Large forevacuum silicon carbide sintering furnace
By designing a large prevailing silicon carbide sintering furnace and adopting a fully enclosed vacuum furnace type and gas sealing device, the existing equipment has solved the problems of high safety risks, high energy consumption and serious pollution, and achieved low energy consumption and high-quality silicon carbide products production, and safely recycled and utilized exhaust gas.
Patent Information
- Application Number
- CN202421404367.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-19
- Publication Date
- 2025-04-29
- Estimated Expiration
- 2034-06-19
AI Technical Summary
The existing silicon carbide smelting equipment has problems such as high safety risks, high energy consumption and serious pollution. It cannot effectively reduce the energy consumption of the reduction reaction, and cannot safely recover and utilize silicon carbide exhaust gas.
A large prevail-vacuum silicon carbide sintering furnace is designed, adopting a fully enclosed vacuum furnace type, equipped with a gas sealing device, a vacuum pump, a nitrogen pipe and a furnace gas purification device, realizing a high vacuum and gas protection process in the furnace, reducing energy consumption, and safely recovering and utilizing exhaust gas through the exhaust main pipe and drain pipe system.
It has achieved changes and upgraded the structure and quality of silicon carbide products, reduced production energy consumption, improved safety and automation, solved exhaust pollution problems, and promoted the progress of energy-saving and emission reduction technology in the silicon carbide industry.
Smart Images
Figure CN222812139U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon carbide production equipment, in particular to a large-scale pre-vacuum silicon carbide sintering furnace. Background Art
[0002] At present, the domestic silicon carbide smelting is mainly small-scale open-type, with a capacity of about 10,000 KVA and 20,000 KVA, distributed in Gansu, Qinghai, Ningxia and Inner Mongolia. Under the importance and urgency of the ecological environment, many manufacturers have tried various methods of closed silicon carbide furnaces, but due to the limitations of technology, funds and old factories, they all ended in failure. Although some companies use the method of covering the furnace body or adding exhaust furnace walls to recover silicon carbide tail gas, these methods cannot be fully sealed, which is very likely to cause explosions and has high safety risks; some companies install a smoke hood on the upper part of the open silicon carbide furnace to collect tail gas and smoke, filter it, and chemically desulfurize the sulfur dioxide in the composition. These simple devices and technologies cannot fundamentally solve the pollution of smoke and dust. Therefore, it is necessary to develop a large-scale pre-vacuum silicon carbide sintering furnace with a safe and reliable process, a high degree of automation, which can effectively reduce the energy consumption required for the reduction reaction, drive changes and upgrades in the structure and quality of silicon carbide products, safely recycle and utilize silicon carbide tail gas, and promote technological progress in energy conservation and emission reduction in the silicon carbide industry. Utility Model Content
[0003] The purpose of the utility model is to provide a large-scale pre-vacuum silicon carbide sintering furnace with a safe and reliable process, a high degree of automation, which can effectively reduce the energy consumption required for the reduction reaction, drive the change and upgrade of the structure and quality of silicon carbide products, safely recycle and utilize silicon carbide tail gas, and promote the advancement of energy-saving and emission reduction technology in the silicon carbide industry.
[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a large-scale pre-vacuum silicon carbide sintering furnace, comprising a furnace cover and a furnace car, the furnace cover is connected to the furnace foundation through a support, the cross-sectional shape of the middle part of the furnace cover is cylindrical, one end of the furnace cover is set as a furnace door, and the other end is set as a head, and a plurality of reinforcing devices are arranged at equal intervals on the outside of the furnace cover, and a plurality of groups of safety valves, explosion-proof doors, hydrogen meters, pressure gauges, exhaust branch pipes and vent pipes are arranged on the top of the furnace cover, the vent pipe is connected to a 180-degree elbow through a first electric valve, the exhaust branch pipe is connected to an exhaust main pipe through a second electric valve, and the outlet of the exhaust main pipe is connected to a furnace gas purification device; a vacuum pump is arranged on one side of the furnace cover, and the vacuum pump is connected to the furnace cover through a vacuum pipe; a nitrogen pipe is also arranged on the furnace cover, and the inlet of the nitrogen pipe is connected to a nitrogen source; an air sealing device is arranged at the connection between the furnace door and the furnace cover;
[0005] A furnace car supporting platform is arranged at the bottom of the furnace cover, at least two tracks are arranged on the furnace car supporting platform, and a furnace car is movably arranged on the tracks; the furnace car comprises a car chassis, side walls and a top support, the side walls are detachably installed on the left and right sides of the car chassis, the top support is detachably installed between the tops of the two side walls, furnace heads are arranged on the front and rear sides of the car chassis, and the furnace heads are connected to an external power supply through a conductive device; a plurality of groups of walking mechanisms are arranged at the bottom of the car chassis, and a traction device is arranged at one end of the furnace cover, and the traction device drives the furnace car to enter and exit the furnace cover along the track through a steel wire rope.
