Polycrystalline silicon core taper detection device

Abstract

The utility model provides a polysilicon silicon core taper detection device, and aims to solve the technical problems of low polysilicon silicon core detection efficiency and inaccurate measurement in the prior art. The apparatus comprises: an electronic device; the acquisition unit is electrically connected with the electronic equipment; wherein the acquisition unit acquires the cone degree of a silicon core and transmits acquired data to the electronic equipment, and the electronic equipment receives the acquired data and judges the acquired data. According to the utility model, the acquisition unit acquires the conicity of the silicon core and transmits the acquired data to the electronic equipment, and the electronic equipment judges the received data so as to judge whether the conicity of the silicon core meets the standard or not, so that whether the grinding degree of the cone of the silicon core is smooth and flat and meets the requirement of the cone or not can be detected; the detection of the silicon core cone is more accurate and normative, and the qualified rate of products is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon production, in particular to a polysilicon core taper detection device. Background Art

[0002] Silicon core is an essential raw material for polysilicon enterprises to produce polysilicon. Silicon core needs to be installed in a reduction furnace for chemical reaction growth to become a qualified silicon product. The two ends of the silicon core are conical in shape and need to be installed in combination with other components to play a role in stable and seamless combination; therefore, whether the cone degree of the silicon core is qualified directly affects the quality of the silicon product after it is finally produced.

[0003] The current silicon core inspection method is not perfect. When inspecting whether the taper of the silicon core is qualified, most of them use vernier calipers and bullet graphite for simple tests; use vernier calipers to detect the length of the silicon core cone, the diameter of the upper and lower ends of the silicon core cone, and use the caliper to manually calculate the results to determine whether the cone is standard; use bullet graphite to make marks, and then visually observe the marks and judge whether the cone is polished. The above inspection method has the following shortcomings: 1. The inspection method remains at the stage of manual inspection and manual calculation, with low efficiency and backward methods; 2. The measurement is not accurate, the test method is too old, and it is mostly based on experience, which cannot meet the requirements of accurate measurement; 3. If the cone is not polished, it will not be detected in time during acceptance, which will directly affect the product quality; 4. The inspection standard is unclear and there is no actual standard data to support it. Summary of the invention

[0004] In view of the above situation, in order to overcome the defects of the prior art, the purpose of the utility model is to provide a polysilicon core taper detection device, which solves the technical problems of low detection efficiency and inaccurate measurement of the prior art polysilicon core.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A polysilicon core taper detection device comprises: an electronic device; a collection unit electrically connected to the electronic device; wherein the collection unit collects the taper of the silicon core and transmits the collected data to the electronic device, and the electronic device receives the collected data and makes judgments on the collected data.

[0007] The utility model collects the taper of the silicon core through a collection unit and transmits the collected data to an electronic device. The electronic device judges the received data to determine whether the taper of the silicon core meets the standard, and can detect whether the polishing degree of the silicon core cone is smooth and flat and meets the cone requirements. The detection of the silicon core cone is more accurate and standardized, and the product qualification rate is effectively improved.

[0008] Optionally, the acquisition unit includes: a detection instrument; a detection probe, whose output end is connected to the input end of the detection instrument via a data line; wherein the output end of the detection instrument is electrically connected to the input end of the electronic device; a signal receiver is provided on the detection probe, and the signal receiver transmits the scanned data to the detection instrument, and the detection instrument receives the signal and transmits the data to the electronic device.

[0009] Optionally, the acquisition unit includes: a detection instrument; a data cable, one end of which is connected to the detection instrument and the other end of which is connected to a connector; a detection probe, which is detachably conductively connected to the connector via a connecting socket; wherein the input end of the detection instrument is electrically connected to the output end of the detection probe, and the output end of the detection instrument is electrically connected to the input end of the electronic device; a signal receiver is provided on the detection probe, and the signal receiver transmits the scanned data to the detection instrument, and the detection instrument receives the signal and transmits the data to the electronic device.

[0010] Optionally, the connector is provided with a connection hole for conductive contact, and the connection seat is adapted to the connection hole and can be plugged into the connection hole.

