Small boat sheet inserting machine

Abstract

The utility model relates to the technical field of boat monitoring, and discloses a boat sheet inserting machine which comprises a main body mechanism and an auxiliary mechanism, the auxiliary mechanism is located at the outer end of the main body mechanism, the main body mechanism comprises a base, a stand column and a motor, the stand column is fixedly installed at the upper end of the base, and the motor is fixedly installed at the upper end of the stand column. The main body mechanism further comprises a coupler, a ball screw, a single-shaft robot, a sensor, a lower groove plate, an insertion piece set, a silicon wafer, a hinting ring, a first positioning plate and an electric appliance cabinet. According to the boat wafer inserting machine, the wafer inserting group and the silicon wafer move up and down along the ball screw by installing the main body mechanism, starting the motor and driving the ball screw to rotate, the installation of the indicating circle is used for fixing the quartz boat, and when the wafer inserting group and the silicon wafer move to the inner side of the indicating circle, the quartz boat is inserted. And the sensor judges whether the tooth spacing of the quartz boat is qualified or not by judging whether the silicon wafer can be inserted into the tooth spacing of the quartz boat or not, so that the practicability of the device is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of small boat monitoring, in particular to a small boat inserting machine. Background Art

[0002] Quartz boat is also known as quartz glass. Quartz glass is made of silicon dioxide-containing materials such as crystal, silica, and silicon dioxide as raw materials and melted at high temperature. Its silicon dioxide content is much higher than that of ordinary glass. Generally, the silicon dioxide content of quartz glass is 99.999%. Quartz glass has excellent optical properties. It not only has excellent visible light transmittance, but also transmits ultraviolet and infrared rays. Quartz glass is a good acid-resistant material. Except for hydrofluoric acid and hot phosphoric acid above 300 degrees, it can resist corrosion by sulfuric acid, nitric acid, hydrochloric acid, aqua regia, neutral salts, carbon and sulfur at high temperatures. Its chemical stability is equivalent to 30 times that of acid-resistant ceramics and 150 times that of nickel-chromium alloys and ceramics. It is resistant to high temperatures, thermal shock, and has a very small thermal expansion coefficient.

[0003] Quartz glass is mainly used in electric light sources, semiconductors, new optical technologies, etc. In new light sources: high-pressure mercury lamps, long arc xenon lamps, iodine tungsten lamps, thallium iodide lamps, infrared lamps and sterilization lamps, etc. In semiconductors: it is an indispensable material in the production process of semiconductor materials and devices, such as crucibles, boats, furnace core tubes and bell jars for growing germanium and silicon single crystals. In the field of new technologies: its excellent acoustic, optical and electrical properties are used to make ultrasonic delay lines on radars, infrared tracking and direction finding, infrared photography, communications, spectrographs, prisms of spectrophotometers, lenses, reflective windows of large astronomical telescopes, high-temperature working windows, reactors, radioactive devices; rockets, missile nose cones, nozzles and antenna covers; radio insulation of artificial satellites. Quartz boats are also used in chemical industry, metallurgy, electrical engineering, scientific research, etc. In chemical industry, they can be used for high-temperature acid-resistant gas combustion, cooling and ventilation devices, acid solution evaporation, cooling absorption, storage devices, distilled water, preparation of hydrochloric acid, nitric acid, sulfuric acid, etc. and other physical and chemical experimental supplies. In high-temperature operations, they can be used for optical glass, crucibles, fluorescent guests, electric furnace core tubes, gas combustion radiators. In optics, quartz glass and quartz glass wool can be used as rocket nozzles, spacecraft heat shields and observation windows, etc. In short, with the development of modern science and technology, quartz glass has been more widely used in various fields.

[0004] However, in the prior art, since the inner side of the quartz boat is provided with several or even dozens of teeth for embedding the silicon wafer, if the tooth spacing of the quartz boat is unqualified during the production process, it may cause the problem of being unable to insert the silicon wafer. Utility Model Content

[0005] The purpose of the utility model is to provide a boat inserting machine to solve the problem mentioned in the above background technology that the inner side of the quartz boat is provided with several or even dozens of teeth for embedding silicon wafers. If the tooth spacing of the quartz boat is unqualified during the production process, it may lead to the problem that the silicon wafer cannot be inserted.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a small boat inserting machine, including a main mechanism and an auxiliary mechanism, the auxiliary mechanism is located at the outer end of the main mechanism, the main mechanism includes a base, a column and a motor, the column is fixedly installed on the upper end of the base, and the motor is fixedly installed on the upper end of the column; the main mechanism also includes a coupling, a ball screw, a single-axis robot, a sensor, a lower slot plate, an inserting group, a silicon wafer, a schematic circuit, a first positioning plate and an electrical cabinet, and the coupling is fixedly installed at the lower end of the motor.

