Cylindrical mirror adjusting mechanism and semiconductor detection system

Abstract

The utility model provides a cylindrical mirror adjusting mechanism and a semiconductor detection system. The cylindrical mirror adjusting mechanism comprises a mounting seat; one end of the mounting cylinder is rotatably arranged on the mounting seat, and the other end of the mounting cylinder is used for mounting a cylindrical mirror; and the adjusting part is connected to the cylinder wall of the part, arranged on the mounting seat, of the mounting cylinder, and can drive the mounting cylinder to rotate around the central axis under the action of external force, so that the degree of freedom of the cylindrical mirror in the axis rotation direction of the mounting cylinder is adjusted. As the mounting cylinder is a cylindrical structural member, the cylindrical mirror can be driven by the mounting cylinder to go deep into a narrow space for use; the adjusting part is arranged at one end, far away from the cylindrical mirror, of the mounting cylinder, so that the mounting cylinder can be driven to rotate around the central axis of the mounting cylinder by applying external force to the adjusting part at a distance far away from the cylindrical mirror, and the degree of freedom of the cylindrical mirror in the axis rotation direction of the mounting cylinder in a narrow space can be adjusted; therefore, the convenience and accuracy of the cylindrical mirror adjusting process are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical instruments, in particular to a cylindrical mirror adjustment mechanism and a semiconductor detection system. Background Art

[0002] A cylindrical mirror is similar to a spherical lens. Although it uses a curved surface to focus or diverge light like a spherical lens, the two focus in different ways. A cylindrical mirror has the ability to converge or diverge only in one direction and does not affect the light in the vertical direction. A spherical lens focuses or diverges light evenly in a rotationally symmetrical manner. Therefore, in many application scenarios, a spherical lens cannot replace a cylindrical mirror.

[0003] At present, cylindrical mirrors play an important role in the control and shaping of laser beams. They are used to shape laser sheets and to circularize elliptical beams. The existing installation methods of cylindrical mirrors mainly adopt the following two methods: (1) The cylindrical mirror is coaxially installed along the optical axis through a lens holder, but this setting method cannot adjust the cylindrical mirror with multiple degrees of freedom; (2) The cylindrical mirror is coaxially installed along the optical axis through a lens holder in conjunction with a multi-axis micro-motion stage, and the cylindrical mirror can be adjusted with multiple degrees of freedom at the same time; however, this setting method cannot adjust the rotational freedom along the central axis of the cylindrical mirror, and is not suitable for adjusting cylindrical mirrors installed in narrow spaces.

[0004] In view of this, the present utility model is proposed. Utility Model Content

[0005] The utility model provides a cylindrical mirror adjustment mechanism and a semiconductor detection system to solve the technical problem that the existing cylindrical mirror adjustment mechanism cannot adjust the rotational freedom of the cylindrical mirror in a narrow space along the central axis of the cylindrical mirror.

[0006] The first aspect of the utility model provides a cylindrical mirror adjustment mechanism, which includes: a mounting seat; a mounting tube, one end of which is rotatably arranged on the mounting seat, and the other end is free and used to install the cylindrical mirror in the inner cavity of the tube; and an adjustment member, which is connected to the tube wall of the portion of the mounting tube arranged on the mounting seat, and can drive the mounting tube to rotate around its central axis under the action of external force, so as to realize the adjustment of the freedom of the cylindrical mirror in the rotation direction of the axis of the mounting tube.

[0007] In a further embodiment of the present invention, the cylindrical mirror adjustment mechanism also includes: a base, which is detachably connected to an external structural member; and a micro-motion mechanism, which is installed on the base and connected to the mounting seat, and the micro-motion mechanism is configured to drive the mounting seat to move axially along the mounting tube to adjust the position of the mounting seat and the mounting tube in the axial direction.