[0011] Optionally, the acquisition unit includes: a detection instrument; a detection bracket, a detection slot is provided on the upper surface, and a signal receiver is provided on the detection slot; wherein the input end of the detection instrument is electrically connected to the output end of the signal receiver, and the output end of the detection instrument is electrically connected to the input end of the electronic device; the signal receiver transmits the scanned data to the detection instrument, and the detection instrument receives the signal and transmits the data to the electronic device.

[0012] Optionally, the signal receiver adopts 3D scanning or pneumatic principle to receive signals.

[0013] Optionally, the detection probe includes a probe body, a detection hole is opened inside the probe body, and the signal receiver includes a plurality of signal receiving points arranged in the detection hole.

[0014] Optionally, the cross-section of the detection hole is conical or U-shaped.

[0015] Optionally, the detection probe includes a probe body, and the probe body can be placed inside the graphite head. The signal receiver includes a plurality of signal receiving points arranged at equal intervals on the outer wall of the probe body.

[0016] Optionally, the detection device further comprises a detection bracket, on which a detection groove matching the silicon core is provided.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] The utility model collects the taper of the silicon core through a collection unit and transmits the collected data to an electronic device, which judges the received data to determine whether the taper of the silicon core meets the standard, and can detect whether the polishing degree of the silicon core cone is smooth and flat and meets the cone requirements. The detection of the silicon core cone is more accurate and standardized, and the product qualification rate is effectively improved. Moreover, the detection device can detect silicon core cones of different specifications and sizes through settings, and can measure the surface cone structure as well as the internal cone structure. It has a wide range of applications, is flexible and convenient to use, and has high detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 The present invention is a schematic structural diagram of an embodiment of a polysilicon core taper detection device in the present invention.

[0021] Figure 2 This is a schematic diagram of the structure of Example 3.

[0022] Figure 3 It is a structural schematic diagram of the detection bracket in the utility model.

[0023] Figure 4 This is a schematic diagram of the structure of Example 6.

[0024] Figure numerals: 1. electronic device; 2. acquisition unit; 21. detection instrument; 22. data cable; 23. detection probe; 231. probe body; 2311. detection hole; 2321. signal receiving point; 24. connector; 241. connection hole; 25. connection seat; 3. silicon core; 4. graphite head; 5. detection bracket; 51. detection slot. DETAILED DESCRIPTION

[0025] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the embodiments of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0026] In the description of the embodiments of the present utility model application, it needs to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", "end", "side", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present utility model application.

[0027] In the embodiments of the present utility model application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model application can be understood according to the specific circumstances.

[0028] In the embodiments of the utility model application, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them. Moreover, the first feature being "above", "above" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0029] The disclosure below provides many different embodiments or examples for realizing different structures of the embodiments of the utility model application. In order to simplify the disclosure of the embodiments of the utility model application, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the embodiments of the utility model application. In addition, the embodiments of the utility model application can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed.

[0030] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0031] The current silicon core inspection method is not perfect. When inspecting whether the taper of the silicon core is qualified, most of them use vernier calipers and bullet graphite for simple tests; use vernier calipers to detect the length of the silicon core cone, the diameter of the upper and lower ends of the silicon core cone, and use the caliper numbers to manually calculate the results to determine whether the cone is standard; or use bullet graphite to make marks, and then visually observe the marks and judge whether the cone is polished. The above inspection methods have the following shortcomings: 1. The inspection method remains at the stage of manual inspection and manual calculation, with low efficiency and backward methods; 2. The measurement is not accurate, the test method is too old, and it is mostly based on experience, which cannot meet the requirements of accurate measurement; 3. If the cone is not polished, it will not be detected in time during acceptance, which will directly affect the product quality; 4. The inspection standard is unclear and there is no actual standard data to support it.

[0032] The utility model application embodiment provides a polysilicon core taper detection device to solve the above problems. The detection device includes an electronic device and a collection unit electrically connected to the electronic device, the collection unit is used to collect the taper of the silicon core and transmit the collected data to the electronic device, the electronic device analyzes and processes the received data and determines whether the taper of the silicon core is qualified.

