Cost-reducing consumption-reducing solid felt for monocrystalline silicon thermal field
By using the solid felt made of asphalt-based cured felt in the single crystal silicon thermal field and setting up an annular connected cavity inside it, the problems of frequent corrosion and replacement of insulation materials in the prior art are solved, and efficient insulation effect and low-cost installation efficiency are achieved.
Patent Information
- Application Number
- CN202421658525.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-12
- Publication Date
- 2025-04-18
- Estimated Expiration
- 2034-07-12
AI Technical Summary
The existing monocrystalline silicon thermal field insulation materials are prone to corrosion, frequently used and high replacement cost. In the prior art, solid felt cannot wrap the entire thermal field and cannot fill the gaps in the thermal field, resulting in limited insulation effect.
The solid felt made of asphalt-based cured felt is solved by setting up multiple annular cavity inside the solid felt and directly placed on the periphery of the water-cooled and hot screen part and the quartz crucible assembly, which solves the problem of frequent replacement of soft felts and high cost, and reduces heat conduction through the cavity and improves the insulation ability.
It realizes maintaining high thermal insulation at low cost, reducing the power consumption of the single crystal silicon thermal field, and improving installation efficiency through active connection and simplifying the felt wrapping process.
Smart Images
Figure CN222771006U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of thermal field of single crystal furnace, and particularly relates to a cost-reducing and consumption-reducing solid felt used for thermal field of single crystal silicon. Background Art
[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals using the Czochralski method. It is the most basic equipment in the solar photovoltaic industry. There is a thermal field inside the single crystal furnace. The performance of the thermal field has a great influence on the quality of the output single crystal silicon, especially the thermal insulation of the thermal field. In the prior art, a carbon-carbon thermal insulation cylinder is generally arranged outside the thermal field, and then soft felt is wrapped around the outside of the carbon-carbon thermal insulation cylinder to achieve the effect of thermal insulation of the thermal field. However, the soft felt pulverizes very quickly and must be replaced frequently during use. Moreover, the method of wrapping the soft felt in the carbon-carbon insulation tube is cumbersome. Each replacement of the soft felt requires a lot of time for disassembly and assembly, which not only wastes time but also increases costs. There is also a small part of carbon fiber integral solid felt placed in the upper and lower parts of the thermal field. Compared with soft felt, carbon fiber solid felt is not easy to corrode, but carbon fiber solid felt can only be placed in the upper and lower parts of the thermal field, and cannot wrap the entire thermal field, nor can it fill the gaps in the thermal field. At the same cost as soft felt, the thermal insulation effect is almost the same, and frequent replacement of detachable protective tubes is costly. Utility Model Content
[0003] In order to overcome the deficiencies of the prior art, the purpose of the utility model is to provide a cost-reducing and consumption-reducing solid felt for a single crystal silicon thermal field, which can not only solve the problem of easy corrosion of the insulation tube, but also maintain high thermal insulation at a low cost.
[0004] To solve the above problems, the technical solution adopted by the utility model is as follows: a cost-reducing and consumption-reducing solid felt for a single crystal silicon thermal field, comprising: a single crystal furnace body and a solid felt, the single crystal furnace body comprising a middle furnace barrel, a furnace cover being provided above the middle furnace barrel, a furnace bottom being provided below the middle furnace barrel, a water-cooled heat shield portion and a quartz crucible assembly being provided in sequence from top to bottom inside the middle furnace barrel, a plurality of cavities being provided inside the solid felt, each of the cavities being annularly connected, the solid felt comprising a first solid felt, a second solid felt and a third solid felt, the first solid felt being able to pass through the water-cooled heat shield portion and being sleeved on the periphery of the water-cooled heat shield portion, the second solid felt being located at the bottom of the first solid felt and the second solid felt being sleeved on the periphery of the quartz crucible assembly, the third solid felt being located at the bottom of the second solid felt and the third solid felt being sleeved on the periphery of the quartz crucible assembly.
[0005] Compared with the prior art, the beneficial effects of the utility model are: the combination of the carbon-carbon insulation tube and the soft felt in the prior art is adjusted to a solid felt filling method, and the solid felt is directly sleeved on the periphery of the water-cooled heat shield part and the quartz crucible assembly to solve the problem of frequent and high cost of replacing the soft felt; an annular cavity is provided inside the solid felt, and the heat conduction of the entire solid felt can be reduced through the cavity, thereby improving the heat preservation capacity and reducing power consumption; in addition, the solid felt of the water-cooled heat shield part is movably connected with the solid felt of the quartz crucible assembly, which is not only convenient for disassembly but also eliminates the felt wrapping process, thereby improving installation efficiency.
[0006] The above-mentioned cost-reducing and consumption-reducing solid felt is made of asphalt-based solidified felt.