[0006] The beneficial effects of the utility model are as follows: the utility model adopts a closed pre-vacuum sintering furnace, which is different from the traditional open sintering furnace. It has the characteristics of a fully enclosed vacuum furnace, which can effectively reduce the temperature required for silica evaporation and decomposition, and has low production energy consumption; the device is based on environmental protection and management, which can not only produce high-quality carbon-silicon-based new materials, but also solve the problem of environmental management of conventional sintering furnaces, and provide a technical solution for the management of industrial pollution; at the same time, the device recycles and utilizes tail gas to synthesize other valuable renewable energy, which promotes the extension of the carbon-silicon-based industrial chain, and provides the industry with a new and advanced smelting equipment and a technical demonstration route for energy conservation, environmental protection, and circular economy. The utility model truly breaks through the industry bottleneck of traditional large industries such as kiln smelting, and fundamentally solves the problems of high pollution, high energy consumption, and low quality in the current domestic kiln smelting industry. BRIEF DESCRIPTION OF THE DRAWINGS
[0007] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0008] Figure 2 for Figure 1 A top view of
[0009] Figure 3 for Figure 1 Middle AA section view;
[0010] Figure 4 for Figure 3 Enlarged view of middle part II;
[0011] Figure 5 for Figure 1 Middle BB section view;
[0012] Figure 6 for Figure 5 Enlarged view of middle part I;
[0013] Figure 7 for Figure 3 Enlarged view of middle part III;
[0014] In the figure: 1-support, 2-furnace car support platform, 21-track, 3-furnace car, 31-travel mechanism, 311-wheel, 312-travel shaft, 313-bearing seat, 314-bearing, 315-transparent cover, 316-end cover, 32-car bottom frame, 33-side wall, 34-top support, 4-furnace door, 41-equipment door, 5-gas sealing device, 51-nitrogen ring pipe, 52-nozzle, 6-furnace cover, 7-reinforcement device, 71-reinforcement plate, 72-reinforcement ring, 73- Stress release hole, 8-explosion-proof door, 9-safety valve, 10-first electric valve, 11-vent pipe, 12-elbow, 13-second electric valve, 14-exhaust branch pipe, 15-exhaust main pipe, 16-operating platform, 161-ladder, 171-oil cylinder, 172-oil cylinder support, 173-connecting rod, 174-pillar, 175-swinging arm, 176-fixed arm, 177-guide rail, 18-head, 19-vacuum pump, 191-vacuum pipe, 20-nitrogen pipe. DETAILED DESCRIPTION
[0015] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0016] See also Figure 1-7 The utility model provides a technical solution, a large-scale pre-vacuum silicon carbide sintering furnace, including a furnace cover 6 and a furnace car 3, the furnace cover 6 is connected to the furnace foundation through a support 1, the cross-sectional shape of the middle part of the furnace cover 6 is cylindrical, one end of the furnace cover 6 is set as a furnace door 4, and the other end is set as a head 18, and a plurality of reinforcing devices 7 are arranged at equal intervals on the outside of the furnace cover 6, and a plurality of groups of safety valves 9, explosion-proof doors 8, hydrogen meters, pressure gauges, exhaust branch pipes 14 and vent pipes 11 are arranged on the top of the furnace cover 6, and the vent pipe 11 is connected to a 180-degree elbow 12 through a first electric valve 10, and the exhaust branch pipe 14 is connected to an exhaust main pipe 15 through a second electric valve 13, and the outlet of the exhaust main pipe 15 is connected to a furnace gas purification device; a vacuum pump 19 is arranged on one side of the furnace cover 6, and the vacuum pump 19 is connected to the furnace cover 6 through a vacuum pipe 191; a nitrogen pipe 20 is also arranged on the furnace cover 6, and the inlet of the nitrogen pipe 20 is connected to a nitrogen source; an air sealing device 5 is arranged at the connection between the furnace door 4 and the furnace cover 6;
