Rotating cathode with antifouling rotating shield
By designing a rotatable arc shield on the rotating cathode, the problem of difficult isolation between the sputter and ions between the rotating cathode is solved, effective anti-fouling protection of the target material is achieved, and the normal production of the film layer is ensured.
Patent Information
- Application Number
- CN202421677518.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-15
- Publication Date
- 2025-04-29
- Estimated Expiration
- 2034-07-15
AI Technical Summary
In vacuum magnetron sputtering coating equipment, it is difficult to effectively isolate sputters and ions between rotating cathodes, resulting in target contamination and affecting the normal production of the film layer.
A rotating cathode with an arc-shaped shield is designed, which drives the arc-shaped shield to block the sputtering area when the rotating cathode body is not working, and drives the arc-shaped shield to expose the sputtering area during operation, thereby achieving anti-fouling protection for sputtering objects and ions.
It effectively prevents sputters and ions from scattering towards the inactive rotating cathode target, avoids target contamination, and ensures the normal production effect of the film layer.
Smart Images
Figure CN222809531U_ABST
Abstract
Description
[Technical field]
[0001] The utility model relates to a rotating cathode with an anti-pollution rotating shield. [Background Technology]
[0002] In the existing vacuum magnetron sputtering coating equipment, in order to improve production efficiency and reduce the time of replacing the film system, a plurality of vacuum chambers 10 are generally arranged in the same vacuum chamber 10. Figure 1 The rotating cathode shown in the figure is used, and different target materials are installed on each rotating cathode. During the coating production, some rotating cathodes are used for sputtering coating according to customer needs. At this time, the ions and sputtered materials in the vacuum chamber move in all directions after breaking away from the magnetic field constraints, causing the sputtered materials to scatter onto the target material of the rotating cathode that is not in use, causing contamination to the target material, resulting in an abnormal film layer obtained when the contaminated target material is used next time, affecting the normal production effect. [Contents of the utility model]
[0003] The utility model overcomes the shortcomings of the prior art and provides a rotating cathode with an anti-pollution rotating shield.
[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0005] A rotating cathode with an anti-fouling rotating shield, characterized in that it includes two connecting seats arranged in a vacuum chamber, a rotatable rotating cathode body is arranged between the two connecting seats, an arc-shaped shield that can rotate around the rotating cathode body is arranged on the outside of the rotating cathode body, and the arc-shaped shield is connected to a rotating driving component that drives the arc-shaped shield to rotate to shield the sputtering area when the rotating cathode body is not working and drives the arc-shaped shield to rotate to expose the sputtering area when the rotating cathode body is working.
[0006] A rotating cathode with an anti-fouling rotating shield as described above is characterized in that: the rotating drive assembly includes a rotatable driving wheel mounted on a connecting seat on one side, one end of the arc-shaped shield is connected to the driving wheel, a driving shaft connected to the driving wheel for transmission is provided in the vacuum chamber, a driving motor is provided outside the vacuum chamber, a belt is provided between the driving motor and the driving shaft for transmission, and the other end of the arc-shaped shield is mounted on the rotating cathode body.
[0007] A rotating cathode with an anti-fouling rotating shield as described above is characterized in that: the rotating cathode body includes a target barrel, and end covers for closing the target barrel are respectively provided at both ends of the target barrel, and a clamp for locking the end cover on the target barrel is sleeved on the outside of the end cover, and the end covers on both sides are respectively rotatably connected to the connecting seats on both sides, and the other end of the arc-shaped shield is sleeved on the outside of a clamp.
[0008] The rotating cathode with anti-fouling rotating shield as described above is characterized in that a driving shaft base is provided in the vacuum chamber, and the driving shaft is arranged on the driving shaft base.
[0009] The rotating cathode with anti-fouling rotating shield as described above is characterized in that a driving wheel gear is provided on the outer side of the driving wheel, one end of the driving shaft extends out of the driving shaft base, and a driving shaft gear meshing with the driving wheel gear is provided on the outer side of the extended end of the driving shaft.
[0010] The rotating cathode with anti-fouling rotating shield as described above is characterized in that a connecting seat is arranged on the driving shaft base.
[0011] The rotating cathode with anti-fouling rotating shield as described above is characterized in that the central angle of the opening of the arc-shaped shield ranges from 180 to 240 degrees.
[0012] The rotating cathode with anti-fouling rotating shield as described above is characterized in that the driving motor is a servo motor.
