Swing type soak cleaning device

Abstract

The utility model discloses a swing type soak cleaning device, which relates to the technical field of semiconductor substrate material manufacturing and comprises a cleaning tank, a swing rod and a driving mechanism. A liquid medicine cavity for accommodating cleaning liquid medicine is formed in the cleaning tank; an opening communicated with the liquid medicine cavity is formed in the cleaning tank; the oscillating bar is rotationally mounted in the liquid medicine cavity, and a plurality of jigs for fixing substrate slices are arranged on the oscillating bar; the driving mechanism is connected with the swing rod and used for driving the swing rod to swing. The cleaning effect and the cleaning efficiency are improved; in addition, the swing design also enables feeding and discharging of the substrate slices to be convenient.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to a swing-type immersion cleaning device. Background Art

[0002] Indium phosphide substrates have a wide range of applications in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other RF devices. RF devices made using indium phosphide substrates have demonstrated excellent performance in satellite, radar and other application scenarios. They are highly competitive in the RF front end of radar and communication systems, analog / mixed signal wide-bandwidth circuits, and are suitable for applications such as high-speed data processing and high-precision wide-bandwidth A / D conversion. It can be seen that indium phosphide substrates are expected to become the mainstream substrate material for RF devices.

[0003] In the manufacture of indium phosphide substrate materials, the polished indium phosphide substrate sheets need to be cleaned, and the existing cleaning methods mainly include spraying or immersion cleaning. Among them, the immersion cleaning method is mostly static immersion in the cleaning solution, and such cleaning efficiency is relatively low. Therefore, it is urgent to provide a new solution to solve the above problems. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a swinging immersion cleaning device to solve the technical problem of low cleaning efficiency of the existing static immersion cleaning method.

[0005] In order to achieve the above technical objectives, the present application provides a swing-type immersion cleaning device, including a cleaning tank, a swing rod and a driving mechanism;

[0006] The cleaning tank is provided with a liquid cavity for containing cleaning liquid;

[0007] The cleaning tank is provided with an opening communicating with the liquid medicine chamber;

[0008] The swing rod is rotatably mounted in the liquid medicine chamber, and is provided with a plurality of jigs for fixing the substrate sheet;

[0009] The driving mechanism is connected to the swing rod and is used to drive the swing rod to swing.

[0010] Furthermore, the opening is opened at the top of the cleaning tank.

[0011] Furthermore, a rotating shaft is fixed to one end of the swing rod;

[0012] The rotating shaft is pivotally connected to the cleaning tank.

[0013] Furthermore, the driving mechanism includes a driver and a transmission assembly;

[0014] The driver is installed on the outer side wall of the cleaning tank, and the driving end is connected to the rotating shaft through the transmission assembly, so as to drive the rotating shaft to rotate, thereby driving the swing rod to swing.

[0015] Further, the driver is a rotating motor;

[0016] The transmission component is a coupling;

[0017] The driving end of the driver is connected to the rotating shaft through the coupling.

[0018] Further, the driver is a rotating motor;

[0019] The transmission assembly includes a driving gear and a driven gear;

[0020] The driving gear is fixed on the driving end of the driver;

[0021] The driven gear is fixed on the shaft section of the rotating shaft extending out of the cleaning tank and is meshed with the driving gear.

[0022] Further, the driver is a telescoping device;

[0023] The transmission assembly includes a rack and a gear;

[0024] The rack is fixed to the driving end of the driver;

[0025] The gear is fixed on the shaft section of the rotating shaft extending out of the cleaning tank and is meshed with the rack.

[0026] Furthermore, there are multiple jigs, which are arranged at intervals along the length direction of the swing rod.

[0027] Furthermore, the fixture is provided with a slot for inserting the substrate sheet.

[0028] Further, the fixture is a U-shaped block structure;

[0029] The clamping slots are arranged at two ends of the top surface of the fixture.

[0030] It can be seen from the above technical scheme that the swinging immersion cleaning device designed in the present application drives the swing rod to swing back and forth in the liquid medicine chamber of the cleaning tank through the driving mechanism, so that the liquid medicine can flush the substrate sheet of the fixture on the swing rod back and forth, making the cleaning of the substrate sheet more thorough and improving the cleaning effect and cleaning efficiency; moreover, the up and down swinging design also makes it convenient to load and unload the substrate sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0032] Figure 1 A three-dimensional diagram of a swing-type immersion cleaning device provided in the present application;

[0033] Figure 2 A three-dimensional diagram of a swing-type immersion cleaning device provided in the present application without a cleaning tank;

[0034] Figure 3 A schematic diagram of the structure of a jig and a substrate sheet of a swing-type immersion cleaning device provided in the present application;

[0035] In the figure: 1, cleaning tank; 11, liquid medicine chamber; 2, swing rod; 3, driver; 4, rotating shaft; 5, fixture; 51, card slot; 6, substrate sheet. DETAILED DESCRIPTION

[0036] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of them. All other embodiments obtained by ordinary technicians in this field without creative work based on the embodiments in the embodiments of the present application are within the scope of protection of the embodiments of the present application.