[0007] Preferably, the ball screw is movably mounted at the lower end of the coupling, and the single-axis robot is fixedly mounted on the outside of the coupling. The motor is started to drive the ball screw to rotate, so that the insert group and the silicon wafer move up and down along the ball screw.

[0008] Preferably, the sensor is fixedly mounted below the coupling, and the lower slot plate is fixedly mounted on the outside of the column. When the insert group and the silicon wafer move to the inside of the schematic circle, the sensor determines whether the tooth spacing of the quartz boat is qualified by judging whether the silicon wafer can be inserted into the tooth spacing of the quartz boat.

[0009] Preferably, the insert group is movably mounted on the outside of the ball screw, and the silicon chip is fixedly mounted on the lower end of the insert group. The installation of the silicon chip is used to test the tooth spacing of the quartz boat.

[0010] Preferably, the schematic circuit is fixedly installed below the silicon wafer, the first positioning plate is fixedly arranged at the lower end of the schematic circuit, the electrical cabinet is fixedly installed inside the base, and the installation of the schematic circuit is used to fix the quartz boat.

[0011] Preferably, the auxiliary mechanism comprises a comb plate, an auxiliary positioning plate and an adjustment plate, the comb plate is fixedly mounted on the inner side of the inner end of the schematic circle, and the installation of the auxiliary positioning plate facilitates the positioning of the quartz boat.

[0012] Preferably, the auxiliary positioning plate is movably installed at the lower end of the inner end of the schematic circle, and the adjustment plate is movably installed on the left side of the inner end of the comb plate. When the silicon wafer cannot be inserted into the tooth spacing of the quartz boat, the motor drives the silicon wafer to move upward, and the adjustment plate can adjust the position of the quartz boat so that the silicon wafer can be inserted into the tooth spacing of the quartz boat, effectively improving the practicability of the device.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The boat inserting machine, through the installation of the main mechanism, the motor is started, and the ball screw is driven to rotate, so that the inserting group and the silicon wafer move up and down along the ball screw. The installation of the schematic circle is used to fix the quartz boat. When the inserting group and the silicon wafer move to the inner side of the schematic circle, the sensor judges whether the silicon wafer can be inserted into the tooth spacing of the quartz boat to judge whether the tooth spacing of the quartz boat is qualified, which effectively improves the practicality of the device;

[0015] 2. The boat inserting machine facilitates the positioning of the quartz boat by installing auxiliary mechanisms and auxiliary positioning plates. When the silicon wafer cannot be inserted into the tooth spacing of the quartz boat, the motor drives the silicon wafer to move upward, and the adjustment plate can adjust the position of the quartz boat so that the silicon wafer can be inserted into the tooth spacing of the quartz boat, effectively improving the practicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the cross-sectional structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the test structure of the utility model;

[0018] Figure 3 This is a schematic diagram of the utility model from a top view;

[0019] Figure 4 It is a schematic diagram of the partial cross-section structure of the utility model.

[0020] In the figure: 1. main mechanism; 101. base; 102. column; 103. motor; 104. coupling; 105. ball screw; 106. single-axis robot; 107. sensor; 108. lower slot plate; 109. insert set; 110. silicon wafer; 111. schematic diagram; 112. first positioning plate; 113. electrical cabinet; 2. auxiliary mechanism; 201. comb plate; 202. auxiliary positioning plate; 203. adjustment plate. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1-Figure 4The utility model provides a technical solution: a small boat inserting machine, including a main mechanism 1 and an auxiliary mechanism 2, the auxiliary mechanism 2 is located at the outer end of the main mechanism 1, the main mechanism 1 includes a base 101, a column 102 and a motor 103, the column 102 is fixedly installed on the upper end of the base 101, and the motor 103 is fixedly installed on the upper end of the column 102; the main mechanism 1 also includes a coupling 104, a ball screw 105, a single-axis robot 106, a sensor 107, a lower slot plate 108, an inserting group 109, a silicon chip 110, a schematic periphery 111, a first positioning plate 112 and an electrical cabinet 113, the coupling 104 It is fixedly installed at the lower end of the motor 103, the ball screw 105 is movably installed at the lower end of the coupling 104, the single-axis robot 106 is fixedly installed on the outside of the coupling 104, the sensor 107 is fixedly installed below the coupling 104, the lower groove plate 108 is fixedly installed on the outside of the column 102, the insert group 109 is movably installed on the outside of the ball screw 105, the silicon wafer 110 is fixedly installed at the lower end of the insert group 109, the schematic circle 111 is fixedly installed below the silicon wafer 110, the first positioning plate 112 is fixedly set at the lower end of the schematic circle 111, and the electrical cabinet 113 is fixedly installed inside the base 101.

