Double-station transverse moving type cleaning device

Abstract

The utility model discloses a double-station transverse moving type cleaning device, and relates to the technical field of semiconductor substrate material manufacturing, and the double-station transverse moving type cleaning device comprises a moving plate, a driver and a spraying assembly; the driver is connected with the moving plate; the moving plate is provided with two fixing assemblies which are arranged in a spaced mode in the first horizontal linear direction. Each fixing assembly comprises two jigs; the number of the spraying assemblies is two. Obliquely fixing the substrate slice by utilizing a jig, and enabling a first surface, close to the preset surface, of the substrate slice to be obliquely downwards arranged and a second surface, far away from the preset surface, of the substrate slice to be obliquely upwards arranged; the first spraying pipe and the second spraying pipe are arranged, so that the first face and the second face of the substrate piece have certain spraying cleaning angles, the first spraying pipe and the second spraying pipe can be used for synchronously cleaning the first face and the second face of the substrate piece, double-station cleaning operation can be achieved, and efficiency is further improved. The driver is used for driving the moving plate to move in a reciprocating mode, then the substrate slice on the fixing assembly is driven to move in a reciprocating mode, dynamic spraying cleaning is achieved, and the cleaning effect is further improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to a double-station lateral cleaning device. Background Art

[0002] Indium phosphide substrates have a wide range of applications in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other RF devices. RF devices made using indium phosphide substrates have demonstrated excellent performance in satellite, radar and other application scenarios. They are highly competitive in the RF front end of radar and communication systems, analog / mixed signal wide-bandwidth circuits, and are suitable for applications such as high-speed data processing and high-precision wide-bandwidth A / D conversion. It can be seen that indium phosphide substrates are expected to become the mainstream substrate material for RF devices.

[0003] In the manufacture of indium phosphide substrate materials, the polished indium phosphide substrate sheet needs to be cleaned, and the existing cleaning methods mainly include spray cleaning or immersion cleaning. Among them, the devices used for spray cleaning are mostly single-sided cleaning. After completing the cleaning operation of one side of the substrate sheet, it is necessary to switch to the other side for cleaning. The operation is cumbersome and the cleaning efficiency is low. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a double-station transverse cleaning device to solve the technical problems of the existing single-sided cleaning method, such as complicated operation and low cleaning efficiency.

[0005] In order to achieve the above technical purpose, the present application provides a double-station transverse cleaning device, including a moving plate, a driver and a spray assembly;

[0006] The driver is connected to the moving plate and is used to drive the moving plate to move along a first horizontal straight line direction;

[0007] The movable plate is provided with two fixed components spaced apart along the direction of the first horizontal straight line;

[0008] Each of the fixing components includes two fixtures;

[0009] The two jigs are spaced apart along a second horizontal straight line direction perpendicular to the first horizontal straight line direction, and are symmetrically arranged relative to a preset plane perpendicular to the second horizontal straight line direction;

[0010] The fixture is used to fix the substrate sheet in an inclined manner, so that the first surface of the substrate sheet close to the preset surface is inclined downward, and the second surface of the substrate sheet away from the preset surface is inclined upward;

[0011] There are two spray assemblies, which are spaced apart along the first horizontal straight line direction, and can spray and clean the substrate sheets fixed by the two fixing assemblies one by one;

[0012] Each of the spray assemblies comprises a first spray pipe and a second spray pipe;

[0013] The first spray pipe is vertically arranged above the movable plate, and its central axis coincides with the preset surface;

[0014] The first spray pipe is provided with a plurality of first spray holes for spraying and cleaning the first surface of the substrate sheet located on the fixture;

[0015] The second spray pipe is connected to the first spray pipe and is provided with a plurality of second spray holes for spraying and cleaning the second surface of the substrate sheet located on the fixture.

[0016] Further, the driver is a linear slide;

[0017] The slider of the linear slide is connected to the bottom of the moving plate.

[0018] Further, the second spray pipe is vertically connected to an end of the first spray pipe away from the movable plate, and is distributed in a T-shape with the first spray pipe;

[0019] The first spray hole is provided on the outer peripheral wall of the first spray pipe;

[0020] The second spray hole is arranged at the bottom of the second spray pipe.

[0021] Further, the first spray pipe is connected to the second spray pipe;

[0022] The second spray pipe is provided with a first pipe joint.

[0023] Furthermore, each of the spray assemblies also includes a spray bracket;

[0024] The spray bracket is connected to the second spray pipe.

