Sampling cabinet for detecting low-impurity chlorosilane
By setting a sampling drawer and rotary sampling valve stem in the sampling cabinet, the problem of continuous non-closing valve double samples in the prior art is solved, which improves detection accuracy and simplifies operation.
Patent Information
- Application Number
- CN202421150160.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2025-04-29
- Estimated Expiration
- 2034-05-24
AI Technical Summary
The existing sampling cabinet cannot achieve the technical problem of taking double samples without closing the valve continuously, and there is a risk of metal impurities entering the sampling bottle, which affects the accuracy of low-heterochlorosilane detection.
By setting up a sampling drawer in the sampling cabinet box, the two sampling bottles are placed in the drawer at the same time. The sampling valve stem rotated clockwise and counterclockwise can be used to continuously take double samples without closing the valve, and automatically replace the sampling bottle through the visible window.
The function of taking double samples without closing the valve is realized, avoiding metal impurities entering the sampling bottle, improving the accuracy of low-heterochlorosilane detection, and simplifying the operation process.
Smart Images
Figure CN222812615U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of polysilicon production, in particular to a sampling cabinet for detecting low-doped chlorosilane. Background Art
[0002] In the field of polysilicon production, chlorosilane is one of the key raw materials, and its impurity content directly affects the product quality. Therefore, polysilicon companies will monitor low-impurity chlorosilane. At present, the sampling cabinet used by the industry is a separate protective cover with a buckle, and a single bottle is used for sampling. However, due to the long-term corrosion of the protective cover and the buckle by chlorosilane, a large amount of metal impurities remain. After cleaning, some metal impurities will still be introduced, which has little effect on the detection of high-impurity chlorosilane impurities, but has a great impact on the detection of low-impurity chlorosilane impurities, and does not meet the sampling requirements for low-impurity chlorosilane detection. In addition, after a large number of sampling experiments, it has been verified that when other conditions are the same, the switching sampling valve will cause the metal impurity content in the sample to be high, so it is necessary to set up double-bottle sampling. The first sampling bottle is used to take the sample during the switching valve process, and the second sampling bottle is used for the sample in the intermediate stage. However, it is necessary to take two samples continuously without closing the valve, but the current sampling cabinet does not meet the usage requirements. The main reason why continuous double sampling without closing the valve cannot be achieved is that a protective cover is designed around the outside of the sampling valve of the existing sampling cabinet, and there is a buckle under the protective cover. The sampling bottle is inserted upward into the protective cover and fixed with a buckle at the bottom to achieve the purpose of fixing the sampling bottle. At this moment, the mouth of the sampling bottle is directly opposite to the bottom of the sampling needle, so sampling can be achieved. However, because the protective cover is in a fixed position and cannot be moved, and only a single bottle can be placed, continuous double-bottle sampling cannot be achieved.
[0003] Therefore, it is of great significance to study a sampling cabinet for low-impurity chlorosilane detection that can achieve continuous double sampling without closing the valve and can effectively prevent metal impurities from entering the sampling bottle to improve detection accuracy. Utility Model Content
[0004] The purpose of the utility model is to solve the technical problem that the sampling cabinet used in the prior art cannot realize continuous double sampling without closing the valve. By improving the mechanism of the sampling cabinet, the original single-bottle sampling bottle is improved from the structure of setting a buckle through a protective cover to setting a sampling drawer in the sampling cabinet box. Two bottles of sampling bottles are placed in the drawer at the same time and sent into the box. By rotating the sampling valve stem clockwise, the sampling needle discharges liquid into the sampling bottle 1, and observes through the visual window. When the sample in the sampling bottle 1 is more than half, push the drawer to place the sampling bottle 2 under the sampling needle. When the sample in the sampling bottle 2 is more than half, pull the drawer to place the sampling bottle 1 under the sampling needle again, rotate the sampling valve stem counterclockwise, and close the sampling valve. In this way, continuous double sampling without closing the valve can be realized, and the accuracy of the sample is guaranteed while being more portable.
[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:
[0006] A sampling cabinet for detecting low-impurity chlorosilane comprises a cabinet body and a support frame installed below the cabinet body, wherein the cabinet body comprises a cabinet door and a box body; the cabinet door is provided with an opening and a sliding window, wherein the sliding window is slidably installed on the cabinet door, and the sliding window can cover and open the opening; a sampling drawer is installed in the box body for placing sampling bottles, wherein the sampling drawer can be moved out of the box body through the opening, a sampling valve is also installed at the top of the box body, a sampling needle is arranged at the outlet of the pipeline where the sampling valve is located, and the bottom of the sampling needle is directly opposite to the bottle mouth of the sampling bottle; a sampling valve stem is also arranged on the outside of the box body, and the sampling valve is opened or closed by rotating the valve stem.
