Graphite boat cleaning equipment and graphite boat cleaning system

Abstract

The utility model discloses graphite boat cleaning equipment and a graphite boat cleaning system. The graphite boat cleaning equipment comprises a shell, a rotating device, a spraying structure and a recycling pipeline. The shell is provided with an accommodating cavity, the rotating device is rotatably arranged in the accommodating cavity, and the rotating device is used for placing the treated graphite boat and driving the treated graphite boat to rotate so as to throw out liquid on the graphite boat. The spraying structure is arranged in the containing cavity, a spraying opening of the spraying structure faces the rotating device, and the spraying structure is used for washing the graphite boat when the rotating device rotates and / or stops. The recycling pipeline is connected to the containing cavity and used for recycling liquid thrown out by the rotating device. According to the utility model, the centrifugal force generated by the rotating device during rotation is used for throwing out the treated liquid on the graphite boat. Therefore, the difficulty of subsequent washing is reduced, and the cleaning effect of the graphite boat is improved.

Description

Technical Field

[0001] The utility model relates to the field of solar cells, in particular to a graphite boat cleaning device and a graphite boat cleaning system. Background Art

[0002] In the related art, the polysilicon layer remaining on the graphite boat is usually cleaned by acid washing or alkali washing, and then soaked and rinsed with a large amount of clean water. During the acid washing process, for example, when a hydrofluoric acid washing solution is used for acid washing, due to the porous structure of the graphite boat itself and its strong adsorption capacity, some of the acid washing solution will remain on the graphite boat. In the subsequent clean water rinsing process, not only a large amount of clean water is required to rinse it clean, but also fluorine-containing wastewater will be generated, which not only wastes water resources but is also not conducive to environmental protection treatment. Utility Model Content

[0003] The utility model discloses a graphite boat cleaning device and a graphite boat cleaning system, which are used for cleaning polysilicon and pickling solution on the graphite boat.

[0004] In order to achieve the above object, the utility model discloses a graphite boat cleaning device, comprising:

[0005] A housing having a receiving cavity;

[0006] A rotating device, which is rotatably disposed in the accommodating chamber, and is used to place the processed graphite boat and drive the processed graphite boat to rotate so as to throw out the liquid on the graphite boat;

[0007] A spray structure, wherein the spray structure is disposed in the accommodating cavity, a spray port of the spray structure faces the rotating device, and the spray structure is used to flush the graphite boat when the rotating device rotates and / or when the rotating device stops;

[0008] A recovery pipe is connected to the accommodating chamber and is used to recover the liquid thrown out by the rotating device.

[0009] As an optional embodiment, the rotating device includes a rotating seat and a placement rack, the rotating seat includes a central part and a peripheral part located outside the central part, the central part can be rotatably arranged in the accommodating cavity, the placement rack is arranged on the peripheral part, and the placement rack is used to place the graphite boat.

[0010] As an optional implementation, there are multiple placement racks, and the multiple placement racks are arranged at intervals in the peripheral part.

[0011] As an optional implementation, the placement rack is provided with a blocking portion, and the blocking portion is used to limit the position of the graphite boat on the placement rack.

[0012] As an optional implementation, the spray structure is arranged on a side of the enclosure portion away from the placement rack, and the spray port of the spray structure faces the placement rack.

[0013] As an optional implementation, the spray structure can be rotatably disposed on the enclosure portion to adjust the direction of the spray port toward the placement rack.

[0014] As an optional embodiment, the rotating device includes at least an acid-stripping state and a water-stripping state. In the acid-stripping state, the spray structure is closed, and the rotating device rotates to throw out the pickling solution on the graphite boat. In the water-stripping state, the spray structure sprays toward the rotating device, and the rotating device rotates to throw out the waste water on the graphite boat.

[0015] As an optional embodiment, the recovery pipeline includes a first pipeline and a second pipeline, the first pipeline is provided with a first valve, and the second pipeline is provided with a second valve. In the acid-sweeping state, the first valve is opened and the second valve is closed, and the first pipeline is used to discharge the pickling solution. In the water-sweeping state, the first valve is closed and the second valve is opened, and the second pipeline is used to discharge the waste water.

[0016] As an optional embodiment, the shell includes a main shell and a cover plate, the main shell has the accommodating cavity, the cover plate is connected to the main shell to cover the accommodating cavity, the cover plate is provided with an exhaust part connected to the accommodating cavity, and the exhaust part is used to discharge the exhaust gas in the accommodating cavity.

