Leakage alarm device for etching equipment
By designing a liquid leakage alarm device in the etching equipment and using a liquid level sensor and controller to monitor the liquid level in real time, the problem of difficult liquid leakage in the etching equipment is solved, and the stability of equipment operation and product quality are guaranteed.
Patent Information
- Application Number
- CN202420636365.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-29
- Publication Date
- 2025-04-18
- Estimated Expiration
- 2034-03-29
AI Technical Summary
The prior art is difficult to effectively monitor the liquid leakage in the etching equipment, resulting in unstable equipment operation and affecting product quality.
An etching equipment leakage alarm device is designed to monitor the liquid level of the main and secondary medicine tanks in real time through a liquid level sensor. Combined with the controller and alarm device, it can realize rapid detection and reminder of the leakage situation.
Real-time monitoring of liquid leakage in etching equipment is realized, ensuring stable operation of the equipment, avoiding product quality problems, and meeting the needs of mass production of ultra-thin flexible glass micro-etching.
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Figure CN222774903U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of liquid leakage alarm monitoring. Background Art
[0002] Ultra-thin flexible glass (UTG) has the characteristics of ultra-thinness, wear resistance, good light transmittance, high strength, bendability, and good resilience, and is considered to be an important development direction for flexible folding materials in new display applications. The status of ultra-thin flexible glass cover plates in the new display industry is gradually improving, and the demand for innovative and accelerated products in the mobile phone folding screen track is also increasing. At the same time, the production and processing technology of ultra-thin flexible glass has also become a focus of attention in the industry.
[0003] In order to improve the surface strength of the current ultra-thin flexible glass cover, potassium nitrate in a high-temperature molten state is often used to replace sodium and potassium ions to achieve the purpose of chemical tempering. However, after this scheme is implemented, the stress of the product increases after tempering, the product expands, and the apparent microcracks of the product are caused, resulting in a significant decrease in the impact resistance of the glass surface. However, the in-plane micro-etching technology can effectively passivate the cracks and edge collapse of the glass surface, but the liquid used for in-plane micro-etching is corrosive, and the pneumatic solenoid valve core used in the equipment circulation system is prone to corrosion. When the pneumatic solenoid valve core is corroded, the valve closure will have problems, and the main tank liquid will flow into the sub-tank through the action of pressure. The liquid is easy to leak from the sub-tank, and the stability of the equipment operation cannot be guaranteed. It is also easy to cause performance problems of the product being tempered while micro-etched.
[0004] There are many leakage alarm devices at present, such as the public document with publication number CN216050571 U, publication date 2022-03-15, and patent name "A leakage detection sensor and a leakage alarm detection system containing it", which discloses a leakage detection sensor and a leakage alarm detection system containing it, which includes: a pair of flexible sensing base plates and an identification circuit, the two flexible sensing base plates are arranged side by side and spaced apart, and the output end of each flexible sensing base plate is connected to the identification circuit; the identification circuit is also provided with a communication interface for connecting to other devices, which is used to send the water seepage signal between the two flexible sensing base plates to other devices. Although similar equipment can monitor leakage, it is difficult to be used for monitoring leakage of etching equipment. Therefore, it is necessary to design a leakage alarm reminder device that can be applied to etching equipment, which can quickly detect leakage and remind personnel to perform repairs in time. Summary of the invention
[0005] The technical problem to be solved by the utility model is to realize a leakage alarm device for etching equipment, which ensures that the product can be put into large-scale production and has good process stability through real-time and reliable monitoring.
[0006] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a liquid leakage alarm device for etching equipment, the etching equipment is provided with a main liquid tank and a secondary liquid tank, a circulation pipeline is connected between the main liquid tank and the secondary liquid tank, a circulation pump and a pneumatic solenoid valve are arranged on the circulation pipeline, a second liquid level sensor is arranged near the upper limit of liquid storage in the secondary liquid tank, the second liquid level sensor is used for liquid leakage alarm sensing, the second liquid level sensor is connected and outputs a sensing signal to a controller, and the controller is connected and outputs a driving signal to the circulation pump and the pneumatic solenoid valve.
[0007] The alarm port of the controller is connected to and outputs an alarm signal to an alarm device, and the alarm device includes a buzzer and an alarm light.
[0008] A first liquid level sensor is provided at the lower limit position of the liquid in the main liquid tank that meets the minimum etching requirement. The first liquid level sensor is connected to and outputs a sensing signal to the controller. The first liquid level sensor is used for alarm sensing of the working operation status.
