Evacuating and detecting connection system

Abstract

The utility model relates to an evacuation and detection connection system which comprises an inner temperature measurement monitor, a pumped container, an inner heating rod, an evacuation pipeline, a high-purity nitrogen device, an outer heating device and an outer temperature measurement monitor, the inner heating rod is inserted into the pumped container, the inner temperature measurement monitor is arranged at the bottom end of the inner heating rod, and the outer temperature measurement monitor is arranged at the bottom end of the outer heating rod. An external heating device is arranged outside the pumped container, an external temperature measurement monitor is arranged on the external heating device, and the pumped container is connected with a high-purity nitrogen device through an evacuation pipeline; a vacuumizing nozzle plug of a vacuumized container is connected with a pull rod valve, the pull rod valve is connected with a vacuum valve, a second vacuum gauge pipe is connected to a pipeline between the pull rod valve and the vacuum valve, the vacuum valve is connected with a branch pipe vacuum valve, and the branch pipe vacuum valve is connected to a vacuumizing pipeline. According to the utility model, the inspection time is reduced, the production cycle is shortened, the productivity is saved, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to the field of vacuuming technology, to a vacuuming process and inspection technology of a product, and in particular to a vacuuming and detection connection system. Background Art

[0002] At present, the evacuation and inspection of vacuum products are to first detect the assembled products by helium mass spectrometry, then heat and evacuate on the vacuum unit. When the vacuum degree on the evacuation pipeline reaches the evacuation index, the evacuated container is sealed, and then the vacuum degree and leakage and degassing rate are tested. Vacuum sealing is divided into hot sealing and cold sealing. Hot sealing is to perform vacuum sealing when heating is stopped, and cold sealing is to continue evacuating to room temperature after heating is stopped. The problem with this vacuum degree detection is that only measuring the dynamic vacuum on the evacuation pipeline cannot reflect the internal vacuum degree of the vacuum product, and it is incorrect to use this vacuum degree to represent the sealing vacuum degree. The problem with hot sealing is that the vacuum interlayer material is not completely degassed in the vacuum hot state. The problem with cold sealing is that as the temperature approaches room temperature during the cooling process, the adsorption of the interlayer material increases, and the free gas molecules in the vacuum return to the surface or inside of the material. The vacuum degree of the vacuum interlayer may increase to the vacuum degree of the evacuation pipeline. In this case, not only the vacuum efficiency is greatly reduced, but also the reflux of free gas molecules or oil vapor molecules will increase. After vacuuming, vacuum degree and leakage rate test are carried out. If unqualified, re-leakage test or vacuuming are carried out. The current vacuuming process and inspection problems are:

[0003] (1) It is not conducive to timely detection of defects, and thus it is impossible to repair or handle them in time according to the defect type; (2) The vacuuming process cannot completely deflate the material, resulting in incomplete vacuuming and low vacuuming efficiency; (3) The vacuuming and inspection cycle is long, production line resources cannot be fully utilized, and the overall production efficiency is low. Utility Model Content

[0004] The purpose of the utility model is to overcome the above-mentioned shortcomings and provide a vacuum and detection connection system to reduce inspection time, shorten production cycle, and help save production capacity and reduce production costs.

[0005] The purpose of the utility model is achieved in this way:

[0006] A vacuuming and detection connection system, comprising an internal temperature monitoring, a vacuumed container, an internal heating rod, a vacuuming pipeline, a high-purity nitrogen device, an external heating device and an external temperature monitoring, wherein an internal heating rod is inserted into the vacuumed container, an internal temperature monitoring device is provided at the bottom end of the internal heating rod, an external heating device is provided outside the vacuumed container, an external temperature monitoring device is provided on the external heating device, and the vacuumed container is connected to the high-purity nitrogen device through the vacuuming pipeline;

[0007] The evacuation nozzle plug of the evacuated container is connected to a pull rod valve, the pull rod valve is connected to a vacuum valve, a second vacuum gauge is connected to the pipeline between the pull rod valve and the vacuum valve, the vacuum valve is connected to a branch vacuum valve, and the branch vacuum valve is connected to the evacuation pipeline;

[0008] One end of the evacuation pipeline is connected to a high-purity nitrogen device through a charging valve; the evacuation pipeline is connected to a molecular pump through a high vacuum valve; and the evacuation pipeline is connected to a Roots pump through a low vacuum valve.