[0025] Further, the spray bracket includes two third spray pipes;

[0026] The two third spray pipes are symmetrically arranged relative to the first spray pipe, and are respectively connected and fixed to the second spray pipe;

[0027] A plurality of third spray holes for spraying and cleaning the second surface of the substrate sheet on the fixture are arranged on one side surface of the two third spray pipes.

[0028] Furthermore, the fixture is provided with an inclined slot for inserting the substrate sheet.

[0029] Furthermore, there are two card slots on the fixture, and they are arranged at intervals.

[0030] Further, the fixture includes a connecting portion and a supporting portion;

[0031] The connecting portion is fixedly connected to the movable plate;

[0032] There are two supporting parts, which are arranged on the connecting part at intervals;

[0033] Each of the supporting parts is respectively provided with a slot.

[0034] Further, the connecting portion is a U-shaped plate structure;

[0035] The supporting portion is a convex block structure, which is integrally formed with the connecting portion.

[0036] It can be seen from the above technical scheme that the double-station transverse cleaning device designed in the present application uses a fixture to tilt and fix the substrate sheet, and makes the first surface of the substrate sheet close to the preset surface tilted downward, and the second surface away from the preset surface tilted upward; so that the first surface and the second surface of the substrate sheet have a certain spray cleaning angle, so that the first surface and the second surface of the substrate sheet can be cleaned synchronously by the first spray pipe and the second spray pipe; at the same time, two fixed components and spray components are set, and they correspond one to one, which can realize double-station cleaning operations and further improve efficiency; and, a driver is used to drive the movable plate to move back and forth, thereby driving the substrate sheet on the fixed component to move back and forth, realizing dynamic spray cleaning, and further improving the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0038] Figure 1 A three-dimensional diagram of a double-station transverse cleaning device provided in this application;

[0039] Figure 2 A three-dimensional diagram of a spray assembly of a double-station transverse cleaning device provided in the present application;

[0040] Figure 3 A three-dimensional diagram of the cooperation between a fixture and a substrate sheet of a double-station lateral cleaning device provided in the present application;

[0041] In the figure: 1. movable plate; 2. driver; 3. fixture; 30. slot; 31. connecting part; 32. supporting part; 41. first spray pipe; 411. first spray hole; 42. second spray pipe; 421. second spray hole; 422. first pipe joint; 43. third spray pipe; 431. third spray hole; 432. second pipe joint; 5. substrate sheet. DETAILED DESCRIPTION

[0042] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of them. All other embodiments obtained by ordinary technicians in this field without creative work based on the embodiments in the embodiments of the present application are within the scope of protection of the embodiments of the present application.

[0043] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0044] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0045] The embodiment of the present application discloses a double-station lateral moving cleaning device.

[0046] See also Figure 1 as well as Figure 2 , an embodiment of a double-station lateral cleaning device provided in the embodiments of the present application includes:

[0047] Moving plate 1, driver 2 and spray assembly.

[0048] The driver 2 is connected to the moving plate 1 and is used to drive the moving plate 1 to move along a first horizontal straight line direction.

[0049] The movable plate 1 is provided with two fixed components spaced apart along a first horizontal straight line direction; each fixed component includes two fixtures 3; the two fixtures 3 of each fixed component are spaced apart along a second horizontal straight line direction perpendicular to the first horizontal straight line direction, and are symmetrically arranged relative to a preset plane perpendicular to the second horizontal straight line direction.

[0050] The fixture 3 is used to fix the substrate sheet 5 at an angle, so that the first surface of the substrate sheet 5 close to the preset surface is tilted downward, and the second surface away from the preset surface is tilted upward; if the first surface is the back surface, then the second surface is correspondingly the front surface.

[0051] There are two spray assemblies, which are spaced apart along the first horizontal straight line direction, and can spray and clean the substrate sheets 5 fixed by the two fixing assemblies one by one.

[0052] Each spray assembly includes a first spray pipe 41 and a second spray pipe 42; the first spray pipe 41 is vertically arranged above the movable plate 1, and its central axis coincides with the preset surface; the width of the gap space between the substrate sheets 5 arranged on the two symmetrically arranged fixtures 3 should be greater than the width of the first spray pipe 41 to ensure that the movable plate 1 will not be interfered by the first spray pipe 41 when moving.

[0053] The first spray pipe 41 is provided with a plurality of first spray holes 411 for spray cleaning the first surface of the substrate sheet 5 located on the fixture 3; the second spray pipe 42 is connected to the first spray pipe 41 and is provided with a plurality of second spray holes 421 for spray cleaning the second surface of the substrate sheet 5 located on the fixture 3.

[0054] The substrate sheet 5 of the present application may be inclined at an angle of 45° or other angles, so that the first surface and the second surface have a certain spray cleaning angle, ensuring that they can be sprayed and cleaned by the first spray pipe 41 and the second spray pipe 42 at the same time.

