Clamp for assisting post-processing of mask plate and equipment thereof
By designing a fixture for post-treatment of mask plates, including a water barrier covering the motor drive spindle, the problem of motor corrosion caused by drops of chemical liquid is solved, and the effect of improving the production accuracy and cleaning efficiency of mask plates is achieved.
Patent Information
- Application Number
- CN202421489540.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-26
- Publication Date
- 2025-04-18
- Estimated Expiration
- 2034-06-26
AI Technical Summary
In the development, etching, film removal and cleaning processes of the existing mask plate, chemical liquid is easily dripped from the edge of the mask plate through the hollow of the fixture onto the motor-driven spindle sleeve of the post-treatment device, and then enters the motor and causes the motor to be corroded.
A clamp for assisting post-treatment of the mask plate is designed, including a chuck, a rotary shaft sleeve and a water barrier. The water barrier is arranged on the outer side of the rotating shaft sleeve, covering the motor drive spindle, and preventing chemical liquid from passing through the through-hole and dripping into the motor drive spindle.
It effectively prevents chemical liquid from entering the motor and prevents the motor from being corroded. At the same time, it solves the problems in the development, etching, film removal and cleaning processes of the special size 3"*5" mask plate, and improves the accuracy and cleaning efficiency of mask plate production.
Smart Images
Figure CN222774731U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of fixtures, and in particular to a fixture and equipment thereof for assisting post-processing of a mask. Background Art
[0002] In the factory, after exposure, the mask usually needs to go through post-processing equipment for post-processing processes such as development, etching, stripping, and cleaning. Before the post-processing process, the mask needs to be installed in a fixture (to fix the mask, thereby facilitating the post-processing process of the mask), and the fixture needs to be installed on the motor-driven spindle of the post-processing equipment. Under the rotation of the motor-driven spindle, the substrate on the fixture is driven to undergo post-processing processes such as development, etching, stripping, and cleaning.
[0003] However, the minimum substrate size that can be processed by existing post-processing equipment is 4"*4" (101.6*101.6). Since the fixture needs to be hollowed out on all sides to spray deionized water (DIW) on the back of the mask during the cleaning process to prevent chemical liquid from flowing from the front to the back of the mask during the development, etching, stripping and cleaning processes, when it is necessary to process a smaller mask (3"*5"), the chemical liquid is easy to drip from the edge of the mask through the hollow part of the fixture onto the motor drive spindle sleeve of the post-processing equipment, and be sucked into the motor when the motor drive spindle rotates, causing the motor to be corroded.
[0004] Therefore, the prior art still needs to be improved. Utility Model Content
[0005] The purpose of the present application is to provide a fixture and equipment for assisting mask post-processing, so as to solve the problem that in the existing mask development, etching, stripping and cleaning processes, chemical liquid easily drips from the edge of the mask through the hollow part of the fixture onto the motor drive spindle sleeve of the post-processing equipment, and then enters the motor, causing the motor to be corroded.
[0006] To achieve the above-mentioned purpose, a first aspect of an embodiment of the present application provides a fixture for assisting post-processing of a mask, comprising:
[0007] A chuck having a slot area formed thereon, the slot area being used to hold the mask;
[0008] A rotating shaft sleeve, one end of which is arranged on a side of the chuck away from the slot area, and the other end is used to connect to the motor drive spindle;
[0009] The water retaining portion is arranged on the outer side surface of the rotating shaft sleeve and is used for covering the motor driving main shaft.
[0010] According to the above-mentioned fixture for assisting post-processing of the mask, the water retaining portion is configured as a water retaining ring, the inner side surface of the water retaining portion is sleeved on the end of the rotating shaft sleeve away from the chuck, and an inclined surface is provided at the periphery of the water retaining portion, wherein the end surface area of the water retaining portion close to the chuck is smaller than the end surface area of the water retaining portion away from the chuck.
[0011] According to the fixture for assisting post-processing of a mask described above, the rotating shaft sleeve is detachably connected to the chuck.
[0012] According to the fixture for assisting mask post-processing described above, a plurality of clamping posts are arranged on a side of the chuck away from the rotating shaft sleeve, each of the clamping posts is provided with a clamping slot, and the clamping slots on all the clamping posts form a clamping slot area.
[0013] According to the fixture for assisting mask post-processing described above, the fixture further comprises:
[0014] A plurality of height adjusting members are arranged on the end surface of the chuck away from the clamping column. One end of the height adjusting member passes through the chuck and the clamping column in sequence and is arranged in the corresponding clamping groove.
