Clamp applied to FIB sample preparation and APT test

Abstract

The utility model discloses a clamp applied to FIB sample preparation and APT testing. The clamp comprises a mounting block, a carrying net, a pressing elastic piece and a connecting rod. During FIB sample preparation, the mounting block is fixedly mounted on a worktable of an ion beam system, the carrier net on the mounting block is compressed by the aid of the compression spring, a sample is mounted on the carrier net, the connecting rod is connected with the mounting block after the sample is processed, the whole clamp is transferred to the vicinity of a TEM (transmission electron microscope) by holding the connecting rod with a hand, and in the transfer process, the mounting block and the carrier net are mounted on the mounting block. Due to the fact that the pressing elastic pieces keep pressing the carrying net all the time, it can be guaranteed that materials on the carrying net do not fall off in the transferring process, after TEM characterization is completed, the connecting rod serves as the connecting part of the APT testing equipment, and the whole clamp is installed on the APT testing equipment for testing. The clamp can be applied to an FIB sample preparation procedure and an APT testing procedure, the grid is pressed through the pressing elastic pieces, the stability of the grid is good, and the grid is convenient to take and place.

Description

Technical Field

[0001] The present application relates to the technical field of material characterization, and in particular to a fixture used for FIB sample preparation and APT testing. Background Art

[0002] FIB sample preparation refers to the use of focused ion beam technology (FIB) to prepare samples, which is often used to prepare samples for electron microscope observation or other precision analysis. APT testing refers to three-dimensional atom probe testing, which can analyze the composition of samples at the atomic scale.

[0003] When using FIB technology to prepare samples for APT testing, the samples need to be prepared on the workbench of the ion beam system. After preparation, the grid and the sample need to be removed together and placed under a TEM (transmission electron microscope) for characterization. During the process of transferring the sample to the TEM for characterization, the sample is prone to fall off. After the characterization, it needs to be installed on the APT testing equipment for testing. Therefore, designing a fixture with good stability and universal application for FIB sample preparation and APT testing is an urgent problem to be solved in this field. Utility Model Content

[0004] The embodiment of the present application provides a fixture for FIB sample preparation and APT testing, which can be applied to a variety of equipment and has good stability.

[0005] The present application provides a fixture for FIB sample preparation and APT testing, comprising a mounting block, a grid, a clamping spring and a connecting rod; the mounting block is mounted on an external device; the grid is arranged on the mounting block, and the sample blank is arranged on the grid; one end of the clamping spring is arranged on the mounting block, and the other end is arranged to clamp the grid on the mounting block; one end of the connecting rod is detachably connected to the mounting block along the horizontal direction.

[0006] Preferably, in the above solution, a mounting groove is provided on the mounting block, and at least a part of the carrier grid is arranged in the mounting groove.

[0007] Preferably, the above scheme has a plurality of mounting teeth at one end of the carrier grid, the mounting teeth being used to connect with the sample blank, a first horizontally concave avoidance groove being provided at one side of the mounting block, and the projection of the mounting teeth in the height direction falling into the first avoidance groove.

[0008] Preferably, in the above solution, the inner bottom surface of the mounting groove is provided with an avoidance hole which vertically penetrates the mounting block, and at least a part of the projection of the clamping spring in the height direction overlaps with the avoidance hole.

[0009] Preferably, in the above solution, a second avoidance groove is provided at the bottom of the mounting block, and an inner top surface of the second avoidance groove is configured as a lower opening end surface of the avoidance hole.

[0010] Preferably, in the above solution, one end of the connecting rod is threadedly connected to a first threaded hole provided on the mounting block.

[0011] The above scheme is preferred, wherein the connecting rod includes a sliding rod, a sleeve, a rotating cover and a screw; one end of the sliding rod is threadedly connected to the first threaded hole, the sleeve is coaxially sleeved on the other end of the sliding rod, and the sleeve and the sliding rod can only slide relative to each other in the axial direction; the rotating cover is rotatably arranged at the end of the sleeve away from the sliding rod; the screw is coaxially arranged in the sleeve, and one end of the screw is fixedly connected to the rotating cover, and the other end is threadedly connected to the second threaded hole arranged on the end face of the sliding rod.

[0012] Preferably, the above scheme has a guide bar on the outer periphery of the slide rod, the length direction of the guide bar is configured as the axial direction of the slide rod, and a guide groove is provided on the inner periphery of the sleeve, so that the sleeve and the slide rod can only slide relative to each other in the axial direction of the slide rod through the cooperation of the guide groove and the guide bar.