[0007] As the preferred technical solution:
[0008] In the above-mentioned sampling cabinet for low-isochlorosilane detection, the cabinet and the sampling drawer are installed in a slide rail connection, specifically: slide rails are installed on the outer sides of the two side plates of the sampling drawer, pulleys are installed on the slide rails, and a guide groove is provided on the bottom plate of the cabinet, and the pulley slides in the guide groove;
[0009] The sliding window and the cabinet door are slidably mounted in a manner that a pulley is mounted on the sliding window, a slide rail is mounted on the cabinet door, and the pulley slides in the slide rail.
[0010] In the sampling cabinet for detecting low-impurity chlorosilane as described above, the cabinet door and the cabinet body are hingedly connected, and a door handle is installed on the cabinet door.
[0011] In the sampling cabinet for low-impurity chlorosilane detection as described above, a visual window is also provided on the side panel of the cabinet body for observing the liquid level of the sampling bottle during the sampling process, so as to judge whether it is necessary to push and pull the drawer to replace the sampling bottle.
[0012] In the sampling cabinet for detecting low-impurity chlorosilane as described above, a handle is provided on the sampling drawer, and a push-pull handle is provided on the push-pull window.
[0013] In the sampling cabinet for detecting low-impurity chlorosilane as described above, the sampling valve is connected to the sampling tube, so that the sample to be detected enters the sampling bottle through the sampling needle.
[0014] In the sampling cabinet for detecting low-impurity chlorosilane as described above, the sampling valve is also connected to the sample discharge tube. When the sampling valve is closed before sampling, the sampling tube is connected to the sample discharge tube. After the sample flows through the sampling tube and the sample discharge tube in sequence, the impurities in the sampling tube and the sample discharge tube are discharged to avoid the influence of metal impurities in the tube on the detection accuracy.
[0015] In the sampling cabinet for detecting low-impurity chlorosilane as described above, the sampling valve is also connected to the nitrogen pipe. When sampling is completed, the sampling valve is closed, and the control valve on the nitrogen pipe is opened. The nitrogen flows into the sampling needle to discharge the residual sample to prevent the sample from corroding the sampling needle.
[0016] In the sampling cabinet for detecting low-impurity chlorosilane as described above, a self-sealing bag is provided on the sampling needle to protect the cleanliness of the needle.
[0017] In the sampling cabinet for detecting low-impurity chlorosilane as described above, the sampling needle is 1 to 2 cm above the mouth of the sampling bottle.
[0018] Compared with the prior art, the beneficial effects of the utility model are:
[0019] 1. The sampling cabinet for low-impurity chlorosilane detection of the utility model adopts the form of a sampling drawer, and two sampling bottles are placed at the same time, so that continuous double sampling without closing the valve can be achieved. Compared with the single-bottle detection method of the existing technology, the residual metal impurities on the protective cover and the buckle are prevented from entering the sampling bottle and affecting the detection accuracy, and the influence of the switch sampling valve on the sample accuracy is also avoided. In addition, the setting of the sampling drawer makes the operation more convenient;
[0020] 2. The sampling cabinet for low-impurity chlorosilane detection of the utility model adopts the form of a sampling drawer, which can place two sampling bottles at the same time, and can realize continuous sampling without closing the valve, further ensuring the sampling accuracy.
[0021] 3. In the sampling cabinet for low-impurity chlorosilane detection of the utility model, two sampling bottles are placed in the sampling drawer and marked. The sample obtained from the first sampling bottle is used for replacement, and the sample from the second bottle is used for detection and analysis, which ensures the representativeness of the sample and has higher detection accuracy.
[0022] 4. The sampling cabinet for low-impurity chlorosilane detection of the utility model can conveniently place and take out the sampling bottles in the form of sampling drawers. As long as the personnel are well protected, close contact with chlorosilane can be avoided, thus reducing the harm of chlorosilane to personnel. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0024] Figure 1 This is a schematic diagram of the structure of a sampling cabinet for detecting low-impurity chlorosilane of the utility model;
[0025] Figure 2 This is a schematic diagram of the structure of the sampling cabinet of the utility model;
[0026] Figure 3 This is a schematic diagram of the internal structure of the sampling cabinet of the utility model;
[0027] Reference numerals:
[0028] 1-cabinet; 2-support frame; 3-cabinet door; 301-opening; 302-sliding window; 303-sliding handle; 304-hinge; 305-door handle; 4-cabinet; 401-sampling bottle; 402-handle; 500-sampling valve; 501-sampling needle; 502-injection tube; 503-discharge tube; 504-nitrogen tube; 505-guide slide; 600-sampling valve stem; 700-visible window. DETAILED DESCRIPTION
[0029] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.