[0015] According to the fixture for assisting post-processing of a mask described above, one end of the height adjustment member passing through the clamping column is configured as a chamfered end, and the chamfered end is used to contact the mask.
[0016] According to the fixture for assisting mask post-processing described above, one end of the height adjusting member facing away from the clamping slot passes through the chuck.
[0017] According to the fixture for assisting mask post-processing described above, a cross adjustment slot or a straight adjustment slot is formed at one end of the height adjustment member away from the clamping slot.
[0018] According to the fixture for assisting post-processing of a mask described above, a plurality of through openings are formed through the chuck, and the plurality of through openings surround the middle portion of the chuck and are spaced apart from each other.
[0019] A second aspect of an embodiment of the present application provides a device for assisting mask post-processing, comprising a platform and the fixture for assisting mask post-processing as described above, wherein the fixture for assisting mask post-processing is arranged on the platform.
[0020] The beneficial effects of a fixture and a device for assisting post-processing of a mask provided by the present application are at least:
[0021] The present application sets a water retaining portion covering the motor drive spindle, which can prevent the chemical liquid from passing through the through hole and dripping into the motor drive spindle when the mask undergoes post-processing, thereby preventing the chemical liquid from entering the motor and causing the motor to be corroded; moreover, the present application can solve the problem of using the existing post-processing machines: developing and etching equipment and cleaning equipment to perform developing, etching, stripping and cleaning when making special size 3"X 5" masks. It can improve the precision of making special size 3"X 5" masks and improve the cleaning efficiency, so as to improve quality, increase efficiency and reduce costs. At the same time, it can also achieve the purpose of improving cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0023] Figure 1 A structural schematic diagram of a mask placed in a fixture for assisting mask post-processing is provided for an embodiment of the present application.
[0024] Figure 2 A schematic structural diagram of a fixture for assisting mask post-processing is provided for an embodiment of the present application.
[0025] Figure 3 for Figure 1 AA cross-section diagram.
[0026] Among them, the reference numerals in the figure are:
[0027] 1. Chuck; 11. Through-hole; 12. Clamping column; 121. Clamping groove; 2. Rotating shaft sleeve; 3. Water retaining part; 31. Inclined surface; 4. Mask; 5. Height adjustment part; 51. Chamfered end; 52. Slotted adjustment groove; 6. Threaded fastener. DETAILED DESCRIPTION
[0028] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.
[0029] It should be noted that when a component is referred to as being "fixed on" or "disposed on" another component, it may be directly or indirectly located on the other component. When a component is referred to as being "connected to" another component, it may be directly or indirectly connected to the other component. The directions or positions indicated by the terms "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the directions or positions shown in the accompanying drawings and are only for the convenience of description and cannot be understood as limitations on the present technical solution. The terms "first" and "second" are only used for the convenience of description and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. "Multiple" means two or more, unless otherwise clearly and specifically defined.
[0030] In the factory, after exposure, the mask usually needs to go through post-processing equipment for post-processing processes such as development, etching, stripping, and cleaning. Before the post-processing process, the mask needs to be installed in a fixture (to fix the mask, thereby facilitating the post-processing process of the mask), and the fixture needs to be installed on the motor-driven spindle of the post-processing equipment. Under the rotation of the motor-driven spindle, the substrate on the fixture is driven to undergo post-processing processes such as development, etching, stripping, and cleaning.
[0031] However, the minimum substrate size that can be processed by existing post-processing equipment is 4"*4" (101.6*101.6). Since the fixture needs to be hollowed out on all sides to spray deionized water (DIW) on the back of the mask during the cleaning process to prevent chemical liquid from flowing from the front to the back of the mask during the development, etching, stripping and cleaning processes, when it is necessary to process a smaller mask (3"*5"), the chemical liquid is easy to drip from the edge of the mask through the hollow part of the fixture onto the motor drive spindle sleeve of the post-processing equipment, and be sucked into the motor when the motor drive spindle rotates, causing the motor to be corroded.
[0032] For this purpose, see Figure 1 , Figure 2 and Figure 3 In a first aspect, the present embodiment provides a fixture for assisting post-processing of a mask 4, comprising a chuck 1, a rotating shaft sleeve 2 and a water retaining portion 3. The chuck 1 is provided with a slot area, the slot area is used to clamp the mask 4, the chuck 1 is provided with a plurality of through-holes 11, the through-holes 11 are used for the cleaning liquid to penetrate and spray to the back of the mask 4, one end of the rotating shaft sleeve 2 is arranged on the side of the chuck 1 away from the slot area, and the other end is used to connect to a motor drive spindle (not shown in the figure), the water retaining portion 3 is arranged on the outer surface of the rotating shaft sleeve 2, and is used to cover the motor drive spindle.