[0055] The double-station transverse cleaning device designed in the present application uses a fixture 3 to tilt and fix the substrate sheet 5, and makes the first surface of the substrate sheet 5 close to the preset surface tilted downward, and the second surface away from the preset surface tilted upward; so that the first surface and the second surface of the substrate sheet 5 have a certain spray cleaning angle, so that the first surface and the second surface of the substrate sheet 5 can be synchronously cleaned by the first spray pipe 41 and the second spray pipe 42; at the same time, two fixed components and spray components are set, and they correspond one to one, which can realize double-station cleaning operations and further improve efficiency; and the driver 2 is used to drive the movable plate 1 to move back and forth, thereby driving the substrate sheet 5 on the fixed component to move back and forth, realizing dynamic spray cleaning, and further improving the cleaning effect.

[0056] In the present application, the movable plate 1 , the fixture 3 , the first spray pipe 41 , and the second spray pipe 42 can all be made of PEEK material, without specific limitation.

[0057] The above is the first embodiment of a double-station lateral moving cleaning device provided in the embodiment of the present application. The following is the second embodiment of a double-station lateral moving cleaning device provided in the embodiment of the present application. For details, please refer to Figures 1 to 3 .

[0058] Based on the solution of the above embodiment 1:

[0059] Furthermore, if Figure 1 As shown, the driver 2 can be a linear slide (such as a screw slide). Specifically, the slider of the linear slide is connected to the bottom of the moving plate 1.

[0060] Of course, the driver 2 may also be an electric push rod or a telescopic cylinder, without any specific limitation.

[0061] Furthermore, if Figure 1 as well as Figure 2 As shown, the second spray pipe 42 is vertically connected to the end of the first spray pipe 41 away from the movable plate 1, and is distributed in a T shape with the first spray pipe 41; the length of the second spray pipe 42 can cover the entire movable plate 1 in the first horizontal straight line direction, or at least can cover the two symmetrically arranged fixtures 3 of the fixed component, ensuring that the substrate sheets 5 on the two fixtures 3 can be sprayed and cleaned at the same time.

[0062] The first spray holes 411 are disposed on the outer peripheral wall of the first spray pipe 41 and are evenly distributed; the second spray holes 421 are disposed on the bottom of the second spray pipe 42 and are evenly distributed.

[0063] Furthermore, if Figure 2 As shown, the first spray pipe 41 and the second spray pipe 42 are designed to be connected, and a first pipe joint 422 is provided on the second spray pipe 42; it is possible to achieve that the two spray pipes share one pipe joint, thereby reducing the number of joints, and the first pipe joint 422 is used to connect the cleaning liquid supply source; of course, the first pipe joint 422 can also be provided on the first spray pipe 41 without limitation.

[0064] Furthermore, if Figure 2 As shown, in order to fix the first spray pipe 41 and the second spray pipe 42 , each spray assembly further includes a spray bracket; the spray bracket is connected to the second spray pipe 42 .

[0065] Furthermore, if Figure 2As shown, the spray bracket is designed to include two third spray pipes 43; the two third spray pipes 43 are symmetrically arranged relative to the first spray pipe 41, and are respectively connected and fixed to the second spray pipe 42; a plurality of third spray holes 431 for spraying and cleaning the second surface of the substrate sheet 5 on the fixture 3 are provided on one side surface of the two third spray pipes 43.

[0066] Two third spray pipes 43 are used to form a spray bracket, which not only meets the supporting and fixing function, but also can spray and clean the substrate sheet 5, further improving the cleaning effect; second pipe joints 432 can be respectively provided on the third spray pipes 43 for connecting to a supply source of cleaning liquid.

[0067] Furthermore, if Figure 3 As shown, in order to fix the substrate sheet 5, the fixture 3 is provided with a slot 30 which is inclined and for the substrate sheet 5 to be inserted.

[0068] Furthermore, if Figure 3 As shown, there are two card slots 30 on the fixture 3 , and they are arranged at intervals; the design of the double card slots 30 at intervals can better fix the substrate sheet 55 .

[0069] Furthermore, if Figure 3 As shown, the structural design of the fixture 3 includes a connecting portion 31 and a supporting portion 32 .

[0070] The connecting portion 31 is fixedly connected to the movable plate 1 , and there are two supporting portions 32 , which are arranged on the connecting portion 31 at intervals; taking the design of two card slots 30 as an example, then each supporting portion 32 is provided with a card slot 30 .

[0071] Furthermore, if Figure 3 As shown, the connecting portion 31 is a U-shaped plate structure, which meets certain strength requirements while saving manufacturing materials.