[0008] In a further embodiment of the present invention, the micro-motion mechanism includes: a fixed part, which is arranged on the base; a telescopic part, which is connected to the mounting seat; and a driving part, which is arranged on the fixed part and connected to the telescopic part, and the driving part is configured to be able to rotate relative to the fixed part to drive the telescopic part to telescopically move along the axial direction of the mounting tube to adjust the position of the mounting seat and the mounting tube in the axial direction.

[0009] In a further embodiment of the present invention, the cylindrical mirror adjustment mechanism further comprises a plurality of fixing components, which are respectively arranged corresponding to different parts of the base. Each of the fixing components comprises: a clamping support, one end of which is used for detachable connection to the external structure and the other end of which is provided with a clamping hole; and a clamping screw, which is passed through the clamping hole and one end of which is used to abut against the base, so that the plurality of clamping screws cooperate with each other to fix the base on the external structure.

[0010] In a further solution of the utility model, the end of the clamping screw abutting against the base is a ball head structure.

[0011] In a further embodiment of the utility model, the free end of the installation tube is provided with a first marking line and a second marking line arranged at intervals. A fixing hole is provided on the tube wall of the installation tube, and the central axis of the fixing hole is parallel to the connecting line of the first marking line and the second marking line. The adjusting member is connected to the installation tube through the fixing hole.

[0012] In a further solution of the utility model, the cylindrical mirror adjustment mechanism also includes: a fastener, which is inserted into the mounting seat and is brought into contact with or out of contact with the mounting tube by changing its relative position with the mounting seat, so as to tighten or loosen the mounting tube.

[0013] In a further solution of the utility model, the mounting seat is provided with a first mounting hole, the first mounting hole is used to accommodate the end of the mounting tube connected to the mounting seat, and the central axis of the first mounting hole is arranged at a preset angle to the mounting surface where the base is located.

[0014] In a further embodiment of the present invention, the mounting seat comprises: a connecting portion connected to the micro-motion mechanism; and a mounting portion protruding from the connecting portion in the radial direction of the mounting tube, and the first mounting hole is provided in the mounting portion through the axial direction. The mounting seat is also provided with a second mounting hole that sequentially penetrates the connecting portion and the inner wall of the first mounting hole, and the second mounting hole is connected to the first mounting hole and is used to install the adjusting member. A portion of the adjusting member protrudes from the second mounting hole and can swing in the second mounting hole under the action of an external force, so as to drive the mounting tube to rotate around its central axis.

[0015] The second aspect of the utility model provides a semiconductor detection system, which comprises a cylindrical mirror and the cylindrical mirror adjustment mechanism described above, wherein the cylindrical mirror is arranged in the installation tube.

[0016] In a further embodiment of the present invention, the cylindrical mirror has a circular or square outline.

[0017] In summary, the cylindrical mirror adjustment mechanism and semiconductor detection system provided by the utility model have at least the following beneficial effects:

[0018] Since the mounting tube is a cylindrical structural member, after the cylindrical mirror is installed in the inner cavity of the mounting tube, the cylindrical mirror can be carried by the mounting tube into a narrow space for use. When the cylindrical mirror is inserted into a narrow space, it is inconvenient to observe the position of the cylindrical mirror. Since the adjusting member of the cylindrical mirror adjustment mechanism is arranged at the end of the mounting tube away from the cylindrical mirror, the mounting tube can be driven to rotate around its central axis by applying an external force to the adjusting member at a distance far from the cylindrical mirror, thereby driving the cylindrical mirror to rotate around the central axis of the mounting tube, thereby achieving the adjustment of the degree of freedom of rotation direction of the mounting tube axis of the cylindrical mirror in a narrow space. At the same time, during the adjustment process of the adjusting member, the rotation angle of the cylindrical mirror can be judged according to the change in the rotation angle of the adjusting member, thereby improving the convenience and accuracy of the cylindrical mirror adjustment process. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the specific implementation or the prior art description. Obviously, the drawings described below are some implementations of the utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 A schematic diagram of the structure of a semiconductor detection system provided by an embodiment of the utility model;

[0021] Figure 2 A schematic diagram of the structure of the mounting tube of the cylindrical mirror adjustment mechanism provided in an embodiment of the utility model;

[0022] Figure 3 A schematic structural diagram of a mounting base for a cylindrical mirror adjustment mechanism provided in an embodiment of the utility model.

