Detection module

Abstract

The utility model provides a detection module which comprises a front-section pipeline, a purging device, a particle counting device, a plurality of to-be-detected liquid injection devices, an air and liquid discharging box, a rear-section pipeline, a flow meter, a first diaphragm valve and a pH meter, the purging device and the particle counting device are connected with the two ends of the front-section pipeline, and the to-be-detected liquid injection devices are connected to the front-section pipeline; the rear section pipeline comprises a main pipeline and a first auxiliary pipeline, the two ends of the main pipeline are connected with the particle counting device and the gas and liquid discharging box respectively, the two ends of the first auxiliary pipeline are connected with the main pipeline and located between the particle counting device and the gas and liquid discharging box, and the flowmeter is arranged on the main pipeline and located between the two ends of the first auxiliary pipeline; the first diaphragm valve is arranged on the first auxiliary pipeline, and the pH meter is arranged on the rear-section pipeline; therefore, detection of various different chemical liquids to be detected can be integrated, and the interference problem caused by incompatibility of the chemical liquids is avoided.

Description

Technical Field

[0001] The present application relates to the technical field of chemical processes, and more particularly to a detection module capable of detecting a variety of chemicals. Background Art

[0002] The production process of various products often involves chemical processes, and the desired effects are achieved through different chemical reactions. Therefore, different chemical liquids are often used in various chemical processes. In order to ensure that the effect after the chemical reaction can meet the requirements, the concentration, purity and uniformity of various chemical liquids after configuration are the key. Therefore, many manufacturers will use particle counting devices to accurately detect whether the particles in the chemical liquid meet the requirements. However, the current particle counting devices mainly use one-to-one detection, that is, a single particle counting device is used to detect a single chemical liquid, thereby avoiding the use of multiple different chemical liquids in the same particle counting device and causing contamination or interference due to incompatibility.

[0003] In view of this, the applicant has focused on the above-mentioned deficiencies in the prior art, conducted intensive research and applied scientific theories to try to solve the above-mentioned problems, which has become the goal of the applicant's improvement. Utility Model Content

[0004] In view of the above technical problems and defects of the prior art, the main purpose of the present application is to integrate the detection of a variety of different chemical liquids to be tested and avoid the interference problem caused by incompatibility of the chemical liquids to be tested.

[0005] In order to achieve the above technical objectives, the present application provides a detection module, including a front-end pipeline, a purge device, a particle counting device, a plurality of test liquid injection devices, an exhaust and drainage box, a rear-end pipeline, a flow meter, a first diaphragm valve and a pH meter, the purge device is connected to one end of the front-end pipeline, the particle counting device is connected to the other end of the front-end pipeline, each test liquid injection device is respectively connected between the two ends of the front-end pipeline, the rear-end pipeline includes a main pipeline and a first sub-pipeline, the two ends of the main pipeline are respectively connected to the particle counting device and the exhaust and drainage box, the two ends of the first sub-pipeline are connected to the main pipeline and are located between the particle counting device and the exhaust and drainage box, the flow meter is arranged in the main pipeline and is located between the two ends of the first sub-pipeline, the first diaphragm valve is arranged in the first sub-pipeline, and the pH meter is arranged in the rear-end pipeline.

[0006] In one embodiment of the present application, a second diaphragm valve is further included. The second diaphragm valve is disposed in the main pipeline and is located between the first sub-pipeline and the exhaust and liquid discharge tank.

[0007] In one embodiment of the present application, the rear pipeline also includes a second auxiliary pipeline, both ends of which are connected to the main pipeline and are located between the first auxiliary pipeline and the exhaust and drain tank, and the second diaphragm valve is located between the two ends of the second auxiliary pipeline.

[0008] In one embodiment of the present application, a third diaphragm valve is further included. The third diaphragm valve and a pH meter are arranged in the second auxiliary pipeline, and the pH meter is located between the third diaphragm valve and the exhaust and liquid discharge box.

[0009] In one embodiment of the present application, a water injection device is further included, and the water injection device is connected between the two ends of the front section pipeline.

[0010] In one embodiment of the present application, a water injection valve is further included, and the water injection valve is arranged at the connection between the water injection device and the front section pipeline.

[0011] In one embodiment of the present application, a blow valve is further included, and the blow valve is arranged at the connection between the purge device and the front section pipeline.

[0012] In one embodiment of the present application, a plurality of test liquid injection valves are further included, and each test liquid injection valve is respectively arranged at the connection between each test liquid injection device and the front section pipeline.

[0013] In one embodiment of the present application, an exhaust pipeline is also included, and the exhaust pipeline is connected to the exhaust and liquid discharge box.