[0013] Preferably, in the above solution, there is magnetic attraction between the rotating cover and the end of the sleeve.

[0014] The fixture used in FIB sample preparation and APT testing of the present application has at least the following beneficial effects:

[0015] The fixture of the present application includes a mounting block, a grid, a clamping spring and a connecting rod; when performing FIB sample preparation, the mounting block is fixedly mounted on the workbench of the ion beam system, and then the grid on the mounting block is clamped by the clamping spring, an external manipulator or other equipment places the sample blank on the grid, and the sample blank is connected to the grid by spraying materials through an external device. After this step is completed, the sample blank can be processed by the ion beam system. After the processing is completed, the connecting rod is connected to the mounting block, and then the entire fixture is transferred to the vicinity of the TEM by holding the connecting rod. During this transfer process, the clamping spring always keeps the grid clamped, thereby ensuring that the material on the grid will not fall during the transfer process. Compared with the method of transferring the grid by hand with tweezers, the structure of the present application is obviously more stable. After the TEM characterization is completed, the grid and sample on the TEM are assembled on the mounting block again and the grid is clamped by the clamping spring, and then the connecting rod is used as the connection part with the APT test equipment, so that the entire fixture is installed on the APT test equipment for testing. The fixture of the present application can be used in the FIB sample preparation process and the APT test process, wherein the carrier grid is compressed by a compression spring sheet, the carrier grid has good stability, and it is relatively convenient to take and place the carrier grid. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present application. Also, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0017] Figure 1 is a structural diagram of a clamp according to an embodiment of the present application;

[0018] Figure 2 yes Figure 1 The enlarged view of point A in the middle;

[0019] Figure 3 yes Figure 1 A top view of the middle mounting block;

[0020] Figure 4 yes Figure 3 Bottom diagram of the middle mounting block;

[0021] Figure 5 is another structural diagram of the clamp according to an embodiment of the present application;

[0022] Figure 6 is a vertical cross-sectional view of the clamp according to an embodiment of the present application;

[0023] Figure 7 yes Figure 1 Exploded view of the middle connecting rod;

[0024] Description of the reference numerals is as follows:

[0025] 1. Mounting block; 1a. Mounting groove; 1b. First avoidance groove; 1c. Avoidance hole; 1d. Second avoidance groove; 1e. First threaded hole;

[0026] 2. Loading net; 21. Installing teeth;

[0027] 3. Press the spring;

[0028] 4. Connecting rod; 41. Sliding rod; 411. Guide bar; 412. Second threaded hole; 42. Sleeve; 421. Guide groove; 43. Rotating cover; 44. Screw. DETAILED DESCRIPTION

[0029] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating the examples of the present application.

[0030] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0031] This embodiment discloses a fixture used for FIB sample preparation and APT testing. The fixture is suitable for FIB sample preparation and APT testing, and can prevent samples from falling during sample transfer.

[0032] like Figure 1 and Figure 2 As shown, the fixture includes a mounting block 1, a grid 2, a clamping spring 3 and a connecting rod 4; the mounting block 1 is mounted on an external device, the mounting block 1 can be used as a carrier of various components, the mounting block 1 is mounted on a FIB device (such as an ion beam system), the grid 2 is arranged on the mounting block 1, and the sample blank (not shown) is arranged on the grid 2; one end of the clamping spring 3 is arranged on the mounting block 1, and the other end is arranged to clamp the grid 2 on the mounting block 1; one end of the connecting rod 4 is detachably connected to the mounting block 1 in the horizontal direction, and the connecting rod 4 can facilitate the staff to transfer the mounting block 1 and the grid 2 and other components to the next station, and the connecting rod 4 can also be used as the connection and installation part of the fixture and the APT test equipment, as follows:

[0033] like Figure 3 and Figure 4As shown, the mounting block 1 is provided with a step surface, and a downwardly concave mounting groove 1a is provided on the step surface. The mounting groove 1a can be used to install the carrier net 2. The side of the mounting groove 1a is provided with a first avoidance groove 1b that is concave toward the mounting groove 1a in the horizontal direction. The first avoidance groove 1b runs through the mounting block 1 from top to bottom. From a top-down perspective, the first avoidance groove 1b is semicircular. The design of the first avoidance groove 1b can facilitate an external manipulator or other equipment to install the sample blank on the mounting teeth 21 at the front end of the carrier net 2, and at the same time, it can make room for operation under the carrier net 2, so as to facilitate the FIB device to process the sample blank. Among them, the FIB device is provided with a downward pressing mechanism that moves up and down. When the mounting block 1 is installed on the FIB device, the downward pressing mechanism can press the mounting block 1 on the FIB device, thereby fixing the position of the mounting block 1.