[0017] A furnace car supporting platform 2 is arranged at the bottom of the furnace hood 6, and at least two tracks 21 are arranged on the furnace car supporting platform 2, and a furnace car 3 is movably arranged on the track 21; the furnace car 3 includes a car bottom frame 32, side walls 33 and a top support 34, the side walls 33 are detachably installed on the left and right sides of the car bottom frame 32, and the top support 34 is detachably installed between the tops of the two side walls 33, and furnace heads are arranged on the front and rear sides of the car bottom frame 32, and the furnace heads are connected to an external power supply through a conductive device; a plurality of groups of walking mechanisms 31 are arranged at the bottom of the car bottom frame 32, and a traction device is arranged at one end of the furnace hood 6, and the traction device drives the furnace car 3 to enter and exit the furnace hood 6 along the track 21 through a steel wire rope.
[0018] Furthermore, the gas sealing device 5 includes a nitrogen ring tube 51 and a nozzle 52. The nitrogen ring tube 51 is arranged at the connection between the furnace door 4 and the furnace hood 6. The inlet of the nitrogen ring tube 51 is connected to the nitrogen source. Several nozzles 52 are evenly arranged on the inner side of the nitrogen ring tube 51 in a circumferential direction, and the outlet of each nozzle 52 points to the furnace core.
[0019] Furthermore, a door opening device is provided on one side of the furnace door 4, and the door opening device includes a cylinder 171, a cylinder support 172, a connecting rod 173, a pillar 174, a rotating arm 175 and a fixed arm 176. The cylinder support 172 and the pillar 174 are respectively fixedly arranged on one side of the furnace hood 6, and the cylinder body of the cylinder 171 is installed on the cylinder support 172. The working end of the cylinder 171 is connected to the connecting rod 173, and the other end of the connecting rod 173 is installed on the pillar 174. A rotating arm 175 is rotatably installed on the pillar 174, and the other end of the rotating arm 175 is connected to the fixed arm 176. The other side of the fixed arm 176 is connected to the furnace door 4. A guide rail 177 for supporting the opening and closing operation of the furnace door 4 is provided at the bottom of the furnace door 4.
[0020] Furthermore, the reinforcing device 7 includes a reinforcing plate 71 and a reinforcing ring 72. The reinforcing ring 72 is connected to the outer wall of the furnace hood 6 through the reinforcing plate 71. A number of stress release holes 73 are evenly arranged circumferentially at the connection between the reinforcing plate 71 and the reinforcing ring 72, and at the connection between the reinforcing plate 71 and the outer wall of the furnace hood 6.
[0021] Furthermore, equipment doors 41 are provided at the ends of the sealing head 18 and the furnace door 4 , and the conductive device enters the furnace cover 6 through the equipment door 41 and is connected to the furnace head.
[0022] Furthermore, the walking mechanism 31 includes two sets of wheels 311 and two pairs of bearing seats 313. The two pairs of bearing seats 313 are respectively connected to the vehicle frame 32. Bearings 314 are installed in the bearing seats 313. A walking shaft 312 is installed between the two bearings 314 by interference fit. The wheels 311 are installed on the walking shaft 312 inside the two bearing seats 313. The inner and outer sides of the two bearings 314 are positioned respectively by a transparent cover 315 and an end cover 316.
[0023] Furthermore, the furnace hood 6 , the furnace door 4 and the end cover 18 are all provided with refractory materials, and the bottom of the furnace car 3 and the lower part of the side wall 33 are all provided with refractory materials.
[0024] Furthermore, an operating platform 16 is provided on the top of the furnace hood 6 , and a ladder 161 is provided on one side of the operating platform 16 .