[0007] In the above-mentioned cost-reducing and consumption-reducing solid felt, the cross-section of the cavity is circular.
[0008] In the above-mentioned cost-reducing and consumption-reducing solid felt, the cross-section of the cavity is elliptical.
[0009] The above-mentioned cost-reducing and consumption-reducing solid felt has matching grooves on its upper and lower end surfaces, and the matching grooves are used for matching and installing with the equipment inside the single crystal furnace body.
[0010] In the above-mentioned cost-reducing and consumption-reducing solid felt, the interior of the cavity is vacuumed.
[0011] In the above-mentioned cost-reducing and consumption-reducing solid felt, the cavities are distributed in an array.
[0012] In the above-mentioned cost-reducing and consumption-reducing solid felt, the cavities on the first solid felt, the second solid felt and the third solid felt are not connected to each other.
[0013] The cost-reducing and consumption-reducing solid felt has an air guide cylinder at the lower part of the quartz crucible assembly, and a support member is provided on the outer periphery of the air guide cylinder.
[0014] The above-mentioned cost-reducing and consumption-reducing solid felt, the supporting member is made of asphalt-based solidified felt with a solid structure. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 This is a schematic cross-sectional view of the internal structure of a single crystal furnace according to an embodiment of the utility model;
[0016] Figure 2 This is a schematic diagram of the solid felt structure of an embodiment of the utility model;
[0017] Figure 3 It is a schematic cross-sectional view of a solid felt according to an embodiment of the utility model;
[0018] Explanation of the accompanying drawings: 1000 single crystal furnace body, 1100 furnace drum, 1110 middle furnace drum, 1120 lower furnace drum, 1200 furnace cover, 1300 furnace bottom, 1400 water-cooled heat shield, 1410 water-cooled heat shield, 1420 outer guide tube, 1500 quartz crucible assembly, 1510 quartz crucible, 1520 crucible side, 1530 crucible support, 1540 support rod, 1600 gas guide tube, 1610 support member, 2000 solid felt, 2100 first solid felt, 2200 second solid felt, 2300 third solid felt, 2400 cavity, 2500 fixing groove, 2600 matching groove. DETAILED DESCRIPTION
[0019] The embodiments of the present invention are described in detail below. Figures 1 to 3 The embodiment of the utility model provides a cost-reducing and consumption-reducing solid felt for a single crystal silicon thermal field, comprising: a single crystal furnace body 1000 and a solid felt 2000, wherein the single crystal furnace body 1000 comprises a middle furnace barrel 1110, a furnace cover 1200 is arranged above the middle furnace barrel 1110, a furnace bottom 1300 is arranged below the middle furnace barrel 1110, a water-cooled heat shield portion 1400 and a quartz crucible assembly 1500 are arranged in sequence from top to bottom inside the middle furnace barrel 1110, a plurality of cavities 2400 are arranged in the solid felt 2000, and a single cavity 2400 is annularly connected, the solid felt 2000 comprises a first solid felt 2100, a second solid felt 2200 and a third solid felt 2300, the first solid felt 2100 can pass through the water-cooled heat shield portion 1400 and is sleeved on the periphery of the water-cooled heat shield portion 1400, the second solid felt 2200 is located at the bottom of the first solid felt 2100 and the second solid felt 2200 is sleeved It is arranged on the periphery of the quartz crucible assembly 1500, the third solid felt 2300 is located at the bottom of the second solid felt 2200 and the third solid felt 2300 is sleeved on the periphery of the quartz crucible assembly 1500, the combination of the carbon-carbon insulation tube and the soft felt in the prior art is adjusted to the filling method of the solid felt 2000, and the solid felt 2000 is directly sleeved on the periphery of the water-cooled heat shield part 1400 and the quartz crucible assembly 1500 to solve the problem of frequent and high cost of replacing the soft felt; an annular cavity 2400 is provided inside the solid felt 2000, and the heat conduction efficiency of the entire solid felt 2000 can be reduced through the cavity 2400, thereby reducing heat transfer and improving the insulation capacity, thereby reducing power consumption. In addition, the solid felt 2000 of the water-cooled heat shield part 1400 is movably connected with the solid felt 2000 of the quartz crucible assembly 1500, which is not only convenient to disassemble but also omits the felt wrapping process, thereby improving the installation efficiency.
