Air inlet device and coating equipment

Abstract

The utility model relates to the technical field of semiconductors or photovoltaics, in particular to an air inlet device and coating equipment, and aims at solving the problems that an existing air inlet device with double independent channels is complex in structure and high in manufacturing cost. According to the air inlet device, the second plate body assembly is in sealed connection with the outer edge of the first sinking groove in the surface of the first plate body assembly, a first air uniformizing chamber can be formed, the second plate body assembly is provided with a plurality of air channels which are communicated with one another, and a second air uniformizing chamber can be formed; the first gas inlet channel and the second gas inlet channel are respectively communicated with the first gas uniformizing chamber and the second gas uniformizing chamber, the first gas outlet channel is communicated with the first gas uniformizing chamber and the process chamber, and the second gas outlet channel is communicated with the second gas uniformizing chamber and the process chamber, so that independent gas inlet of the two channels is realized, and the first gas uniformizing chamber and the second gas uniformizing chamber are simple in structure and low in cost. The requirement for dimensional accuracy in the direction perpendicular to the thickness direction of the air inlet device is low, and the manufacturing cost is reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor or photovoltaic technology, and in particular to an air intake device and a coating device. Background Art

[0002] In the photovoltaic industry, coating equipment is the key equipment to achieve high-quality coating. Among them, the air intake device is an important part of the coating equipment, and its performance directly affects the uniformity and stability of the coating effect.

[0003] In existing coating equipment, an air intake device with dual independent air intake channels is widely used, which is intended to introduce different gases into the process chamber of the coating equipment through two independent air intake channels to achieve a more sophisticated coating effect. However, the air intake device with dual independent channels is usually more complicated in structure design, which increases the manufacturing cost of the equipment. Utility Model Content

[0004] In view of this, an embodiment of the present application provides an air intake device and a coating device to solve the problem that the existing air intake device with dual independent channels has a complex structure and high manufacturing cost.

[0005] In the first aspect, an embodiment of the present application provides an air intake device, which is applied to a coating device. The coating device is provided with a process chamber, and the air intake device includes: a first plate body component, a surface of the first plate body component is provided with a first trough, and the first plate body component is also provided with a first air intake channel and a second air intake channel; a second plate body component is sealed and connected to the outer edge of the first trough to form a first uniform air chamber; the first air intake channel is connected to the first uniform air chamber, the second plate body component is provided with a plurality of air channels connected to each other, the plurality of air channels form a second uniform air chamber, and the second air intake channel is connected to the second uniform air chamber; wherein the second plate body component is also provided with a plurality of first air outlet channels and a plurality of second air outlet channels; the plurality of first air outlet channels are configured to connect the first uniform air chamber and the process chamber; the plurality of second air outlet channels are configured to connect the second uniform air chamber and the process chamber.

[0006] In combination with the first aspect, in certain implementations of the first aspect, the first plate body assembly includes: a first plate body, a second trough and a third trough arranged at the bottom of the second trough on one side of the first plate body close to the second plate body assembly; a second plate body, sealed and connected to the outer edge of the third trough to form a third uniform air chamber with the first plate body; the second plate body is provided with a plurality of first through holes, and the plurality of first through holes connect the first uniform air chamber and the third uniform air chamber; wherein the second trough and the second plate body form the first trough.

[0007] In combination with the first aspect, in some implementations of the first aspect, a plurality of first air outlet channels and a plurality of second air outlet channels are arranged alternately; wherein the second plate body assembly comprises: a third plate body, a fourth sink groove is provided on a side close to the first plate body assembly, a plurality of first protrusions are provided in the fourth sink groove, the fourth sink groove is divided by the plurality of first protrusions to form a plurality of sub-sink grooves and a first annular sink groove connected to the plurality of sub-sink grooves, a sub-sink groove is formed between two adjacent first protrusions, and the first annular sink groove is provided along the inner wall of the fourth sink groove to surround the plurality of A first protrusion and a plurality of sub-grooves; a fourth plate body, including a sealing portion and a plurality of first hollow portions, the sealing portion including a plurality of sub-sealing portions and an annular sealing portion connecting the plurality of sub-sealing portions, a sub-sealing portion is formed between two adjacent first hollow portions, and the plurality of sub-sealing portions cooperate with the plurality of sub-grooves to form a plurality of air channels; wherein the first hollow portion is adapted to the corresponding first protrusion of the third plate body, a plurality of first air outlet channels and a plurality of second air outlet channels penetrate the third plate body, and a plurality of second air outlet channels are arranged at the bottom of the sub-grooves.

[0008] In combination with the first aspect, in certain implementations of the first aspect, a middle area and a side area surrounding the middle area are provided on a side of the first plate body assembly away from the second plate body assembly, the first air intake channel is located in the middle area, and the second air intake channel is located in the side area; the plurality of air ducts include strip air ducts and annular air ducts; wherein the second uniform air chamber includes: a plurality of first sub-uniform air chambers, each sub-sealing portion is sealed and connected to the outer edge of a sub-sink to form a first sub-uniform air chamber, the first sub-uniform air chamber is a strip air channel; the second sub-uniform air chamber is formed by a ring-shaped sealing portion being sealed and connected to the outer edge of the first annular sink, the second sub-uniform air chamber is an annular air channel, and the second sub-uniform air chamber is connected to the first sub-uniform air chamber; wherein the orthographic projection of the second sub-uniform air chamber on the first plate body assembly and the orthographic projection of the first sink on the first plate body assembly are provided with a non-overlapping area; the second air intake channel is connected to the second sub-uniform air chamber corresponding to the non-overlapping area.

[0009] In combination with the first aspect, in certain implementations of the first aspect, a second annular groove is provided on one side of the first plate body close to the second plate body assembly, and the second annular groove is located on the periphery of the first groove; the fourth plate body is sealed and connected to the outer edge of the second annular groove to form a fourth uniform air chamber; the second air inlet channel is connected to the fourth uniform air chamber; the orthographic projection of the fourth uniform air chamber on the first plate body assembly and the orthographic projection of the second sub-uniform air chamber on the first plate body assembly have an annular overlapping area; the annular sealing portion is provided with a plurality of second through holes in the area corresponding to the annular overlapping area, and the second through holes connect the fourth uniform air chamber and the second sub-uniform air chamber.

[0010] In combination with the first aspect, in certain implementations of the first aspect, an air intake chamber is provided in the first plate body; the second air intake channel is connected to the air intake chamber, the first plate body is provided with a plurality of third through holes, and the third through holes are connected to the air intake chamber and the fourth uniform air chamber; the second air intake channel and the plurality of third through holes are staggeredly arranged.

[0011] In combination with the first aspect, in some implementations of the first aspect, the air intake chamber is an arc-shaped chamber or an annular chamber.

[0012] In combination with the first aspect, in certain implementations of the first aspect, the air intake device further includes: heating wires uniformly arranged in the first plate assembly and / or the second plate assembly.