[0014] In one embodiment of the present application, a liquid drain pipeline is further included, and the liquid drain pipeline is connected to the exhaust and liquid drain box.

[0015] The detection module provided in the present application is connected to a purge device and a plurality of test liquid injection devices via a front-end pipeline, so that it can integrate the detection of a variety of different test chemical liquids and avoid the interference problem of incompatibility of the test chemical liquids. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of pipeline connection in a specific implementation manner of this application;

[0017] Figure 2 Flowchart (I) is used in the specific implementation of this application;

[0018] Figure 3 Flowchart (II) is used in the specific implementation of this application;

[0019] Figure 4 Flowchart (III) is used in the specific implementation of this application;

[0020] Figure 5 Flowchart (IV) is used in the specific implementation of this application;

[0021] Figure 6 Flowchart (V) is used in the specific implementation of this application;

[0022] Figure 7 Flowchart (six) is used in the specific implementation of this application;

[0023] Figure 8 Flowchart (VII) is used in the specific implementation of this application.

[0024] Reference numerals: 10: front section pipeline;

[0025] 20: purge device;

[0026] 21: air blowing valve;

[0027] 30: particle counting device;

[0028] 40: test liquid injection device;

[0029] 41: test liquid injection valve;

[0030] 50: exhaust and liquid discharge tank;

[0031] 51: exhaust pipe;

[0032] 52: Drainage line;

[0033] 60: rear section pipeline;

[0034] 61: Main road;

[0035] 62: first auxiliary pipeline;

[0036] 63: second auxiliary pipeline;

[0037] 70: water injection device;

[0038] 71: water injection valve;

[0039] 91: flow meter;

[0040] 92: first diaphragm valve;

[0041] 93: second diaphragm valve;

[0042] 94: third diaphragm valve;

[0043] 95: pH meter. DETAILED DESCRIPTION

[0044] In the description of the present application, it should be understood that the terms "front", "rear", "left side", "right side", "front end", "rear end", "end", "longitudinal", "lateral", "vertical", "top", "bottom", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present application and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a restriction on the present application.

[0045] As used herein, terms such as "first," "second," "third," "fourth," and "fifth" describe various elements, components, regions, levels, and / or portions, which should not be limited by these terms. These terms may only be used to distinguish one element, component, region, level, or portion from another. Unless the context clearly indicates otherwise, terms such as "first," "second," "third," "fourth," and "fifth" as used herein do not imply a sequence or order.

[0046] The detailed description and technical contents of this application will be described below with the help of drawings. However, the drawings are only for illustrative purposes and are not intended to limit this application.

[0047] The present application provides a detection module for detecting a plurality of different chemical liquids. Figure 1 As shown, the detection module of the present application mainly includes a front-end pipeline 10, a purge device 20, a particle counting device 30, a plurality of test liquid injection devices 40, an exhaust and liquid discharge box 50, a rear-end pipeline 60, a flow meter 91, a first diaphragm valve 92 and a pH meter 95.

[0048] The two ends of the front section pipeline 10 are respectively connected to the purge device 20 and the particle counting device 30. The purge device 20 is used to spray gas (the gas in this embodiment is air, but the present application does not particularly limit the type of gas) into the front section pipeline 10 to purge and remove the residues in the front section pipeline 10. Each test liquid injection device 40 is respectively connected to the front section pipeline 10, and each test liquid injection device 40 is connected between the two ends of the front section pipeline 10. Each test liquid injection device 40 is used to inject a different test chemical liquid into the front section pipeline 10 for detection by the particle counting device 30. The number of the test liquid injection devices 40 is at least two. In this embodiment, the number of the test liquid injection devices 40 is five, but the present application is not limited to five.

[0049] The exhaust and drainage box 50 is used to collect and discharge the gas sprayed by the purge device 20 or the chemical liquid injected by each test liquid injection device 40. Specifically, the detection module of the present application also includes an exhaust pipeline 51 and a drainage pipeline 52. The exhaust pipeline 51 and the drainage pipeline 52 are respectively connected to the exhaust and drainage box 50, so as to discharge the gas or chemical liquid in the exhaust and drainage box 50.

[0050] The rear pipeline 60 mainly includes a main pipeline 61 and a first sub-pipeline 62. The two ends of the main pipeline 61 are respectively connected to the particle counting device 30 and the exhaust and drain tank 50, so as to continuously transmit the gas or chemical liquid passing through the particle counting device 30 to the exhaust and drain tank 50. The two ends of the first sub-pipeline 62 are connected to the main pipeline 61, and the first sub-pipeline 62 is located between the particle counting device 30 and the exhaust and drain tank 50, thereby forming a parallel bypass channel.