[0037] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0038] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0039] The embodiment of the present application discloses a swing-type immersion cleaning device.

[0040] See also Figure 1 , an embodiment of a swing-type immersion cleaning device provided in the embodiments of the present application includes:

[0041] Cleaning tank 1, swing rod 2 and driving mechanism;

[0042] A liquid chamber 11 for containing cleaning liquid is provided in the cleaning tank 1, and an opening communicating with the liquid chamber 11 is provided on the cleaning tank 1 to facilitate loading and unloading of the substrate sheet 6. In order to facilitate replenishment or discharge of liquid in the liquid chamber 11, a corresponding liquid replenishment port and a liquid discharge port may be further provided on the cleaning tank 1. In addition, the cleaning tank 1 may be made of, for example, aluminum alloy 6061 material, without specific limitation.

[0043] The swing rod 2 is rotatably installed in the liquid medicine chamber 11 so as to swing up and down, and is provided with a plurality of jigs 5 for fixing the substrate sheet 6. The swing rod 2 and the jigs 5 can be made of PEEK material, and there is no specific limitation. The swing rod 2 is arranged near the opening position to facilitate loading and unloading of the substrate sheet 6 through the opening. Specifically, the substrate sheet 6 can be loaded and unloaded when the swing rod 2 swings to a horizontal state.

[0044] The driving mechanism is connected to the swing rod 2 and is used to drive the swing rod 2 to swing.

[0045] The swing-type immersion cleaning device designed in the present application drives the swing rod 2 to swing back and forth in the liquid chamber 11 of the cleaning tank 1 through a driving mechanism, so that the liquid can rinse the substrate sheet 6 of the fixture 5 on the swing rod back and forth, making the cleaning of the substrate sheet 6 more thorough, improving the cleaning effect and cleaning efficiency; moreover, the up and down swing design also makes it convenient to load and unload the substrate sheet 6.

[0046] The above is an embodiment of the present invention provided by the embodiment of a swing type immersion cleaning device. The following is an embodiment of the present invention provided by the embodiment of a swing type immersion cleaning device. For details, please refer to Figures 1 to 3 .

[0047] Based on the above implementation plan:

[0048] Furthermore, the opening can be specifically opened at the top of the cleaning tank 1, and the cleaning tank 1 as a whole can be a cubic structure without limitation.

[0049] Furthermore, in terms of the rotation design of the swing arm 2 , a rotating shaft 4 is fixed to one end of the swing arm 2 , and the rotating shaft 4 is pivotally connected to the cleaning tank 1 .

[0050] Furthermore, if Figure 1 As shown, the drive mechanism design includes a driver 3 and a transmission assembly (not shown).

[0051] The driver 3 is installed on the outer wall of the cleaning tank 1, and the driving end is connected to the rotating shaft 4 through a transmission assembly, so as to drive the rotating shaft 4 to rotate, thereby driving the swing rod 2 to swing.

[0052] Furthermore, the driver 3 may be a rotary motor, specifically a servo motor capable of forward and reverse rotation.

[0053] The transmission assembly may be a coupling, and the driving end of the driver 3 is connected to the rotating shaft 4 via the coupling to achieve direct drive.

[0054] Furthermore, the driver 3 is a rotary motor, specifically a servo motor capable of forward and reverse rotation.

[0055] The transmission assembly is designed to include a driving gear and a driven gear.

[0056] The driving gear is fixed on the driving end of the driver 3, and the driven gear is fixed on the shaft section of the rotating shaft 4 extending out of the cleaning tank 1 and meshes with the driving gear to realize gear transmission drive.

[0057] Furthermore, the driver 3 may also be a telescopic device, such as a telescopic cylinder, an electric push rod, a telescopic motor, etc., without limitation.

[0058] The transmission assembly includes a rack and a gear. The rack is fixed to the driving end of the driver 3, and the gear is fixed to the shaft section of the rotating shaft 4 extending out of the cleaning tank 1 and meshes with the rack to realize the conversion of telescopic motion into rotational motion.