[0013] In combination with the first aspect, in certain implementations of the first aspect, a cross-sectional area of ​​a first end of the first air outlet channel is smaller than a cross-sectional area of ​​a second end of the first air outlet channel, wherein the first end of the first air outlet channel is an end of the first air outlet channel close to the first plate body assembly; and / or a cross-sectional area of ​​a first end of the second air outlet channel is smaller than a cross-sectional area of ​​a second end of the second air outlet channel, wherein the first end of the second air outlet channel is an end of the second air outlet channel close to the first plate body assembly.

[0014] In combination with the first aspect, in certain implementations of the first aspect, the first air outlet channel includes: a first front section channel; a first rear section channel, away from the first end of the first air outlet channel and connected to the first front section channel, wherein the cross-sectional area of ​​the first front section channel is smaller than the cross-sectional area of ​​the first rear section channel, and / or the second air outlet channel includes: a second front section channel; a second rear section channel, away from the first end of the second air outlet channel and connected to the second front section channel, wherein the cross-sectional area of ​​the second front section channel is smaller than the cross-sectional area of ​​the second rear section channel.

[0015] In a second aspect, an embodiment of the present application provides a coating device, comprising: a process chamber, provided with a process chamber; an air intake device mentioned in any one of the first aspects, disposed in the process chamber and configured to intake air into the process chamber.

[0016] The air intake device provided in this embodiment has a first groove on the surface of the first plate assembly, and the second plate assembly is sealed and connected to the outer edge of the first groove to form a first uniform air chamber. The second plate assembly is provided with a plurality of air passages connected to each other to form a second uniform air chamber. The first air intake channel is connected to the first uniform air chamber, and the second air intake channel is connected to the second uniform air chamber. The first air outlet channel can connect the first uniform air chamber and the process chamber, and the second air outlet channel can connect the second uniform air chamber and the process chamber, thereby realizing independent air intake of the two channels. The structure of forming the first uniform air chamber and the second uniform air chamber is simple, the two components are easy to align, and the dimensional accuracy requirement in the direction perpendicular to the thickness direction of the air intake device is low, thereby reducing the manufacturing cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 Shown is a schematic structural diagram of a coating device provided in one embodiment of the present application.

[0019] Figure 2 Shown is a schematic structural diagram of an air intake device provided in one embodiment of the present application.

[0020] Figure 3 Shown is a schematic diagram of a top view of an air intake device provided in an embodiment of the present application.

[0021] Figure 4 The present invention provides an embodiment of the present invention. Figure 3 Schematic diagram of the cross-sectional structure of the central air intake device along AA.

[0022] Figure 5 The present invention provides an embodiment of the present invention. Figure 4 A local enlarged schematic diagram of point B in the middle.

[0023] Figure 6 The present invention provides an embodiment of the present invention. Figure 3 Schematic diagram of the cross-sectional structure of the central air intake device along CC.

[0024] Figure 7 The present application provides an embodiment of Figure 4 Schematic diagram of the cross-sectional structure of the central air intake device along DD.

[0025] Figure 8 Shown is a schematic diagram of a top view of a side of a first plate body close to a second plate body assembly provided in an embodiment of the present application.

[0026] Fig. 9 Shown is a schematic diagram of a top view of a second plate provided in an embodiment of the present application.

[0027] Fig.10 The diagram is a schematic top view of a side of a third plate body close to the first plate body assembly provided in an embodiment of the present application.

[0028] Fig.11 Shown is a schematic diagram of a top view of a fourth plate body provided in an embodiment of the present application.

[0029] Fig.12Shown is an exploded view of an air intake device provided in one embodiment of the present application.

[0030] Fig.13 Shown is an exploded view of an air intake device provided in another embodiment of the present application.

[0031] Fig.14 Shown is a schematic diagram of an air intake device provided in an embodiment of the present application from a bottom-up perspective.

[0032] Fig.15 The present invention provides an embodiment of the present invention. Fig.14 The schematic diagram of the cross-sectional structure of the air intake device along EE is shown.

[0033] Fig.16 The present invention provides an embodiment of the present invention. Fig.14 The schematic diagram of the cross-sectional structure of the air intake device along FF is shown.

[0034] Reference numerals:

[0035] 1. Coating equipment; 10. Air intake device; 11. First plate assembly; 110. First sink; 111. First air intake channel; 112. Second air intake channel; 113. First plate; 1130. Second sink; 1131. Third sink; 114. Second plate; 1140. First through hole; 115. Second annular sink; 116. Air intake chamber; 117. Third through hole; 118. Communication channel; 1180. First end of the communication channel; 1181. Second end of the communication channel; 12. Second plate assembly; 120. Airway; 121. First air outlet channel; 1210. First end of the first air outlet channel; 1211. Second end of the first air outlet channel; 1212. First front section channel; 1213. First rear section channel; 1214. First transition section; 122. Second air outlet channel; 12 20. The first end of the second air outlet channel; 1221. The second end of the second air outlet channel; 1222. The second front section channel; 1223. The second rear section channel; 1224. The second transition section; 123. The third plate; 1230. The fourth trough; 1231. The sub-trough; 1232. The first annular trough; 1233. The first protrusion; 124. The fourth plate; 1240. The sealing portion; 1241. The sub-sealing portion; 1242. The annular sealing portion; 1243. The second through hole; 1244. The first hollow portion; 13. The first uniform air chamber; 14. The second uniform air chamber; 140. The first sub-uniform air chamber; 141. The second sub-uniform air chamber; 15. The third uniform air chamber; 16. The fourth uniform air chamber; 17. The heating wire; 20. The process chamber; 21. The process chamber; h. The middle area; k. The edge area; g. The non-overlapping area. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0037] Figure 1 Shown is a schematic structural diagram of a coating device provided in one embodiment of the present application. Figure 2 Shown is a schematic structural diagram of an air intake device provided in one embodiment of the present application. Figure 3 Shown is a schematic diagram of a top view of an air intake device provided in an embodiment of the present application. Figure 4 The present invention provides an embodiment of the present invention. Figure 3 Schematic diagram of the cross-sectional structure of the central air intake device along AA. Figure 5 The present invention provides an embodiment of the present invention. Figure 4 A local enlarged schematic diagram of point B in the middle. Figure 6 The present invention provides an embodiment of the present invention. Figure 3 Schematic diagram of the cross-sectional structure of the central air intake device along CC. Figure 7 The present application provides an embodiment of Figure 4 Schematic diagram of the cross-sectional structure of the central air intake device along DD.

[0038] like Figures 1 to 7 As shown, the air intake device 10 is applied to a coating device 1. The coating device 1 is provided with a process chamber 20. The air intake device 10 comprises: a first plate assembly 11 and a second plate assembly 12.

[0039] A first sink 110 is disposed on one surface of the first plate assembly 11. The first plate assembly 11 is also provided with a first air inlet passage 111 and a second air inlet passage 112.