[0020] Furthermore, the solid felt 2000 is used for heat preservation of the thermal field to reduce the power consumption of the thermal field. The thermal field of the single crystal furnace is composed of thermal field components and thermal insulation materials, and about 50% of the heater power is sufficient to maintain its crystal growth conditions, and the rest of the energy is consumed in the environment. By changing the thermal field structure and adjusting the performance of the thermal insulation material, the temperature gradient of the thermal field can be made reasonable, and the heat loss can be reduced, thereby effectively reducing the power during crystal pulling. Of course, the utility model does not limit the specific material of the solid felt 2000. Preferably, the solid felt 2000 is made of asphalt-based solidified felt. Figure 1 When the solid felt 2000 is used to insulate the heat field, an annular cylindrical cavity 2400 is dug out inside the solid felt 2000, that is, a single cavity 2400 is annularly connected. Of course, the utility model does not limit the specific shape of the cross section of the cavity 2400. Preferably, the cross section of the cavity 2400 is circular. Under the same cross-sectional diameter size, the circular cavity 2400 has the largest heat conduction area, so the circular cavity 2400 has the best heat conduction effect. Of course, the cross section of the cavity 2400 can be elliptical or other structural shapes. Further, referring to Figure 3 The cavities 2400 are distributed in an array so that the cavities 2400 are evenly distributed inside the solid felt 2000. The evenly distributed cavities 2400 can make the thermal insulation more balanced, so that the heat of the outer wall of the water-cooled heat shield 1400 and the quartz crucible assembly 1500 remains uniform. It is also easy to process the cavities 2400 and make the solid felt 2000, saving a lot of production time. Furthermore, the interior of the cavities 2400 is vacuumed. The cavities 2400 are vacuumed. In the cavities 2400, since there is no gas, the gas molecules will not conduct heat transfer in the form of convection and conduction. At the same time, since there are no molecules, the cavities 2400 cannot transfer heat by thermal radiation. Therefore, the thermal conductivity of the entire solid felt 2000 is enhanced, and the effect of heat transfer can be slowed down, thereby keeping the heat field warm and further reducing the power consumption of the heat field.
[0021] Furthermore, in order to properly install and connect with the thermal field components, refer to Figure 2 The upper and lower end surfaces of the solid felt 2000 are provided with matching grooves 2600, and the matching grooves 2600 are used to match and install with the equipment inside the single crystal furnace body 1000. Furthermore, the center of the solid felt 2000 is provided with a fixing groove 2500, and the fixing groove 2500 is used to sleeve the thermal field components, for example, sleeved on the periphery of the water-cooled heat shield part 1400 and the quartz crucible assembly 1500. Of course, the utility model is not limited to specific thermal field components. Preferably, refer to Figure 1 and Figure 2The thermal field component includes a water-cooled heat shield portion 1400 and a quartz crucible assembly 1500. The solid felt 2000 is fixed to the periphery of the water-cooled heat shield portion 1400 and the quartz crucible assembly 1500 through a fixing groove 2500. The matching groove 2600 is clamped with the end faces of the water-cooled heat shield portion 1400 and the quartz crucible assembly 1500 so that the solid felt 2000 can be stably sleeved on the periphery of the thermal field component. Of course, the utility model does not limit the specific structure of the fixing groove 2500 and the matching groove 2600. Preferably, the fixing groove 2500 and the matching groove 2600 are based on the specific size of the actual thermal field component. The fixing groove 2500 and the matching groove 2600 are used to be matched and installed on the periphery of the thermal field component.
[0022] Furthermore, the present invention does not limit the specific structure and specific connection method of the thermal field components inside the single crystal furnace. Figure 1A furnace cover 1200 is arranged above the water-cooled heat shield 1410, the water-cooled heat shield part 1400 and the quartz crucible assembly 1500 are placed inside the furnace barrel 1100, the furnace barrel 1100 includes a middle furnace barrel 1110 and a lower furnace barrel 1120, the middle furnace barrel 1110 and the lower furnace barrel 1120 are movably connected, the water-cooled heat shield part 1400 includes a water-cooled heat shield 1410 and an outer guide tube 1420 arranged on the periphery of the water-cooled heat shield 1410, the first fixed felt 2100 is sleeved on the periphery of the outer guide tube 1420, and the quartz crucible assembly 1500 is connected to the bottom of the water-cooled heat shield part 1400 The quartz crucible assembly 1500 includes a quartz crucible 1510, a crucible side 1520 on the outer wall of the quartz crucible 1510, and a crucible support 1530 at the bottom of the quartz crucible 1510. A support rod 1540 is further provided below the crucible support 1530. Air guide tubes 1600 are provided on both sides of the support rod 1540. The second solid felt 2200 is located above the third solid felt 2300. The second solid felt 2200 and the third solid felt 2300 are sleeved on the periphery of the quartz crucible assembly 1500. The cavities 2400 on the first solid felt 2100, the second solid felt 2200 and the third solid felt 2300 are not connected to each other. That is, the cavities 2400 on the first solid felt 2100, the second solid felt 2200 and the third solid felt 2300 are all independent. When the solid felt 2000 needs to be replaced, the second solid felt 2200 and the third solid felt 2300 can be taken out by simply disassembling the middle furnace drum 1110 and the lower furnace drum 1120, and the first solid felt 2100 can be taken out by disassembling the furnace cover 1200. In the process of installing and disassembling the solid felt 2000, it is not necessary to disassemble other thermal field components, which solves the problem of cumbersome soft felt wrapping in the prior art. Furthermore, the lower part of the quartz crucible assembly 1500 is provided with an air guide Cylinder 1600, the outer periphery of the air guide cylinder 1600 is provided with a support member 1610, and the support member 1610 is made of asphalt-based cured felt with a solid 2400 structure. Since the air guide cylinder 1600 does not require high thermal insulation performance, a solid 2400 asphalt-based cured felt is used. The solid 2400 asphalt-based cured felt also has certain thermal insulation performance, but its thermal conductivity is not as good as the asphalt-based cured felt with a cavity 2400 structure. It is suitable for structures that do not require high thermal insulation performance, which not only plays a supporting role but also a thermal insulation role.
