the temperature controller when the temperature controller is mounted on the furnace tube is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a temperature control fixing device and furnace tube equipment. Background Art

[0002] Furnace tube equipment has many uses in the field of semiconductor technology, for example, it is used in oxidation processes, thermal annealing processes and various deposition film formation processes.

[0003] The furnace tube equipment has a heating function. In order to control the heating temperature, the furnace tube equipment is usually equipped with a temperature controller to achieve temperature control to ensure uniform temperature inside the furnace tube equipment.

[0004] The existing temperature controller needs to pass through the furnace tube equipment, so the furnace tube equipment needs to have a mounting hole for the temperature controller to pass through, and the temperature controller and the mounting hole need to be sealed. The existing sealing method usually sets a sealing ring between the temperature controller and the mounting hole. This sealing method can achieve a good sealing effect under normal pressure, but when the furnace tube equipment is repeatedly evacuated, the pressure can easily cause the temperature controller to move relative to the mounting hole, which affects the temperature measurement accuracy of the temperature controller on the one hand, and easily causes the temperature controller to scratch the inside of the furnace tube equipment on the other hand.

[0005] In order to solve the above problems, the utility model provides a temperature control fixing device and a furnace tube device, wherein the temperature control fixing device is used to fix a temperature controller to improve the phenomenon of relative displacement of the temperature controller in a mounting hole when the furnace tube device is repeatedly vacuumed. Utility Model Content

[0006] The utility model aims to provide a temperature control fixing device and a furnace tube device, wherein the temperature control fixing device is used to fix a temperature controller to improve the phenomenon of relative displacement of the temperature controller in a mounting hole when the furnace tube device is repeatedly vacuumed, so as to improve the stability of the temperature controller when it is installed on the furnace tube.

[0007] The utility model provides a temperature control fixing device, comprising: a sealing component, a connecting component and a temperature controller;

[0008] The temperature controller has an assembly portion, and a groove is formed on the assembly portion;

[0009] The sealing assembly is arranged around the assembly portion;

[0010] The connecting assembly is connected to the furnace tube, and the connecting assembly is pressed against the sealing assembly so that at least a portion of the sealing assembly is located in the groove.

[0011] Optionally, the sealing assembly includes a first sealing ring, and the first sealing ring is sleeved on the assembly portion;

[0012] The groove is an annular groove opened along the circumference of the assembly portion;

[0013] The connecting assembly is pressed against the first sealing ring so that a portion of the first sealing ring is located in the groove.

[0014] Optionally, the sealing assembly further comprises a second sealing ring, the second sealing ring is sleeved on the assembly portion, and the second sealing ring and the first sealing ring are arranged in an axial direction of the assembly portion;

[0015] The connecting assembly is pressed on the second sealing ring, and the second sealing ring is pressed on the outer peripheral wall of the assembling portion, and the second sealing ring is pressed on the furnace tube.

[0016] Optionally, along the axial direction of the assembly portion, the first sealing ring is located on a side of the second sealing ring away from the furnace tube.

[0017] Optionally, the connecting assembly includes a connecting member and a first pressure member;

[0018] The connecting member is connected to the furnace tube, and the connecting member is sleeved on the assembly part. The first pressure member and the sealing assembly are located between the connecting member and the assembly part. The connecting member is pressed on the first pressure member along the axial direction of the assembly part, and the first pressure member is pressed on the sealing assembly.

[0019] Optionally, the connection assembly further includes a second pressure-applying member;

[0020] The first pressure member and the second pressure member are arranged in an axial direction of the assembly portion;

[0021] The sealing assembly includes a first sealing ring and a second sealing ring, the first sealing ring is located between the first pressure member and the second pressure member, and the connecting member is pressed on the first pressure member along the axial direction of the assembly portion, so that the first pressure member is pressed on the first sealing ring, the first sealing ring is pressed on the second pressure member, and the second pressure member is pressed on the second sealing ring.