[0033] Example 1

[0034] The utility model application embodiment provides a polysilicon core taper detection device. Figure 1 As shown, in this embodiment, the detection device includes an electronic device 1 and a collection unit 2 electrically connected to the electronic device 1, the collection unit is used to collect the taper of the silicon core and transmit the collected data to the electronic device, the electronic device analyzes and processes the received data and determines whether the taper of the silicon core is qualified.

[0035] The acquisition unit 2 includes a detection instrument 21 , a data line 22 and a detection probe 23 .

[0036] The input end of the detection instrument 21 is electrically connected to the detection probe 23 through the data line 22, and the output end of the detection instrument 21 is electrically connected to the input end of the electronic device 1. The detection probe 23 is provided with a signal receiver that can be scanned. The signal receiver transmits the received signal to the detection instrument 21. After receiving the signal, the detection instrument 21 transmits the data to the electronic device 1.

[0037] Optionally, the signal receiver may use 3D scanning technology to receive signals, or may use pneumatic principles to receive signals.

[0038] Optionally, the detection probe 23 can be replaced according to different needs, such as: outside, inside, size, etc. Correspondingly, the detection instrument 21 is compatible with various types and different numbers of signal receiving points, and can achieve compatible connection between different detection probes and the electronic device 1. The detection instrument 21 can be provided with a data line interface, a specification size adjustment button, an inside and outside adjustment button, etc. The electronic device 1 can use a computer, and through the dedicated detection software on the computer, the data can be counted and displayed. The computer is connected to the cone detector, and the detector transmits specific data to the software system.

[0039] Example 2

[0040] The present utility model application embodiment provides a detection probe. Based on embodiment 1, as Figure 1 As shown, in this embodiment, the detection probe 23 includes a probe body 231 and a signal receiver arranged inside the probe body 231 .

[0041] Optionally, a detection hole 2311 is opened inside the probe body 231. The signal receiver includes a plurality of signal receiving points 2321 arranged in the detection hole 2311 at equal intervals.

[0042] Optionally, the cross section of the detection hole 2311 is conical or U-shaped. The signal receiving points 2321 are evenly distributed on the inner wall of the detection hole 2311 of the conical or U-shaped structure.

[0043] Optionally, the cross section of the probe body 231 is also conical or U-shaped.

[0044] Optionally, the outer wall of one end of the probe body 231 close to the data line 22 is rounded.

[0045] When in use, the end of the silicon core 3 is inserted into the detection hole 2311, the detection result is mapped through the signal receiving point 2321 (3D scanning), and then the detection data is transmitted to the computer software for judgment, and the computer terminal displays whether the detection result is qualified.

[0046] Example 3

[0047] The present utility model application embodiment provides a detection probe. Based on embodiment 1, as Figure 2 As shown, in this embodiment, the detection probe 23 includes a probe body 231 and a signal receiver disposed on the probe body 231 .

[0048] Optionally, the diameter of the probe body 231 is smaller than the diameter of the silicon core hole of the graphite head 4, that is, the probe body 231 can be accommodated in the silicon core hole inside the graphite head 4. The signal receiver includes a plurality of signal receiving points 2321 arranged on the outer wall of the probe body 231 at equal intervals.

[0049] Optionally, the probe body 231 is a column with a solid structure.

[0050] When in use, one end of the silicon core 3 is inserted into the silicon core hole of the graphite head 4, and the probe body 231 is inserted into the graphite head 4 away from one end of the silicon core 3. The test result is mapped through the signal receiving point 2321, and then the test data is transmitted to the computer software for judgment. The computer end displays whether the test result is qualified.

[0051] Example 4

[0052] The utility model application embodiment provides a polysilicon core taper detection device. Figure 1~Figure 3 As shown, in this embodiment, the detection device includes an electronic device 1 , a collection unit 2 electrically connected to the electronic device 1 , and a detection bracket 5 .

[0053] The collecting unit 2 is used to collect the taper of the silicon core and transmit the collected signal to the electronic device 1. The electronic device 1 receives the signal, analyzes and processes the signal and determines whether the taper of the silicon core is qualified. The detection bracket 5 is provided with a detection slot 51.

[0054] Optionally, a plurality of detection slots 51 are provided on the detection bracket 5 .