[0023] It should be noted that in the description of the present invention, if there are any orientation descriptions, such as up, down, front, back, left, right, etc., the orientations or positional relationships indicated are all based on the orientations or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed or operated in a specific orientation, and cannot be understood as a limitation on the present invention.
[0024] In the description of the present utility model, the meaning of "several" is one or more of the cost-reducing and consumption-reducing solid felt for single crystal silicon thermal field, and "more" means two or more. "greater than", "less than", "exceed" and the like are understood as not including the number, and "above", "below", "within" and the like are understood as including the number. If there is a description of the first cost-reducing and consumption-reducing solid felt for single crystal silicon thermal field or the second, it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.
[0025] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.
[0026] The above-mentioned implementation modes are only preferred implementation modes of the present invention, and cannot be used to limit the protection scope of the present invention. Any non-substantial changes and substitutions made by technicians in this field on the basis of the present invention shall fall within the scope of protection required by the present invention.
Claims
1. A cost-reducing and consumption-reducing solid felt for a single crystal silicon thermal field, characterized in that: include: A single crystal furnace body (1000) and a solid felt (2000), wherein the single crystal furnace body (1000) comprises a middle furnace barrel (1110), a furnace cover (1200) is arranged above the middle furnace barrel (1110), a furnace bottom (1300) is arranged below the middle furnace barrel (1110), a water-cooled heat shield (1400) and a quartz crucible assembly (1500) are arranged in sequence from top to bottom inside the middle furnace barrel (1110), a plurality of cavities (2400) are arranged inside the solid felt (2000), each of the cavities (2400) is annularly connected, and the solid felt (2000) comprises a first solid felt (2 100), a second solid felt (2200) and a third solid felt (2300), the first solid felt (2100) can pass through the water-cooled heat shield part (1400) and is sleeved on the periphery of the water-cooled heat shield part (1400), the second solid felt (2200) is located at the bottom of the first solid felt (2100) and the second solid felt (2200) is sleeved on the periphery of the quartz crucible assembly (1500), the third solid felt (2300) is located at the bottom of the second solid felt (2200) and the third solid felt (2300) is sleeved on the periphery of the quartz crucible assembly (1500).
2. The cost-reducing and consumption-reducing solid felt according to claim 1, characterized in that: The solid felt (2000) is made of asphalt-based solid felt.
3. The cost-reducing and consumption-reducing solid felt according to claim 1, characterized in that: The cross section of the cavity (2400) is circular.
4. The cost-reducing and consumption-reducing solid felt according to claim 1, characterized in that: The cross section of the cavity (2400) is elliptical.
5. The cost-reducing and consumption-reducing solid felt according to claim 1, characterized in that: The upper and lower end surfaces of the solid felt (2000) are both provided with matching grooves (2600), and the matching grooves (2600) are used for matching installation with the equipment inside the single crystal furnace body (1000).
6. The cost-reducing and consumption-reducing solid felt according to claim 1, characterized in that: The interior of the cavity (2400) is vacuumed.
7. The cost-reducing and consumption-reducing solid felt according to claim 1, characterized in that: The cavities (2400) are distributed in an array.
8. The cost-reducing and consumption-reducing solid felt according to claim 1, characterized in that: The cavities (2400) on the first solid felt (2100), the second solid felt (2200) and the third solid felt (2300) are not connected to each other.
9. The cost-reducing and consumption-reducing solid felt according to claim 1, characterized in that: A gas guide cylinder (1600) is provided at the lower part of the quartz crucible assembly (1500), and a support member (1610) is provided on the outer periphery of the gas guide cylinder (1600).
10. The cost-reducing and consumption-reducing solid felt according to claim 9, characterized in that: The support member (1610) is made of asphalt-based cured felt with a solid structure.