Pretreatment device for detecting metal impurity ions in trichlorosilane

Abstract

The utility model relates to the technical field of polycrystalline silicon production, in particular to a pretreatment device for detecting metal impurity ions in trichlorosilane, which comprises a reaction device and a filler container, the reaction device comprises a reaction container and a container cover; the reaction container is provided with a cavity with an open upper end; an exhaust port is formed in the upper part of the reaction container; the container cover is detachably arranged on the reaction container and is used for sealing the accommodating cavity; the packing container comprises a rotating part, a feeding part and an operating component. One end of the rotating part is rotatably arranged on the inner wall of the accommodating cavity; the feeding part is arranged at the other end of the rotating part; an opening is formed in the upper end of the feeding part; the feeding part can be rotated until the opening is downward; the operation component is rotatably arranged on the reaction container; the operating member drives the rotating part to rotate through magnetic force. According to the utility model, material reaction and feeding can be carried out under a closed condition, no new impurities are introduced in the test, and the accuracy and repeatability of detection data are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon production, in particular to a pre-processing device for detecting metal impurity ions in trichlorosilane. Background Art

[0002] At present, in the detection of impurities in trichlorosilane, a fixed amount of trichlorosilane is first added to a clean crucible, and then an appropriate amount of complexing agent and water are added in sequence to generate silicon dioxide; then hydrofluoric acid is added to dissolve the silicon dioxide, and then it is placed in a graphite furnace and evaporated with an electric heating plate. After evaporation, the residue is dissolved with nitric acid, and the volume is fixed with ultrapure water. Finally, the impurity elements are quantitatively analyzed by inductively coupled plasma optical emission spectroscopy (ICP-OES). Since the current method requires multiple additions of chemical reagents and water during the pretreatment of trichlorosilane samples, impurities are easily introduced; moreover, multiple manual sampling and sampling injection into the instrument will cause human errors; resulting in poor accuracy and repeatability of the test data. Utility Model Content

[0003] In view of this, the utility model provides a pretreatment device for detecting metal impurity ions in trichlorosilane, the main purpose of which is to allow material reaction and feeding to be carried out under closed conditions, without introducing new impurities into the test, thereby improving the accuracy and repeatability of the detection data.

[0004] In order to achieve the above purpose, the utility model mainly provides the following technical solutions:

[0005] The embodiment of the utility model provides a pre-treatment device for detecting metal impurity ions in trichlorosilane, comprising: a reaction device and a packing container;

[0006] The reaction device comprises: a reaction container and a container cover; the reaction container has a cavity with an upper opening; the inner wall of the cavity has an anti-corrosion layer 1;

[0007] The upper portion of the reaction container is provided with an exhaust port; the exhaust port is communicated with the cavity;

[0008] The container cover is detachably disposed on the reaction container and is used to seal the cavity;

[0009] The filling container comprises: a rotating part, a feeding part and an operating member;

[0010] One end of the rotating part is rotatably disposed on the inner wall of the cavity;

[0011] The feeding part is arranged at the other end of the rotating part;

[0012] The upper end of the feeding part has an opening; the feeding part can be rotated so that the opening faces downward;

[0013] The inner side of the feeding part has a second anti-corrosion layer;

[0014] The operating member is rotatably disposed on the reaction container; the operating member and the rotating portion are separated by a wall of the chamber;

[0015] The operating member and the rotating part are provided with magnetic attraction members; the operating member drives the rotating part to rotate through magnetic force.

[0016] Furthermore, it also includes: a tail gas absorption device;

[0017] The tail gas absorption device is connected to the exhaust port through a tail gas pipe;

[0018] The tail pipe is provided with a pressure reducing valve;

[0019] The pressure reducing valve is provided with a polytetrafluoroethylene valve core.

[0020] Furthermore, the feeding part is plugged into the end of the rotating part.

[0021] Furthermore, the rotating part can be detachably plugged into the inner wall of the cavity.

[0022] Furthermore, the first anti-corrosion layer is a polytetrafluoroethylene profile.

[0023] Furthermore, the second anti-corrosion layer is a polytetrafluoroethylene profile.

[0024] By means of the above technical solution, the pre-treatment device for detecting metal impurity ions in trichlorosilane of the utility model has at least the following advantages:

[0025] It enables material reaction and addition to be carried out under closed conditions, and the test will not introduce new impurities, thus improving the accuracy and repeatability of test data.

[0026] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A schematic diagram of a pre-treatment device for detecting metal impurity ions in trichlorosilane provided by an embodiment of the utility model;

[0028] Figure 2 A schematic diagram of a pre-treatment device for detecting metal impurity ions in trichlorosilane provided by another embodiment of the utility model.

[0029] As shown in the figure:

[0030] 1 is a reaction container, 2 is a container cover, 3 is a feeding part, 4 is a rotating part, 5 is an operating member, 6 is an exhaust gas absorption device, 7 is a pressure reducing valve, and 8 is a magnetic attraction member. DETAILED DESCRIPTION

[0031] In order to further explain the technical means and effects adopted by the utility model to achieve the predetermined utility model purpose, the specific implementation methods, structures, features and effects of the utility model application are described in detail below in conjunction with the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "embodiment" does not necessarily refer to the same embodiment. In addition, specific features, structures, or characteristics in one or more embodiments may be combined in any suitable form.