[0022] Optionally, the first pressure member is annular, the first pressure member is outer-mounted on the assembly portion, the inner circumference of the first end of the first pressure member is an outwardly expanding conical surface, and the inner circumference of the first end of the first pressure member is pressed against the first sealing ring;

[0023] And / or; the second pressure member is annular, the second pressure member is sleeved on the assembly portion, the inner circumference of the first end of the second pressure member is a conical surface expanding outward, and the inner circumference of the first end of the second pressure member is pressed against the second sealing ring.

[0024] Optionally, when the first pressure member and the second pressure member are both ring-shaped;

[0025] The first end of the first pressure member extends into the interior of the second end of the second pressure member.

[0026] Optionally, the first pressure member has a force-bearing surface, and the connecting member is pressed against the force-bearing surface along the axial direction of the assembly portion.

[0027] The utility model also provides a furnace tube device, comprising a furnace tube and the above-mentioned temperature control fixing device, wherein a joint is arranged on the furnace tube, a part of the assembly portion passes through the joint, and the connection assembly is connected to the joint.

[0028] With such configuration, the temperature control fixing device in the utility model not only plays the role of sealing the assembly part, but also plays the role of fixing the assembly part to prevent the assembly part from sliding relative to each other in the joint. When the furnace tube is repeatedly evacuated, the phenomenon of relative displacement of the temperature controller in the joint can be improved to improve the installation stability of the temperature controller, avoid damage to the temperature controller itself and the inside of the furnace tube when the temperature controller moves relative to the furnace tube, and help to increase the service life of the temperature controller. At the same time, it is also beneficial to ensure the stability of the position of the temperature controller in the furnace tube, which helps to improve the temperature detection accuracy. It can also improve the phenomenon of increased furnace tube leakage rate caused by the movement of the temperature controller relative to the furnace tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the structure of the furnace tube of some embodiments of the utility model;

[0030] Figure 2 It is a schematic diagram of the structure of the temperature control fixing device of some embodiments of the utility model.

[0031] Among them, in the attached drawings:

[0032] 10-seal assembly; 11-first seal ring; 12-second seal ring;

[0033] 20-Connection components;

[0034] 21-connecting member; 211-force application surface;

[0035] 22-first pressure member; 221-large diameter section; 222-middle diameter section; 223-small diameter section; 224-force-bearing surface; 225-first end of the first pressure member;

[0036] 23-a second pressure member; 231-a tapered shoulder surface; 232-a first end of the second pressure member;

[0037] 30-temperature controller; 31-assembly portion; 32-groove;

[0038] 40 - furnace tube; 41 - inner tube; 42 - outer tube; 421 - base; 422 - joint; 423 - pressure surface. DETAILED DESCRIPTION

[0039] The temperature control fixing device proposed by the utility model is further described in detail below in combination with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the utility model will be more clear. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.

[0040] As used in the present invention, the singular forms "one", "an", and "the" include plural objects, the term "or" is usually used to include the meaning of "and / or", the term "several" is usually used to include the meaning of "at least one", and the terms "at least two" or "a plurality" are usually used to include the meaning of "two or more". In addition, the terms "first", "second", and "third" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features. In addition, as used in the present invention, "installed", "connected", "connected", and one element "set" on another element should be understood in a broad sense, usually only indicating that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements can be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any orientation such as inside, outside, above, below or one side of another element, unless the content clearly indicates otherwise. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used relative to the exemplary embodiments as shown in the figures, with the upward or upper direction toward the top of the corresponding figure, and the downward or lower direction toward the bottom of the corresponding figure.

[0041] In this embodiment, the axial direction refers to the axial direction of the assembly portion 31 .