[0023] The auxiliary mechanism 2 includes a combing plate 201, an auxiliary positioning plate 202 and an adjusting plate 203. The combing plate 201 is fixedly mounted on the inner side of the inner end of the schematic circle 111, the auxiliary positioning plate 202 is movably mounted on the lower end of the inner end of the schematic circle 111, and the adjusting plate 203 is movably mounted on the left side of the inner end of the combing plate 201. When the boat inserting machine is used, the motor 103 is started to drive the ball screw 105 to rotate, so that the inserting group 109 and the silicon wafer 110 move up and down along the ball screw 105. The installation of the schematic circle 111 is used to fix the quartz boat. When the insert group 109 and the silicon wafer 110 move to the inner side of the schematic circle 111, the sensor 107 determines whether the tooth spacing of the quartz boat is qualified by judging whether the silicon wafer 110 can be inserted into the tooth spacing of the quartz boat. The installation of the auxiliary positioning plate 202 facilitates the positioning of the quartz boat. When the silicon wafer 110 cannot be inserted into the tooth spacing of the quartz boat, the motor 103 drives the silicon wafer 110 to move upward, and the adjustment plate 203 can adjust the position of the quartz boat so that the silicon wafer 110 can be inserted into the tooth spacing of the quartz boat.

[0024] Working principle: When using the boat inserting machine, the motor 103 starts and drives the ball screw 105 to rotate, so that the inserting group 109 and the silicon wafer 110 move up and down along the ball screw 105. The installation of the schematic circle 111 is used to fix the quartz boat. When the inserting group 109 and the silicon wafer 110 move to the inner side of the schematic circle 111, the sensor 107 determines whether the tooth spacing of the quartz boat is qualified by judging whether the silicon wafer 110 can be inserted into the tooth spacing of the quartz boat. The installation of the auxiliary positioning plate 202 facilitates the positioning of the quartz boat. When the silicon wafer 110 cannot be inserted into the tooth spacing of the quartz boat, the motor 103 is driven to move the silicon wafer 110 upward. The adjustment plate 203 can adjust the position of the quartz boat so that the silicon wafer 110 can be inserted into the tooth spacing of the quartz boat.

[0025] Finally, it should be noted that the above content is only used to illustrate the technical solution of the utility model, rather than to limit the protection scope of the utility model. Simple modifications or equivalent substitutions of the technical solution of the utility model by ordinary technicians in this field do not deviate from the essence and scope of the technical solution of the utility model.

Claims

1. A small boat inserting machine, comprising a main mechanism (1) and an auxiliary mechanism (2), characterized in that: The auxiliary mechanism (2) is located at the outer end of the main mechanism (1); the main mechanism (1) comprises a base (101), a column (102) and a motor (103); the column (102) is fixedly mounted on the upper end of the base (101); and the motor (103) is fixedly mounted on the upper end of the column (102); The main body mechanism (1) further comprises a coupling (104), a ball screw (105), a single-axis robot (106), a sensor (107), a lower slot plate (108), a plug assembly (109), a silicon chip (110), a schematic ring (111), a first positioning plate (112) and an electrical cabinet (113); the coupling (104) is fixedly mounted on the lower end of the motor (103).

2. A small boat inserting machine according to claim 1, characterized in that: The ball screw (105) is movably mounted on the lower end of the coupling (104), and the single-axis robot (106) is fixedly mounted on the outside of the coupling (104).

3. A boat inserting machine according to claim 2, characterized in that: The sensor (107) is fixedly mounted below the coupling (104), and the lower groove plate (108) is fixedly mounted on the outside of the column (102).

4. A boat inserting machine according to claim 3, characterized in that: The inserting piece group (109) is movably mounted on the outside of the ball screw (105), and the silicon chip (110) is fixedly mounted on the lower end of the inserting piece group (109).

5. A boat inserting machine according to claim 4, characterized in that: The schematic ring (111) is fixedly mounted below the silicon chip (110), the first positioning plate (112) is fixedly arranged at the lower end of the schematic ring (111), and the electrical cabinet (113) is fixedly mounted inside the base (101).

6. A boat inserting machine according to claim 5, characterized in that: The auxiliary mechanism (2) comprises a combing plate (201), an auxiliary positioning plate (202) and an adjustment plate (203); the combing plate (201) is fixedly mounted on the inner side of the inner end of the schematic periphery (111).

7. A boat inserting machine according to claim 6, characterized in that: The auxiliary positioning plate (202) is movably mounted at the lower end of the inner end of the schematic circle (111), and the adjustment plate (203) is movably mounted on the left side of the inner end of the combing plate (201).

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