[0009] A third liquid level sensor is provided in the auxiliary liquid tank near the lower limit of liquid storage. The third liquid level sensor is connected to and outputs a sensing signal to the controller. The third liquid level sensor is used for liquid replenishment alarm sensing.
[0010] The first liquid level sensor, the second liquid level sensor and the third liquid level sensor are all sensor components made of acid-resistant and corrosion-resistant materials.
[0011] The circulating pipes are provided with two, one is a liquid inlet pipe, and the other is a liquid discharge pipe. The liquid inlet pipe is connected to the lower part of the main medicine liquid tank, and the liquid discharge pipe is connected to the upper part of the main medicine liquid tank. The circulating pump and the pneumatic solenoid valve are located on the liquid inlet pipe.
[0012] The etching equipment is an ultra-thin flexible glass micro-etching equipment.
[0013] The utility model is suitable for ultra-thin flexible glass micro-etching equipment, which detects the height of the liquid inside the main and auxiliary tanks, ensures the stability of the equipment during production, and can meet the mass production needs of ultra-thin glass micro-etching. When the liquid level alarm of the main tank is triggered, the equipment automatically pauses to prevent the product from being tempered while being micro-etched, thereby improving product performance. When the liquid level alarm of the auxiliary tank is triggered, the three-color light of the equipment operation status turns red and the buzzer alarms, and personnel need to immediately check the liquid status of the auxiliary tank. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The following is a brief description of the contents expressed in each figure in the utility model specification and the marks in the figure:
[0015] Figure 1 This is a schematic diagram of the structure of a leakage alarm device for etching equipment;
[0016] The markings in the above figures are: 1. Main medicine liquid tank; 2. Auxiliary medicine liquid tank; 3. Circulation pipeline; 4. Circulation pump; 5. Alarm device; 6. Pneumatic solenoid valve; 7. First liquid level sensor; 8. Second liquid level sensor; 9. Third liquid level sensor; 10. Controller. DETAILED DESCRIPTION
[0017] The following is a further detailed description of the specific implementation methods of the present invention, such as the shapes and structures of the components involved, the relative positions and connection relationships between the components, the functions and working principles of the components, the manufacturing process and the operation and use methods, etc., through the description of the embodiments with reference to the accompanying drawings, so as to help those skilled in the art to have a more complete, accurate and in-depth understanding of the inventive concept and technical solution of the present invention.
[0018] like Figure 1 As shown, the leakage alarm device of the etching equipment can be applied to the existing ultra-thin flexible glass micro-etching equipment. The etching equipment generally has a main liquid tank 1 and an auxiliary liquid tank 2. A circulation pipe 3 is connected between the main liquid tank 1 and the auxiliary liquid tank 2. The circulation pipe 3 is provided with two CPVC pipes, which are acid-resistant and corrosion-resistant. One circulation pipe is an inlet pipe, and the other circulation pipe is a discharge pipe. One end of the inlet pipe is connected to the lower part of the main liquid tank 1, and the other end is connected to the lower part of the auxiliary liquid tank 2. One end of the discharge pipe is connected to the upper part of the main liquid tank 1, generally below the normal working liquid level of the main liquid tank 1, for liquid reflux circulation, and the other end is connected to the upper part of the auxiliary liquid tank 2. A circulation pump 4 and a pneumatic solenoid valve 6 are arranged on the inlet pipe.
[0019] The etching equipment leakage alarm device is provided with a controller 10 for overall control, and the PLC of the etching equipment can also be used directly. The alarm port of the controller 10 is connected and outputs an alarm signal to the alarm device 5. The alarm device 5 includes a buzzer and an alarm light, which can remind the staff of technical inspection and maintenance by means of sound and light alarms. At the same time, the controller 10 is connected and outputs a drive signal to the circulation pump 4 and the pneumatic solenoid valve 6, which can stop the circulation when necessary.
[0020] There are three liquid level sensors for monitoring, among which a second liquid level sensor 8 is provided near the upper limit of liquid storage in the auxiliary liquid tank 2. The second liquid level sensor 8 is used for leakage alarm sensing. The second liquid level sensor 8 is connected and outputs a sensing signal to the controller 10. When the liquid level sensor has a signal, it indicates that the valve core of the pneumatic solenoid valve 6 may be corroded, and there may be problems with the closure of the valve. The liquid in the main tank will flow into the auxiliary tank through the action of pressure, and there may be a fault in which the liquid is easy to leak from the auxiliary tank. When the controller 10 receives the signal, it controls the alarm device 5 to alarm, and at the same time closes the circulation pump 4 and the pneumatic solenoid valve 6.