[0042] Please refer to Figure 1 As shown, this embodiment provides a furnace tube device;

[0043] The furnace tube device includes a temperature control fixture and a furnace tube 40, wherein the furnace tube 40 generally includes an inner tube 41 and an outer tube 42. The lower end of the outer tube 42 is open, and a base 421 is provided at the bottom of the inner tube 41. The outer tube 42 is covered with the inner tube 41 and the base 421 is sealed to the open end of the outer tube 42.

[0044] Please refer to Figure 1 As shown, in this embodiment, the temperature control fixing device is disposed on the base 421 , that is, the temperature controller 30 is installed on the base 421 .

[0045] Please refer to Figure 1 and Figure 2 As shown, in this embodiment, the temperature control fixing device includes: a sealing component 10, a connecting component 20 and a temperature controller 30.

[0046] A joint 422 is provided on the base 421 of the furnace tube 40 .

[0047] The temperature controller 30 has a substantially L-shape. Figure 1 In the figure, the horizontal section of the temperature controller 30 serves as the assembly part 31, a part of the assembly part 31 passes through the joint 422 and is connected to the vertical section of the temperature controller 30, and another part of the assembly part 31 is located outside the joint 422 for connecting to an external temperature control circuit. The vertical section of the temperature controller 30 is located inside the outer tube 42 and extends vertically. The vertical section of the temperature controller 30 has five temperature control areas distributed along its length direction for detecting the temperature of each area inside the outer tube 42. The temperature controller 30 adopts an existing model, and its specific structure is a prior art, which will not be described in detail here.

[0048] The assembly portion 31 of the temperature controller 30 is sealed and fixed to the joint 422 through the sealing assembly 10 and the connecting assembly 20 .

[0049] The sealing assembly 10 is arranged around the assembly portion 31; a groove 32 is provided on the assembly portion 31;

[0050] The connecting assembly 20 is connected to the joint 422 of the furnace tube 40.

[0051] After the connecting component 20 is connected to the joint 422 , it is pressed against the sealing component 10 , so that at least a portion of the sealing component 10 is located in the groove 32 .

[0052] Since the assembly portion 31 is usually a cylindrical structure, the sealing component 10 is preferably annular, and the connecting component 20 preferably applies uniform pressure to the outer circumference of the sealing component 10 so that the inner circumference of the sealing component 10 is tightly sealed to the assembly portion 31 and a portion is embedded in the groove 32.

[0053] In this embodiment, the connector 422 is cylindrical, and the outside of the connector 422 has an external thread, and the connecting component 20 is threadedly connected to the connector 422. In other alternative embodiments, the connecting component 20 can also be connected to the connector 422 by means of snap connection, magnetic attraction, etc. The specific shape of the connector 422 and the connection method of the connector 422 and the connecting component 20 can be adaptively adjusted based on actual use requirements.

[0054] The above-mentioned temperature control fixing device, on the one hand, plays the role of sealing the assembly part 31, and also plays the role of fixing the assembly part 31, so as to prevent the assembly part 31 from sliding relative to each other in the joint 422. When the furnace tube 40 is repeatedly evacuated, the phenomenon of relative displacement of the temperature controller 30 in the joint 422 can be improved, so as to improve the installation stability of the temperature controller 30, avoid damage to the temperature controller 30 and the inside of the furnace tube 40 when the temperature controller 30 moves relative to the furnace tube 40, and help to improve the service life of the temperature controller 30. At the same time, it is also beneficial to ensure the stability of the posture of the temperature controller 30 in the furnace tube 40, which helps to improve the temperature detection accuracy. It can also improve the phenomenon of increased furnace tube leakage rate caused by the movement of the temperature controller 30 relative to the furnace tube 40.

[0055] For further information, please refer to Figure 2 As shown, in this embodiment, the sealing assembly 10 includes a first sealing ring 11 and a second sealing ring 12, and the first sealing ring 11 is sleeved on the assembly portion 31; the groove 32 is an annular groove opened along the circumference of the assembly portion 31; the connecting assembly 20 is pressed on the first sealing ring 11, and the inner wall of the first sealing ring 11 is located in the groove 32.