[0017] In a second aspect, the utility model discloses a graphite boat cleaning system, comprising the graphite boat cleaning device described in any one of the above embodiments.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] The graphite boat cleaning device disclosed in the utility model is provided with a rotating device in the graphite boat cleaning device, so that the acid washing solution remaining in the graphite boat can be thrown out before the graphite boat is cleaned, that is, the graphite boat is dried by the centrifugal force generated by the rotation of the rotating device, thereby reducing the difficulty of subsequent cleaning. At the same time, a spray structure is added, and the graphite boat is flushed and cleaned by spraying, which can not only effectively flush the polysilicon layer on the graphite boat, but also make the cleaning process more water-saving and water-saving.

[0020] In addition, since part of the pickling solution has been thrown out before cleaning, the amount of wastewater after cleaning and the acid content in the wastewater are reduced, which is convenient for subsequent environmental protection treatment. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0022] Figure 1 It is a structural schematic diagram of a graphite boat in the related art;

[0023] Figure 2 This is a structural schematic diagram of the graphite boat cleaning equipment disclosed in the utility model;

[0024] Figure 3 It is a top view of the graphite boat cleaning device disclosed in the utility model;

[0025] Figure 4 for Figure 2 The enlarged view of point A in the middle;

[0026] Figure 5 for Figure 2 Enlarged view of point B in the middle.

[0027] Description of reference numerals:

[0028] 100. Graphite boat cleaning equipment; 1. Shell; 1a. Accommodating chamber; 11. Main shell; 12. Cover plate; 12a. Exhaust part; 2. Rotating device; 21. Rotating seat; 21a. Central part; 21b. Peripheral part; 22. Placement rack; 22a. Enclosure; 22b. Swing arm mechanism; 3. Spray structure; 3a. Spray port; 4. Recovery pipe; 41. First pipe; 41a. First valve; 42. Second pipe; 42a. Second valve; 5. Graphite boat; 5a. Wafer placement part. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] In the present invention, the directions or positional relationships indicated by the terms "inside", "outside", "middle", etc. are based on the directions or positional relationships shown in the accompanying drawings. These terms are mainly used to better describe the present invention and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific direction, or to be constructed and operated in a specific direction.

[0031] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in this utility model can be understood according to specific circumstances.

[0032] In addition, the terms "disposed", "provided with", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0033] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0034] In the related art, the graphite boat is usually first cleaned in a cleaning tank, using acid or alkali to preliminarily clean the polysilicon layer remaining on the graphite boat, and then soaking and rinsing with a large amount of clean water. During the pickling process, for example, when a hydrofluoric acid pickling solution is used for pickling, due to the porous structure of the graphite boat itself and its strong adsorption capacity, some pickling solution will remain on the graphite boat. In the subsequent clean water rinsing process, not only a large amount of clean water is required to rinse it clean, but fluorine-containing wastewater will also be generated, which not only wastes water resources but is also not conducive to environmental protection. In addition, see Figure 1 , Figure 1 The structure of the graphite boat in the related art is shown. Since the shape of the silicon wafer is relatively slender and flat, the shape of the silicon wafer placement part in the graphite boat for placing the silicon wafer is relatively narrow and long, and it needs to be cleaned intensively during cleaning, which may increase the consumption of water resources and increase the difficulty of cleaning the graphite boat. Furthermore, during the rinsing process of the graphite boat, a large amount of polysilicon powder will fall from the graphite boat into the cleaning tank. When the graphite boat is taken out of the cleaning tank, the graphite boat will be stained with polysilicon powder again, resulting in the graphite boat not being cleaned thoroughly.

[0035] Based on this, the utility model provides a graphite boat cleaning device and a graphite boat cleaning system. After the graphite boat is pickled, the graphite boat is placed on a rotating device in the graphite boat cleaning device. The rotating device is rotated to generate centrifugal force in the graphite boat, so that the pickling solution remaining on the graphite boat is thrown out, and then the remaining pickling solution and the residual polysilicon are further rinsed under the flushing of the spray structure. The use of spray flushing can effectively save the use of water resources. In the above process, the recovery pipeline can recycle the pickling solution and the discarded waste water, and the recovered pickling solution can be returned to the pickling tank for reuse, saving production costs. In addition, since most of the pickling solution on the graphite boat has been thrown out before flushing, the pickling solution content of the waste water is greatly reduced, which is convenient for the subsequent centralized treatment of waste water to reduce the cost and difficulty of environmental protection treatment.