[0055] When in use, the silicon core 3 is placed in the detection groove 51, and the tail vertebra of the silicon core 3 protrudes and extends to the outside of the detection bracket 5, and then the detection probe 23 of the collection unit 2 is used to detect the silicon core 3 exposed outside the detection bracket 5 or the graphite head on the silicon core 3, so that the taper detection of the silicon core is more convenient and quick.

[0056] In this embodiment, the detection probe 23 may be the detection probe described in Embodiment 2 or Embodiment 3.

[0057] Example 5

[0058] The utility model application embodiment provides a polysilicon core taper detection device. Figure 3 As shown, in this embodiment, the detection device includes an electronic device and a collection unit electrically connected to the electronic device, the collection unit is used to collect the taper of the silicon core and transmit the collected data to the electronic device, the electronic device receives the data and determines whether the taper of the silicon core is qualified.

[0059] In this embodiment, the acquisition unit includes a detection instrument and a detection bracket 5, a detection slot 51 is provided on the detection bracket 5, a signal receiver that can be scanned is provided on the detection slot 51, the input end of the detection instrument is electrically connected to the signal receiver, and the output end is electrically connected to the input end of the electronic device, the signal receiver transmits the received signal to the detection instrument, and the detection instrument transmits the data to the electronic device after receiving the signal. The electronic device analyzes and processes the received data and determines whether the taper of the silicon core is qualified. The electronic device is a computer, and the data can be counted and displayed through the special detection software on the computer.

[0060] Optionally, the signal receiver may use 3D scanning technology to receive signals, or may use pneumatic principles to receive signals.

[0061] Optionally, the detection bracket 5 can be a box with an open top, and the detection slot 51 can be a slide rail, which is fixedly installed in the box. A signal receiver is provided on each slide rail, and the signal receiver can be a plurality of signal receiving points evenly distributed on the slide rail.

[0062] When in use, the silicon core 3 is placed in the detection groove 51, and the tail vertebra of the silicon core 3 can protrude and extend to the outside of the detection bracket 5. The detection result is mapped through a signal receiver (3D scanning), and the overall verticality of the silicon core 3 can be measured.

[0063] Example 6

[0064] The utility model application embodiment provides a polysilicon core taper detection device. Figure 4 As shown, in this embodiment, the acquisition unit 2 includes a detection instrument 21, a data line 22, a detection probe 23, a connector 24 and a connection seat 25. The output end of the detection instrument 21 is connected to the input end of the electronic device 1, the detection instrument is provided with a data line interface, one end of the data line 22 is connected to the data line interface, and the other end is connected to the connector 24, the connector 24 is provided with a connection hole 241 for conductive contact, the detection probe 23 is detachably connected to the connector 24 through the connection seat 25, the connection seat 25 is adapted to the connection hole 241, and the connection seat 25 is plugged into the connection hole 241.

[0065] The detection probe 23 is provided with a signal receiver capable of scanning. The signal receiver transmits the received signal to the detection instrument 21 . After receiving the signal, the detection instrument 21 transmits the data to the electronic device 1 .

[0066] Optionally, the signal receiver includes a plurality of signal receiving points 2321 arranged on the detection probe body 231 .

[0067] Optionally, the detection probe 23 can be replaced according to different needs, such as: outside, inside, size, etc. Correspondingly, the detection instrument 21 is compatible with various types and different numbers of signal receiving points, and can achieve compatible connection between different detection probes and the electronic device 1. The detection instrument 21 can be provided with a data line interface, a specification size adjustment button, an inside and outside adjustment button, etc. The electronic device 1 can use a computer, and the data can be counted and displayed through the dedicated detection software on the computer.

[0068] As an implementation scenario, in this scenario, the detection probe 23 is the detection probe described in Example 2, and one end of the detection probe 23 away from the detection hole 2311 is connected to a connection seat 25 that can be in conductive contact with the connection hole 241 on the connector 24.

[0069] As another implementation scenario, in this scenario, the detection probe 23 is the detection probe described in Example 3, and one end of the detection probe 23 is connected to a connection seat 25 that can be in conductive contact with the connection hole 241 on the connector 24 .