[0056] The first sealing ring 11 and the second sealing ring 12 can be made of rubber, polyurethane, fluororubber, silicone rubber, polytetrafluoroethylene, metal, etc. Preferably, the material has good sealing, wear resistance, oil resistance, high temperature resistance and aging resistance.

[0057] In this embodiment, the assembly portion 31 is a cylindrical structure, so the groove 32 is formed along the circumference of the assembly portion 31, and the groove 32 is a circular ring groove. Figure 1 As shown, the cross section of the groove 32 is rectangular, the inner circumference of the first sealing ring 11 is embedded in the groove 32, and the inner circumference of the first sealing ring 11 is pressed against the bottom of the groove 32.

[0058] The second sealing ring 12 is sleeved on the assembly portion 31, and the second sealing ring 12 and the first sealing ring 11 are arranged along the axial direction of the assembly portion 31; the connecting assembly 20 is pressed on the second sealing ring 12, and the second sealing ring 12 is pressed on the outer peripheral wall of the assembly portion 31, and the second sealing ring 12 is pressed on the furnace tube 40.

[0059] Please continue to refer to Figure 1 As shown, the inner circumferential surface of the second sealing ring 12 is pressed against the outer circumferential wall of the assembly portion 31, and the right side of the second sealing ring 12 is pressed against the furnace tube 40. Specifically, the right side of the second sealing ring 12 is pressed against the position of the assembly portion 31 on the furnace tube 40. In this embodiment, the second sealing ring 12 is pressed against the joint 422 of the furnace tube 40, and the second sealing ring 12 is used to seal between the assembly portion 31 and the joint 422.

[0060] In addition, along the axial direction of the assembly portion 31, the first sealing ring 11 is located on a side of the second sealing ring 12 away from the furnace tube 40 ( Figure 2 The first sealing ring 11 is located on the left side of the second sealing ring 12).

[0061] In the above assembly method, the first sealing ring 11 cooperates with the groove 32 to focus on fixing the assembly part 31 of the temperature controller 30 to limit the axial displacement of the assembly part 31 relative to the joint 422, and the first sealing ring 11 also plays a certain sealing role. The second sealing ring 12 focuses on the sealing between the assembly part 31 and the joint 422, and the second sealing ring 12 plays a heat insulation effect, which helps to prevent the heat in the furnace tube 40 from being transferred to the first sealing ring 11 side. Through the cooperation of the first sealing ring 11 and the second sealing ring 12, the assembly part 31 is effectively fixed and sealed, and at the same time, when the temperature controller 30 is installed, it is also convenient to fine-tune the temperature controller 30.

[0062] In other alternative embodiments, Figure 1 The cross section of the middle groove 32 can be set to be an arc shape, and the specific shape of the groove 32 can be adaptively adjusted based on the matching requirements with the first sealing ring 11.

[0063] In this embodiment, the assembly portion 31 is cylindrical, so the first sealing ring 11 and the second sealing ring 12 are in a circular ring shape that matches the assembly portion 31. In other alternative embodiments, when the shape of the assembly portion 31 changes, the shapes of the first sealing ring 11 and the second sealing ring 12 can be adaptively changed based on the shape of the assembly portion 31. For example, the assembly portion 31 can be an elliptical cylinder, and the first sealing ring 11 and the second sealing ring 12 can be adaptively set to be elliptical rings.

[0064] In other alternative embodiments, two groups of grooves 32 may be provided on the assembly portion 31, and the first sealing ring 11 and the second sealing ring 12 correspond to one group of grooves 32 respectively, that is, when the connecting component 20 applies pressure to the first sealing ring 11 and the second sealing ring 12, the first sealing ring 11 is embedded in one group of grooves, and the second sealing ring 12 is embedded in the other group of grooves 32.