[0030] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the products of the present invention are conventionally placed when in use, or are the orientations or positional relationships conventionally understood by those skilled in the art, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0031] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0032] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0033] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0034] The disclosure below provides many different embodiments or examples for realizing different structures of the utility model. In order to simplify the disclosure of the utility model, the components and settings of specific examples are described below. Of course, they are merely examples, and the purpose is not to limit the utility model. In addition, the utility model may repeat reference numbers and / or reference letters in different examples, and such repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the utility model provides various specific examples of processes and materials, but those of ordinary skill in the art may be aware of the application of other processes and / or the use of other materials.
[0035] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.
[0036] The utility model embodiment provides a sampling cabinet for low-isochlorosilane detection, such as Figures 1 to 3 As shown, it includes a cabinet 1 and a support frame 2 installed under the cabinet. The support frame includes 4 support columns, which are respectively located at the four corners under the cabinet. The bottom of the support column is provided with a threaded hole, and the support column is fixed to the ground or other plane by screws. The cabinet 1 includes a cabinet door 3 and a box body 4. The cabinet door 3 and the box body 4 are connected by a hinge 304. Figure 2 As shown, a door handle 305 is also installed on the other opposite side of the cabinet door 3 away from the hinge. The cabinet door can be opened by pulling the door handle 305 to install or repair various components in the box.
[0037] The cabinet door 3 has an opening 301 and a sliding window 302, and a sliding handle 303 is installed on the sliding window 302. The sliding window 302 is slidably installed on the cabinet door 3, wherein the sliding window 302 and the cabinet door 3 are slidably installed in a manner that a pulley is installed on the sliding window 302, and a slide rail is installed on the cabinet door 3. By pushing the sliding handle 303 on the sliding window 302 up and down or left and right, the pulley of the sliding window 302 can slide in the slide rail on the cabinet door 3, so as to cover and open the opening 301;
[0038] A sampling drawer 400 is installed in the box body 4 for placing sampling bottles 401. A handle 402 is also provided on the sampling drawer. The box body 4 and the sampling drawer 400 are installed in a slide rail connection. Specifically, slide rails are installed on the outer sides of the two side panels of the sampling drawer 400, and pulleys are installed on the slide rails. A guide groove 505 is provided on the bottom plate of the box body 4, and the pulley slides in the guide groove. By pulling the handle 402, the sampling drawer 400 can be moved out of the box body 4 through the opening 301.
[0039] A sampling valve 500 is also installed on the top of the box 4. A sampling needle 501 is arranged at the outlet of the pipeline where the sampling valve is located. The lower part of the sampling needle 501 faces the bottle mouth of the sampling bottle 401, and the distance between the needle head and the upper part of the bottle mouth is 1-2 cm.
[0040] A control valve stem 600 is also provided on the outer side of the box body 4 , and the sampling valve 500 is opened or closed by rotating the sampling valve stem 600 .
[0041] The sampling valve 500 is communicated with the sample injection tube 502 and the sample discharge tube 503 , and the sampling valve 500 is also communicated with the nitrogen tube 504 .
[0042] A visual window 700 is also provided on the side panel of the box body 4. The visual window can be made of glass or other transparent materials and is used to observe the liquid level in the sampling bottle 401 during the sampling process, so as to facilitate the change of the positions of the two samples.
[0043] The sampling needle 500 may also be covered with a ziplock bag to protect the cleanliness of the needle.
[0044] As another preferred embodiment of the utility model, a control module and a display module can also be installed on the box body. The control module is electrically connected to the sampling valve, the sampling needle and the control valve stem respectively, and is used to control the opening and closing of the sampling valve and the sampling of the sampling needle. The display module is electrically connected to the sampling needle and is used to display the amount of sample taken in the sampling needle. The setting of the control module and the display module can realize automatic operation. Compared with manual sampling, the control of the accuracy of the sampling amount and the control of the sampling time are more accurate and portable. The utility model can realize both manual sampling and automatic sampling, which is more flexible and functional.
[0045] The process of sampling using the sampling cabinet of the utility model is as follows:
[0046] (1) Open the valves on the sample discharge pipe and the sample inlet pipe connected to the sampling cabinet. Note that you should open the sample discharge pipe valve first and then the sample inlet pipe valve. Open the sliding window, pull the handle of the sampling drawer, and move the sampling drawer through the opening on the cabinet door and out of the cabinet. Place two sampling bottles in the sampling drawer and mark them as the first sampling bottle and the second sampling bottle respectively.