[0009] Furthermore, the evacuation pipeline is also connected to a first vacuum gauge and a vacuum negative pressure gauge;

[0010] Furthermore, the molecular pump is connected to the Roots pump via a molecular pump front valve;

[0011] Furthermore, the Roots pump is connected to a rotary vane pump, and the rotary vane pump is connected to a low vacuum valve via a bypass valve.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model provides a vacuuming and detection connection system, in which the vacuumed product is connected to the product vacuuming joint through a vacuuming pull rod valve, a measuring short tube is connected through the vacuuming pull rod valve, a vacuum gauge is installed in the middle of the short tube, the other end of the short tube is connected to one end of the vacuum valve, the other end of the vacuum valve is connected to the vacuuming branch pipe, the vacuuming branch pipe is connected to the vacuuming main pipeline, and the vacuuming main pipeline is connected to the vacuuming unit through the vacuum valve. The inspection of the vacuum performance threshold is completed during the vacuuming process without occupying the vacuuming process time; when the vacuum performance threshold meets the standard, the vacuumed container is judged to be qualified, and the relevant parameter prompts of the vacuum degree, leakage rate, leakage and degassing rate threshold and unqualified defective items of the product are given during the execution of the vacuuming process, guiding the production line operation to transfer qualified products to the next process, and re-evacuating or offline leak detection for defective products; the threshold described in the utility model refers to the limit value detected in the vacuuming process that can ensure that the vacuum performance index of the product meets the standard requirements.

[0014] During the vacuuming process, we can understand whether the vacuum state of the product is normal or what kind of defects exist, make corresponding treatment at any time, and provide the calculation threshold of the vacuum degree, leakage rate and leakage and degassing rate of the container to improve the vacuuming efficiency and ensure the vacuuming quality. It reduces the inspection time, shortens the production cycle, and is conducive to saving production capacity and reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the vacuuming-detection connection system of the present utility model.

[0016] Figure 2 It is a schematic diagram of a qualified static vacuum degree curve of the utility model.

[0017] Figure 3 It is a schematic diagram of the leakage rate defect curve of the utility model.

[0018] Figure 4 It is a schematic diagram of the deflation defect curve of the utility model.

[0019] Figure 5 It is a schematic diagram of the leakage and deflation defect curve of the utility model.

[0020] in:

[0021] Internal temperature monitoring 1, evacuated container 2, internal heating rod 3, pull rod valve 4, vacuum valve 5, evacuation pipeline 6, branch vacuum valve 7, high vacuum valve 8, first vacuum gauge 9, vacuum negative pressure gauge 10, charging valve 11, high purity nitrogen device 12, low vacuum valve 13, molecular pump fore valve 14, bypass valve 15, rotary vane pump 16, Roots pump 17, molecular pump 18, second vacuum gauge 19, external heating device 20, external temperature monitoring 21. DETAILED DESCRIPTION

[0022] In order to better understand the technical solution of the present invention, the following will be described in detail in conjunction with the relevant illustrations. It should be understood that the following specific embodiments are not intended to limit the specific implementation of the technical solution of the present invention, and are only implementations that can be adopted by the technical solution of the present invention. It should be noted that the description of the positional relationship of each component in this article, such as component A being located above component B, is based on the description of the relative positions of the components in the illustration, and is not intended to limit the actual positional relationship of the components. Embodiment 1:

[0023] See also Figure 1 , Figure 1 A vacuuming and detection connection system of the utility model is drawn. As shown in the figure, a vacuuming and detection connection system includes an internal temperature monitoring 1, a vacuumed container 2, an internal heating rod 3, a vacuuming pipeline 6, a high-purity nitrogen device 12, an external heating device 20 and an external temperature monitoring 21. The vacuumed container 2 is inserted with an internal heating rod 3, and the bottom end of the internal heating rod 3 is provided with an internal temperature monitoring 1. The vacuumed container 2 is wrapped with an external heating device 20, and the external heating device 20 is provided with an external temperature monitoring 21. The vacuumed container 2 is connected to the high-purity nitrogen device 12 through the vacuuming pipeline 6.

[0024] The evacuation nozzle plug on the evacuated container 2 is connected to the pull rod valve 4, the pull rod valve 4 is connected to the vacuum valve 5, a second vacuum gauge 19 is connected to the pipeline between the pull rod valve 4 and the vacuum valve 5, the vacuum valve 5 is connected to the branch vacuum valve 7, and the branch vacuum valve 7 is connected to the evacuation pipeline 6.