[0051] The flow meter 91 is provided in the main pipeline 61 and is located between the two ends of the first auxiliary pipeline 62. The flow meter 91 is used to detect the flow rate of the chemical liquid flowing through, so the flow rate will decrease when the gas or chemical liquid passes through the flow meter 91. The first diaphragm valve 92 is provided in the first auxiliary pipeline 62. The first diaphragm valve 92 can be switched by circuit control to close or conduct the first auxiliary pipeline 62 at its location. The pH meter 95 is provided in the rear pipeline 60, and its specific position will be described later, so it will not be repeated here.

[0052] Thus, whenever a chemical liquid needs to be tested, the chemical liquid to be tested can be injected into the front-end pipeline 10 through the corresponding test liquid injection device 40, so as to be tested by the particle counting device 30, and then flow to the exhaust and drain tank 50 through the rear-end pipeline 60 and discharged through the drain pipeline 52. When another chemical liquid needs to be tested, the residual chemical liquid in the front-end pipeline 10, the particle counting device 30 and the rear-end pipeline 60 can be purged and cleared to the exhaust and drain tank 50 through the purge device 20, and then the chemical liquid to be tested can be injected into the front-end pipeline 10 through another corresponding test liquid injection device 40 for the particle counting device 30 to test. In this way, the detection of multiple different chemical liquids to be tested can be integrated, and the interference problem of incompatibility of the chemical liquids to be tested can be avoided.

[0053] In particular, the particle counter device 30 measures the particles in the liquid sample collected by it through precision sensing technologies such as optics or lasers, thereby accurately measuring the particles in the liquid to ensure product quality. Since the particle counter device 30 has been widely used and applied, a person with ordinary knowledge in the field should be able to understand, use or operate it, so the specific structure, use principle or operation method of the particle counter device 30 will not be repeated here.

[0054] See also Figure 1As shown, the detection module of the present application also includes a water injection device 70, a second diaphragm valve 93 and a third diaphragm valve 94, and the rear section pipeline 60 also includes a second auxiliary pipeline 63. The water injection device 70 is connected between the two ends of the front section pipeline 10, and the water injection device 70 is connected between the purge device 20 and the test liquid injection devices 40. The water injection pipeline is used to inject water (the present application is not limited to tap water or pure water) into the front section pipeline 10 to clean the front section pipeline 10, the particle counting device 30 and the rear section pipeline 60, so as to ensure that there is no residual chemical liquid detected last time. The two ends of the second auxiliary pipeline 63 are connected to the main pipeline 61, and the second auxiliary pipeline 63 is located between the first auxiliary pipeline 62 and the exhaust and drainage box 50, thereby forming a parallel bypass channel. The second diaphragm valve 93 is arranged on the main pipeline 61, and the second diaphragm valve 93 is located between the first auxiliary pipeline 62 and the exhaust and drainage box 50. More specifically, the second diaphragm valve 93 is located between the two ends of the second auxiliary pipeline 63. The third diaphragm valve 94 and the pH meter 95 are both disposed in the second auxiliary pipeline 63. The pH meter 95 is located between the third diaphragm valve 94 and the exhaust and drain tank 50. The pH meter 95 is mainly used to detect the pH value of the water flowing therethrough, so that the residual amount of the chemical liquid in the front-end pipeline 10 and the particle counting device 30 can be known through the measured pH value.

[0055] In this embodiment, a water injection valve 71, a purge valve 21 and a plurality of test liquid injection valves 41 are also included. The water injection valve 71 is arranged at the connection between the water injection device 70 and the front section pipeline 10, and can switch the closure or conduction between the water injection device 70 and the front section pipeline 10 through circuit control. The purge valve 21 is arranged at the connection between the purge device 20 and the front section pipeline 10, and can switch the closure or conduction between the purge device 20 and the front section pipeline 10 through circuit control. Each test liquid injection valve 41 is respectively arranged at the connection between each test liquid injection device 40 and the front section pipeline 10, and can switch the closure or conduction between each test liquid injection device 40 and the front section pipeline 10 through circuit control. However, the present application is not limited to the above, for example, the water injection valve 71 can be integrated in the water injection device 70, the purge valve 21 can be integrated in the purge device 20, and each test liquid injection valve 41 can also be integrated in each test liquid injection device 40.

[0056] Please read next Figures 2 to 8 The figure shows the use process of the detection module of the present application, wherein the dotted lines shown in each figure are used to represent the flow direction and path of gas, water or chemical liquid, which will be explained first.