[0032] like Figure 1 and Figure 2 As shown, a pretreatment device for detecting metal impurity ions in trichlorosilane proposed in one embodiment of the utility model comprises: a reaction device and a packing container; the reaction device comprises: a reaction vessel 1 and a container cover 2; the reaction vessel 1 has a cavity with an upper opening; the inner wall of the cavity has an anti-corrosion layer 1; preferably, the anti-corrosion layer 1 is a polytetrafluoroethylene profile, which is corrosion-resistant to avoid affecting the detection. Of course, the entire reaction vessel 1 can also be made of anti-corrosion profiles. An exhaust port is provided at the top of the reaction vessel 1, and the exhaust port is connected to the cavity for discharging the reaction gas; the container cover 2 can be detachably arranged on the reaction vessel 1 for sealing the cavity; preferably, the container cover 2 is connected to the reaction vessel 1 through a flange structure, and the connection structure is simple and reliable to achieve sealing.

[0033] The filling container includes: a rotating part 4, a feeding part 3 and an operating member 5; one end of the rotating part 4 can be rotatably arranged on the inner wall of the cavity; in this embodiment, the rotating part 4 can be detachably plugged into the inner wall of the cavity, which is convenient for installation and disassembly. The feeding part 3 is arranged at the other end of the rotating part 4; in this embodiment, the feeding part 3 is plugged into the end of the rotating part 4, which can achieve quick connection and disassembly. The rotating part 4 is made of polytetrafluoroethylene profile. The magnetic attraction member 8 is wrapped in the polytetrafluoroethylene profile to avoid corrosion.

[0034] The upper end of the feeding part 3 has an opening; the feeding part 3 can be rotated to face the opening downward; when the material of the feeding part 3 needs to be added to the cavity, it is only necessary to rotate the filling container. The inner side of the feeding part 3 has an anti-corrosion layer 2; in this embodiment, the anti-corrosion layer 2 is a polytetrafluoroethylene profile, which is corrosion-resistant and avoids affecting the detection. Of course, the entire feeding part 3 can also be made of an anti-corrosion profile.

[0035] The operating member 5 is rotatably arranged on the reaction container 1; the operating member 5 and the rotating part 4 are separated by the wall of the cavity, so that the cavity is completely sealed; a magnetic attraction member 8 is arranged on the operating member 5 and the rotating part 4; the operating member 5 drives the rotating part 4 to rotate by magnetic force. The operating member 5 is an operating handle.

[0036] An embodiment of the utility model provides a pretreatment device for detecting metal impurity ions in trichlorosilane, which can enable material reaction and material addition to be carried out under closed conditions, without introducing new impurities into the test, and without easily losing impurities, thereby improving the accuracy and repeatability of detection data.

[0037] As a preferred embodiment of the above-mentioned embodiment, an embodiment of the utility model proposes a pretreatment device for detecting metal impurity ions in trichlorosilane, which also includes: a tail gas absorption device 6; the tail gas absorption device 6 is connected to the exhaust port through a tail gas pipe, and is used to absorb the tail gas after the reaction; a pressure reducing valve 7 is provided on the tail gas pipe; the pressure reducing valve 7 is provided with a polytetrafluoroethylene valve core to avoid corrosion.

[0038] Further explanation, although the terms first, second, etc. can be used to describe various elements in this article, these terms should not limit these elements. These terms are only used to distinguish one element from another element. For example, the first element can be called the second element, and, similarly, the second element can be called the first element, and these terms are only used to distinguish one element from another element. This does not depart from the scope of exemplary embodiments. Similarly, element one and element two do not represent the order of elements, and these terms are only used to distinguish one element from another element. As used herein, the term "and / or" includes any combination and all combinations of one or more associated listed items.

[0039] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] The standard parts used in the utility model can all be purchased from the market, and special-shaped parts can be customized according to the instructions and the drawings. The specific connection methods of each part adopt the conventional means such as mature bolts, rivets, welding, etc. in the existing technology. The machinery, parts and equipment all adopt the conventional models in the existing technology, and the circuit connection adopts the conventional connection method in the existing technology, which will not be described in detail here.

[0041] The above is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Any simple modification, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A pre-treatment device for detecting metal impurity ions in trichlorosilane, characterized in that: Comprising: a reaction device and a filling container; The reaction device comprises: a reaction container and a container cover; the reaction container has a cavity with an upper opening; the inner wall of the cavity has an anti-corrosion layer 1; The upper portion of the reaction container is provided with an exhaust port; the exhaust port is communicated with the cavity; The container cover is detachably disposed on the reaction container and is used to seal the cavity; The filling container comprises: a rotating part, a feeding part and an operating member; One end of the rotating part is rotatably disposed on the inner wall of the cavity; The feeding part is arranged at the other end of the rotating part; The upper end of the feeding part has an opening; the feeding part can be rotated so that the opening faces downward; The inner side of the feeding part has a second anti-corrosion layer; The operating member is rotatably disposed on the reaction container; the operating member and the rotating portion are separated by a wall of the chamber; The operating member and the rotating part are provided with magnetic attraction members; the operating member drives the rotating part to rotate through magnetic force.

2. The pre-treatment device for detecting metal impurity ions in trichlorosilane according to claim 1, characterized in that: Also includes: Tail gas absorption device; The tail gas absorption device is connected to the exhaust port through a tail gas pipe; The tail pipe is provided with a pressure reducing valve; The pressure reducing valve is provided with a polytetrafluoroethylene valve core.

3. The pre-treatment device for detecting metal impurity ions in trichlorosilane according to claim 1, characterized in that: The feeding part is inserted into the end of the rotating part.

4. The pre-treatment device for detecting metal impurity ions in trichlorosilane according to claim 1, characterized in that: The rotating part can be detachably plugged into the inner wall of the cavity.

5. The pre-treatment device for detecting metal impurity ions in trichlorosilane according to claim 1, characterized in that: The first anti-corrosion layer is a polytetrafluoroethylene profile.

6. The pre-treatment device for detecting metal impurity ions in trichlorosilane according to claim 1, characterized in that: The second anti-corrosion layer is a polytetrafluoroethylene profile.

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