[0040] The second plate assembly 12 is sealed and connected to the outer edge of the first sink 110 to form a first uniform air chamber 13. The first air inlet channel 111 is connected to the first uniform air chamber 13, and the second plate assembly 12 is provided with a plurality of air passages 120 connected to each other, and the plurality of air passages 120 form a second uniform air chamber 14. The second air inlet channel 112 is connected to the second uniform air chamber 14.

[0041] The second plate assembly 12 is further provided with a plurality of first gas outlet channels 121 and a plurality of second gas outlet channels 122. The plurality of first gas outlet channels 121 are configured to connect the first gas homogenizing chamber 13 and the process chamber 20. The plurality of second gas outlet channels 122 are configured to connect the second gas homogenizing chamber 14 and the process chamber 20.

[0042] Exemplarily, the coating device 1 may be any device capable of coating an object. For example, the coating device 1 may include a vapor deposition device. For example, the coating device 1 may include an atomic layer deposition (Plasma Enhanced Atomic Layer Deposition, PEALD) device. Exemplarily, the coating device 1 is used to coat parts or raw materials forming a photovoltaic module. For example, the coating device 1 may be used to coat a silicon wafer.

[0043] Exemplarily, the gas intake device 10 may be disposed in the process chamber 20 to intake gas into the process chamber 20 .

[0044] Exemplarily, the first plate assembly 11 may be composed of at least one plate-shaped member. The first plate assembly 11 may be composed of multiple parts or may be integrally formed. The first plate assembly 11 may also include a connector, which is used to achieve a sealed connection between the first plate assembly 11 and the second plate assembly 12.

[0045] Specifically, the sink groove provided on the surface may be a groove structure provided on the surface. Exemplarily, the first sink groove 110 may be a circular sink groove for gas flow. The second plate assembly 12 is aligned with the outer edge of the first sink groove 110 and is sealed and connected to form a first uniform gas chamber 13.

[0046] Exemplarily, the first gas inlet channel 111 and the second gas inlet channel 112 may be configured to respectively introduce the first gas and the second gas. The first gas and the second gas may be set according to actual needs. Exemplarily, the first gas may include an organic source gas source (such as trimethylaluminum) or a process gas. The process gas may be a gas used for a coating process, such as ozone. The second gas may include a cleaning gas. The cleaning gas may include a gas used to purge and clean the process chamber 20, such as argon. The first gas inlet channel 111 and the second gas inlet channel 112 may be configured to respectively introduce the first gas and the second gas at the same time, or may be configured to be intermittently introduced. Exemplarily, intermittent gas introduction may include the following process: a certain amount of the first gas is introduced through the first gas inlet channel 111, and then a certain amount of the second gas is introduced through the second gas inlet channel 112, and then a certain amount of the first gas is introduced through the first gas inlet channel 111 again, and so on.

[0047] Exemplarily, the second plate assembly 12 may be composed of at least one plate-like member. Exemplarily, the second plate assembly 12 may be composed of a plurality of parts, or may be integrally formed. Exemplarily, the second plate assembly 12 may be integrally formed by casting. The number and shape of the air ducts 120 in the second plate assembly 12 may be set according to actual needs, and are not specifically limited in this embodiment.

[0048] Exemplarily, the first plate assembly 11 and the second plate assembly 12 can be connected by one or more of the following methods: screw connection, clamping connection, welding, and bonding. Exemplarily, a sealing structure, such as a sealing ring, is further provided between the first plate assembly 11 and the second plate assembly 12 to achieve sealing between the two. Exemplarily, the first plate assembly 11 and the second plate assembly 12 can be sealed and connected by multi-layer welding.

[0049] Exemplarily, a plurality of first air outlet channels 121 are evenly arranged in a partial area of ​​the second plate assembly 12. For example, a plurality of first air outlet channels 121 are evenly arranged in the first area of ​​the second plate assembly 12. A plurality of second air outlet channels 122 are evenly arranged in the second area of ​​the second plate assembly 12. Exemplarily, a plurality of second air outlet channels 122 are evenly arranged in the second area of ​​the second plate assembly 12. For example, a plurality of second air outlet channels 122 are evenly arranged on the second plate assembly 12. Exemplarily, there may be no intersection between the first area and the second area. For example, the first area is the left half area of ​​the second plate assembly 12, and the second area is the right half area of ​​the second plate assembly 12.

[0050] In some application scenarios, the first gas can flow uniformly into the first uniform gas chamber 13 through the first gas inlet channel 111, and then be divided by a plurality of first gas outlet channels 121 to enter the process chamber 20. The second gas can flow uniformly into the second uniform gas chamber 14 formed by a plurality of gas channels 120 through the second gas inlet channel 112, and then be divided by a plurality of second gas outlet channels 122 to enter the process chamber 20.

[0051] The air intake device 10 provided in this embodiment has a first groove 110 on the surface of the first plate body component 11, and the second plate body component 12 is sealed and connected to the outer edge of the first groove 110 to form a first uniform air chamber 13. The second plate body component 12 is provided with a plurality of air channels 120 connected to each other to form a second uniform air chamber 14. The first air intake channel 111 is connected to the first uniform air chamber 13, and the second air intake channel 112 is connected to the second uniform air chamber 14. The first air outlet channel 121 can connect the first uniform air chamber 13 and the process chamber 20, and the second air outlet channel 122 can connect the second uniform air chamber 14 and the process chamber 20, thereby realizing independent air intake of the two channels, and the structure of forming the first uniform air chamber 13 and the second uniform air chamber 14 is simple, the two components are easy to align, and the dimensional accuracy requirement in the direction perpendicular to the thickness direction of the air intake device 10 is low, thereby reducing the manufacturing cost.

[0052] Figure 8 Shown is a schematic diagram of a top view of a side of a first plate body close to a second plate body assembly provided in an embodiment of the present application. Fig. 9Shown is a schematic diagram of a top view of a second plate provided in an embodiment of the present application.

[0053] like Figures 2 to 9 As shown, the first plate assembly 11 includes a first plate 113 and a second plate 114 .

[0054] A second sinking groove 1130 and a third sinking groove 1131 disposed at the bottom of the second sinking groove 1130 are formed on one side of the first plate body 113 close to the second plate body assembly 12 .

[0055] The second plate 114 is sealedly connected to the outer edge of the third sink 1131 to form a third uniform air chamber 15 with the first plate 113. The second plate 114 is provided with a plurality of first through holes 1140. The plurality of first through holes 1140 communicate the first uniform air chamber 13 with the third uniform air chamber 15.

[0056] The second sinking groove 1130 and the second plate body 114 form the first sinking groove 110 .

[0057] Specifically, the sum of the groove depth of the second sink groove 1130 and the groove depth of the third sink groove 1131 is less than the thickness of the first plate body 113. Exemplarily, the second sink groove 1130 and the third sink groove 1131 can form a step groove. The second plate body 114 of the step groove is sealed and connected to the outer edge of the step to form a third uniform air chamber 15 with the first plate body 113. Exemplarily, the second sink groove 1130 can be an annular sink groove, and the third sink groove 1131 can be a circular sink groove. Exemplarily, the maximum diameter of the second sink groove 1130 is greater than the maximum diameter of the third sink groove 1131.