[0023] The reference numerals are as follows:

[0024] 100. Cylindrical mirror adjustment mechanism;

[0025] 10. Mounting seat; 11. Connecting portion; 12. Mounting portion; 13. Position limiting boss; A. First mounting hole; B. Second mounting hole; C. Third mounting hole;

[0026] 20, mounting tube; 21, fixing hole; 22, positioning boss; A1, first marking line; A2, second marking line;

[0027] 30. Adjustment parts;

[0028] 40. Base;

[0029] 50. Micro-motion mechanism; 51. Fixed part; 52. Telescopic part; 53. Driving part;

[0030] 60. Fixing assembly; 61. Pressing support; 62. Pressing screw;

[0031] 70. Fasteners;

[0032] 80. Clamping parts;

[0033] 200. Cylindrical mirror. DETAILED DESCRIPTION

[0034] In the description of the present invention, it is necessary to understand that if terms such as "center", "length", "width", "up", "down", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", and "circumferential" appear to indicate the orientation or position relationship, unless otherwise specified, they are understood to be based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0035] In addition, if there is a feature defined as "first" or "second", it is only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Features defined as "first" or "second" may explicitly or implicitly include at least one of the defined features. If there is a description of "plurality", the general meaning is to include at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0036] In this utility model, unless otherwise clearly specified and limited, the terms such as "install", "connect", "connect", "fix" and so on should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection, it can be a direct connection, or it can be an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood according to the specific circumstances.

[0037] In the description of this specification, if the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" appear, it means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples without contradiction.

[0038] Figure 1 A schematic structural diagram of a semiconductor inspection system provided for an embodiment of the present utility model illustrates the structures of the components of a cylindrical mirror adjustment mechanism 100 in the semiconductor inspection system and the specific installation position of a cylindrical mirror 200 on the cylindrical mirror adjustment mechanism 100.

[0039] Reference Figure 1 The semiconductor inspection system provided by the embodiment of the utility model includes a cylindrical mirror adjustment mechanism 100 and a cylindrical mirror 200. The cylindrical mirror 200 is mounted on the cylindrical mirror adjustment mechanism 100 and can achieve multi-degree-of-freedom adjustment under the action of the cylindrical mirror adjustment mechanism 100. The following will describe in detail how to use the cylindrical mirror adjustment mechanism 100 to achieve multi-degree-of-freedom adjustment of the cylindrical mirror 200 in combination with the specific structure of the cylindrical mirror adjustment mechanism 100.

[0040] The cylindrical mirror adjustment mechanism 100 includes a mounting seat 10, a mounting tube 20 and an adjustment member 30. One end of the mounting tube 20 is rotatably arranged on the mounting seat 10, and the other end is free and used to install the cylindrical mirror 200 in its inner cavity. The adjustment member 30 is connected to the wall of the mounting tube 20 at the location where the mounting tube 20 is arranged on the mounting seat 10, and the adjustment member 30 can drive the mounting tube 20 to rotate around its central axis under the action of external force, so as to achieve the adjustment of the cylindrical mirror 200 in the rotation direction of the axis of the mounting tube 20.

[0041] In the cylindrical mirror adjustment mechanism 100 of the utility model, since the installation tube 20 is a cylindrical structure, after the cylindrical mirror 200 is installed in the inner cavity of the installation tube 20, the cylindrical mirror 200 can be carried into a narrow detection space for use through the installation tube 20. Among them, the installation tube 20 with a certain length can be reasonably selected based on the size of the detection space.