[0034] like Figure 3 and Figure 4 As shown, a avoidance hole 1c is provided on the inner bottom surface of the mounting groove 1a of the mounting block 1. The avoidance hole 1c vertically penetrates the mounting block 1. From a top-down perspective, the projection of the compression spring 3 in the height direction completely covers the avoidance hole 1c. The avoidance hole 1c is provided to facilitate the telescopic top pin (not shown) of the external device to pass through the avoidance hole 1c upward and lift the compression spring 3 upward, so as to facilitate the placement and removal of the carrier net 2. Specifically, a telescopic top pin that can be extended and retracted up and down is provided on the FIB device. When the mounting block 1 is installed on the FIB device, the telescopic top pin corresponds coaxially with the avoidance hole 1c, and the telescopic top pin can lift the compression spring 3 upward. Then the staff places the carrier net 2 in the mounting groove 1a of the mounting table, and then the telescopic top pin is retracted downward, and the compression spring 3 immediately presses the carrier net 2 on the inner bottom surface of the mounting groove 1a.

[0035] like Figure 4 As shown, a second recessed avoidance groove 1d is provided below (on the lower surface) the mounting block 1. From an upward perspective, the second avoidance groove 1d is U-shaped, and the length and width specifications of the second avoidance groove 1d are at least twice the inner diameter of the avoidance hole 1c. Among them, the lower opening end surface of the avoidance hole 1c is configured as the inner top surface of the second avoidance groove 1d, that is, the avoidance hole 1c and the projection of the inner top surface of the second avoidance groove 1d in the height direction overlap. In this embodiment, the second avoidance groove 1d is provided to make room for a corresponding space below the avoidance hole 1c, to avoid interference between the mounting block 1 and the structure near the telescopic top pin, and to achieve a certain weight reduction effect.

[0036] Please refer again Figure 2, the carrier net 2 is arranged on the inner bottom surface of the installation groove 1a, and one end of the carrier net 2 is provided with a mounting tooth 21, and the mounting tooth 21 is used to connect with the sample stock. From a top view, the projections of multiple mounting teeth 21 all fall into the first avoidance groove 1b. When installing the sample stock, an external manipulator or other equipment abuts the sample stock with the mounting tooth 21. In this process, the first avoidance groove 1b can provide an avoidance space for the external manipulator. After the sample stock abuts with the mounting tooth 21, the external equipment sprays an adhesive material to the abutment position of the sample stock and the mounting tooth 21, thereby connecting and fixing the sample stock with the mounting tooth 21. In some preferred embodiments, the thickness of the carrier net 2 is consistent with the depth of the installation groove 1a.

[0037] Please refer again Figure 2 One end of the clamping spring 3 is arranged on the mounting table, and the other end of the clamping spring 3 can abut against the upper surface of the carrier net 2 so as to clamp the carrier net 2 in the mounting groove 1a. When the carrier net 2 needs to be taken or placed, it is only necessary to lift or lower the clamping spring 3. The material of the clamping spring 3 is preferably a metal elastic material. The specific material type can refer to the prior art and is not limited here. In the prior art, the carrier net is fixed by using a screw thread to lock the clamping block, and then the clamping block clamps the carrier net. This method makes it inconvenient to take and place the carrier net because the screw is relatively small and cannot be turned quickly, and the efficiency is much slower.

[0038] like Figure 5 As shown, one end of the connecting rod 4 is detachably connected to the mounting block 1 in the horizontal direction. The detachable connection method facilitates the adaptation and application of the mounting block 1 on different devices. For example, the connecting rod 4 needs to be removed when it is on a FIB device. When transferring the mounting block 1, the grid 2 and the sample, the connecting rod 4 needs to be held for transfer. When the sample needs to be subjected to an APT test, the connecting rod 4 needs to be clamped on the workbench of the APT device.

[0039] like Figure 5 As shown, the detachable connection between the connecting rod 4 and the mounting block 1 can be a snap-on connection or a threaded connection. In this embodiment, a threaded connection is preferred. The specific structural form is: an external thread is provided at one end of the connecting rod 4, and a first threaded hole 1e is provided on the side of the mounting block 1 away from the first avoidance groove 1b, and the connecting rod 4 is threadedly connected to the first threaded hole 1e.