[0033] It is foreseeable that, by providing a water retaining portion 3 covering the motor drive spindle, this embodiment can prevent the chemical liquid from passing through the through-port 11 and dripping into the motor drive spindle sleeve when the mask 4 undergoes a post-processing process, thereby preventing the chemical liquid from entering the motor and causing the motor to be corroded. Moreover, this embodiment can solve the problem of using existing post-processing machines: developing and etching equipment and cleaning equipment to perform development, etching, stripping and cleaning when making special size 3"X5" masks. It can improve the production accuracy of special size 3"X5" masks and improve the cleaning efficiency, thereby improving quality, increasing efficiency and reducing costs. At the same time, it can achieve the purpose of improving cleaning efficiency, quickly respond to customer order needs, and win customer praise.
[0034] Among them, see Figure 2 and Figure 3 In this embodiment, the plurality of through openings 11 can be set to be through openings 11 of different shapes, and the plurality of through openings 11 surround the middle portion of the chuck 1 and are spaced apart from each other. In this embodiment, the through openings 11 are provided to facilitate back-sprayed deionized water (DIW) to be sprayed from the through openings 11 to the back side of the mask 4, thereby ensuring the cleanliness of the back side of the mask 4 and preventing the chemical liquid from flowing from the front side of the mask 4 to the back side of the mask 4.
[0035] Optional, see Figure 1 and Figure 2 In this embodiment, the chuck 1 can be set as a cylindrical disk.
[0036] Optional, see Figure 1 and Figure 3 In the present embodiment, the water retaining portion 3 is configured as a water retaining ring, the inner side surface of the water retaining portion 3 is sleeved on the end of the rotating shaft sleeve 2 away from the chuck 1, and an inclined surface 31 is provided at the periphery of the water retaining portion 3, wherein the end surface area of the water retaining portion 3 close to the chuck 1 is smaller than the end surface area of the water retaining portion 3 away from the chuck 1. In the present embodiment, by providing the inclined surface 31 at the periphery of the water retaining portion 3, the medicine or other liquid flowing to the water retaining portion 3 can be quickly discharged from the surface of the water retaining portion 3.
[0037] Optional, see Figure 1 and Figure 3 In this embodiment, the rotating shaft sleeve 2 is detachably connected to the chuck 1. This embodiment not only facilitates processing but also facilitates maintenance and repair by arranging the rotating shaft sleeve 2 to be detachably connected to the chuck 1.
[0038] The clamp further comprises a plurality of threaded fasteners 6 , and the rotating shaft sleeve 2 is detachably connected to the chuck 1 via the threaded fasteners 6 .
[0039] Optional, see Figure 2 and Figure 3 In this embodiment, a plurality of clamping columns 12 are provided on a side of the chuck 1 facing away from the rotating shaft sleeve 2, each of the clamping columns 12 is provided with a clamping groove 121, and the clamping grooves 121 on all the clamping columns 12 form a clamping groove area, which is used to limit the corners of the mask 4 to prevent the mask 4 from rotating and flying out during the post-processing process.
[0040] For further information, see Figure 2 and Figure 3 In this embodiment, the clamp also includes a plurality of height adjustment members 5, and the plurality of height adjustment members 5 are arranged on the end surface of the chuck 1 away from the clamping column 12. One end of the height adjustment member 5 passes through the chuck 1 and the clamping column 12 in sequence and is arranged in the corresponding clamping groove 121.
[0041] Optionally, in an embodiment, the height adjusting member 5 is configured as a screw, and the height adjusting member 5 is threadedly connected to the chuck 1 and the chuck column 12 .
[0042] Optional, see Figure 1 and Figure 3 In the present embodiment, one end of the height adjustment member 5 passing through the clamping column 12 is set as a chamfered end 51, and the chamfered end 51 is used to contact the mask 4. In the present embodiment, by setting the contact end of the height adjustment member 5 and the mask 4 as the chamfered end 51, the contact area between the height adjustment member 5 and the mask 4 can be reduced, thereby reducing the residual imprint on the mask 4, and further reducing the contamination of the mask 4.
[0043] Optional, see Figure 1 and Figure 3 In the present embodiment, the end of the height adjusting member 5 which is away from the slot 121 passes through the chuck 1. Since the present embodiment adjusts the height adjusting member 5 at the end which is away from the slot 121, the present embodiment can conveniently adjust the height adjusting member 5 by passing the end of the height adjusting member 5 which is away from the slot 121 through the chuck 1.