[0021] A first liquid level sensor 7 is provided at the lower limit position of the liquid that meets the minimum etching requirement in the main liquid tank 1. The first liquid level sensor 7 is connected to and outputs a sensing signal to the controller 10. The first liquid level sensor 7 is used for working operation status alarm sensing. When the liquid level sensor has a signal, it indicates that the micro-etching liquid is insufficient, and the etching equipment is controlled to shut down to avoid product quality problems.
[0022] A third liquid level sensor 9 is provided near the lower limit of the storage of the liquid medicine in the auxiliary liquid medicine tank 2. The third liquid level sensor 9 is connected and outputs a sensing signal to the controller 10. The third liquid level sensor 9 is used for sensing the alarm of replenishment. The liquid level sensor can also be used to control the operating state of the circulation pump 4. When the liquid level is too low, there may be excessive consumption of liquid medicine and the need for replenishment, or there may be a problem with the power of the circulation pump 4.
[0023] The first liquid level sensor 7, the second liquid level sensor 8, and the third liquid level sensor 9 are all made of acid-resistant and corrosion-resistant materials, and the operating temperature of the entire system needs to be reliable. The etching equipment leakage alarm device is practical and can detect the liquid level of the main and auxiliary tanks. When the liquid reaches the high liquid level of the auxiliary tank, the three-color red light of the equipment operation status lights up and the buzzer alarms; when the liquid level sensor in the main tank senses it, the equipment immediately stops running, which can ensure the stable operation of the equipment, meet the large-scale production of products, and have good process stability.
[0024] The present invention is described above by way of example in conjunction with the accompanying drawings. It is obvious that the specific implementation of the present invention is not limited to the above-mentioned method. As long as various non-substantial improvements are made using the method concept and technical solution of the present invention, or the concept and technical solution of the present invention are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.
Claims
1. A leakage alarm device for etching equipment, wherein the etching equipment is provided with a main liquid tank and an auxiliary liquid tank, wherein a circulation pipeline is connected between the main liquid tank and the auxiliary liquid tank, and a circulation pump and a pneumatic solenoid valve are provided on the circulation pipeline, characterized in that: A second liquid level sensor is provided in the auxiliary liquid tank near the upper limit of liquid storage. The second liquid level sensor is used for leakage alarm sensing. The second liquid level sensor is connected to and outputs a sensing signal to a controller. The controller is connected to and outputs a driving signal to a circulation pump and a pneumatic solenoid valve.
2. The etching equipment leakage alarm device according to claim 1, characterized in that: The alarm port of the controller is connected to and outputs an alarm signal to an alarm device, and the alarm device includes a buzzer and an alarm light.
3. The etching equipment leakage alarm device according to claim 2, characterized in that: A first liquid level sensor is provided at the lower limit position of the liquid in the main liquid tank that meets the minimum etching requirement. The first liquid level sensor is connected to and outputs a sensing signal to the controller. The first liquid level sensor is used for alarm sensing of the working operation status.
4. The etching equipment leakage alarm device according to claim 3, characterized in that: A third liquid level sensor is provided in the auxiliary liquid tank near the lower limit of liquid storage. The third liquid level sensor is connected to and outputs a sensing signal to the controller. The third liquid level sensor is used for liquid replenishment alarm sensing.
5. The etching equipment leakage alarm device according to claim 4, characterized in that: The first liquid level sensor, the second liquid level sensor and the third liquid level sensor are all sensor components made of acid-resistant and corrosion-resistant materials.
6. The etching equipment leakage alarm device according to any one of claims 1 to 5, characterized in that: The circulating pipes are provided with two, one is a liquid inlet pipe, and the other is a liquid discharge pipe. The liquid inlet pipe is connected to the lower part of the main medicine liquid tank, and the liquid discharge pipe is connected to the upper part of the main medicine liquid tank. The circulating pump and the pneumatic solenoid valve are located on the liquid inlet pipe.
7. The etching equipment leakage alarm device according to claim 6, characterized in that: The etching equipment is an ultra-thin flexible glass micro-etching equipment.