[0042] It is understandable that when the cylindrical mirror 200 goes deep into the narrow detection space, it is inconvenient to observe the position of the cylindrical mirror 200. Since the adjustment member 30 of the cylindrical mirror adjustment mechanism 100 is arranged at the end of the mounting tube 20 away from the cylindrical mirror 200, at this time, at a distance far from the cylindrical mirror 200, an external force can be applied to the adjustment member 30 to drive the mounting tube 20 to rotate around its central axis, thereby driving the cylindrical mirror 200 to rotate around the central axis of the mounting tube 20, thereby achieving the adjustment of the cylindrical mirror 200 in the narrow space. The degree of freedom of rotation direction of the mounting tube 20 axis. At the same time, during the adjustment process of the adjustment member 30, the rotation angle of the cylindrical mirror 200 can be determined according to the change in the rotation angle of the adjustment member 30, thereby improving the convenience and accuracy of the adjustment process of the cylindrical mirror 200.

[0043] Further references Figure 1 , the cylindrical mirror adjustment mechanism 100 also includes a base 40 and a micro-motion mechanism 50, wherein the micro-motion mechanism 50 is mounted on the base 40 and connected to the mounting base 10. In other words, the mounting base 10 is arranged on the base 40 through the micro-motion mechanism 50, and the base 40 is used to be detachably connected with the external structural member to achieve two degrees of freedom of movement adjustment of the cylindrical mirror 200 in the horizontal direction (including a first direction and a second direction perpendicular to each other). The "horizontal direction" is the direction of the mounting surface where the base 40 is located, wherein the first direction is the length direction of the base 40 or the mounting surface, and the second direction is the width direction of the base 40 or the mounting surface.

[0044] It can be understood that, based on the detachable connection between the base 40 and the external structural member (such as an optical plate or other structural member), when the base 40 and the external structural member are in an unconnected state, the base 40 can be moved along the first direction and / or the second direction to change the installation position of the base 40 on the external structural member, thereby realizing the adjustment of the two degrees of freedom of movement of the cylindrical mirror 200 in the horizontal direction. In addition, after the base 40 is adjusted and installed in place, the base 40 is connected to the external structural member, so that when the base 40 and the external structural member are in a connected state, the base 40 can be effectively prevented from moving with the mounting seat 10 and the cylindrical mirror 200 thereon during the adjustment process of the adjustment member 30, and thus the rotational freedom adjustment of the cylindrical mirror 200 around the central axis of the mounting tube 20 will not be affected.

[0045] The micro-motion mechanism 50 is mounted on the base 40 and connected to the mounting seat 10. The micro-motion mechanism 50 serves as a driving mechanism of the mounting seat 10, and can drive the mounting seat 10 to move along the axial direction of the mounting tube 20 to adjust the position of the mounting seat 10 and the mounting tube 20 in the axial direction, so as to achieve the adjustment of the degree of freedom of movement of the cylindrical mirror 200 in the axial direction. The "axial direction" mentioned here refers to the axial direction of the mounting tube 20. Preferably, the axial direction of the mounting tube 20 can also coincide with the optical axis of the optical path in the semiconductor detection system, and the axial direction of the cylindrical mirror 200 can also coincide with the axial direction of the mounting tube 20 (that is, the cylindrical mirror 200 and the mounting tube 20 are coaxially mounted).

[0046] In a specific embodiment, the micro-motion mechanism 50 includes a fixed portion 51, a telescopic portion 52, and a driving portion 53. The driving portion 53 is disposed on the fixed portion 51 and connected to the telescopic portion 52, and the driving portion 53 is configured to be able to rotate relative to the fixed portion 51 to drive the telescopic movement of the telescopic portion 52. Further, the driving portion 53 can be connected to the fixed portion 51 by a threaded manner to convert the rotational movement of the driving portion 53 into the telescopic movement of the telescopic portion 52.

[0047] In the cylindrical mirror adjustment mechanism 100, the micro-motion mechanism 50 is fixedly arranged on the base 40 through the fixed part 51, connected to the mounting seat 10 through the telescopic part 52, and the telescopic part 52 is driven to telescopically move along the axial direction of the mounting tube 20 through the rotational movement of the driving part 53 relative to the fixed part 51, so as to adjust the axial position of the mounting seat 10, the mounting tube 20 and the cylindrical mirror 200 thereon in the mounting tube 20, thereby realizing the adjustment of the freedom of movement of the cylindrical mirror 200 in the axial direction.