[0013] The beneficial effects of the utility model are:
[0014] The utility model provides an arc-shaped shield which can rotate around the rotating cathode body on the outer side of the rotating cathode body. When the rotating cathode body is not working, the arc-shaped shield is driven to rotate to the front position to shield the sputtering area. When the rotating cathode body is working, the arc-shaped shield is driven to rotate to the back position to expose the sputtering area, thereby realizing the anti-fouling protection function between the rotating cathode bodies. [Drawings]
[0015] Figure 1 It is a schematic diagram of the existing rotating cathode structure;
[0016] Figure 2 It is a schematic diagram of the structure of the utility model. [Specific implementation method]
[0017] The technical solutions in the embodiments of the present utility model will be described clearly and completely below in conjunction with the accompanying drawings.
[0018] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly. In addition, the descriptions of "preferred", "sub-preferred", etc. in the present invention are only used for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "preferred" or "sub-preferred" may explicitly or implicitly include at least one of the features.
[0019] like Figure 2As shown, a rotating cathode with an anti-fouling rotating shield includes two connecting seats 1 arranged in a vacuum chamber 10, a rotatable rotating cathode body 2 is provided between the two connecting seats 1, an arc-shaped shield 3 that can rotate around the rotating cathode body 2 is provided on the outer side of the rotating cathode body 2, and the arc-shaped shield 3 is connected to a rotating driving component 4 that drives the arc-shaped shield 3 to rotate to shield the sputtering area when the rotating cathode body 2 is not working and drives the arc-shaped shield 3 to rotate to expose the sputtering area when the rotating cathode body 2 is working. In actual use, a plurality of rotating cathode bodies 2 are arranged in the vacuum chamber 10 of the vacuum magnetron sputtering coating equipment, and the target materials installed on the rotating cathode bodies 2 are also different; when the vacuum magnetron sputtering coating equipment is coating, some rotating cathode bodies 2 are controlled to work according to customer needs. At this time, the driving component 4 of the rotating cathode body 2 that needs to work drives the arc shield 3 to rotate to the back position, so that the sputtering area of the rotating cathode body 2 is exposed, and at the same time, the driving component 4 of the rotating cathode body 2 that does not need to work drives the arc shield 3 to rotate to the front position, so that the target sputtering area of the rotating cathode body 2 is blocked. Therefore, when the rotating cathode body 2 that needs to work works, the ions and sputtering materials in the vacuum chamber 10 are freed from the magnetic field constraints and move in all directions, the ions and sputtering materials moving toward the rotating cathode body 2 that does not need to work are blocked by the arc shield 3 and do not scatter on the target material of the rotating cathode body 2, so as not to pollute the target material, so that a normal film layer can be obtained when the rotating cathode body 2 is used next time, and the production effect is not affected.
[0020] like Figure 2 As shown, the rotation drive assembly 4 includes a rotatable driving wheel 41 sleeved on one side of the connecting seat 1, one end of the arc shield 3 is connected to the driving wheel 41, a driving shaft 42 connected to the driving wheel 41 is provided in the vacuum chamber 10, a driving motor is provided outside the vacuum chamber 10, a belt 43 connected and transmitted is provided between the driving motor and the driving shaft 42, and the other end of the arc shield 3 is sleeved on the rotating cathode body 2. When the arc shield 3 needs to be rotated, the driving motor works, drives the driving shaft 42 to rotate through the belt 43, and then drives the driving wheel 41 to rotate through the driving shaft 42, so that the driving wheel 41 drives the arc shield 3 to rotate synchronously, and realizes the rotation of the arc shield 3 around the rotating cathode body 2.
[0021] like Figure 2 As shown, a driving shaft base 44 is provided in the vacuum chamber 10 , and the driving shaft 42 is arranged on the driving shaft base 44 , which plays a role in protecting the driving shaft 42 and making the driving shaft 42 rotate smoothly.
[0022] like Figure 2As shown, the right connecting seat 1 is arranged on the driving shaft base 44; a driving wheel gear 45 is arranged on the outer side of the driving wheel 41, one end of the driving shaft 42 extends out of the driving shaft base 44, and a driving shaft gear 46 meshing with the driving wheel gear 45 is arranged on the outer side of the extended end of the driving shaft 42, and the transmission rotation between the driving shaft 42 and the driving wheel 41 is realized by the meshing rotation of the driving wheel gear 45 and the driving shaft gear 46; Figure 2 A through hole is provided on the connecting seat 1 for the drive shaft gear 46 to pass through and mesh with the drive wheel gear 45. Figure 2 The drive shaft 42 and the drive shaft gear 46 are not cut along the center.