[0065] In other alternative embodiments, the sealing assembly 10 may include only one sealing ring, in which case the sealing ring is sealed between the assembly portion 31 and the joint 422 and is embedded in the groove 32 .

[0066] In other alternative embodiments, the sealing assembly 10 may include three or more sealing rings, at least one of which is provided with a groove 32 .

[0067] In other alternative embodiments, the groove 32 may be a rectangular groove opened at a local position on the periphery of the assembly portion 31; the groove 32 may also be composed of a plurality of sub-grooves, each of which is evenly distributed along the circumference of the outer periphery of the assembly portion 31. The shape and distribution of the groove 32 may be adaptively adjusted based on usage requirements.

[0068] In other alternative embodiments, the sealing component 10 may be a filler, that is, the sealing component 10 is a packing seal. The packing seal is usually a dynamic sealing device that generates a compression force between the packing and the sealed component through pre-tightening or self-tightening of the medium pressure. Commonly used packing materials include asbestos fabric, carbon fiber, rubber, flexible graphite and engineering plastics.

[0069] Combine the following Figure 2 The structure of the connection assembly 20 is described.

[0070] like Figure 1 As shown, the connecting assembly 20 includes a connecting member 21, a first pressure member 22 and a second pressure member 23;

[0071] The connecting piece 21 is adapted to the shape of the joint 422 , and the connecting piece 21 is similar to a nut structure, and the connecting piece 21 is threadedly screwed on the joint 422 .

[0072] The assembly portion 31 passes through the joint 422 , and the connecting member 21 is also substantially sheathed on the assembly portion 31 .

[0073] The first pressure member 22 and the sealing assembly 10 are located between the connecting member 21 and the assembling portion 31 .

[0074] The first pressure member 22 has a stepped shaft structure, and includes three parts along its axial direction, namely, a large diameter section 221, a middle diameter section 222, and a small diameter section 223, wherein the middle diameter section 222 and the small diameter section 223 are respectively connected to the two axial ends of the large diameter section 221, and the middle diameter section 222 is connected to one end of the large diameter section 221 close to the joint 422 (i.e., connected to the right end of the large diameter section 221). The outer diameters of the large diameter section 221, the middle diameter section 222, and the small diameter section 223 are successively smaller.

[0075] The shoulder surface where the large diameter section 221 connects to the small diameter section 223 serves as a force-bearing surface 224 , and the connecting member 21 is pressed against the force-bearing surface 224 along the axial direction of the assembly portion 31 .

[0076] like Figure 1 As shown, the inner cavity of the connecting member 21 is a stepped cavity with a larger right cavity and a smaller left cavity, so the connecting member 21 has a shoulder surface, which serves as a force-applying surface 211. Figure 1 As shown, the right end of the connecting member 21 is threadedly connected to the joint 422. When the connecting member 21 continues to rotate and moves to the right, the force-applying surface 211 presses rightward on the force-bearing surface 224 of the first pressure-applying member 22. After the first pressure-applying member 22 is subjected to the rightward pressure, its first end 225 ( Figure 2 The right end in the middle) is pressed against the first sealing ring 11.

[0077] The first pressure member 22 and the second pressure member 23 are arranged along the axial direction of the assembly portion 31; the first pressure member 22 and the second pressure member 23 are annular, and the first pressure member 22 and the second pressure member 23 are both sleeved on the assembly portion 31. The second pressure member 23 is located between the first pressure member 22 and the joint 422, and the first sealing ring 11 is located between the first pressure member 22 and the second pressure member 23.

[0078] When the connecting member 21 presses the first pressure member 22 axially to the right, the first end 225 ( Figure 2 The first sealing ring 11 is pressed on the second pressure member 23 in the axial direction to the right, and the first end 232 ( Figure 2 The right end of the second sealing ring 12 is pressed against the second sealing ring 12, so the second sealing ring 12 is pressed against the end of the joint 422 to the right.