[0036] The technical solution of the utility model will be further described below in conjunction with embodiments and drawings.

[0037] The utility model discloses a graphite boat cleaning system, comprising an acid pickling tank, a water washing tank and a graphite boat cleaning device. The acid pickling tank is used to pickle the polysilicon layer on the graphite boat, the graphite boat cleaning device can be used to spin out the pickling solution after the graphite boat is pickled and to initially rinse it, and the water washing tank can be used to rinse the graphite boat after the initial cleaning by the graphite boat cleaning device. After the graphite boat is washed by the water washing tank, the graphite boat cleaning device can also be used for secondary spinning and secondary rinsing of the graphite boat to further clean the polysilicon residue on the graphite boat.

[0038] It is understandable that the pickling tank, water washing tank and graphite boat cleaning equipment can be arranged in various ways. For example, the graphite boat cleaning equipment can be arranged downstream of the pickling tank, while the water washing tank is arranged downstream of the graphite boat cleaning equipment; or, the water washing tank is arranged downstream of the pickling tank, while the graphite boat cleaning equipment is arranged downstream of the water washing tank. The specific arrangement can be made according to the actual situation, and this embodiment does not make any specific limitation to this.

[0039] When the graphite boat cleaning system of the present application is used to clean the graphite boat, the cleaning process is as follows:

[0040] S1: First, pickle in a pickling tank. A pickling solution can be set in the pickling tank, and the graphite boat is placed in the pickling solution and soaked for 3-10 hours.

[0041] S2: After pickling, the graphite boat is placed in a graphite boat cleaning device for acid removal and spraying. The purpose is to remove the pickling solution and residual polysilicon left on the graphite boat after pickling.

[0042] S3: After being cleaned by the graphite boat cleaning equipment, the graphite boat is placed in a water washing tank for rinsing, in order to further clean the polysilicon remaining in the graphite boat.

[0043] S4: After being rinsed in the water washing tank, the graphite boat is put back into the graphite boat cleaning equipment for re-drying and re-spraying. Specifically, the graphite boat after being washed in the water washing tank is first dried, and then the graphite boat is sprayed and rinsed again, and the graphite boat is dried again after the rinsing is completed.

[0044] In this way, the cleaning of the graphite boat is completed and the graphite boat can obtain a better cleaning effect.

[0045] The graphite boat cleaning device disclosed in the utility model will be described in detail below in conjunction with the accompanying drawings.

[0046] See also Figure 2 The utility model discloses a graphite boat cleaning device 100, comprising a shell 1, a rotating device 2, a spray structure 3 and a recovery pipe 4. The shell 1 has a receiving chamber 1a, and the rotating device 2 is rotatably arranged in the receiving chamber 1a. The rotating device 2 is used to place the processed graphite boat 5 and drive the processed graphite boat 5 to rotate to throw out the liquid on the graphite boat 5. The spray structure 3 is arranged in the receiving chamber 1a, and the spray port 3a of the spray structure 3 faces the rotating device 2. The spray structure 3 is used to rinse the graphite boat 5 when the rotating device 2 rotates and / or when the rotating device 2 stops. The recovery pipe 4 is connected to the receiving chamber 1a, and the recovery pipe 4 is used to recover the liquid thrown out by the rotating device 2.

[0047] The graphite boat cleaning equipment disclosed in the present application is provided with a rotating device 2, and the liquid on the graphite boat 5 is thrown out by the centrifugal force generated by the rotating device 2 when rotating. The thrown out liquid may include the pickling solution remaining after pickling and the waste water remaining after washing or rinsing. In this way, the difficulty of subsequent washing is reduced, which is conducive to improving the cleaning effect of the graphite boat 5. At the same time, the addition of the spray structure 3 can spray and wash the graphite boat 5 after the pickling solution is thrown out of the graphite boat 5, or the waste water after washing on the graphite boat 5 can be thrown out by the rotating device 2 while washing the graphite boat 5. In this way, the spray washing method can not only have a good washing effect on the polysilicon remaining on the graphite boat 5, but also the spray washing method can better control the use of water to reduce the waste of water resources.

[0048] For example, after the graphite boat 5 has finished shaking off the pickling solution or the waste water after rinsing, the spray structure 3 can be used to spray and clean the graphite boat 5. When the spray structure 3 is spraying, the rotating device 2 can be restarted to achieve spraying and shaking. After the spraying and rinsing is completed, the rotating device 2 can continue to rotate to shake off the waste water remaining on the graphite boat 5 during the rinsing. It can be understood that the use of spraying can more efficiently achieve the cleaning of the graphite boat 5.