[0048] In order to ensure the adjustment accuracy of the cylindrical mirror 200 during the adjustment of the freedom of movement in the axial direction, preferably, the driving part 53 can be a differential head structure.

[0049] In an optional embodiment, one of the base 40 and the telescopic part 52 of the micro-motion mechanism 50 may be provided with a slide groove and the other may be provided with a slide rail. The matching between the slide rail and the slide groove provides guidance for the axial telescopic movement of the telescopic part 52 along the mounting tube 20, thereby improving the adjustment accuracy of the freedom of movement of the cylindrical mirror 200 in the axial direction.

[0050] Further references Figure 1 The cylindrical mirror adjustment mechanism 100 further includes a plurality of fixing components 60, which are respectively arranged corresponding to different parts of the base 40, and are used to detachably connect the base 40 to the external structural member. Preferably, the plurality of fixing components 60 are respectively arranged corresponding to different corners of the base 40. Exemplarily, the bottom of the base 40 is a square structure, and a corresponding fixing component 60 is respectively arranged at the four corners.

[0051] Each fixing component 60 includes a clamping support 61 and a clamping screw 62. One end of the clamping support 61 is used for detachable connection to the external structure, and the other end is provided with a clamping hole 611. The clamping screw 62 is passed through the clamping hole 611 and one end is used to abut against the base 40, so that the clamping screws 62 in multiple fixing components 60 cooperate with each other to fix the base 40 on the external structure.

[0052] In an optional embodiment, one end of the clamping screw 62 that abuts against the base 40 is a ball head structure. When the end of the clamping screw 62 with the ball head structure abuts against the base 40, it is equivalent to point contact with the base 40, and in the process of fixing the base 40 by the fixing assembly 60, the micro-movement of the base 11 on the external structural member can be effectively avoided. Compared with the ordinary screw fixing method, the fixing assembly 60 in this embodiment has better stability, which can significantly improve the accuracy of the cylindrical mirror 200 during adjustment.

[0053] Further references Figure 1 The cylindrical mirror adjustment mechanism 100 further includes a fastener 70, which is inserted into the mounting seat 10 and is brought into contact with or out of contact with the mounting tube 20 by changing the relative position of the fastener 70 with the mounting seat 10, so as to tighten or loosen the mounting tube 20. Specifically, the fastener 70 may be a screw, and the mounting seat 10 may be provided with a screw hole, and the relative position between the fastener 70 and the mounting seat 10 may be changed by screwing the fastener 70 into and out of the screw hole.

[0054] Specifically, when it is necessary to adjust the freedom of rotation direction of the cylindrical mirror 200 in the axis of the mounting tube 20 through the adjusting member 30, it is necessary to first rotate the fastener 70 to move it away from the mounting seat 10 until it is separated from the mounting tube 20, so as to achieve loose adjustment of the mounting tube 20, and then adjust it through the adjusting member 30; when the adjusting member 30 adjusts the cylindrical mirror 200 into place, rotate the fastener 70 again to move it close to the mounting seat 10 until it abuts against the mounting tube 20, so as to achieve tight adjustment of the mounting tube 20, and at this time the mounting tube 20 is fixed on the mounting seat 10.

[0055] Further references Figure 1 The cylindrical mirror adjustment mechanism 100 further includes a pressing member 80, which is used to press and fix the cylindrical mirror 200 after the cylindrical mirror 200 is installed in the inner cavity of the installation tube 20, so as to prevent the cylindrical mirror 200 from escaping from the installation tube 20 during the adjustment process. Specifically, the pressing member 80 can be a ring-shaped structure.

[0056] Figure 2 It is a schematic structural diagram of the mounting tube 20 of the cylindrical mirror adjustment mechanism 100 provided in an embodiment of the utility model.