[0079] Please continue to refer to Figure 2 As shown, the first end 225 ( Figure 2 The inner surface of the right end of the Figure 2 The conical surface that expands (to the right) in the groove 32 is pressed against the first sealing ring 11. When the first end 225 of the first pressure member 22 applies pressure to the first sealing ring 11, it has an axial force to the right and a radial force. The axial force is used to pass through the first sealing ring 11 and transmit the force axially to the right to the second pressure member 23, so that the second pressure member 23 has an axial pressure to the right. The radial force acts on the first sealing ring 11, causing the first sealing ring 11 to be compressed and deformed and partially embedded in the groove 32, thereby providing a circumferential clamping force to the assembly portion 31 to fix the assembly portion 31.

[0080] In addition, the second end ( Figure 2The inner diameter of the first end 225 ( Figure 1 The right end of the second pressure member 23 extends to the second end ( Figure 1 The second pressure member 23 has a tapered shoulder surface 231, which is along the Figure 2 Therefore, the first end 225 of the first pressure member 22 and the tapered shoulder surface 231 of the second pressure member 23 squeeze the first sealing ring 11. The tapered shoulder surface 231 of the second pressure member 23 has a radial reaction force on the first sealing ring 11, and through the cooperation of the first end 225 of the first pressure member 22 and the tapered shoulder surface 231, the first sealing ring 11 is radially and uniformly pressed to ensure that the first sealing ring 11 is reliably embedded in the groove 32.

[0081] Please continue to refer to Figure 2 As shown, the first end 232 ( Figure 2 The inner circumference of the second pressure member 23 is a conical surface that expands outward, and the first end 232 ( Figure 2 The inner circumference of the second sealing ring 12 (the right end of the middle portion) is pressed against the second sealing ring 12. Similarly, when the second pressure member 23 applies pressure to the second sealing ring 12, it has an axial force and a radial force. The axial force is used to press the second sealing ring 12 to the right against the end of the joint 422. The radial force acts on the second sealing ring 12, causing the second sealing ring 12 to be compressed and deformed and pressed against the outer circumferential wall of the assembly portion 31, thereby achieving sealing between the assembly portion 31 and the joint 422.

[0082] In addition, the left end of the joint 422 has a pressure surface 423, which is along the Figure 2 Therefore, the first end 232 of the second pressure member 23 and the pressure surface 423 of the joint 422 squeeze the second sealing ring 12. The pressure surface 423 of the joint 422 has a radial reaction force on the second sealing ring 12. Through the cooperation of the first end 232 of the second pressure member 23 and the pressure surface 423 of the joint 422, the second sealing ring 12 is radially and uniformly pressed to ensure that the second sealing ring 12 is reliably pressed on the outer peripheral surface of the assembly part 31; at the same time, the second sealing ring 12 is reliably sealed between the assembly part 31 and the joint 422.

[0083] like Figure 1 As shown, there is a gap between the outer walls of the first pressure member 22 and the second pressure member 23 and the inner wall of the connecting member 21 , and a sealing member can be added in the gap or between the force-applying surface 211 and the force-bearing surface 224 to further improve the sealing effect.

[0084] In other alternative embodiments, the first pressure member 22 and the second pressure member 23 can be integrally formed to form a pressure member, and the first sealing ring 11 is pressed into the groove 32 through the inner wall of the pressure member, and the second sealing ring 12 applies pressure through the right end of the pressure member.

[0085] In other alternative embodiments, the first pressure member 22 and the second pressure member 23 can be configured as block structures. For example, the first pressure member 22 is formed by splicing two halves of a tile-like structure. Similarly, the second pressure member 23 can also be formed by splicing two halves of a tile-like structure. The specific structures of the first pressure member 22 and the second pressure member 23 can be adaptively adjusted based on actual usage requirements.