[0049] Furthermore, the recovery pipe 4 can be kept open when the rotating device 2 rotates or the spraying structure 3 sprays to recover the discarded pickling solution and waste water. The recovered pickling solution can be discharged back to the pickling tank through the recovery pipe 4 for reuse to save costs. The waste water is discharged to environmental protection treatment. Since the pickling solution on the graphite boat 5 is first thrown out, the pickling solution content in the waste water generated by flushing is also greatly reduced, and the cost and difficulty of subsequent waste water environmental protection treatment are also reduced.

[0050] In some embodiments, the housing 1 includes a main shell 11 and a cover plate 12. The main shell 11 has a housing chamber 1a. The cover plate 12 is connected to the main shell 11 to cover the housing chamber 1a. The cover plate 12 is provided with an exhaust portion 12a connected to the housing chamber 1a. The exhaust portion 12a is used to discharge the waste gas in the housing chamber 1a. Considering that part of the pickling solution will volatilize into gas when the pickling solution is thrown out, if these gases cannot be discharged in time, they may cause corrosion to the devices and structures in the equipment or cause harm to the technicians' bodies when they open the equipment to take out the graphite boat 5. Therefore, the exhaust portion 12a is opened on the cover plate 12, and the exhaust portion 12a is used to timely discharge the acidic gas in the graphite boat cleaning equipment 100 to prevent the acidic gas from accumulating in the graphite boat cleaning equipment 100.

[0051] Please also see Figure 2 and Figure 3 In some embodiments, the rotating device 2 includes a rotating seat 21 and a placing rack 22. The rotating seat 21 includes a central portion 21a and a peripheral portion 21b located outside the central portion 21a. The central portion 21a can be rotatably arranged in the accommodating chamber 1a. The placing rack 22 is arranged at the peripheral portion 21b. The placing rack 22 is used to place the graphite boat 5. Specifically, the peripheral portion 21b of the rotating seat 21 located outside the central portion 21a generates a larger centrifugal force when rotating. In particular, the centrifugal force generated by the peripheral portion 21b farther away from the central portion 21a is greater. Therefore, the placing rack 22 is arranged on the peripheral portion 21b of the rotating seat 21 away from the central portion 21a, and the liquid on the graphite boat 5 is thrown out by the centrifugal force generated when the rotating seat 21 rotates, which is conducive to improving the efficiency of throwing out the liquid on the graphite boat 5. Of course, in other embodiments, the placing rack can also be arranged on the central portion 21a.

[0052] In some embodiments, there may be a plurality of placement racks 22, and the plurality of placement racks 22 are disposed at intervals in the peripheral portion 21b. In this way, it is beneficial to realize the simultaneous drying of a plurality of graphite boats 5, which is beneficial to improving production efficiency.

[0053] Furthermore, a plurality of placement racks 22 are evenly spaced and arranged on the peripheral portion 21b around the central portion 21a, and the positions of the placement racks 22 to the central portion 21a are kept consistent, that is, the plurality of placement racks can be arranged in a ring along the center of the rotating seat 21. This ensures that the centrifugal force exerted on each graphite boat 5 when rotating on the rotating seat 21 is the same, and the drying effect is consistent, so as to prevent the phenomenon that some graphite boats 5 cannot be dried.

[0054] Since the graphite boat 5 generates centrifugal force when it rotates on the placement rack 22 following the rotating seat 21, and the centrifugal force gradually increases with the increase of the rotation speed, it is easy to cause the graphite boat 5 to be thrown off the placement rack 22. Based on this, in some embodiments, the placement rack 22 may be provided with a blocking portion 22a, and the blocking portion 22a is used to limit the position of the graphite boat 5 on the placement rack 22. It can be understood that the blocking portion 22a can resist the graphite boat 5 when the rotating seat 21 rotates, preventing the graphite boat 5 from falling off the placement rack 22 due to the excessively fast rotation speed of the rotating seat 21, which is conducive to avoiding damage to the graphite boat 5.

[0055] Furthermore, the enclosure 22a is provided with a plurality of gaps to facilitate the spray structure 3 to spray water to clean the graphite boat 5 or to facilitate the discharge of pickling solution and waste water. Optionally, the enclosure 22a can be a railing, a block, and an enclosure net arranged around the placement rack 22, and the utility model is not specifically limited here.