[0057] It is well known that, unlike a spherical lens, the cylindrical mirror 200 has the ability to converge or diverge in only one direction and will not affect the light in the vertical direction. In addition, the cylindrical mirror 200 is generally made of a transparent material and it is not convenient to observe the plane axis direction of the cylindrical mirror 200 (that is, the axis direction of the end face of the cylindrical mirror 200 on its axial direction). Therefore, when installing the cylindrical mirror 200, the cylindrical mirror 200 is required to have an accurate installation direction relative to the light path.

[0058] Reference Figure 2 The free end of the mounting tube 20 is provided with a first marking line A1 and a second marking line A2 which are arranged at intervals. The first marking line A1 and the second marking line A2 are used to determine the installation direction of the cylindrical mirror 200 when the cylindrical mirror 200 is installed. Specifically, when installing the cylindrical mirror 200, the line connecting the first marking line A1 and the second marking line A2 can be used as the installation direction of the cylindrical mirror 200, and then the plane axis direction of the cylindrical mirror 200 can be installed parallel to the installation direction, thereby improving the convenience and accuracy of the installation of the cylindrical mirror 200. For example, the contour shape of the cylindrical mirror 200 can be circular or square. Furthermore, the cylindrical mirror 200 can include a main body and an outer edge portion which protrudes from the main body in the axial direction thereof and is symmetrically arranged, and the center line connecting the two symmetrically arranged outer edge portions is the plane axis direction of the cylindrical mirror 200.

[0059] A fixing hole 21 is provided on the wall of the installation tube 20 at one end away from the first marking line A1 and the second marking line A2, and the central axis of the fixing hole 21 is parallel to the line connecting the first marking line A1 and the second marking line A2, and the adjusting member 30 is connected to the installation tube 20 through the fixing hole 21. Specifically, the adjusting member 30 can be threadedly connected to the installation tube 20 through the fixing hole 21.

[0060] In this embodiment, since the first marking line A1 and the second marking line A2 are provided at one end of the mounting tube 20, and the fixing hole 21 for mounting the adjusting member 30 is provided at the other end, and the central axis of the fixing hole 21 is parallel to the line connecting the first marking line A1 and the second marking line A2, or the two are coplanar, this makes the plane axis of the cylindrical mirror 200 coplanar with the central axis of the fixing hole 21, so that when the adjusting member 30 rotates under the action of an external force, the plane axis direction of the cylindrical mirror 200 will change with the change of the central axis direction of the fixing hole 21, thereby achieving that adjusting the central axis direction of the fixing hole 21 will synchronously adjust the plane axis direction of the cylindrical mirror 200. At the same time, during the adjustment process of the adjusting member 30, the rotation angle of the plane axis of the cylindrical mirror 200 can be determined according to the change of the rotation angle of the adjusting member 30, thereby improving the convenience and accuracy of the adjustment process of the cylindrical mirror 200.

[0061] Reference Figure 1 and Figure 2An optical path is formed inside the mounting tube 20, and a positioning boss 22 is protruding from the inner wall of the optical path. The positioning boss 22 is arranged along the circumference of the mounting tube 20 and surrounds a through hole connected to the optical path, and the cylindrical mirror 200 is arranged coaxially with the through hole. The positioning boss 22 is used to position and install the cylindrical mirror 200 and cooperates with the pressing member 80 to press and fix the cylindrical mirror 200 between the two, so as to prevent the cylindrical mirror 200 from detaching from the mounting tube 20 during the adjustment process.

[0062] Figure 3 A schematic structural diagram of a mounting base 10 of a cylindrical mirror adjustment mechanism 100 provided in an embodiment of the utility model.

[0063] Reference Figure 2 and Figure 3 The mounting seat 10 is provided with a first mounting hole A, which is used to accommodate the end of the mounting tube 20 connected to the mounting seat 10, and the central axis of the first mounting hole A is set at a preset angle to the mounting surface where the base 40 is located.