[0086] In the above embodiment, the joint 422 is provided on the base 421, which provides a way to install the temperature controller 30. In other alternative embodiments, the joint can be provided on the top of the outer tube 42, so the temperature controller 30 can be installed vertically downward through the top of the outer tube 42, and the temperature controller 30 as a whole can be set to a vertical structure. The position where the temperature controller 30 is installed on the furnace tube 40 can be adaptively adjusted based on actual use requirements, and similarly, the specific shape of the temperature controller 30 can be adaptively adjusted based on its installation position.

[0087] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0088] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A temperature control fixing device, characterized in that: include: Sealing components, connection components and temperature controllers; The temperature controller has an assembly portion, and a groove is formed on the assembly portion; The sealing assembly is arranged around the assembly portion; The connecting assembly is connected to the furnace tube, and the connecting assembly is pressed against the sealing assembly so that at least a portion of the sealing assembly is located in the groove.

2. The temperature control fixing device according to claim 1, characterized in that: The sealing assembly comprises a first sealing ring, and the first sealing ring is sleeved on the assembly portion; The groove is an annular groove opened along the circumference of the assembly portion; The connecting assembly is pressed against the first sealing ring so that a portion of the first sealing ring is located in the groove.

3. The temperature control fixing device according to claim 2, characterized in that: The sealing assembly further includes a second sealing ring, the second sealing ring is sleeved on the assembly portion, and the second sealing ring and the first sealing ring are arranged along the axial direction of the assembly portion; The connecting assembly is pressed on the second sealing ring, and the second sealing ring is pressed on the outer peripheral wall of the assembling portion, and the second sealing ring is pressed on the furnace tube.

4. The temperature control fixing device according to claim 3, characterized in that: Along the axial direction of the assembly portion, the first sealing ring is located on a side of the second sealing ring away from the furnace tube.

5. The temperature control fixing device according to any one of claims 1 to 4, characterized in that: The connecting assembly includes a connecting member and a first pressure member; The connecting member is connected to the furnace tube, and the connecting member is sleeved on the assembly part. The first pressure member and the sealing assembly are located between the connecting member and the assembly part. The connecting member is pressed on the first pressure member along the axial direction of the assembly part, and the first pressure member is pressed on the sealing assembly.

6. The temperature control fixing device according to claim 5, characterized in that: The connecting assembly further includes a second pressure-applying member; The first pressure member and the second pressure member are arranged in an axial direction of the assembly portion; The sealing assembly includes a first sealing ring and a second sealing ring, the first sealing ring is located between the first pressure member and the second pressure member, and the connecting member is pressed on the first pressure member along the axial direction of the assembly portion, so that the first pressure member is pressed on the first sealing ring, the first sealing ring is pressed on the second pressure member, and the second pressure member is pressed on the second sealing ring.

7. The temperature control fixing device according to claim 6, characterized in that: The first pressure member is annular, the first pressure member is outer-mounted on the assembly portion, the inner circumference of the first end of the first pressure member is a conical surface expanding outward, and the inner circumference of the first end of the first pressure member is pressed against the first sealing ring; And / or; the second pressure member is annular, the second pressure member is sleeved on the assembly portion, the inner circumference of the first end of the second pressure member is a conical surface expanding outward, and the inner circumference of the first end of the second pressure member is pressed against the second sealing ring.

8. The temperature control fixing device according to claim 7, characterized in that: When the first pressure member and the second pressure member are both ring-shaped; The first end of the first pressure member extends into the interior of the second end of the second pressure member.

9. The temperature control fixing device according to claim 5, characterized in that: The first pressure member has a force-bearing surface, and the connecting member is pressed against the force-bearing surface along the axial direction of the assembly portion.

10. A furnace tube device, characterized in that: It comprises a furnace tube and the temperature control fixing device as claimed in any one of claims 1 to 9, wherein the furnace tube is provided with a joint, a part of the assembly portion passes through the joint, and the connection component is connected to the joint.

Images