[0056] Please also see Figure 2 and Figure 3 In some embodiments, the spray structure 3 is disposed on the side of the enclosure 22a away from the placement rack 22. It is understandable that the enclosure 22a has a side facing the graphite boat 5 in the placement rack 22 and a side away from the placement rack 22, that is, the inner side and the outer side of the enclosure 22a. By arranging the spray structure 3 on the outer side of the enclosure 22a, it is possible to prevent the graphite boat 5 on the inner side of the enclosure 22a from hitting the spray structure 3 during rotation, thereby preventing the graphite boat 5 or the spray structure 3 from being damaged.

[0057] The outer side of the enclosure 22a may be the periphery of the enclosure 22a or the top of the enclosure 22a, that is, the spray structure 3 may be disposed at the periphery and the top of the enclosure 22a at the same time to achieve all-round cleaning of the graphite boat 5.

[0058] In order to achieve a better flushing effect on the graphite boat, the spray port 3a of the spray structure 3 is directed toward the placement rack 22. Specifically, the spray port 3a of the spray structure 3 is directed toward the silicon wafer placement portion 5a of the graphite boat 5 on the placement rack 22. Since the graphite boat 5 is used to carry silicon wafers, each silicon wafer placement portion 5a on the graphite boat 5 is long and narrow, which is not convenient for cleaning. In order to better clean the graphite boat 5, the spray port 3a of the spray structure 3 should be directed toward the portion on the graphite boat 5 where the silicon wafers are placed, so as to effectively achieve the cleaning of the graphite boat 5.

[0059] Optionally, the spray structure 3 may be, but is not limited to, a water spray structure such as a spray pipe, a spray head, etc., and the present utility model does not make any specific limitation here.

[0060] See also Figures 2 to 4 In some embodiments, the spray structure 3 can be rotatably arranged on the enclosure portion 22a to adjust the direction of the spray port 3a toward the placement rack 22. It can be understood that the graphite boat 5 is provided with a plurality of silicon wafer placement portions 5a, and because the silicon wafer placement portions 5a are adapted to the shape of the silicon wafer, the corresponding silicon wafer placement portions 5a are set as long and narrow placement spaces (such as Figure 1 Therefore, by rotatably setting the spray structure 3 on the enclosure 22a, the spray structure 3 can keep swinging when washing the graphite boat 5, so as to facilitate washing each silicon wafer placement part 5a, avoid missing washing and washing, and effectively improve the cleaning effect of the graphite boat 5.

[0061] See also Figure 4 Specifically, the spray structure 3 is connected to the enclosure portion 22a through a swing arm mechanism 22b. When the swing arm mechanism 22b swings, the spray structure 3 moves accordingly, thereby changing the direction of the spray port 3a.

[0062] In some embodiments, since the graphite boat cleaning device 100 has multiple working states, such as a working state of only throwing out the acid solution and waste water or a working state of throwing out and washing at the same time, the rotating device 2 needs to be set to multiple working states accordingly. Therefore, the rotating device 2 includes at least an acid throwing state and a water throwing state. In the acid throwing state, the spray structure 3 is closed, and the rotating device 2 rotates to throw out the pickling solution on the graphite boat 5. In the water throwing state, the spray structure 3 sprays toward the rotating device 2, and the rotating device 2 rotates to throw out the waste water on the graphite boat 5.

[0063] Exemplarily, since the pickling solution on the graphite boat 5 needs to be recovered, the rotating device 2 is in the acid-sweeping state at this time, and the spray structure 3 needs to remain in a closed state to prevent the pickling solution from being diluted by water spraying. When the acid solution is thrown out, the spray structure 3 can be used to clean the graphite boat 5. In the water-sweeping state, the rotating seat 21 can wait for the spray structure 3 to complete the flushing before water-sweeping. Alternatively, it can be rotated directly during the spraying process of the spray structure 3, that is, it can be washed while washing, which can prevent a large amount of waste water from accumulating on the rotating table. When the washing while shaking is completed, the rotating seat 21 rotates alone again to throw out the waste water remaining on the graphite boat 5, the rotating seat 21 and the placement rack 22, which is conducive to keeping the graphite boat cleaning equipment 100 dry.