[0025] The rotary vane pump 16 is connected to the Roots pump 17 as the front pump of the Roots pump 17, and is connected to the low vacuum valve 13 through a bypass valve to perform low vacuum pre-pumping on the evacuation pipe 6; the Roots pump 17 is connected to the molecular pump 18 through the molecular pump front valve 14 to serve as the front pump of the molecular pump 18, and is connected to the evacuation pipe 6 through the low vacuum valve 13 to perform low vacuum pre-pumping on the evacuation system; the molecular pump 18 is connected to the evacuation pipe 6 through the high vacuum valve 8 to evacuate the evacuation system to high vacuum; the high-purity nitrogen device 12 is connected to the evacuation pipe 6 through the charging valve 11 to replace the evacuated container with pure nitrogen; the evacuation pipe 6 is connected to the first vacuum gauge 9 for high vacuum detection; the evacuation pipe 6 is connected to the vacuum negative pressure gauge 10 to control the pure nitrogen replacement pressure.

[0026] The utility model can be applied to the vacuuming and online inspection process of vacuum products. Based on the above-mentioned vacuuming and detection connection system, the process operation can adopt intelligent measurement and control mode, fully automatic measurement and control mode, semi-dynamic measurement and control mode, and manual measurement and control, including the following contents:

[0027] S1, nitrogen replacement heating pre-vacuum stage;

[0028] S11, connecting the evacuation nozzle plug of the evacuated container 2 to the pull rod of the pull rod valve 4, and opening the pull rod valve 4, the vacuum valve 5 and the branch pipe vacuum valve 7;

[0029] S12, insert the inner heating rod 3 into the inner liner of the container 2 to be pumped, turn on the inner heating rod 3, the external heating device 20, the internal temperature monitoring 1 and the external temperature monitoring 21, set the heating temperature to 150°C ± 5°C; then open the inflation valve 11 to communicate with the outside world;

[0030] S13, after the container 2 to be pumped reaches the set temperature, close the charging valve 11, start the vacuum unit rotary vane pump 16, open the low vacuum valve 13, bypass valve 15 and vacuum negative pressure gauge 10, and after evacuating to a gauge pressure of -0.1 MPa, close the low vacuum valve 13 and stop the rotary vane pump 16;

[0031] S14, connect the charging valve 11 to the high-purity nitrogen device 12, slowly open the charging valve 11, slowly fill the high-purity nitrogen into the interlayer of the container 2 to be evacuated, observe the vacuum negative pressure gauge 10, and when the gauge pressure reaches -0.05MPa, close the charging valve 11;

[0032] S15, after monitoring the heating temperature to 140°C, keep it warm for 1 hour, start the vacuum unit rotary vane pump 16, open the low vacuum valve 13, evacuate to below 30Pa, and then close the low vacuum valve 13;

[0033] S16, repeat step S14;

[0034] S17, after monitoring the heating temperature to 140°C, keep the temperature for 1 hour, open the low vacuum valve 13, evacuate to below 20Pa, and then close the low vacuum valve 13;

[0035] S18, repeat step S14;

[0036] S19, after monitoring the heating temperature to 140°C, keep the temperature for 1 hour, open the low vacuum valve 13, evacuate to below 10Pa, close the low vacuum valve 13, and close the bypass valve 15;

[0037] S20, start the Roots pump 17, the molecular pump front valve 14, and the molecular pump 18 in sequence; open the high vacuum valve 8 to draw a high vacuum on the interlayer of the pumped container 2;

[0038] When the vacuum material has too high water content or the environment is unfavorable such as the rainy season, the repetition of step S14 may be increased;

[0039] S2, heating and pumping dynamic monitoring stage;

[0040] S21, during the heating and evacuation period, the internal heating rod 3, the external heating device 20, the internal temperature monitoring device 1 and the external temperature monitoring device 21 are monitored in real time, and the heating temperature is strictly controlled within the range of 150°C ± 5°C; and the monitored internal and external temperatures are displayed on the evacuation curve chart;

[0041] S22, using the second vacuum gauge 19 to perform real-time dynamic patrol monitoring on the vacuum degree of the valve port of the tie rod valve 4, and displaying the dynamic vacuum degree monitored by the second vacuum gauge 19 on a vacuum curve graph;

[0042] S23. If the dynamic vacuum degree monitored by the second vacuum gauge 19 shows abnormality in the evacuated container, check the air tightness of the connection and reinstall it, or close the vacuum valve 5, and use the second vacuum gauge 19 to measure the vacuum degree-time curve of the interlayer of the evacuated container 2. If the container with excessive leakage rate is found, it will be removed from the evacuation production line, checked for leaks, and repaired;