[0058] Exemplarily, a plurality of first through holes 1140 are evenly arranged on the second plate body 114. Exemplarily, the first air inlet channels 111 and the first through holes 1140 are staggered.

[0059] Exemplarily, the bottom of the second sink 1130 and the second plate 114 form the bottom of the first sink 110. Exemplarily, the side of the second plate 114 close to the second plate assembly 12 is flush with the bottom of the second sink 1130, so that the side of the first uniform gas chamber 13 close to the first plate assembly 11 is smoother, which is convenient for gas circulation. Exemplarily, the plane connection between the first uniform gas chamber 13 and the third uniform gas chamber 15 is chamfered to facilitate smooth gas circulation.

[0060] Exemplarily, the volume of the first uniform air chamber 13 is larger than the volume of the third uniform air chamber 15, so as to provide more space and time for the gas to be further evenly distributed. A larger volume means that the flow rate of the gas therein will be relatively slow, which helps to reduce turbulence and eddy currents, thereby facilitating the uniform distribution of the gas. Exemplarily, the first uniform air chamber 13 and the third uniform air chamber 15 are both flat.

[0061] Exemplarily, the first air inlet channel 111 and the second air inlet channel 112 are arranged on a side of the first plate body 113 away from the second plate body assembly 12, and penetrate the surface of the first plate body 113 on the side away from the second plate body assembly 12. Exemplarily, the first air inlet channel 111 and the second air inlet channel 112 are vertically arranged on the side of the first plate body 113 away from the second plate body assembly 12. Exemplarily, the first air inlet channel 111 and the second air inlet channel 112 protrude from the surface of the first plate body 113 on the side away from the second plate body assembly 12, so as to be connected to the pipeline providing the first gas or the second gas.

[0062] The air intake device 10 provided in this embodiment is provided with a second trough 1130 and a third trough 1131 arranged at the bottom of the second trough 1130 on one side of the first plate body 113 close to the second plate body assembly 12, and the second plate body 114 is sealed and connected to the outer edge of the third trough 1131 to form a third uniform air chamber 15. A plurality of first through holes 1140 on the second plate body 114 connect the first uniform air chamber 13 and the third uniform air chamber 15, so that the gas introduced from the first air intake channel 111 can be preliminarily homogenized in the third uniform air chamber 15, and then diverted by the first through holes and further evenly distributed in the first uniform air chamber 13, that is, the first gas can be uniformly circulated twice through the third uniform air chamber 15 and the first uniform air chamber 13, thereby improving the overall uniformity and making the first gas output by the air intake device 10 more uniform.

[0063] Fig.10 The diagram is a schematic top view of a side of a third plate body close to the first plate body assembly provided in an embodiment of the present application.

[0064] Fig.11 Shown is a schematic diagram of a top view of a fourth plate body provided in an embodiment of the present application.

[0065] like Figure 4 , Fig.10 and Fig.11 As shown, a plurality of first air outlet channels 121 and a plurality of second air outlet channels 122 are arranged alternately. The second plate assembly 12 includes: a third plate 123 and a fourth plate 124 .

[0066] The third plate body 123 is provided with a fourth sink 1230 on one side close to the first plate body assembly 11. A plurality of first protrusions 1233 are provided in the fourth sink 1230. The fourth sink 1230 is divided into a plurality of sub-sinks 1231 and a first annular sink 1232 connected to the plurality of sub-sinks 1231 by the plurality of first protrusions 1233. A sub-sink 1231 is formed between two adjacent first protrusions 1233. The first annular sink 1232 is provided along the inner wall of the fourth sink 1230 to surround the plurality of first protrusions 1233 and the plurality of sub-sinks 1231.

[0067] The fourth plate body 124 includes a sealing portion 1240 and a plurality of first hollow portions 1244. The sealing portion 1240 includes a plurality of sub-sealing portions 1241 and an annular sealing portion 1242 connecting the plurality of sub-sealing portions 1241. A sub-sealing portion 1241 is formed between two adjacent first hollow portions 1244. The plurality of sub-sealing portions 1241 cooperate with the plurality of sub-sinks 1231 to form a plurality of air passages 120.

[0068] The first hollow portion 1244 is adapted to the corresponding first protrusion 1233 of the third plate 123. A plurality of first outlet channels 121 and a plurality of second outlet channels 122 penetrate the third plate 123, and a plurality of second outlet channels 122 are disposed at the bottom of the sub-sink 1231.

[0069] Specifically, along the direction away from the first plate assembly 11 , the second plate assembly 12 sequentially includes: a third plate 123 and a fourth plate 124 .

[0070] Exemplarily, the sub-sink groove 1231 may be a strip groove. Several sub-sink grooves 1231 may be several parallel strip grooves. Several sub-sink grooves 1231 may also be mesh grooves that intersect each other. The first annular sink groove 1232 may be any groove structure that can connect several sub-sink grooves 1231. The specific shape of the first annular sink groove 1232 is not specifically limited in this embodiment. Exemplarily, the first annular sink groove 1232 may be a circular ring.

[0071] The sub-sealing portion 1241 and the annular sealing portion 1242 can be respectively arranged according to the sub-sink 1231 and the first annular sink 1232. Exemplarily, the shape and number of the sub-sealing portion 1241 are the same as the shape and number of the sub-sink 1231. Exemplarily, the sub-sealing portion 1241 can be strip-shaped or square-shaped. The annular sealing portion 1242 can be annular, such as a circular ring.

[0072] Exemplarily, the first protrusions 1233 are respectively sealed to the outer edges of the first hollow portions 1244 or to the outer edges of the sealing portions 1240. The shape of the first hollow portion 1244 can be set based on the shape of the corresponding first protrusion 1233 of the third plate 123.

[0073] For example, Figure 4 and Fig.10 As shown, a plurality of first air outlet channels 121 may respectively penetrate a plurality of first protrusions 1233 , so as to realize a staggered arrangement of a plurality of first air outlet channels 121 and a plurality of second air outlet channels 122 .

[0074] In the air intake device 10 provided in this embodiment, a plurality of first air outlet channels 121 and a plurality of second air outlet channels 122 are arranged in a staggered manner, which is conducive to the plurality of first air outlet channels 121 and a plurality of second air outlet channels 122 being evenly distributed in the second plate assembly 12, and is conducive to the gas flowing out of the first air outlet channels 121 and the gas flowing out of the second air outlet channels 122 being evenly distributed in the process chamber 20. The plurality of sub-sealing portions 1241 of the fourth plate body 124 cooperate with the plurality of sub-sinking grooves 1231 of the third plate body 123 to form a plurality of air channels 120, thereby forming a second uniform air chamber 14, which has a simple structure and is easy to process. In addition, the fourth plate body 124 and the third plate body 123 are easy to align, and the dimensional accuracy requirement in the direction perpendicular to the thickness direction of the air intake device 10 is relatively low, thereby reducing the manufacturing cost.