[0040] like Figure 6 and Figure 7 As shown, in some embodiments, the length of the connecting rod 4 is set to be adjustable. On the one hand, it is to adapt to different working conditions. On the other hand, when performing APT testing on the sample, the position of the mounting block 1 and the sample on the APT testing equipment can be changed by adjusting the length of the connecting rod 4, thereby meeting different testing requirements.

[0041] The specific structure of the connecting rod 4 is as follows: Figure 6 and Figure 7 As shown: the connecting rod 4 includes a slide bar 41, a sleeve 42, a rotating cover 43 and a screw 44; one end of the slide bar 41 is provided with an external thread that matches the first threaded hole 1e, and the sleeve 42 is coaxially sleeved on the other end of the slide bar 41, and the slide bar 41 and the sleeve 42 can only slide relative to each other in the axial direction of the slide bar 41, and the overall length can be adjusted by the relative axial sliding of the slide bar 41 and the sleeve 42, wherein when the APT test is required, the sleeve 42 of the connecting rod 4 can be clamped on the workbench of the APT equipment. The rotating cover 43 is rotatably arranged at one end of the sleeve 42 away from the slide bar 41; the screw 44 is coaxially arranged in the sleeve 42, and one end of the screw 44 is fixedly connected to the inner side of the rotating cover 43, and the other end of the screw 44 is threadedly connected to the slide bar 41, specifically, a second threaded hole 412 is arranged on the axial end face of the slide bar 41, and the screw 44 is threadedly matched with the second threaded hole 412. When the length of the connecting rod 4 needs to be adjusted, it is only necessary to rotate the rotating cover 43, and the rotating cover 43 drives the screw rod 44 to rotate. Since the sliding rod 41 can only slide axially, the rotating screw rod 44 can drive the sliding rod 41 to slide axially and thus adjust the length.

[0042] like Figure 6 and Figure 7 As shown, the slide bar 41 and the sleeve 42 can only slide relative to each other in the axial direction of the slide bar 41, and the specific implementation method is: a guide bar 411 is provided on the outer periphery of the slide bar 41, and the length direction of the guide bar 411 is configured as the axial direction of the slide bar 41, and a guide groove 421 is provided on the inner periphery of the sleeve 42, and the length direction of the guide groove 421 is also configured as the axial direction of the slide bar 41; at least part of the guide bar 411 is slidably arranged in the guide groove 421, and the cooperation between the guide groove 421 and the guide bar 411 restricts the slide bar 41 and the sleeve 42 from circumferential rotation, and the slide bar 41 and the sleeve 42 can only slide relative to each other in their axial direction.

[0043] like Figure 6 and Figure 7 As shown, in some embodiments, preferably, the inner circumference of the rotating cover 43 is provided with an annular convex strip (not marked) along its circumference, the end of the sleeve 42 is provided with an annular groove (not marked), and the annular boss is provided in the annular groove, so that the rotating cover 43 can be restricted from axially separating from the sleeve 42, and the rotating cover 43 can only rotate circumferentially relative to the sleeve 42. Among them, a magnetic attraction layer (not marked) is provided on the inner circumference of the rotating cover 43, and there is a magnetic attraction between the magnetic attraction layer and the end (metal material) of the sleeve 42, so that when the rotating cover 43 is not rotated, the position of the rotating cover 43 is stable, and the overall length of the slide rod 41 and the sleeve 42 is fixed. When the length needs to be changed, it is only necessary to manually overcome the magnetic attraction of the rotating cover 43 and rotate the rotating cover 43.

[0044] A working mode of the fixture used for FIB sample preparation and APT testing of this embodiment is as follows:

[0045] When preparing a sample in FIB, hold the connecting rod 4 to place the mounting block 1 on the working table of the FIB device, then move the pressing mechanism of the FIB device downward to press the mounting block 1 on the working table of the FIB device, and remove the connecting rod 4;

[0046] Then the telescopic ejector pin of the FIB device passes upward through the avoidance hole 1c and pushes up the pressing spring sheet 3. The worker places the carrier mesh 2 in the mounting groove 1a of the mounting block 1. Then the telescopic ejector pin is reset downward, and the pressing spring sheet 3 immediately presses the carrier mesh 2 downward.