[0043] S24, continuous heating and evacuation. The heating and evacuation time is determined by comprehensive factors such as the vacuum performance process index of the evacuated container 2, the volume size, the material degassing gas load, the sample batch, the staff on duty time, etc. through process tests; generally, the continuous heating and evacuation is within the range of tens of hours. If automatic detection is adopted, the S3 insulation hot interval static degassing inspection stage is preferably carried out at night;

[0044] S3, thermal insulation interval static deflation test stage

[0045] S31, after step S24, turn off the internal and external heating, and maintain the natural heat preservation and slow cooling state;

[0046] S32, close the vacuum valve 5, use the second vacuum gauge 19 to monitor the static vacuum degree of the interlayer of the container 2 in the hot state, and display and plot the static vacuum degree of the interlayer on the interlayer vacuum degree-time change curve. If the second vacuum gauge 19 is full scale during the detection period, it is regarded as abnormal detection or serious over-standard, and the second vacuum gauge 19 is immediately closed. If calculation is required, this moment is t2 and the vacuum degree at this moment is P2;

[0047] S33, the heat preservation heat interval stage time is about 10 to 15 hours, until the interlayer material and the surface are fully deflated in the hot state; the heat interval time can be determined through inspection process tests based on comprehensive factors such as process indicators, volume size, material deflation gas load, sample batch, and personnel duty time;

[0048] S34, calculate the vacuum degree, leakage rate, and leakage and degassing rate of the container, refer to Figure 2~Figure 4 ;

[0049] S35, determining the process status of the extracted container according to the curve type and the threshold calculation result in the graph;

[0050] S36, remove the pumped containers 2 with excessive leakage rate for leak detection; keep the vacuum valve 5 closed for the containers with excessive deflation, and leave them for the production line and the next batch to be evacuated or offline for processing as appropriate; the qualified containers are transferred to the next process;

[0051] S4, evacuate and seal the thermal insulation interval;

[0052] S41, opening the vacuum valve 5 to evacuate the interlayer of the container after hot degassing, using the second vacuum gauge 19 to perform real-time dynamic patrol monitoring of the vacuum degree of the valve port of the tie rod valve 4, and displaying the dynamic vacuum degree monitored by the second vacuum gauge 19 on the evacuation curve graph;

[0053] S42, after continuously evacuating to the vacuum degree specified by the process, record the dynamic vacuum degree of evacuation monitored by the second vacuum gauge 19; close the vacuum valve 5, and record the static vacuum degree of the vacuum interlayer monitored by the second vacuum gauge 19;

[0054] S43, close the vacuum valve 5, press the valve stem of the tie-rod valve 4, compress the valve stem, unscrew the vacuum plug counterclockwise, and pull out the tie-rod valve 4 upwards after hearing the clicking sound of the thread being unscrewed;

[0055] S44, attach a disposable anti-opening plug label to the plug thread, and install a protective cap on the evacuation nozzle;

[0056] S45, complete the evacuation and online inspection of the evacuated container 2, and proceed to the next process;

[0057] S5. Identification of the evacuation curve, threshold calculation and defect processing;

[0058] Combination Figure 2~Figure 5 Explain curve graphic identification, calculation and defect handling;

[0059] During the heat preservation interval, when the container is stopped from being evacuated, the pressure will rise due to material degassing and leakage. After the internal and external heating is stopped, the temperature will slowly drop over time due to the heat preservation of the vacuum multi-layer insulation, and the degassing will slowly decrease as the temperature decreases. The leakage rate and the threshold of the leakage and degassing rate in the hot state are calculated by formula (1):

[0060] (1)

[0061] Where: Q is the threshold of the outgassing rate or leak rate in the hot state, Pa·m 3 / s; P1 is the vacuum degree at the start of the thermal insulation interval, Pa; P2 is the vacuum degree at the end of the thermal insulation interval, Pa; t is the thermal insulation interval time, s; V is the volume of the interlayer of the container being evacuated, m 3 ;

[0062] S51, qualified type: Figure 2 The vacuum curve shown is characterized by an increase with the start of the thermal insulation interval, and about 2×10 -1 Pa then steadily decreases, and 1 / 10 of its threshold value Q is less than or equal to the standard value of the product at room temperature, the gas leakage rate is qualified, and the leakage rate is also qualified;