[0075] In addition, a plurality of first air outlet channels 121 and a plurality of second air outlet channels 122 pass through the third plate body 123, and a plurality of second air outlet channels 122 are arranged at the bottom of the sub-sink 1231, so that the third plate body 123 can directly serve as a part of the first uniform air chamber 13 and the second uniform air chamber 14, so that the gas in the first uniform air chamber 13 and the second uniform air chamber 14 can directly enter the first air outlet channel 121 and the second air outlet channel 122 respectively, avoiding the alignment between tiny structures such as the need for the air outlet holes of the uniform air chamber to be aligned with the air outlet channels in the prior art, thereby reducing the difficulty of manufacturing the air intake device 10.

[0076] In some embodiments, the third plate body is provided with a fifth sink groove on a side away from the first plate body assembly. A plurality of second protrusions are provided in the fifth sink groove. The fifth sink groove is divided by the plurality of second protrusions to form a plurality of sub-sink grooves and a third annular sink groove connected to the plurality of sub-sink grooves. A sub-sink groove is formed between two adjacent second protrusions. The third annular sink groove is provided along the inner wall of the fifth sink groove to surround the plurality of second protrusions and the plurality of sub-sink grooves.

[0077] The fourth plate body includes a groove sealing part and a plurality of second hollow parts. The groove sealing part includes a plurality of sub-groove sealing parts and an annular groove sealing part connecting the plurality of sub-groove sealing parts. A sub-groove sealing part is formed between two adjacent second hollow parts. The plurality of sub-groove sealing parts cooperate with the plurality of sub-sinking grooves to form a plurality of air passages.

[0078] The second hollow portion is adapted to the corresponding second protrusion of the third plate body, a plurality of first outlet channels and a plurality of second outlet channels penetrate the third plate body, and a plurality of second outlet channels penetrate the slot sealing portion. For example, a plurality of second outlet channels penetrate a plurality of slot sealing portions.

[0079] Exemplarily, the orthographic projection of the fifth sink on the third plate body covers the orthographic projection of the second air outlet channel on the third plate body. The orthographic projection of the second protrusion on the third plate body covers the orthographic projection of the first air outlet channel on the third plate body. Exemplarily, a plurality of first air outlet channels penetrate a plurality of second protrusions.

[0080] The air intake device 10 provided in this embodiment is configured by setting a fifth groove on the side away from the first plate body assembly through the third plate body, and a plurality of sub-groove sealing parts cooperate with a plurality of sub-grooves to form a plurality of air ducts, thereby forming a second uniform air chamber, and a plurality of second air outlet channels penetrate the groove sealing parts, providing different shapes of the third plate body and the fourth plate body, providing a diversified design, and facilitating improving the adaptability of the air intake device 10.

[0081] In some embodiments, Figures 2 to 11 As shown, a side of the first plate assembly 11 away from the second plate assembly 12 is provided with a middle region h and a side region k surrounding the middle region h. The first air inlet passage 111 is located in the middle region h, and the second air inlet passage 112 is located in the side region k.

[0082] The plurality of air passages 120 include strip-shaped air passages and annular air passages. The second air homogenizing chamber 14 includes: a plurality of first sub-air homogenizing chambers 140 and second sub-air homogenizing chambers 141 .

[0083] Each sub-sealing portion 1241 is sealed and connected to the outer edge of a sub-sink 1231 to form a first sub-gas-uniform chamber 140. The first sub-gas-uniform chamber 140 is a strip-shaped air passage.

[0084] The second sub-gas-homogenizing chamber 141 is formed by the annular sealing portion 1242 and the outer edge of the first annular sink groove 1232 being sealed and connected. The second sub-gas-homogenizing chamber 141 is an annular air passage and is in communication with the first sub-gas-homogenizing chamber 140 .

[0085] The orthographic projection of the second sub-gas-homogenizing chamber 141 on the first plate assembly 11 and the orthographic projection of the first sink 110 on the first plate assembly 11 are provided with a non-overlapping area g.

[0086] The second air inlet channel 112 is in communication with the second sub-gas homogenizing chamber 141 corresponding to the non-overlapping region g.

[0087] Exemplarily, the middle region h may include a region of the first plate assembly 11 corresponding to the first sink 110. For example, the orthographic projection of the first sink 110 on the first plate assembly 11 is within the range of the orthographic projection of the middle region h on the first plate assembly 11.

[0088] Exemplarily, the size of the non-overlapping region g can be set according to the size of the second air inlet passage 112. Exemplarily, the orthographic projection of the non-overlapping region g on the first plate assembly 11 is within the range of the orthographic projection of the edge region k on the first plate assembly 11.

[0089] In the air intake device 10 provided in this embodiment, the first air intake channel 111 is located in the middle area h, and the second air intake channel 112 is located in the edge area k, so that the first air intake channel 111 and the second air intake channel 112 can be arranged at a longer distance, which is convenient for inputting gas into the air intake device 10 through the first air intake channel 111 and the second air intake channel 112, and one route is used to intake air through the edge area k instead of both routes being used to intake air through the middle area h, which is beneficial to simplifying the structural design of the area corresponding to the middle area h of the air intake device 10.

[0090] In addition, the sub-sealing portion 1241 is sealed and connected to the outer edge of the sub-sink 1231 to form a first sub-uniform air chamber 140, and the annular sealing portion 1242 is sealed and connected to the outer edge of the first annular sink 1232 to form a second sub-uniform air chamber 141. The orthographic projection of the second sub-uniform air chamber 141 on the first plate body assembly 11 and the orthographic projection of the first sink 110 on the first plate body assembly 11 are provided with a non-overlapping area g, and the second air inlet channel 112 is connected to the second sub-uniform air chamber 141 corresponding to the non-overlapping area g, so that the second sub-uniform air chamber 141 can distribute air to the first sub-uniform air chamber 140, so that the gas in the first sub-uniform air chamber 140 can flow out more evenly.

[0091] In some embodiments, Figures 4 to 11 As shown, a second annular sink groove 115 is provided on one side of the first plate body 113 close to the second plate body assembly 12 , and the second annular sink groove 115 is located at the periphery of the first sink groove 110 .

[0092] The fourth plate 124 is sealedly connected to the outer edge of the second annular sink groove 115 to form a fourth uniform air chamber 16. The second air inlet channel 112 is in communication with the fourth uniform air chamber 16.

[0093] There is a circular overlapping area between the orthographic projection of the fourth uniform air chamber 16 on the first plate assembly 11 and the orthographic projection of the second sub-uniform air chamber 141 on the first plate assembly 11 .