[0025] The working process of the utility model is as follows:
[0026] After the furnace is loaded, the furnace car 3 is sent into the furnace cover 6, the furnace door 4 is closed, and the nitrogen pipe valve is opened to purge and replace the sintering furnace with nitrogen gas. When the pressure in the furnace rises to a slightly positive pressure, the first electric valve 10 is automatically opened, and the gas in the furnace cover 6 is vented through the vent pipe 11. The replacement is stopped when the oxygen content is reduced to a certain value, and the first electric valve 10 is closed; the vacuum pump 19 is turned on to evacuate the furnace cover 6. When the pressure in the furnace cover 6 reaches a certain vacuum degree, the circuit is connected, and a strong current is passed, and the raw materials begin to heat up. At the same time, the second electric valve 13 is opened to transport the furnace gas to the furnace gas purification system through the exhaust main pipe 15 to keep the pressure of the sintering furnace stable. Petroleum coke and quartz sand react chemically at a temperature of 1600~2700℃ to generate silicon carbide, and the furnace gas is pumped to the furnace gas purification system by the fan. Two furnace cars 3 are set, one for standby and one for smelting. The two furnace cars 3 alternately enter the furnace cover 6 for circulation smelting to ensure the continuous output of the silicon carbide product line and the continuous output of furnace gas.
[0027] After the sintering furnace reacts for one cycle, the current and CO content drop to a certain value, then the power is turned off. After the CO content continues to drop to a certain value, the second electric valve 13 is closed to cut out the tail gas of this sintering furnace to the purification system pipeline. At this time, after the vacuum sintering furnace finishes the reaction, the nitrogen pipe valve is opened to purge and replace the sintering furnace with nitrogen. When the CO content drops to a certain value, the replacement is stopped, the gas sealing device 5 is opened, and then the furnace door 4 is opened to pull out the furnace car 3, and a smelting cycle is completed.
[0028] The utility model has many advantages and features: First, in the fully enclosed furnace cover 6, electrical and gas facilities are complete, and the conversion operations of positive pressure, normal pressure, vacuum and gas protection processes can be flexibly carried out; the gas sealing device 5 isolates the CO in the furnace to prevent CO from escaping and injuring people when the door is opened; the furnace adopts a movable furnace car 3, which can be modified into different furnace structures according to needs, and can be used for the production of silicon carbide, as well as for the smelting and purification of other metal or non-metal products. Secondly, the use of this technology can produce products of different qualities by adjusting the pressure and temperature in the furnace, such as high-purity silicon carbide, high-density silicon carbide, β-type silicon carbide, etc., under the premise of the same raw materials and energy consumption, the added value of the product can be greatly improved; thirdly, the furnace car 3 is scientifically designed, with a high degree of mechanization, low dust emission and a good working environment.
Claims
1. A large pre-vacuum silicon carbide sintering furnace, characterized by: The invention comprises a furnace cover (6) and a furnace car (3), wherein the furnace cover (6) is connected to a furnace foundation through a support (1), the cross-sectional shape of the middle part of the furnace cover (6) is cylindrical, one end of the furnace cover (6) is provided with a furnace door (4), and the other end is provided with a sealing head (18), a plurality of reinforcing devices (7) are provided at equal intervals outside the furnace cover (6), and a plurality of groups of safety valves (9), explosion-proof doors (8), hydrogen meters, pressure gauges, exhaust branch pipes (14) and vent pipes (11) are provided on the top of the furnace cover (6), and the vent pipes (11) are connected to the furnace cover through a first electric valve. (10) is connected to a 180-degree elbow (12); the exhaust branch pipe (14) is connected to the exhaust main pipe (15) through a second electric valve (13); the outlet of the exhaust main pipe (15) is connected to a furnace gas purification device; a vacuum pump (19) is provided on one side of the furnace cover (6); the vacuum pump (19) is connected to the furnace cover (6) through a vacuum pumping pipe (191); a nitrogen pipe (20) is also provided on the furnace cover (6); the inlet of the nitrogen pipe (20) is connected to a nitrogen source; and a gas sealing device (5) is provided at the connection between the furnace door (4) and the furnace cover (6); A furnace car support platform (2) is arranged at the bottom of the furnace cover (6), at least two tracks (21) are arranged on the furnace car support platform (2), and a furnace car (3) is movably arranged on the tracks (21); the furnace car (3) comprises a car bottom frame (32), side walls (33) and a top support (34), the side walls (33) are detachably mounted on the left and right sides of the car bottom frame (32), the top support (34) is detachably mounted between the tops of the two side walls (33), and furnace heads are arranged on the front and rear sides of the car bottom frame (32), and the furnace heads are connected to an external power supply through a conductive device; a plurality of groups of walking mechanisms (31) are arranged at the bottom of the car bottom frame (32), and a traction device is arranged at one end of the furnace cover (6), and the traction device drives the furnace car (3) to enter and exit the furnace cover (6) along the tracks (21) through a steel wire rope.
