Vacuum cavity capable of being used for continuous optical thin film coating

Abstract

The utility model discloses a vacuum cavity for continuous optical film coating, which comprises a vacuum cavity body, two side walls in the vacuum cavity body are fixedly connected with limiting rods, a sealing plate is slidably arranged between the two limiting rods, the bottom end of the sealing plate is rotatably connected with push rods close to the two sides, and the push rods are fixedly connected with the vacuum cavity body. The other ends of the two push rods are rotationally connected with sliding blocks, and two adjusting rods are fixedly connected to the two side walls of the interior of the vacuum cavity body. The memory spring shrinks under the influence of temperature, so that the sliding block is driven to slide in the adjusting rod, the push rod rotates along with the sliding block and pushes the sealing plate to rotate, the sealing plate is opened under the cooperation of the movable rod, raw materials reaching the evaporation temperature enter the upper cavity to be evaporated on a sample to be coated, the coating quality is improved, and the production efficiency is improved. And the defects of non-uniform film, unstable performance and infirm adhesion of the coated film are overcome.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum cavities, in particular to a vacuum cavity which can be used for continuous optical thin film coating. Background Art

[0002] Optical thin film is a type of optical medium material composed of thin layered media that transmits light beams through interfaces. Vacuum coating refers to heating and evaporating the evaporation source in a vacuum chamber or sputtering it with accelerated ion bombardment to deposit it on the surface of the substrate to form a multi-layer thin film.

[0003] In the prior art, for example, Chinese patent CN206173436U discloses an “optical vacuum chamber with high coating quality”, which includes a vacuum chamber body, a baffle hinged to the upper part of the vacuum chamber body directly above the bottom of the vacuum chamber body for placing an evaporation source, and a spring made of a memory alloy material is arranged under the baffle.

[0004] During the heating process before coating in the vacuum chambers used for most current optical thin film coatings, some raw materials will reach the evaporation temperature and evaporate first. Since the amount of raw materials that evaporate first is small and is absorbed by the surface of the object first, it is easy to cause problems such as uneven film thickness, unstable performance and loose adhesion during subsequent coating, thus affecting the coating quality. Utility Model Content

[0005] The purpose of the utility model is to provide a vacuum chamber that can be used for continuous optical thin film coating to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum chamber that can be used for continuous optical thin film coating, comprising a vacuum chamber body, wherein the inner side walls of the vacuum chamber body are fixedly connected with limit rods, a sealing plate is slidably arranged between the two limit rods, a push rod is rotatably connected at the lower end of the sealing plate and close to the two sides, and the other ends of the two push rods are rotatably connected with sliders, the inner side walls of the vacuum chamber body are fixedly connected with two adjustment rods, the outer surfaces of the two sliders are respectively slidably connected to the inside of the two adjustment rods, one side of the two sliders are fixedly connected with a degenerate spring, the other ends of the two degenerate springs are respectively fixedly connected to one side wall of the inner side of the two adjustment rods, the bottom end of the sealing plate is rotatably connected with two movable rods, and the other ends of the two movable rods are respectively rotatably connected to one side of the two limit rods.

[0007] As a further preferred embodiment of the present technical solution, a top cover is fixedly connected to the top of the vacuum chamber body, a driving motor is fixedly connected to the top of the top cover, an output end of the driving motor passes through the top of the top cover and is fixedly connected to a loading plate, four movable columns are fixedly connected to the top of the loading plate, movable sleeves are sleeved on the outer surfaces of the four movable columns, buffer springs are fixedly connected to the tops of the four movable columns, the other ends of the four buffer springs are respectively fixedly connected to the inner top surfaces of the four movable sleeves, rollers are rotatably connected to the tops of the four movable sleeves, a guide groove is opened at the bottom end of the top cover, and the outer surfaces of the four rollers are rollingly arranged with the inner top surfaces of the guide grooves.