[0064] It can be understood that when the base 40 is arranged on the external structure, the mounting surface of the base 40 is the surface of the external structure on which the base 40 is mounted. In addition, the "preset angle setting" here means that the central axis of the first mounting hole A is neither parallel to the mounting surface of the base 40 nor perpendicular to the mounting surface of the base 40, but there is a certain angle between the two, that is, the central axis of the mounting tube 20 for mounting the cylindrical mirror 200 is inclined to the mounting surface to form a certain angle.

[0065] During the process of adjusting the rotational freedom of the mounting tube 20 and the cylindrical mirror 200 thereon along the central axis of the mounting tube 20 by the adjusting member 30, since the central axis of the mounting tube 20 on which the cylindrical mirror 200 is mounted is arranged at a certain angle to the mounting surface, the end of the mounting tube 20 arranged on the mounting seat 10 can directly abut against the inner wall of the first mounting hole A, thereby preventing the mounting tube 20 and the cylindrical mirror 200 from sliding downward and falling together during the adjustment process.

[0066] Reference Figure 3 The mounting seat 10 includes a connecting portion 11 and a mounting portion 12. The connecting portion 11 is connected to the telescopic portion 52 of the micro-motion mechanism 50. The mounting portion 12 protrudes from the connecting portion 11 along the radial direction of the mounting tube 20 and is provided with a first mounting hole A along the axial direction for mounting the mounting tube 20.

[0067] Furthermore, the mounting seat 10 is also provided with a second mounting hole B which sequentially penetrates the connecting portion 11 and the inner wall of the first mounting hole A, and the second mounting hole B is connected to the first mounting hole A and is used to install the adjusting member 30. The adjusting member 30 is rod-shaped as a whole, and a part of it extends out of the second mounting hole B and can swing in the second mounting hole B under the action of an external force to drive the mounting tube 20 to rotate around its central axis. The size (such as the length) of the second mounting hole B determines the rotation adjustment range and rotation adjustment accuracy of the adjusting member 30, so the rotation adjustment accuracy of the adjusting member 30 can be further improved by optimizing the parameters of the second mounting hole B.

[0068] The mounting seat 10 also includes a limiting boss 13, which protrudes from the inner wall of the first mounting hole A and is used to limit the depth of the mounting tube 20 inserted into the first mounting hole A, and the second mounting hole B is located axially on the side of the limiting boss 13 close to the mounting tube 20 of the first mounting hole A.

[0069] The mounting seat 10 is also provided with a third mounting hole C communicating with the first mounting hole A, and the third mounting hole C is used to install a fastener 70. Specifically, the fastener 70 can be screwed into the third mounting hole C to move the fastener 70 close to the mounting cylinder 2 until it abuts against the mounting cylinder 20, and the fastener 70 can be screwed out of the third mounting hole C to move the fastener 70 away from the mounting cylinder 20 until it is separated from the mounting cylinder 20, thereby achieving the tightening or loosening adjustment of the mounting cylinder 20. Specifically, the fastener 70 can be a screw, and the third mounting hole C is a screw hole.

[0070] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations of the present invention. Those skilled in the art can change, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A cylindrical mirror adjustment mechanism (100), characterized in that: include: Mounting seat (10); A mounting tube (20), one end of which is rotatably disposed on the mounting seat (10), and the other end of which is free and used for mounting a cylindrical mirror (200) in the inner cavity of the tube; and The adjusting member (30) is connected to the wall of the mounting tube (20) at a position where the mounting tube (20) is arranged on the mounting seat (10), and can drive the mounting tube (20) to rotate around its central axis under the action of an external force, so as to achieve adjustment of the degree of freedom of rotation of the cylindrical mirror (200) in the direction of the axis of the mounting tube (20).