[0094] The annular sealing portion 1242 is provided with a plurality of second through holes 1243 in an area corresponding to the annular overlapping area, and the second through holes 1243 are connected to the fourth gas homogenizing chamber 16 and the second sub-gas homogenizing chamber 141 .

[0095] Specifically, the second annular sink groove 115 is not connected to the first sink groove 110. Exemplarily, the second annular sink groove 115 can also be arranged on the periphery of the second sink groove 1130.

[0096] Exemplarily, the second annular sink 115 is in the shape of a circular ring. The shape of the annular overlapping area is in the shape of a circular ring. The distribution shape of the plurality of second through holes 1243 is in the shape of a circular ring. Exemplarily, the orthographic projection of the area of ​​the annular sealing portion 1242 corresponding to the annular overlapping area on the first plate assembly 11 coincides with the orthographic projection of the annular overlapping area on the first plate assembly 11.

[0097] In some application scenarios, after the second gas enters the fourth uniform air chamber 16 through the second air inlet channel 112, it is diverted by a plurality of second through holes 1243 and enters the second sub-uniform air chamber 141, and then diverted by the second sub-uniform air chamber 141 into the first sub-uniform air chamber 140, and then flows out through the second air outlet channel 122.

[0098] In the air intake device 10 provided in this embodiment, the second annular groove 115 is located on the periphery of the first groove 110, and the fourth plate 124 is sealed and connected to the outer edge of the second annular groove 115 to form a fourth uniform air chamber 16. The second air intake channel 112 is connected to the fourth uniform air chamber 16 to facilitate the intake of the second air intake channel 112 located in the edge area k, and the gas introduced by the second air intake channel 112 can be uniformed twice through the fourth uniform air chamber 16 and the second uniform air chamber 14, so that the gas introduced by the second air intake channel 112 can be discharged more uniformly.

[0099] In addition, the annular sealing portion 1242 is provided with a plurality of second through holes 1243 in the area corresponding to the annular overlapping area. The second through holes 1243 connect the fourth uniform air chamber 16 and the second sub-uniform air chamber 141, so that the fourth uniform air chamber 16 can flow to the second uniform air chamber 14 more evenly, so that the gas introduced from the second air inlet channel 112 can be discharged more evenly.

[0100] In some embodiments, Figures 4 to 7 As shown, an air intake chamber 116 is provided in the first plate body 113. The second air intake channel 112 is connected to the air intake chamber 116. The first plate body 113 is provided with a plurality of third through holes 117, and the third through holes 117 are connected to the air intake chamber 116 and the fourth uniform air chamber 16. The second air intake channel 112 and the plurality of third through holes 117 are arranged in a staggered manner. By providing the air intake chamber 116, the gas entering from the second air intake channel 112 can be distributed to the fourth uniform air chamber 16 through the plurality of third through holes 117, which is conducive to the gas entering from the second air intake channel 112 being more evenly distributed in the fourth uniform air chamber 16.

[0101] Exemplarily, the second air inlet channel 112 is connected to the top of the air inlet chamber 116. Exemplarily, a plurality of third through holes 117 are evenly arranged at the bottom of the air inlet chamber 116. Exemplarily, the volume of the air inlet chamber 116 is smaller than the volume of the fourth uniform air chamber 16, so as to quickly distribute gas to the fourth uniform air chamber 16. Exemplarily, the plurality of third through holes 117 and the plurality of second through holes 1243 are staggered so that the gas flowing out of the third through holes 117 is more evenly distributed in the fourth uniform air chamber 16.

[0102] Exemplarily, the first plate body 113 may be made by a casting process.

[0103] In some embodiments, Figure 7 As shown, the air inlet chamber 116 is an arc-shaped chamber or an annular chamber. Since the orthographic projection of the fourth air-homogenizing chamber 16 on the first plate assembly 11 and the orthographic projection of the second sub-air-homogenizing chamber 141 on the first plate assembly 11 have an annular overlapping area, that is, the fourth air-homogenizing chamber 16 includes a portion corresponding to the annular overlapping area, the air inlet chamber 116 is an arc-shaped chamber or an annular chamber, which facilitates the arrangement of a plurality of third through holes 117 connecting the air inlet chamber 116 and the fourth air-homogenizing chamber 16.

[0104] Exemplarily, the orthographic projection of the air inlet chamber 116 on the first plate assembly 11 is within the range of the orthographic projection of the fourth uniform air chamber 16 on the first plate assembly 11. Exemplarily, the air inlet chamber 116 is an arc-shaped chamber, and the central angle of the arc is 270°. Exemplarily, a third through hole 117 is provided at every 90°. A third through hole 117 can also be provided at every 30°. The number of the third through holes 117 can be set according to actual needs.

[0105] Fig.12 Shown is an exploded view of an air intake device provided in one embodiment of the present application. Fig.13 Shown is an exploded view of an air intake device provided in another embodiment of the present application. Fig.14 Shown is a schematic diagram of an air intake device provided in an embodiment of the present application from a bottom-up perspective. Fig.15 The present invention provides an embodiment of the present invention. Fig.14 The schematic diagram of the cross-sectional structure of the air intake device along EE is shown. Fig.16 The present invention provides an embodiment of the present invention. Fig.14 The schematic diagram of the cross-sectional structure of the air intake device along FF is shown.

[0106] like Figures 12 to 16 As shown, a middle region h and a side region k surrounding the middle region h are provided on the side of the first plate assembly 11 away from the second plate assembly 12. The first air inlet channel 111 and the second air inlet channel 112 are both located in the side region k. A connecting channel 118 connecting the first air inlet channel 111 and the first uniform air chamber 13 is provided in the first plate assembly 11.

[0107] Exemplarily, the first air intake channel 111 and the second air intake channel 112 are symmetrical about the central axis of the first air homogenizing chamber 13. Such an arrangement is conducive to uniform force on the air intake device 10, so that it can run smoothly.

[0108] Exemplarily, the orthographic projection of the first air inlet passage 111 on the first plate assembly 11 does not overlap with the orthographic projection of the air inlet chamber 116 on the first plate assembly 11. Exemplarily, the air inlet chamber 116 is an arc-shaped chamber, and the first air inlet passage 111 is located at the opening side of the arc-shaped air inlet chamber 116.

[0109] Exemplarily, the first end 1180 of the communication channel is in communication with the first air inlet channel 111, and the second end 1181 of the communication channel is in communication with the second uniform air chamber 14. Exemplarily, the second end 1181 of the communication channel is disposed in communication with the central region of the third trough 1131. Exemplarily, the central axis of the central region is colinear with the central axis of the third trough 1131. Exemplarily, the communication channel 118 may include a plurality of interconnected sub-communication channels. The shape of the communication channel 118 may be set according to actual needs.