[0008] As a further preferred embodiment of the technical solution, a mounting seat is fixedly connected to the bottom surface of the vacuum chamber body, a heat insulation board is fixedly connected to the inside of the mounting seat, and an evaporation source is fixedly connected to the inside of the heat insulation board.

[0009] As a further preferred embodiment of the present technical solution, positioning grooves are provided on the top and bottom surfaces inside the adjusting rod, the top and bottom ends of the sliding block are fixedly connected with positioning rods, and the outer surfaces of the two positioning rods are slidably connected to the inner surfaces of the two positioning grooves respectively.

[0010] As a further preferred embodiment of the technical solution, limiting grooves are provided on the inner sides of the two limiting rods, limiting columns are fixedly connected on both sides of the sealing plate and at the middle position, and the outer surfaces of the two limiting columns are respectively slidably connected to the inside of the two limiting grooves.

[0011] As a further preferred embodiment of the present technical solution, a sealing door is rotatably connected to one side of the vacuum chamber body, and a handle is fixedly connected to one side of the sealing door.

[0012] As a further preferred embodiment of the technical solution, two exhaust pipes are fixedly connected to one side of the vacuum chamber body, a sealing cover is fixedly connected to the inside of the vacuum chamber body, and the bottom end of the sealing cover is in close contact with the top end of the sealing plate.

[0013] The utility model provides a vacuum chamber that can be used for continuous optical thin film coating, which has the following beneficial effects:

[0014] (1) The utility model uses a memory spring that contracts under the influence of temperature, thereby driving the slider to slide inside the adjusting rod, causing the push rod to rotate and push the sealing plate to rotate. With the cooperation of the movable rod, the sealing plate is opened, allowing the raw material that has reached the evaporation temperature to enter the upper cavity to evaporate the sample to be coated, thereby improving the coating quality and preventing the coating from having the disadvantages of uneven film, unstable performance and loose adhesion.

[0015] (2) The utility model provides a stabilizing device to drive the loading plate to rotate with a driving motor. During the rotation, the vibration generated moves inside the movable sleeve through the movable column, causing the support rod to squeeze the buffer spring. The buffer spring absorbs the vibration force, so that the roller can cooperate with the rotation of the loading plate to be more stable, thereby improving the coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 It is a schematic diagram of the internal structure of the vacuum chamber body of the utility model;

[0018] Figure 3 It is an exploded schematic diagram of the structure between the sealing plate and the limiting rod of the utility model;

[0019] Figure 4 It is an exploded schematic diagram of the structure between the loading plate and the top cover of the utility model;

[0020] Figure 5 For this utility model Figure 4 A magnified schematic diagram of the structure in the middle.

[0021] In the figure: 1. vacuum chamber body; 2. limit rod; 3. sealing plate; 4. adjusting rod; 5. slider; 6. push rod; 7. movable rod; 8. degenerative spring; 9. positioning groove; 10. positioning rod; 11. limit column; 12. limit groove; 13. sealing cover; 14. top cover; 15. driving motor; 16. loading plate; 17. guide groove; 18. movable column; 19. movable sleeve; 20. buffer spring; 21. roller; 22. sealing door; 23. handle; 24. exhaust pipe; 25. mounting seat; 26. heat insulation board; 27. evaporation source. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0023] The utility model provides a technical solution: Figure 1-3As shown, in this embodiment, a vacuum chamber that can be used for continuous optical thin film coating includes a vacuum chamber body 1, and the two side walls of the vacuum chamber body 1 are fixedly connected to limit rods 2, and a sealing plate 3 is slidably arranged between the two limit rods 2. A push rod 6 is rotatably connected to the lower end of the sealing plate 3 and close to the two sides, and the other ends of the two push rods 6 are rotatably connected to sliders 5. Two adjusting rods 4 are fixedly connected to the two side walls of the vacuum chamber body 1, and the outer surfaces of the two sliders 5 are respectively slidably connected to the inside of the two adjusting rods 4. One side of the two sliders 5 is fixedly connected to a degenerate spring 8, and the other ends of the two degenerate springs 8 are respectively fixedly connected to one side wall of the two adjusting rods 4. Two movable rods 7 are rotatably connected to the bottom end of the sealing plate 3, and the other ends of the two movable rods 7 are respectively rotatably connected to one side of the two limit rods 2. By setting the limit rod 2, the movable range of the sealing plate 3 can be limited. By setting the push rod 4, it can cooperate with the movable rod 7 to make the sealing plate 3 flip over. By setting the degenerate spring 8, it can shrink when a certain temperature is reached to achieve the pulling of the slider 5.