[0047] (2) Open the cabinet door, remove the protective bag on the sampling needle, wipe the sampling needle clean, and close the cabinet door;
[0048] (3) Open the sampling bottle cap, push the handle to push the sampling drawer into the box, and adjust it so that the first sampling bottle is directly below the sampling needle;
[0049] (4) Rotate the sampling valve stem clockwise, and the sampling needle discharges liquid into the first sampling bottle. Observe through the visual window. When the sample in the first sampling bottle is more than half full, push the sampling drawer to place the second sampling bottle under the sampling needle. When the sample in the second sampling bottle is more than half full, pull the sampling drawer to place the first sampling bottle under the sampling needle again, rotate the sampling valve stem counterclockwise, and close the sampling valve.
[0050] (5) Pull out the sampling drawer, cover the sampling bottle cap, open the nitrogen valve on the top of the sampling cabinet, purge the sampling valve, discharge the nitrogen through the sampling needle, discharge the sample remaining in the sampling valve, and send the sample in the second sampling bottle to the testing equipment for detection and analysis of low-impurity chlorosilane;
[0051] (6) Close the valves of the sample inlet and sample discharge pipes connected to the sampling cabinet. Note that you should close the valve of the sample inlet pipe first and then the valve of the sample discharge pipe.
[0052] In the prior art, the detection of low-isocyanuric chlorosilane in samples requires two samplings, the first sampling is used for replacement, and the second sampling is used for analysis. However, the commonly used sampling cabinets adopt single-bottle sampling, that is, the control valve is opened during sampling, and after the sampling needle completes sampling, the control valve is closed, the protective cover and the buckle on the first sampling bottle are removed, and then the second sampling bottle is replaced, and the control valve is opened for the second sampling. Therefore, continuous non-valve sampling cannot be achieved in the whole process, which easily causes inaccurate detection accuracy, and the buckle operation is troublesome during replacement. The sampling cabinet of the utility model is provided with a sampling drawer. During the sampling process, it only needs to be pushed and pulled from the box body to achieve the replacement of the positions of the first sampling bottle and the second sampling bottle, and the sampling of the second sampling bottle is completed. The valve of the control valve does not need to be closed during the whole process, and the continuous non-valve closing is achieved, which ensures the detection accuracy and is more convenient to operate.
Claims
1. A sampling cabinet for low-impurity chlorosilane detection, comprising a cabinet body and a support frame located below the cabinet body, wherein the cabinet body comprises a cabinet door and a box body; characterized in that: The cabinet door has an opening and a sliding window, and the sliding window is slidably installed on the cabinet door. The sliding window can cover and open the opening; a sampling drawer is installed in the box body for placing sampling bottles, and the sampling drawer is moved out of the box body through the opening; a sampling valve is also installed on the top of the box body, and a sampling needle is arranged at the outlet of the pipeline where the sampling valve is located, and the bottom of the sampling needle is directly opposite to the bottle mouth of the sampling bottle; a sampling valve stem is also arranged on the outside of the box body, and the sampling valve is opened or closed by rotating the sampling valve stem.
2. A sampling cabinet for detecting low-isochlorosilane according to claim 1, characterized in that: The box and the sampling drawer are installed in a slide rail connection, specifically: slide rails are installed on the outer sides of the two side plates of the sampling drawer, pulleys are installed on the slide rails, and a guide groove is provided on the bottom plate of the box, and the pulley slides in the guide groove; The sliding window and the cabinet door are slidably mounted in a manner that a pulley is mounted on the sliding window, a slide rail is mounted on the cabinet door, and the pulley slides in the slide rail.
3. A sampling cabinet for detecting low-isochlorosilane according to claim 1, characterized in that: The cabinet door is hinged to the box body, and a door handle is installed on the cabinet door.
4. A sampling cabinet for detecting low-impurity chlorosilane according to claim 1, characterized in that: The side plate of the box body is also provided with a visual window for observing the liquid level of the sampling bottle during the sampling process.
5. A sampling cabinet for detecting low-impurity chlorosilane according to claim 1, characterized in that: A handle is provided on the sampling drawer, and a push-pull handle is provided on the push-pull window.
6. A sampling cabinet for detecting low-impurity chlorosilane according to claim 1, characterized in that: The sampling valve is connected to the sampling tube, and is used for the sample to be detected to enter the sampling bottle through the sampling needle.
7. A sampling cabinet for detecting low-impurity chlorosilane according to claim 6, characterized in that: The sampling valve is also communicated with the sample discharge pipe.
8. A sampling cabinet for detecting low-impurity chlorosilane according to claim 7, characterized in that: The sampling valve is also connected to a nitrogen pipe.
9. A sampling cabinet for detecting low-impurity chlorosilane according to claim 1, characterized in that: A self-sealing bag is set on the sampling needle to protect the cleanliness of the needle.
10. A sampling cabinet for detecting low-impurity chlorosilane according to claim 1, characterized in that: The sampling needle is 1 to 2 cm above the mouth of the sampling bottle.