2. A large pre-vacuum silicon carbide sintering furnace according to claim 1, characterized in that: The gas sealing device (5) comprises a nitrogen ring tube (51) and a nozzle (52). The nitrogen ring tube (51) is arranged at the connection between the furnace door (4) and the furnace cover (6). The inlet of the nitrogen ring tube (51) is connected to a nitrogen source. A plurality of nozzles (52) are evenly arranged in a circumferential direction on the inner side of the nitrogen ring tube (51). The outlet of each nozzle (52) points toward the furnace core.
3. A large pre-vacuum silicon carbide sintering furnace according to claim 1, characterized in that: A door opening device is arranged on one side of the furnace door (4), and comprises a cylinder (171), a cylinder support (172), a connecting rod (173), a support (174), a rotating arm (175) and a fixed arm (176). The cylinder support (172) and the support (174) are respectively fixedly arranged on one side of the furnace cover (6). The cylinder body of the cylinder (171) is mounted on the cylinder support (172). The working end of the cylinder (171) is connected to the connecting rod (173). The other end of the connecting rod (173) is mounted on the support (174). A rotating arm (175) is rotatably mounted on the support (174). The other end of the rotating arm (175) is connected to the fixed arm (176). The other side of the fixed arm (176) is connected to the furnace door (4). A guide rail (177) for supporting the furnace door (4) to open and close is arranged at the bottom of the furnace door (4).
4. The large pre-vacuum silicon carbide sintering furnace according to claim 1, characterized in that: The reinforcing device (7) comprises a reinforcing plate (71) and a reinforcing ring (72); the reinforcing ring (72) is connected to the outer wall of the furnace hood (6) via the reinforcing plate (71); a plurality of stress release holes (73) are evenly arranged in the circumferential direction at the connection between the reinforcing plate (71) and the reinforcing ring (72) and at the connection between the reinforcing plate (71) and the outer wall of the furnace hood (6).
5. The large pre-vacuum silicon carbide sintering furnace according to claim 1, characterized in that: Equipment doors (41) are provided at the ends of the sealing head (18) and the furnace door (4), and the conductive device enters the furnace cover (6) through the equipment door (41) and is connected to the furnace head.
6. The large pre-vacuum silicon carbide sintering furnace according to claim 1, characterized in that: The walking mechanism (31) comprises two sets of wheels (311) and two pairs of bearing seats (313). The two pairs of bearing seats (313) are respectively connected to the vehicle bottom frame (32). A bearing (314) is installed in each of the bearing seats (313). A walking shaft (312) is installed between the two bearings (314) in an interference fit. The wheels (311) are installed on the walking shafts (312) inside the two bearing seats (313). The inner and outer sides of the two bearings (314) are respectively positioned by a transparent cover (315) and an end cover (316).
7. The large pre-vacuum silicon carbide sintering furnace according to claim 1, characterized in that: The furnace hood (6), the furnace door (4) and the end cover (18) are all provided with refractory materials, and the bottom of the furnace car (3) and the lower part of the side wall (33) are all provided with refractory materials.
8. The large pre-vacuum silicon carbide sintering furnace according to claim 1, characterized in that: An operating platform (16) is provided on the top of the furnace cover (6), and a ladder (161) is provided on one side of the operating platform (16).