[0072] The support portion 32 is a convex block structure, which is integrally formed with the connecting portion 31, thereby reducing assembly steps and making production more convenient.

[0073] Working principle:

[0074] 1. Manually install four substrate sheets 5 onto four jigs 3 on the moving plate 1;

[0075] 2. The driver 2 drives the movable plate 1 to move back and forth, thereby driving the fixture 3 and the substrate sheet 5 to move back and forth;

[0076] 3. Connect the first pipe joint 422 and the second pipe joint 432 so that the first spray pipe 41 , the second spray pipe 42 and the third spray pipe 43 spray cleaning liquid to spray and clean the first surface and the second surface of the substrate sheet 5 .

[0077] The above is a detailed introduction to a double-station transverse cleaning device provided in the present application. For a person skilled in the art, according to the idea of ​​the embodiments of the present application, there may be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A double-station lateral cleaning device, characterized in that: It comprises a moving plate (1), a driver (2) and a spray assembly; The driver (2) is connected to the movable plate (1) and is used to drive the movable plate (1) to move along a first horizontal straight line direction; The movable plate (1) is provided with two fixed components spaced apart along the direction of the first horizontal straight line; Each of the fixing components comprises two fixtures (3); The two jigs (3) are spaced apart along a second horizontal straight line direction perpendicular to the first horizontal straight line direction, and are symmetrically arranged relative to a preset plane perpendicular to the second horizontal straight line direction; The jig (3) is used to fix the substrate sheet (5) in an inclined manner, so that a first surface of the substrate sheet (5) close to the preset surface is arranged inclined downward, and a second surface of the substrate sheet (5) away from the preset surface is arranged inclined upward; There are two spray assemblies, which are arranged at intervals along the first horizontal straight line direction, and can spray and clean the substrate sheets (5) fixed by the two fixing assemblies one by one; Each of the spray assemblies comprises a first spray pipe (41) and a second spray pipe (42); The first spray pipe (41) is vertically arranged above the movable plate (1), and its central axis coincides with the preset surface; The first spray pipe (41) is provided with a plurality of first spray holes (411) for spraying and cleaning the first surface of the substrate sheet (5) located on the fixture (3); The second spray pipe (42) is connected to the first spray pipe (41) and is provided with a plurality of second spray holes (421) for spraying and cleaning the second surface of the substrate sheet (5) located on the fixture (3).

2. A double-station lateral cleaning device according to claim 1, characterized in that: The driver (2) is a linear slide; The slider of the linear slide is connected to the bottom of the movable plate (1).

3. A double-station lateral cleaning device according to claim 1, characterized in that: The second spray pipe (42) is vertically connected to an end of the first spray pipe (41) away from the movable plate (1), and is arranged in a T-shape with the first spray pipe (41); The first spray hole (411) is arranged on the outer peripheral wall of the first spray pipe (41); The second spray hole (421) is arranged at the bottom of the second spray pipe (42).

4. A double-station lateral cleaning device according to claim 3, characterized in that: The first spray pipe (41) is connected to the second spray pipe (42); The second spray pipe (42) is provided with a first pipe joint (422).

5. A double-station lateral cleaning device according to claim 3, characterized in that: Each of the spray assemblies further includes a spray bracket; The spray bracket is connected to the second spray pipe (42).

6. A double-station lateral cleaning device according to claim 5, characterized in that: The spray bracket comprises two third spray pipes (43); The two third spray pipes (43) are symmetrically arranged relative to the first spray pipe (41), and are respectively connected and fixed to the second spray pipe (42); A plurality of third spray holes (431) for spraying and cleaning the second surface of the substrate sheet (5) on the fixture (3) are provided on one side surface of the two third spray pipes (43).

7. A double-station lateral cleaning device according to claim 1, characterized in that: The jig (3) is provided with an inclined slot (30) for inserting the substrate sheet (5).

8. A double-station lateral cleaning device according to claim 7, characterized in that: There are two clamping slots (30) on the fixture (3), which are arranged at intervals.

9. A double-station lateral cleaning device according to claim 8, characterized in that: The fixture (3) comprises a connecting portion (31) and a supporting portion (32); The connecting portion (31) is fixedly connected to the movable plate (1); There are two supporting parts (32), which are arranged on the connecting part (31) at intervals; A clamping slot (30) is respectively provided on each of the supporting portions (32).

10. A double-station lateral cleaning device according to claim 9, characterized in that: The connecting portion (31) is a U-shaped plate structure; The supporting portion (32) is a convex block structure, and is integrally formed with the connecting portion (31).

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