2. The cylindrical mirror adjustment mechanism (100) according to claim 1, characterized in that: The cylindrical mirror adjustment mechanism (100) further comprises: A base (40) detachably connected to the external structural member; and A micro-motion mechanism (50) is mounted on the base (40) and connected to the mounting seat (10), and the micro-motion mechanism (50) is configured to be able to drive the mounting seat (10) to move along the axial direction of the mounting tube (20) so as to adjust the positions of the mounting seat (10) and the mounting tube (20) in the axial direction.

3. The cylindrical mirror adjustment mechanism (100) according to claim 2, characterized in that: The micro-motion mechanism (50) comprises: A fixing part (51) is arranged on the base (40); A telescopic portion (52) connected to the mounting seat (10); and A driving portion (53) is arranged on the fixed portion (51) and connected to the telescopic portion (52), and the driving portion (53) is arranged to be able to rotate relative to the fixed portion (51) to drive the telescopic portion (52) to telescopically move along the axial direction of the mounting tube (20) to adjust the positions of the mounting seat (10) and the mounting tube (20) in the axial direction.

4. The cylindrical mirror adjustment mechanism (100) according to claim 2, characterized in that: The cylindrical mirror adjustment mechanism (100) further comprises a plurality of fixing components (60), wherein the plurality of fixing components (60) are respectively arranged corresponding to different parts of the base (40), and each of the fixing components (60) comprises: A clamping support (61), one end of which is used for detachable connection to the external structural member and the other end of which is provided with a clamping hole (611); and A clamping screw (62) is inserted into the clamping hole (611) and one end of which is used to abut against the base (40), so that a plurality of the clamping screws (62) cooperate with each other to fix the base (40) on the external structural component.

5. The cylindrical mirror adjustment mechanism (100) according to claim 4, characterized in that: One end of the clamping screw (62) abutting against the base (40) is a ball head structure.

6. The cylindrical mirror adjustment mechanism (100) according to any one of claims 1 to 5, characterized in that: The free end of the installation tube (20) is provided with a first marking line (A1) and a second marking line (A2) which are arranged at intervals; A fixing hole (21) is provided on the wall of the installation cylinder (20), and a central axis of the fixing hole (21) is parallel to a line connecting the first marking line (A1) and the second marking line (A2); The adjusting member (30) is connected to the mounting tube (20) through the fixing hole (21).

7. The cylindrical mirror adjustment mechanism (100) according to any one of claims 1 to 5, characterized in that: The cylindrical mirror adjustment mechanism (100) further comprises: The fastener (70) is inserted through the mounting seat (10) and is brought into contact with or out of contact with the mounting tube (20) by changing its relative position with the mounting seat (10), thereby adjusting the mounting tube (20) to be tightened or loosened.

8. The cylindrical mirror adjustment mechanism (100) according to claim 2, characterized in that: The mounting seat (10) is provided with a first mounting hole (A), the first mounting hole (A) being used to accommodate the end of the mounting tube (20) connected to the mounting seat (10), and the central axis of the first mounting hole (A) is arranged at a preset angle with the mounting surface where the base (40) is located.

9. The cylindrical mirror adjustment mechanism (100) according to claim 8, characterized in that: The mounting seat (10) comprises: a connecting portion (11) connected to the micro-motion mechanism (50); and A mounting portion (12) protrudes from the connecting portion (11) along the radial direction of the mounting tube (20), and the first mounting hole (A) is provided through the mounting portion (12) along the axial direction; The mounting seat (10) is further provided with a second mounting hole (B) which sequentially passes through the connecting portion (11) and the inner wall of the first mounting hole (A); the second mounting hole (B) is communicated with the first mounting hole (A) and is used for mounting the adjusting member (30); A portion of the adjusting member (30) extends out of the second mounting hole (B) and can swing in the second mounting hole (B) under the action of an external force, so as to drive the mounting tube (20) to rotate around its central axis.

10. A semiconductor testing system, characterized in that: It comprises a cylindrical mirror (200) and a cylindrical mirror adjustment mechanism (100) according to any one of claims 1 to 9, wherein the cylindrical mirror (200) is arranged in the mounting tube (20).

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