[0024] like Figure 2 , Figure 4 and Figure 5 As shown, the top of the vacuum chamber body 1 is fixedly connected to a top cover 14, the top of the top cover 14 is fixedly connected to a driving motor 15, the output end of the driving motor 15 passes through the top of the top cover 14 and is fixedly connected to a loading plate 16, the top of the loading plate 16 is fixedly connected to four movable columns 18, the outer surfaces of the four movable columns 18 are sleeved with movable sleeves 19, the tops of the four movable columns 18 are fixedly connected to buffer springs 20, the other ends of the four buffer springs 20 are respectively fixedly connected to the inner top surfaces of the four movable sleeves 19, the tops of the four movable sleeves 19 are rotatably connected to rollers 21, the bottom end of the top cover 14 is provided with a guide groove 17, the outer surfaces of the four rollers 21 are rollingly arranged with the inner top surfaces of the guide grooves 17, wherein, by arranging the driving motor 15, the loading plate 16 can be driven to rotate, by arranging the buffer springs 20, the stability of the loading plate 16 during operation can be maintained, and by arranging the rollers 21, the friction can be reduced, making the operation smoother.

[0025] like Figure 2 As shown, a mounting seat 25 is fixedly connected to the bottom surface of the vacuum chamber body 1, a heat insulation board 26 is fixedly connected inside the mounting seat 25, and an evaporation source 27 is fixedly connected inside the heat insulation board 26 for evaporating the raw material.

[0026] like Figure 3 As shown, positioning grooves 9 are provided on the top and bottom surfaces of the adjusting rod 4, and positioning rods 10 are fixedly connected to the top and bottom ends of the sliding block 5. The outer surfaces of the two positioning rods 10 are respectively slidably connected to the inner surfaces of the two positioning grooves 9, which can improve the stability of the sliding block 5 in the adjusting rod 4.

[0027] like Figure 3As shown, limiting grooves 12 are provided on the inner sides of the two limiting rods 2, and limiting columns 11 are fixedly connected at both sides of the sealing plate 3 and at the middle position. The outer surfaces of the two limiting columns 11 are slidably connected to the inside of the two limiting grooves 12 respectively, so as to guide the sealing plate 3.

[0028] like Figure 1 As shown, a sealing door 22 is rotatably connected to one side of the vacuum chamber body 1, and a handle 23 is fixedly connected to one side of the sealing door 22 to facilitate loading and unloading.

[0029] like Figure 1 , Figure 2 and Figure 3 As shown, two exhaust pipes 24 are fixedly connected to one side of the vacuum chamber body 1, and a sealing cover 13 is fixedly connected to the inside of the vacuum chamber body 1. The bottom end of the sealing cover 13 is in close contact with the top end of the sealing plate 3. By setting the exhaust pipe 24, the inside of the vacuum chamber body 1 can be evacuated to make the inside a vacuum state. By setting the sealing cover 13, the sealing plate 3 can be sealed to improve the airtightness.

[0030] The utility model provides a vacuum chamber that can be used for continuous optical thin film coating, and the specific working principle is as follows:

[0031] When coating an object, the evaporation source 27 heats the coating raw material to evaporate. After the temperature inside the vacuum chamber body 1 reaches the specified temperature, the deformable spring 8 contracts due to the temperature. During its contraction, it drives the slider 5 to slide inside the adjusting rod 4, causing the push rod 6 to rotate and push the sealing plate 3 to rotate. With the cooperation of the movable rod 7, the sealing plate 3 is opened to allow the raw material that has reached the evaporation temperature to enter the upper cavity to be evaporated on the object. During the evaporation process, the driving motor 15 drives the loading plate 16 to rotate. During the rotation, the vibration generated moves through the movable column 18 inside the movable sleeve 19, causing the movable column 18 to squeeze the buffer spring 20. The buffer spring 20 absorbs the vibration force, so that the roller 21 can cooperate with the loading plate 16 to rotate more stably.