[0047] The external manipulator mounts the sample blank on the mounting teeth 21 of the carrier mesh 2, and then sprays adhesive material on the contact portion between the sample blank and the mounting teeth 21, thereby connecting the sample blank and the mounting teeth 21 together;

[0048] The FIB equipment processes the sample blank and prepares the sample on the grid 2. After the preparation is completed, the pressing mechanism of the FIB equipment is reset upward, and the connecting rod 4 is threadedly connected to the mounting block 1. Then, the staff holds the connecting rod 4 and transfers the mounting block 1, the grid 2 and the prepared sample to the vicinity of the TEM (transmission electron microscope);

[0049] After the staff transfers the fixture to the vicinity of the TEM, they use tweezers or other tools to pull out the grid 2 and the sample from the mounting block 1 and then place them on the TEM for characterization. After the characterization is completed, they continue to use tweezers to put the grid 2 and the sample back to their original positions on the mounting block 1. When placing, the pressing spring 3 needs to be lifted and then the grid 2 is pressed;

[0050] When APT testing is required, the staff clamps the connecting rod 4 on the workbench of the APT equipment, and the APT equipment tests and analyzes the sample at the front end of the mounting block 1. After the analysis is completed, the connecting rod 4 together with the mounting block 1 and other components can be removed from the APT equipment.

[0051] The above is only a specific implementation of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the systems, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the protection scope of the present application is not limited to this. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in this application, and these modifications or replacements should be included in the protection scope of this application.

Claims

1. A fixture used for FIB sample preparation and APT testing, characterized in that: It comprises a mounting block (1), a carrier net (2), a pressing spring sheet (3) and a connecting rod (4); The mounting block (1) is mounted on an external device; The carrier net (2) is arranged on the mounting block (1), and the sample blank is arranged on the carrier net (2); One end of the pressing spring sheet (3) is arranged on the mounting block (1), and the other end is arranged to press the carrier net (2) onto the mounting block (1); One end of the connecting rod (4) is detachably connected to the mounting block (1) along the horizontal direction.

2. The fixture for FIB sample preparation and APT testing according to claim 1, characterized in that: The mounting block (1) is provided with a mounting groove (1a), and at least a portion of the carrier net (2) is arranged in the mounting groove (1a).

3. The fixture for FIB sample preparation and APT testing according to claim 2, characterized in that: One end of the carrier net (2) is provided with a plurality of mounting teeth (21), the mounting teeth (21) being used to connect with the sample blank, one side of the mounting block (1) is provided with a horizontally concave first avoidance groove (1b), and the projection of the mounting teeth (21) in the height direction falls into the first avoidance groove (1b).

4. The fixture for FIB sample preparation and APT testing according to claim 2 or 3, characterized in that: The inner bottom surface of the installation groove (1a) is provided with an avoidance hole (1c) vertically penetrating the installation block (1), and at least a portion of the projection of the compression spring sheet (3) in the height direction overlaps with the avoidance hole (1c).

5. The fixture for FIB sample preparation and APT testing according to claim 4, characterized in that: A second avoidance groove (1d) is provided at the bottom of the installation block (1), and the inner top surface of the second avoidance groove (1d) is configured as the lower opening end surface of the avoidance hole (1c).

6. The fixture for FIB sample preparation and APT testing according to claim 1, characterized in that: One end of the connecting rod (4) is threadedly connected to a first threaded hole (1e) provided on the mounting block (1).

7. The fixture for FIB sample preparation and APT testing according to claim 6, characterized in that: The connecting rod (4) comprises a sliding rod (41), a sleeve (42), a rotating cover (43) and a screw rod (44); one end of the sliding rod (41) is threadedly connected to the first threaded hole (1e), and the sleeve (42) is coaxially sleeved on the other end of the sliding rod (41), and the sleeve (42) and the sliding rod (41) can only slide relative to each other in the axial direction; the rotating cover (43) is rotatably arranged at one end of the sleeve (42) away from the sliding rod (41); the screw rod (44) is coaxially arranged in the sleeve (42), and one end of the screw rod (44) is fixedly connected to the rotating cover (43), and the other end is threadedly connected to the second threaded hole (412) arranged on the end surface of the sliding rod (41).

8. The fixture for FIB sample preparation and APT testing according to claim 7, characterized in that: A guide bar (411) is arranged on the outer periphery of the slide bar (41), and the length direction of the guide bar (411) is configured as the axial direction of the slide bar (41). A guide groove (421) is arranged on the inner periphery of the sleeve (42), and the sleeve (42) and the slide bar (41) can only slide relative to each other in the axial direction of the slide bar (41) through the cooperation of the guide groove (421) and the guide bar (411).

9. The fixture for FIB sample preparation and APT testing according to claim 7 or 8, characterized in that: There is magnetic attraction between the rotating cover (43) and the end of the sleeve (42).

Images