[0023] like Figure 2 As shown, the rotating cathode body 2 includes a target barrel 21, and end caps 22 for closing the target barrel 21 are respectively provided at both ends of the target barrel 21, and a clamp 23 for locking the end cap 22 on the target barrel 21 is sleeved on the outer side of the end cap 22, and the end caps 22 on both sides are rotatably connected to the connecting seats 1 on both sides, and the target material is arranged on the outer side of the target barrel 21, and the other end of the arc shield 3 is sleeved on the outer side of a clamp 23. When the arc shield 3 rotates with the driving wheel 41, the other end of the arc shield 3 rotates around the clamp 23.
[0024] In this case, the central angle of the opening of the arc-shaped shield 3 ranges from 180 to 240 degrees, and the rotating cathode body 2 can be disassembled and taken out from the opening of the arc-shaped shield 3 .
[0025] In this case, the driving motor is a servo motor, which can accurately control the forward and reverse rotation of the arc shield 3, so that the arc shield 3 can accurately rotate to the front position to block the sputtering area when the rotating cathode body 2 is not working, and can accurately rotate to the back position to expose the sputtering area when the rotating cathode body 2 is working.
[0026] The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. All equivalent structural changes made using the contents of the present invention specification and drawings under the utility model concept, or directly or indirectly applied in other related technical fields are included in the patent protection scope of the present invention.
Claims
1. A rotating cathode with an anti-fouling rotating shield, characterized in that: The invention comprises two connection seats (1) arranged in a vacuum chamber (10), a rotatable rotating cathode body (2) being arranged between the two connection seats (1), an arc-shaped shield (3) being arranged on the outer side of the rotating cathode body (2) and being rotatable around the rotating cathode body (2), and the arc-shaped shield (3) being connected to a rotation driving component (4) for driving the arc-shaped shield (3) to rotate and shield a sputtering area when the rotating cathode body (2) is not working, and for driving the arc-shaped shield (3) to rotate and expose the sputtering area when the rotating cathode body (2) is working.
2. A rotating cathode with an anti-fouling rotating shield according to claim 1, characterized in that: The rotary drive assembly (4) comprises a rotatable drive wheel (41) sleeved on a connecting seat (1) at one side; one end of the arc-shaped shield (3) is connected to the drive wheel (41); a drive shaft (42) connected to the drive wheel (41) for transmission is provided in the vacuum chamber (10); a drive motor is provided outside the vacuum chamber (10); a belt (43) connected to the drive motor and the drive shaft (42) for transmission is provided; and the other end of the arc-shaped shield (3) is sleeved on the rotating cathode body (2).
3. A rotating cathode with an anti-fouling rotating shield according to claim 2, characterized in that: The rotating cathode body (2) comprises a target barrel (21), and end covers (22) for closing the target barrel (21) are respectively provided at both ends of the target barrel (21), and a clamp (23) for locking the end cover (22) on the target barrel (21) is sleeved on the outside of the end cover (22), and the end covers (22) on both sides are respectively rotatably connected to the connecting seats (1) on both sides, and the other end of the arc-shaped shield (3) is sleeved on the outside of a clamp (23).
4. A rotating cathode with an anti-fouling rotating shield according to claim 2, characterized in that: A drive shaft base (44) is provided in the vacuum chamber (10), and the drive shaft (42) is arranged on the drive shaft base (44).
5. A rotating cathode with an anti-fouling rotating shield according to claim 4, characterized in that: A driving wheel gear (45) is provided on the outer side of the driving wheel (41); one end of the driving shaft (42) extends out of the driving shaft base (44); and a driving shaft gear (46) meshing with the driving wheel gear (45) is provided on the outer side of the extended end of the driving shaft (42).
6. The rotary cathode with anti-fouling rotary shield according to claim 4, characterized in that: A connecting seat (1) is arranged on the driving shaft base (44).
7. The rotary cathode with anti-fouling rotary shield according to claim 1, characterized in that: The central angle of the opening of the arc-shaped shield (3) ranges from 180 to 240 degrees.
8. The rotary cathode with anti-fouling rotary shield according to claim 2, characterized in that: The driving motor is a servo motor.