[0032] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum chamber that can be used for continuous optical thin film coating, comprising a vacuum chamber body (1), characterized in that: The inner side walls of the vacuum chamber body (1) are fixedly connected to limit rods (2); a sealing plate (3) is slidably arranged between the two limit rods (2); a push rod (6) is rotatably connected to the lower end of the sealing plate (3) and close to the two sides; the other ends of the two push rods (6) are rotatably connected to sliders (5); the inner side walls of the vacuum chamber body (1) are fixedly connected to two adjustment rods (4); the outer surfaces of the two sliders (5) are respectively slidably connected to the inside of the two adjustment rods (4); one side of the two sliders (5) is fixedly connected to a variable spring (8); the other ends of the two variable springs (8) are respectively fixedly connected to one side wall of the inside of the two adjustment rods (4); the bottom end of the sealing plate (3) is rotatably connected to two movable rods (7); the other ends of the two movable rods (7) are respectively rotatably connected to one side of the two limit rods (2).

2. A vacuum chamber for continuous optical thin film coating according to claim 1, characterized in that: The top of the vacuum chamber body (1) is fixedly connected to a top cover (14), the top of the top cover (14) is fixedly connected to a driving motor (15), the output end of the driving motor (15) passes through the top of the top cover (14) and is fixedly connected to a loading plate (16), the top of the loading plate (16) is fixedly connected to four movable columns (18), the outer surfaces of the four movable columns (18) are sleeved with movable sleeves (19), the tops of the four movable columns (18) are fixedly connected to buffer springs (20), the other ends of the four buffer springs (20) are respectively fixedly connected to the inner top surfaces of the four movable sleeves (19), the tops of the four movable sleeves (19) are rotatably connected to rollers (21), the bottom of the top cover (14) is provided with a guide groove (17), the outer surfaces of the four rollers (21) are rollably arranged with the inner top surfaces of the guide grooves (17).

3. The vacuum chamber for continuous optical thin film coating according to claim 2, characterized in that: The bottom surface of the interior of the vacuum chamber body (1) is fixedly connected to a mounting seat (25), a heat insulation board (26) is fixedly connected to the interior of the mounting seat (25), and an evaporation source (27) is fixedly connected to the interior of the heat insulation board (26).

4. The vacuum chamber for continuous optical thin film coating according to claim 1, characterized in that: The top and bottom surfaces of the adjusting rod (4) are both provided with positioning grooves (9), the top and bottom ends of the sliding block (5) are both fixedly connected with positioning rods (10), and the outer surfaces of the two positioning rods (10) are respectively slidably connected to the inner surfaces of the two positioning grooves (9).

5. The vacuum chamber for continuous optical thin film coating according to claim 4, characterized in that: The inner sides of the two limiting rods (2) are provided with limiting grooves (12), and limiting columns (11) are fixedly connected at the middle positions on both sides of the sealing plate (3), and the outer surfaces of the two limiting columns (11) are respectively slidably connected to the insides of the two limiting grooves (12).

6. The vacuum chamber for continuous optical thin film coating according to claim 1, characterized in that: A sealing door (22) is rotatably connected to one side of the vacuum chamber body (1), and a handle (23) is fixedly connected to one side of the sealing door (22).

7. The vacuum chamber for continuous optical thin film coating according to claim 6, characterized in that: One side of the vacuum chamber body (1) is fixedly connected to two exhaust pipes (24), and the interior of the vacuum chamber body (1) is fixedly connected to a sealing cover (13), the bottom end of the sealing cover (13) being in close contact with the top end of the sealing plate (3).

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