[0057] See first Figure 2As shown, before any chemical liquid is detected, the air blowing valve 21 and the purge device 20 are opened by circuit control, and the purge device 20 blows gas into the front section pipeline 10, the particle counting device 30 and the rear section pipeline 60 in sequence, so that the residual chemical liquid therein is purged and removed to the exhaust and liquid discharge box 50, and then the gas is discharged through the exhaust pipeline 51, so as to ensure that there is no residue in the front section pipeline 10, the particle counting device 30 and the rear section pipeline 60, and finally the air blowing valve 21 and the purge device 20 are closed by circuit control. In this embodiment, the purge device 20 should continue to purge the gas for at least 1 minute, but the present application is not limited thereto. It should be noted that during the purge process, the third diaphragm valve 94 is in a closed state, and the first diaphragm valve 92 and the second diaphragm valve 93 are both in an open state, so that the gas can smoothly pass through the main pipeline 61 and the first auxiliary pipeline 62 and purge.

[0058] Next Read Figure 3 As shown, the test liquid injection valve 41 and the test liquid injection device 40 corresponding to the chemical liquid to be tested are opened through circuit control, and the test liquid injection device 40 injects the chemical liquid to be tested into the front section pipeline 10, the particle counting device 30, the rear section pipeline 60, the exhaust and drainage box 50 and the drainage pipeline 52, thereby ensuring that the chemical liquid to be tested is completely filled therein. In this embodiment, the test liquid injection device 40 should continue to inject the chemical liquid to be tested for at least 3 minutes, but the present application is not limited to this. It should be noted that during the injection of the chemical liquid, the third diaphragm valve 94 is in a closed state, while the first diaphragm valve 92 and the second diaphragm valve 93 are both in an open state, so that the chemical liquid can smoothly pass through the main pipeline 61 and the first auxiliary pipeline 62 at a large flow rate.

[0059] Please read next Figure 4 As shown, the exhaust and drainage box 50 is closed by circuit control, so that the chemical liquid to be tested fills the front section pipeline 10, the particle counting device 30 and the rear section pipeline 60, and then the corresponding test liquid injection valve 41 and the test liquid injection device 40 are closed, and then the chemical liquid is tested by the particle counting device 30. It should be noted that during the injection of the chemical liquid, the first diaphragm valve 92 and the third diaphragm valve 94 are in a closed state, and only the second diaphragm valve 93 is in an open state, so that the chemical liquid can only pass through the main pipeline 61. This is because the particle counting device 30 requires a stable flow rate and a lower flow rate to detect accurately. It is worth mentioning that if the test result measured by the particle counting device 30 does not meet the standard, the exhaust and drainage box 50, the corresponding test liquid injection valve 41 and the test liquid injection device 40 will be opened by circuit control to re-inject the chemical liquid to be tested, and then repeat the above action to perform a second test.

[0060] Please read next Figure 5As shown, when the detection is completed, the air blowing valve 21, the purge device 20 and the exhaust and liquid discharge box 50 are opened through circuit control, and the purge device 20 blows the gas into the front section pipeline 10, the particle counting device 30, the rear section pipeline 60, the exhaust and liquid discharge box 50 and the exhaust pipeline 51 in sequence, so as to purge and remove the residual chemical liquid therein and discharge the gas from the exhaust pipeline 51, thereby ensuring that there is no residue in the front section pipeline 10, the particle counting device 30 and the rear section pipeline 60, and finally the air blowing valve 21 and the purge device 20 are closed through circuit control. In this embodiment, the purge device 20 should continue to purge the gas for at least 1 minute, but the present application is not limited thereto. It should be noted that during the purge process, the third diaphragm valve 94 is in a closed state, and the first diaphragm valve 92 and the second diaphragm valve 93 are both in an open state, so that the gas can smoothly pass through the main pipeline 61 and the first auxiliary pipeline 62 and purge.

[0061] Please read next Figure 6 As shown, the exhaust and drainage box 50 is switched through circuit control to be connected to the drainage channel, and the water injection valve 71 and the water injection device 70 are opened, and water is injected into the front section pipeline 10, the particle counting device 30, the rear section pipeline 60, the exhaust and drainage box 50 and the drainage pipeline 52 in sequence by the water injection device 70, so as to flush and clean the residual chemical liquid therein and discharge the water from the drainage pipeline 52, so as to ensure that there is no residue in the front section pipeline 10, the particle counting device 30 and the rear section pipeline 60. In this embodiment, the water injection device 70 should continue to inject water at least 3 times, but the present application is not limited thereto. It should be noted that during the purging process, the third diaphragm valve 94 is in a closed state, and the first diaphragm valve 92 and the second diaphragm valve 93 are both in an open state, so that water can smoothly pass through the main pipeline 61 and the first auxiliary pipeline 62 at a large flow rate and perform flushing.