[0070] It should be noted that in the above embodiments, the sizes of the acquisition unit 2, silicon core 3, graphite head 4 and detection bracket 5 are schematic and are only used to express the idea of ​​the technical solution, and do not involve the limitation of specific positions and sizes in the actual embodiments. The detection instrument can adjust the cone degree detection of different sizes, can measure the surface cone structure or the inner cone structure, and can also measure whether the central axis of the cone deviates. The electronic equipment uses a computer, and the computer end is designed with special detection software. The computer is electrically connected to the cone detector, and the specific data is transmitted to the software system by the detector. The detector is electrically connected to a specific detection tool (detection probe or detection bracket) for silicon core detection. The detection tool maps the detection results through (3D scanning), and then transmits the data to the computer software for judgment. The computer end displays whether the detection results are qualified. The detection device can detect the taper of the silicon core, the slope of the cone angle, the smoothness of the cone, the diameter of the upper and lower ends of the cone, and the degree of fit with the bullet graphite.

[0071] Parts not described in detail in this embodiment are well-known techniques in the art.

[0072] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of various changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A polysilicon core taper detection device, characterized in that: include: Electronic equipment (1); A collection unit (2) electrically connected to the electronic device (1); The acquisition unit (2) acquires the taper of the silicon core and transmits the acquired data to the electronic device (1); the electronic device (1) receives the acquired data and makes a judgment on the acquired data.

2. The polysilicon core taper detection device according to claim 1, characterized in that: The acquisition unit (2) comprises: Testing instruments (21); A detection probe (23), the output end of which is connected to the input end of the detection instrument (21) via a data line (22); The output end of the detection instrument (21) is electrically connected to the input end of the electronic device (1); the detection probe (23) is provided with a signal receiver, the signal receiver transmits the scanned data to the detection instrument (21), and the detection instrument (21) receives the signal and transmits the data to the electronic device (1).

3. The polysilicon core taper detection device according to claim 1, characterized in that: The acquisition unit (2) comprises: Testing instruments (21); A data line (22), one end of which is connected to the detection instrument (21), and the other end of which is connected to a connector (24); A detection probe (23) is detachably and conductively connected to the connector (24) via a connection base (25); The input end of the detection instrument (21) is electrically connected to the output end of the detection probe (23), and the output end of the detection instrument (21) is electrically connected to the input end of the electronic device (1); the detection probe (23) is provided with a signal receiver, and the signal receiver transmits the scanned data to the detection instrument (21), and the detection instrument (21) receives the signal and transmits the data to the electronic device (1).

4. The polysilicon core taper detection device according to claim 3, characterized in that: The connector (24) is provided with a connection hole (241) for conductive contact, and the connection seat (25) is adapted to the connection hole (241) and can be plugged into the connection hole (241).

5. The polysilicon core taper detection device according to claim 1, characterized in that: The acquisition unit (2) comprises: Testing instruments (21); A detection bracket (5) having a detection slot (51) disposed on its upper surface, wherein a signal receiver is disposed on the detection slot (51); The input end of the detection instrument (21) is electrically connected to the output end of the signal receiver, the output end of the detection instrument (21) is electrically connected to the input end of the electronic device (1), the signal receiver transmits the scanned data to the detection instrument, and the detection instrument (21) receives the signal and transmits the data to the electronic device (1).

6. The polysilicon core taper detection device according to claim 2, 3, 4 or 5, characterized in that: The signal receiver adopts 3D scanning or pneumatic principle to receive signals.

7. The polysilicon core taper detection device according to claim 2, 3 or 4, characterized in that: The detection probe (23) comprises a probe body (231), a detection hole (2311) is provided inside the probe body (231), and the signal receiver comprises a plurality of signal receiving points (2321) arranged in the detection hole (2311).

8. The polysilicon core taper detection device according to claim 7, characterized in that: The cross section of the detection hole (2311) is conical or U-shaped.

9. The polysilicon core taper detection device according to claim 2, 3 or 4, characterized in that: The detection probe (23) comprises a probe body (231), the probe body (231) can be placed inside the graphite head (4), and the signal receiver comprises a plurality of signal receiving points (2321) arranged on the outer wall of the probe body (231).

10. The polysilicon core taper detection device according to claim 2, 3 or 4, characterized in that: The detection device further comprises a detection bracket (5), wherein the detection bracket (5) is provided with a detection groove (51) adapted to the silicon core (3).

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