[0110] In the air intake device 10 provided in this embodiment, the first air intake channel 111 and the second air intake channel 112 are both located in the edge region k, and a connecting channel 118 connecting the first air intake channel 111 and the first uniform air chamber 13 is provided in the first plate assembly 11, so that other structures can be provided in the middle region h of the first plate assembly 11, thereby improving the flexibility and adaptability of the design of the air intake device 10. For example, the middle region h of the first plate assembly 11 can be provided with a structure for fixing the air intake device 10 in the process chamber 20, such as a countersunk hole, a threaded hole, etc., so as to facilitate the installation of the air intake device 10 and facilitate the smooth operation of the air intake device 10.

[0111] In some embodiments, Figure 4 As shown, the air intake device 10 also includes a heating component. The heating component may include a heating wire. Exemplarily, the air intake device 10 includes a heating wire 17 uniformly arranged in the first plate assembly 11. The heating wire 17 may also be uniformly arranged in the second plate assembly 12. By uniformly arranging the heating wire 17 in the first plate assembly 11 and / or the second plate assembly 12, a temperature field with good temperature uniformity is provided, and the gas entering from the first air intake channel 111 and the second air intake channel 112 is heated more quickly and uniformly, which is conducive to the good reaction of the gas entering the process chamber 20 from the first air intake channel 111 and the gas entering the process chamber 20 from the second air intake channel 112, thereby improving the coating quality.

[0112] Exemplarily, the heating wires 17 are evenly arranged in the first plate body 113 .

[0113] In some embodiments, Figure 4 As shown, the cross-sectional area of ​​the first end 1210 of the first gas outlet channel is smaller than the cross-sectional area of ​​the second end 1211 of the first gas outlet channel. The first end 1210 of the first gas outlet channel is an end of the first gas outlet channel 121 close to the first plate assembly 11. The cross-sectional area of ​​the first end 1210 of the first gas outlet channel is smaller, which is beneficial for the gas in the first uniform gas chamber 13 to flow out slowly and evenly. The cross-sectional area of ​​the second end 1211 of the first gas outlet channel is larger, which is beneficial for reducing the speed of the gas flowing out of the first end 1210 of the first gas outlet channel, so that the flow rate of the gas flowing out of the first uniform gas chamber 13 is more uniform as a whole, thereby improving the uniformity of the gas flowing out of the first uniform gas chamber 13.

[0114] Exemplarily, the cross-sectional area of ​​the first outlet channel 121 gradually increases from the first end 1210 of the first outlet channel to the second end 1211 of the first outlet channel. Exemplarily, the shape of the first outlet channel 121 includes a cone.

[0115] In some embodiments, Figure 4 As shown, the cross-sectional area of ​​the first end 1220 of the second gas outlet channel is smaller than the cross-sectional area of ​​the second end 1221 of the second gas outlet channel. The first end 1220 of the second gas outlet channel is an end of the second gas outlet channel 122 close to the first plate assembly 11. The cross-sectional area of ​​the first end 1220 of the second gas outlet channel is small, which is conducive to the gas in the second uniform gas chamber 14 to flow out slowly and evenly. The cross-sectional area of ​​the second end 1221 of the second gas outlet channel is large, which is conducive to reducing the speed of the gas flowing out of the first end 1220 of the second gas outlet channel, so that the flow rate of the gas flowing out of the second uniform gas chamber 14 is relatively uniform as a whole, thereby improving the uniformity of the gas flowing out of the second uniform gas chamber 14.

[0116] Exemplarily, the cross-sectional area of ​​the second outlet channel 122 gradually increases from the first end 1220 of the second outlet channel to the second end 1221 of the second outlet channel. Exemplarily, the shape of the second outlet channel 122 includes a cone.

[0117] In some embodiments, Figure 4As shown, the first gas outlet channel 121 includes: a first front section channel 1212 and a first rear section channel 1213. The first rear section channel 1213 is far away from the first end 1210 of the first gas outlet channel and is connected to the first front section channel 1212. The cross-sectional area of ​​the first front section channel 1212 is smaller than the cross-sectional area of ​​the first rear section channel 1213. In this way, the tube wall of the first rear section channel 1213 can limit the diffusion range of the gas flowing out of the first front section channel 1212, so that the gas flowing out of the first gas outlet channel 121 is more concentrated in the coating area. The coating area can be the area on the part to be coated that needs to be coated.

[0118] Exemplarily, the first front section channel 1212 and the first rear section channel 1213 are both cylindrical or tubular. Exemplarily, the first air outlet channel 121 further includes a first transition section 1214. The first transition section 1214 connects the first front section channel 1212 and the first rear section channel 1213. Exemplarily, the shape of the first transition section 1214 is conical.

[0119] In some embodiments, Figure 4 As shown, the second gas outlet channel 122 includes: a second front section channel 1222 and a second rear section channel 1223. The second rear section channel 1223 is far away from the first end 1220 of the second gas outlet channel and is connected to the second front section channel 1222. The cross-sectional area of ​​the second front section channel 1222 is smaller than the cross-sectional area of ​​the second rear section channel 1223. In this way, the tube wall of the second rear section channel 1223 can limit the diffusion range of the gas flowing out of the second front section channel 1222, so that the gas flowing out of the second gas outlet channel 122 is more concentrated in the coating area.

[0120] Exemplarily, the second front section channel 1222 and the second rear section channel 1223 are both cylindrical or tubular. Exemplarily, the second air outlet channel 122 further includes a second transition section 1224. The second transition section 1224 connects the second front section channel 1222 and the second rear section channel 1223. Exemplarily, the shape of the second transition section 1224 is conical.

[0121] The above describes in detail the embodiment of the air intake device 10 of the present application, and the following describes in detail the embodiment of the coating device 1 of the present application. It should be understood that the description of the embodiment of the air intake device 10 corresponds to the description of the embodiment of the coating device 1, so the parts not described in detail can refer to the above embodiment of the air intake device 10.

[0122] like Figure 1 As shown, the coating equipment 1 includes: a process chamber 21 and the air intake device 10 mentioned in any of the above embodiments.

[0123] The process chamber 20 is provided in the process chamber body 21 . The air intake device 10 is provided in the process chamber 20 and is configured to intake air into the process chamber 20 .

[0124] As described above, illustratively, the coating device 1 can be any device capable of coating an object. For example, the coating device 1 can include a vapor deposition device. For example, the coating device 1 can include a PEALD device. Exemplarily, the coating device 1 can also include a gas source device ( Figure 1 The gas source device is configured to communicate with the gas intake device 10 to provide gas to the gas intake device 10.

[0125] The coating equipment 1 provided in this embodiment has a first plate assembly 11 with a first trough 110 on its surface, a second plate assembly 12 sealed and connected to the outer edge of the first trough 110 to form a first uniform air chamber 13, and a second plate assembly 12 with a plurality of air passages 120 interconnected to form a second uniform air chamber 14. The first air inlet channel 111 is connected to the first uniform air chamber 13, the second air inlet channel 112 is connected to the second uniform air chamber 14, the first air outlet channel 121 can connect the first uniform air chamber 13 and the process chamber 20, and the second air outlet channel 122 can connect the second uniform air chamber 14 and the process chamber 20, thereby realizing independent air intake of the two channels, and the structure of forming the first uniform air chamber 13 and the second uniform air chamber 14 is simple, the two components are easy to align, and the dimensional accuracy requirement in the direction perpendicular to the thickness direction of the air intake device 10 is low, thereby reducing the manufacturing cost.