[0062] Please read next Figure 7 As shown, after the flushing for the predetermined number of times or time is completed, the second diaphragm valve 93 is closed and the third diaphragm valve 94 is opened through circuit control, so that water can only pass through the second auxiliary pipeline 63 but cannot pass through the main pipeline 61, so that the pH value of the water is detected by the pH meter 95 on the second auxiliary pipeline 63, and the residual amount of the chemical liquid in the front pipeline 10 and the particle counting device 30 is known through the measured pH value. It is worth mentioning that if the pH value detection result measured by the pH meter 95 does not meet the standard, the second diaphragm valve 93 will be reopened and the third diaphragm valve 94 will be closed through circuit control to continue flushing for the predetermined number of times or time, and then the above action will be repeated to perform the second pH value detection.

[0063] Please read next Figure 8As shown, when the pH value meets the predetermined value, the third diaphragm valve 94 is closed through circuit control, so that water cannot pass through the main pipeline 61 and the second auxiliary pipeline 63, thereby filling the front section pipeline 10 before the water injection device 70, the particle counting device 30, the second diaphragm valve 93 and the rear section pipeline 60 before the third diaphragm valve 94, so that the air in the internal pipeline can be isolated, thereby avoiding chemical reactions that affect subsequent detection. Of course, if other chemical liquids are to be tested, the same method can be repeated. Figures 3 to 7 to detect another chemical liquid, and finally execute Figure 8 Pipeline water conservation.

[0064] The detection module of the present application is connected to the purge device 20 and the plurality of test liquid injection devices 40 via the front-end pipeline 10, so that the detection of a plurality of different test chemical liquids can be integrated and the interference problem of incompatibility of the test chemical liquids can be avoided.

[0065] In summary, the above contents disclosed in this application are intended to enable those with ordinary knowledge in the field to clearly understand the technical contents of this application and implement them accordingly, and are not intended to limit the scope of patent protection of this application. In addition, this application may of course have other unlisted embodiments. Without departing from the spirit and essence of this application, those familiar with the art should be able to evolve various corresponding changes and deformations based on this application, but these corresponding changes and deformations should all fall within the scope of protection of the patent applied for in this application.

Claims

1. A detection module, characterized in that: include: A front section pipeline; a purge device connected to one end of the front section pipeline; a particle counting device connected to the other end of the front section pipeline; A plurality of test liquid injection devices are respectively connected between the two ends of the front section pipeline; an exhaust and liquid drain tank; A rear pipeline, comprising a main pipeline and a first auxiliary pipeline, wherein two ends of the main pipeline are respectively connected to the particle counting device and the exhaust and drain tank, and two ends of the first auxiliary pipeline are connected to the main pipeline and are located between the particle counting device and the exhaust and drain tank; a flow meter, disposed in the main pipeline and located between two ends of the first secondary pipeline; a first diaphragm valve, disposed in the first secondary pipeline; and A pH meter is arranged in the rear section of the pipeline.

2. The detection module as claimed in claim 1, characterized in that: It also includes a second diaphragm valve, which is arranged on the main pipeline and located between the first auxiliary pipeline and the exhaust and liquid discharge box.

3. The detection module as claimed in claim 2, characterized in that: The rear pipeline also includes a second auxiliary pipeline, both ends of which are connected to the main pipeline and are located between the first auxiliary pipeline and the exhaust and liquid discharge box, and the second diaphragm valve is located between the two ends of the second auxiliary pipeline.

4. The detection module as claimed in claim 3, characterized in that: It also includes a third diaphragm valve. The third diaphragm valve and the pH meter are arranged in the second secondary pipeline. The pH meter is located between the third diaphragm valve and the exhaust and liquid discharge box.

5. The detection module according to claim 1, characterized in that: It also includes a water injection device, which is connected between the two ends of the front section pipeline.

6. The detection module as claimed in claim 5, characterized in that: It also includes a water injection valve, which is arranged at the connection between the water injection device and the front section pipeline.

7. The detection module according to claim 1, characterized in that: It also includes a blow valve, which is arranged at the connection between the blow device and the front section pipeline.

8. The detection module according to claim 1, characterized in that: It also includes a plurality of test liquid injection valves, each of which is arranged at the connection between each of the test liquid injection devices and the front section pipeline.

9. The detection module according to claim 1, characterized in that: It also includes an exhaust pipeline, which is connected to the exhaust and liquid discharge box.

10. The detection module according to claim 1, characterized in that: It also includes a liquid discharge pipeline, which is connected to the exhaust and liquid discharge box.

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