[0044] Further, in this embodiment, the end of the height adjustment member 5 away from the slot 121 may be provided with a cross adjustment slot or a straight adjustment slot 52 to further facilitate the adjustment of the height adjustment member 5. Figure 3 The end of the height adjustment member 5 away from the slot 121 is provided with a straight adjustment slot 52 .
[0045] A second aspect of the present embodiment provides a device for assisting mask post-processing, comprising a platform and the fixture for assisting mask post-processing as described above, wherein the fixture for assisting mask post-processing is disposed on the platform.
[0046] In summary, the present application provides a fixture and equipment for assisting post-processing of a mask, including a chuck 1, a rotating shaft sleeve 2, and a water retaining portion 3. The chuck 1 is provided with a slot area, and the slot area is used to clamp the mask 4. The chuck 1 is provided with a plurality of through-holes 11, and the through-holes 11 are used for deionized water (DIW) to penetrate and spray to the back of the mask 4. One end of the rotating shaft sleeve 2 is arranged on the side of the chuck 1 away from the slot area, and the other end is used to connect the motor drive spindle. The water retaining portion 3 is arranged on the outer surface of the rotating shaft sleeve 2 and is used to cover the motor drive spindle. It can be foreseen that the present application, by providing a water retaining portion 3 covering the motor drive spindle, can prevent the chemical liquid from passing through the through-hole 11 and dripping into the motor drive spindle when the mask 4 undergoes a post-processing process, thereby preventing the chemical liquid from entering the motor and causing the motor to be corroded. Moreover, this application can solve the problem of using existing post-processing machines: developing and etching equipment and cleaning equipment to develop, etch, strip and clean special size 3"X5" masks when making them. It can improve the precision of special size 3"X5" masks and improve the cleaning efficiency, so as to improve quality, increase efficiency and reduce costs. At the same time, it can also achieve the purpose of improving cleaning efficiency, quickly respond to customer order needs, and win customer praise.
[0047] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims
1. A fixture for assisting post-processing of a mask, characterized in that: include: A chuck having a slot area formed thereon, the slot area being used to hold the mask; A rotating shaft sleeve, one end of which is arranged on a side of the chuck away from the slot area, and the other end is used to connect to the motor drive spindle; The water retaining portion is arranged on the outer side surface of the rotating shaft sleeve and is used for covering the motor driving main shaft.
2. The fixture for assisting mask post-processing according to claim 1, characterized in that: The water retaining part is configured as a water retaining ring, the inner side surface of the water retaining part is sleeved on the end of the rotating shaft sleeve away from the chuck, and an inclined surface is provided at the periphery of the water retaining part, wherein the end surface area of the water retaining part close to the chuck is smaller than the end surface area of the water retaining part away from the chuck.
3. The fixture for assisting mask post-processing according to claim 1, characterized in that: The rotating shaft sleeve is detachably connected to the chuck.
4. The fixture for assisting mask post-processing according to claim 1, characterized in that: A plurality of clamping columns are arranged on a side of the chuck away from the rotating shaft sleeve, each of the clamping columns is provided with a clamping groove, and the clamping grooves on all the clamping columns form a clamping groove area.
5. The fixture for assisting mask post-processing according to claim 4, characterized in that: The fixture also includes: A plurality of height adjusting members are arranged on the end surface of the chuck away from the clamping column. One end of the height adjusting member passes through the chuck and the clamping column in sequence and is arranged in the corresponding clamping groove.
6. The fixture for assisting mask post-processing according to claim 5, characterized in that: One end of the height adjustment member passing through the clamping column is configured as a chamfered end, and the chamfered end is used to contact the mask.
7. The fixture for assisting mask post-processing according to claim 5, characterized in that: One end of the height adjusting member facing away from the clamping slot passes through the clamping disc.
8. The fixture for assisting mask post-processing according to claim 5, characterized in that: The end of the height adjustment member away from the clamping slot is provided with a cross adjustment slot or a straight adjustment slot.
9. The fixture for assisting mask post-processing according to claim 1, characterized in that: The chuck is provided with a plurality of through openings, which surround the middle part of the chuck and are arranged at intervals from each other.
10. A device for assisting mask post-processing, characterized in that: It comprises a platform and a fixture for assisting post-processing of a mask as claimed in any one of claims 1 to 9, wherein the fixture for assisting post-processing of a mask is arranged on the platform.