[0059] Of course, the present invention is not limited to the several implementation modes given above, and those skilled in the art can make appropriate design changes based on these.

[0060] Furthermore, if Figure 2 As shown, there are multiple jigs 5, specifically 5, and the multiple jigs 5 are spaced apart along the length direction of the swing rod 2. The design of multiple jigs 5 can clean multiple substrate sheets 6 at one time, further improving the cleaning efficiency.

[0061] Furthermore, if Figure 3 As shown, in order to fix the substrate sheet 6, the fixture 5 is provided with a slot 51 for inserting the substrate sheet 6.

[0062] Furthermore, if Figure 3 As shown, the fixture 5 is designed as a U-shaped block structure, and correspondingly, the slots 51 are opened at both ends of the top surface of the fixture 5, so that the two slots 51 can limit and fix the substrate sheet 6. This design has a simple structure, saves materials, and can play a good fixing role; as for the fixing method between the fixture 5 and the swing rod 2, it can be integrally formed or glued, or connected and fixed by a connector, and there is no specific limitation.

[0063] Working principle:

[0064] 1. The driving mechanism drives the swing rod 2 to swing to a horizontal position;

[0065] 2. Manually install the substrate sheet 6 into the fixture 5 on the swing rod 2;

[0066] 3. The driving mechanism drives the swing rod 2 to swing until the fixture 5 and the substrate sheet 6 are immersed in the liquid medicine in the liquid medicine chamber 11;

[0067] 4. The driving mechanism drives the swing rod 2 to swing back and forth, so that the fixture 5 and the substrate sheet 6 swing back and forth in the liquid medicine.

[0068] It should be noted that as long as the swinging speed is controlled to swing slowly, the substrate sheet 6 will not fall out of the fixture 5 .

[0069] The above is a detailed introduction to a swinging immersion cleaning device provided by the present application. For a person skilled in the art, according to the idea of ​​the embodiments of the present application, there may be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A swing-type immersion cleaning device, characterized in that: It comprises a cleaning tank (1), a swing rod (2) and a driving mechanism; The cleaning tank (1) is provided with a liquid chamber (11) for containing a cleaning liquid; The cleaning tank (1) is provided with an opening communicating with the liquid medicine chamber (11); The swing rod (2) is rotatably mounted in the liquid medicine chamber (11), and is provided with a plurality of jigs (5) for fixing the substrate sheet (6); The driving mechanism is connected to the swing rod (2) and is used to drive the swing rod (2) to swing.

2. A swing-type immersion cleaning device according to claim 1, characterized in that: The opening is opened at the top of the cleaning tank (1).

3. The swing-type immersion cleaning device according to claim 1, characterized in that: A rotating shaft (4) is fixed to one end of the swing rod (2); The rotating shaft (4) is pivotally connected to the cleaning tank (1).

4. A swing-type immersion cleaning device according to claim 3, characterized in that: The driving mechanism comprises a driver (3) and a transmission assembly; The driver (3) is mounted on the outer wall of the cleaning tank (1), and the driving end is connected to the rotating shaft (4) through the transmission assembly, and is used to drive the rotating shaft (4) to rotate, thereby driving the swing rod (2) to swing.

5. A swing-type immersion cleaning device according to claim 4, characterized in that: The driver (3) is a rotating motor; The transmission component is a coupling; The driving end of the driver (3) is connected to the rotating shaft (4) via the coupling.

6. The swing-type immersion cleaning device according to claim 4, characterized in that: The driver (3) is a rotating motor; The transmission assembly includes a driving gear and a driven gear; The driving gear is fixed on the driving end of the driver (3); The driven gear is fixed to the shaft section of the rotating shaft (4) extending out of the cleaning tank (1), and is meshed with the driving gear.

7. The swing-type immersion cleaning device according to claim 4, characterized in that: The driver (3) is a telescoping device; The transmission assembly includes a rack and a gear; The rack is fixed to the driving end of the driver (3); The gear is fixed to the shaft section of the rotating shaft (4) extending out of the cleaning tank (1) and meshes with the rack.

8. The swing-type immersion cleaning device according to claim 1, characterized in that: There are a plurality of jigs (5), which are arranged at intervals along the length direction of the swing rod (2).

9. The swing-type immersion cleaning device according to claim 1, characterized in that: The jig (5) is provided with a slot (51) for inserting the substrate sheet (6).

10. The swing-type immersion cleaning device according to claim 9, characterized in that: The jig (5) is a U-shaped block structure; The clamping slots (51) are provided at two ends of the top surface of the fixture (5).

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