[0064] Please also see Figures 2 to 5In some embodiments, considering the need to recycle the pickling solution and waste water separately, the recovery pipeline 4 includes a first pipeline 41 and a second pipeline 42. The first pipeline 41 is provided with a first valve 41a, and the second pipeline 42 is provided with a second valve 42a. In the acid-sweeping state, the first valve 41a is opened, the second valve 42a is closed, and the first pipeline 41 is used to discharge the pickling solution. In the water-sweeping state, the first valve 41a is closed, the second valve 42a is opened, and the second pipeline 42 is used to discharge the waste water. In other words, the first valve 41a and the second valve 42a control the opening and closing of the first pipeline 41 and the second pipeline 42 respectively. When the pickling solution is thrown out, the first valve 41a is opened, and the pickling solution can flow out through the first pipeline 41, but it is necessary to avoid flowing into the second pipeline 42, so the second valve 42a is closed, so that the pickling solution is recovered separately, and the pickling solution is reused. In the water-spinning state, the second valve 42a is opened, and waste water can flow out from the second pipe 42. In order to prevent waste water from flowing into the first pipe 41 and contaminating the pickling solution, the first valve 41a is closed, so that the waste water is uniformly collected and treated. In this way, the pickling solution and waste water are separately recycled and treated, and the pickling solution can be reused, which reduces the use of supplementary solution in the pickling tank, reduces costs, reduces the content of pickling solution in the waste water, and reduces the difficulty and cost of waste water treatment.

[0065] The graphite boat cleaning equipment and the graphite boat cleaning system disclosed in the embodiments of the present invention are introduced in detail above. Specific examples are used in this article to illustrate the principle and implementation mode of the present invention. The description of the above embodiments is only used to help understand the graphite boat cleaning equipment and the graphite boat cleaning system of the present invention and their core ideas. At the same time, for general technicians in this field, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A graphite boat cleaning device, characterized in that: include: A housing having a receiving cavity; A rotating device, which is rotatably disposed in the accommodating chamber, and is used to place the processed graphite boat and drive the processed graphite boat to rotate so as to throw out the liquid on the graphite boat; A spray structure, wherein the spray structure is disposed in the accommodating cavity, a spray port of the spray structure faces the rotating device, and the spray structure is used to flush the graphite boat when the rotating device rotates and / or when the rotating device stops; A recovery pipe is connected to the accommodating chamber and is used to recover the liquid thrown out by the rotating device.

2. The graphite boat cleaning device according to claim 1, characterized in that: The rotating device includes a rotating seat and a placement rack, the rotating seat includes a central part and a peripheral part located outside the central part, the central part is rotatably arranged in the accommodating cavity, the placement rack is arranged on the peripheral part, and the placement rack is used to place the graphite boat.

3. The graphite boat cleaning device according to claim 2, characterized in that: There are a plurality of the placing racks, and the plurality of the placing racks are arranged at intervals in the peripheral part.

4. The graphite boat cleaning device according to claim 2, characterized in that: The placement rack is provided with a blocking portion, and the blocking portion is used to limit the position of the graphite boat on the placement rack.

5. The graphite boat cleaning device according to claim 4, characterized in that: The spray structure is arranged on a side of the enclosure portion away from the placement rack, and the spray port of the spray structure faces the placement rack.

6. The graphite boat cleaning device according to claim 5, characterized in that: The spray structure can be rotatably arranged on the enclosure portion to adjust the direction of the spray port toward the placement rack.

7. The graphite boat cleaning device according to any one of claims 1 to 6, characterized in that: The rotating device at least includes an acid-stripping state and a water-stripping state. In the acid-stripping state, the spray structure is closed, and the rotating device rotates to throw out the pickling solution on the graphite boat. In the water-stripping state, the spray structure sprays toward the rotating device, and the rotating device rotates to throw out the waste water on the graphite boat.

8. The graphite boat cleaning device according to claim 7, characterized in that: The recovery pipeline comprises a first pipeline and a second pipeline, the first pipeline is provided with a first valve, and the second pipeline is provided with a second valve; In the acid rejection state, the first valve is opened, the second valve is closed, and the first pipeline is used to discharge the pickling solution; In the water-throwing state, the first valve is closed, the second valve is opened, and the second pipe is used to discharge the waste water.

9. The graphite boat cleaning device according to any one of claims 1 to 6, characterized in that: The shell includes a main shell and a cover plate, the main shell has the accommodating cavity, the cover plate is connected to the main shell to cover the accommodating cavity, the cover plate is provided with an exhaust portion connected to the accommodating cavity, and the exhaust portion is used to exhaust the exhaust gas in the accommodating cavity.

10. A graphite boat cleaning system, characterized in that: The invention comprises a graphite boat cleaning device as described in any one of claims 1 to 9.

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