[0063] S52, Leakage rate defect type: Because the effect of temperature on leakage is negligible compared with that on deflation, Figure 3 The vacuum curve shown is characterized by being approximately linear, and P2 exceeds 10 -1 Pa; when the threshold Q is greater than or equal to the leakage rate value of the product at room temperature, the leakage rate is unqualified, and the container is sent for leak detection;

[0064] S53, Outgassing rate defect type: Figure 4 The characteristic of the vacuum degree curve shown is that after the vacuum degree rises for a period of time, it keeps steadily decreasing due to a small and steady decrease in temperature. When 10 times of its threshold value Q is less than or equal to the standard value of the product at room temperature, the degassing rate is qualified, otherwise the degassing rate is unqualified; the container to be evacuated is handed over to the production line for reheating and the number of pure nitrogen replacements is increased, and then the process is implemented again;

[0065] S54, Leakage rate defect type: Figure 5 The vacuum degree curve shown is a curve where the unqualified leak rate and the deflation rate are superimposed, which is a leak deflation rate defect type; the first half of the curve mainly reflects the deflation rate characteristics, and the second half mainly reflects the leak rate characteristics;

[0066] The leakage rate is calculated according to formula (2):

[0067] (2)

[0068] The degassing rate is calculated according to formula (3):

[0069] (3)

[0070] Where: P x , t x is the vacuum value and inflection point time of the nonlinear segment and the linear segment;

[0071] The container to be pumped can be leak-checked and repaired first, and after confirming that the leakage rate meets the index, it can be reheated and replaced with pure nitrogen more times before being implemented according to this process.

[0072] The utility model is applied to the vacuum online inspection process, which comprehensively utilizes the pure nitrogen replacement principle, the heating vacuum principle, the hot static material degassing principle, and the vacuum characteristic curve graphic principle, integrates the vacuuming and inspection processes into one, improves the vacuuming-inspection work efficiency, and utilizes the vacuum degree-time curve principle of the hot interval degassing stage to inspect, draw and judge the vacuum performance, that is, utilizes the hot interval pressure recovery to fully degas the material, improves the vacuum degree of the interlayer after vacuuming, and performs the interlayer vacuum performance test. The utility model saves the time of the interlayer vacuum performance test on the basis of improving the vacuuming-inspection work efficiency, and simplifies the inspection operation. It makes full use of production capacity resources, improves production efficiency, and reduces the production cycle. The utility model is conducive to the intelligentization of products and the application of automated production lines.

[0073] The above are only specific application examples of the utility model, and do not constitute any limitation on the protection scope of the utility model. Any technical solution formed by equivalent transformation or equivalent replacement falls within the protection scope of the utility model.

Claims

1. A vacuum and detection connection system, characterized in that: It comprises an internal temperature monitoring device (1), a pumped container (2), an internal heating rod (3), an evacuation pipeline (6), a high-purity nitrogen device (12), an external heating device (20) and an external temperature monitoring device (21); the pumped container (2) is inserted with an internal heating rod (3); the bottom end of the internal heating rod (3) is provided with an internal temperature monitoring device (1); the outside of the pumped container (2) is provided with an external heating device (20); the external heating device (20) is provided with an external temperature monitoring device (21); the pumped container (2) is connected to the high-purity nitrogen device (12) via the evacuation pipeline (6); The evacuation nozzle plug of the evacuated container (2) is connected to a pull rod valve (4), the pull rod valve (4) is connected to a vacuum valve (5), a second vacuum gauge (19) is connected to the pipeline between the pull rod valve (4) and the vacuum valve (5), the vacuum valve (5) is connected to a branch pipe vacuum valve (7), and the branch pipe vacuum valve (7) is connected to the evacuation pipeline (6); The evacuation pipeline (6) is connected to a molecular pump (18) via a high vacuum valve (8); one end of the evacuation pipeline (6) is connected to a high purity nitrogen device (12) via a charging valve (11); the evacuation pipeline (6) is connected to a Roots pump (17) via a low vacuum valve (13); and the low vacuum valve (13) is connected to a rotary vane pump (16) via a bypass valve (15).

2. The evacuation and detection connection system according to claim 1, characterized in that: The evacuation pipeline (6) is also connected to a first vacuum gauge (9) and a vacuum negative pressure gauge (10).

3. The evacuation and detection connection system according to claim 1, characterized in that: The molecular pump (18) is connected to a molecular pump front-stage valve (14), and the molecular pump front-stage valve (14) is connected to a Roots pump (17).

4. The evacuation and detection connection system according to claim 1, characterized in that: The Roots pump (17) is connected to the rotary vane pump (16).

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