[0126] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0127] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "provided with", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to", and can be used interchangeably with it.

[0128] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0129] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0130] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. An air intake device, characterized in that: Applied to a coating device, the coating device is provided with a process chamber, and the air intake device comprises: A first plate assembly, wherein a first sink groove is provided on one surface of the first plate assembly, and the first plate assembly is further provided with a first air inlet channel and a second air inlet channel; The second plate assembly is sealed and connected to the outer edge of the first sink to form a first uniform air chamber; the first air inlet channel is connected to the first uniform air chamber, the second plate assembly is provided with a plurality of air passages connected to each other, the plurality of air passages form a second uniform air chamber, and the second air inlet channel is connected to the second uniform air chamber; Among them, the second plate assembly is also provided with a plurality of first gas outlet channels and a plurality of second gas outlet channels; a plurality of the first gas outlet channels are configured to connect the first uniform gas chamber and the process chamber; a plurality of the second gas outlet channels are configured to connect the second uniform gas chamber and the process chamber.

2. The air intake device according to claim 1, characterized in that: The first plate assembly comprises: A first plate body, wherein a second sink groove and a third sink groove arranged at the bottom of the second sink groove are provided on one side of the first plate body close to the second plate body assembly; A second plate body is sealed and connected to the outer edge of the third sink to form a third uniform air chamber with the first plate body; the second plate body is provided with a plurality of first through holes, and the plurality of first through holes communicate with the first uniform air chamber and the third uniform air chamber; Wherein, the second sinking groove and the second plate body form the first sinking groove.

3. The air intake device according to claim 2, characterized in that: A plurality of the first air outlet channels and a plurality of the second air outlet channels are arranged alternately; Wherein, the second plate assembly comprises: The third plate body is provided with a fourth sink groove on one side close to the first plate body component, a plurality of first protrusions are provided in the fourth sink groove, the fourth sink groove is divided by the plurality of first protrusions to form a plurality of sub-sink grooves and a first annular sink groove connected with the plurality of sub-sink grooves, one sub-sink groove is formed between two adjacent first protrusions, and the first annular sink groove is provided along the inner wall of the fourth sink groove to surround the plurality of first protrusions and the plurality of sub-sink grooves; The fourth plate body comprises a sealing portion and a plurality of first hollow portions, wherein the sealing portion comprises a plurality of sub-sealing portions and an annular sealing portion connecting the plurality of sub-sealing portions, wherein one sub-sealing portion is formed between two adjacent first hollow portions, and the plurality of sub-sealing portions cooperate with the plurality of sub-sinks to form a plurality of the air passages; The first hollow portion is matched with the corresponding first protruding portion of the third plate body, a plurality of the first air outlet channels and a plurality of the second air outlet channels penetrate the third plate body, and a plurality of the second air outlet channels are arranged at the bottom of the sub-sink.

4. The air intake device according to claim 3, characterized in that: A side of the first plate assembly away from the second plate assembly is provided with a middle area and a side area surrounding the middle area, the first air inlet passage is located in the middle area, and the second air inlet passage is located in the side area; The plurality of airways include strip-shaped airways and ring-shaped airways; Wherein, the second uniform gas chamber comprises: A plurality of first sub-gas-homogenizing chambers, each of the sub-sealing parts is sealed and connected to the outer edge of a sub-sink to form a first sub-gas-homogenizing chamber, and the first sub-gas-homogenizing chamber is the strip-shaped air passage; A second sub-gas-homogenizing chamber is formed by the annular sealing portion and the outer edge of the first annular sink groove being sealed and connected, the second sub-gas-homogenizing chamber is the annular air passage, and the second sub-gas-homogenizing chamber is connected to the first sub-gas-homogenizing chamber; Wherein, the orthographic projection of the second sub-gas-homogenizing chamber on the first plate assembly and the orthographic projection of the first sink on the first plate assembly are provided with a non-overlapping area; The second air inlet channel is in communication with the second sub-gas homogenizing chamber corresponding to the non-overlapping area.

5. The air intake device according to claim 4, characterized in that: A second annular sink groove is provided on one side of the first plate body close to the second plate body assembly, and the second annular sink groove is located at the periphery of the first sink groove; The fourth plate is sealed and connected to the outer edge of the second annular sink to form a fourth uniform air chamber; the second air inlet channel is connected to the fourth uniform air chamber; The orthographic projection of the fourth uniform air chamber on the first plate assembly and the orthographic projection of the second sub-uniform air chamber on the first plate assembly have an annular overlapping area; The annular sealing portion is provided with a plurality of second through holes in an area corresponding to the annular overlapping area, and the second through holes are connected with the fourth uniform air chamber and the second sub-uniform air chamber.

6. The air intake device according to claim 5, characterized in that: An air intake chamber is provided in the first plate body; The second air inlet passage is connected to the air inlet chamber, the first plate body is provided with a plurality of third through holes, and the third through holes are connected to the air inlet chamber and the fourth air homogenizing chamber; The second air inlet passage and a plurality of the third through holes are arranged in a staggered manner.

7. The air intake device according to claim 6, characterized in that: The air inlet chamber is an arc-shaped chamber or an annular chamber.

8. The air intake device according to claim 1, characterized in that: Also includes: Heating wires are uniformly arranged in the first plate assembly and / or the second plate assembly.

9. The air intake device according to any one of claims 1 to 8, characterized in that: The cross-sectional area of ​​the first end of the first air outlet channel is smaller than the cross-sectional area of ​​the second end of the first air outlet channel, wherein the first end of the first air outlet channel is an end of the first air outlet channel close to the first plate assembly; and / or The cross-sectional area of ​​the first end of the second air outlet channel is smaller than the cross-sectional area of ​​the second end of the second air outlet channel, wherein the first end of the second air outlet channel is an end of the second air outlet channel close to the first plate assembly.

10. The air intake device according to claim 9, characterized in that: The first air outlet channel comprises: First front passage; a first rear section channel, which is away from the first end of the first air outlet channel and communicates with the first front section channel, wherein the cross-sectional area of ​​the first front section channel is smaller than the cross-sectional area of ​​the first rear section channel, and / or The second air outlet channel comprises: Second front passage; The second rear section channel is far away from the first end of the second air outlet channel and is communicated with the second front section channel, wherein the cross-sectional area of ​​the second front section channel is smaller than the cross-sectional area of ​​the second rear section channel.

11. A coating device, characterized in that: include: A process chamber, provided with a process chamber; The air intake device according to any one of claims 1 to 10 is disposed in the process chamber and is configured to intake air into the process chamber.

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