Lifting type soaking and cleaning device

Abstract

The utility model discloses a lifting type soaking and cleaning device, which relates to the technical field of semiconductor substrate material manufacturing and comprises a cleaning tank, a swing rod, a swing driving mechanism and a lifting driving mechanism, a liquid medicine cavity for accommodating cleaning liquid medicine is formed in the cleaning tank; an opening communicated with the liquid medicine cavity is formed in the cleaning tank; the swing rod is provided with a plurality of jigs used for fixing substrate slices. The swing driving mechanism is connected with the swing rod and used for driving the swing rod to swing. The lifting driving mechanism is used for driving the cleaning tank to do lifting motion or driving the swing rod to do lifting motion so that the swing rod can stretch into the liquid medicine cavity from the opening or stretch out of the liquid medicine cavity from the liquid medicine opening. The cleaning effect and the cleaning efficiency are improved; and the cleaning tank or the swing rod can do lifting motion through the lifting driving mechanism, so that the swing rod can stretch into or stretch out of the solution tank, operation is easy, and feeding and discharging of the substrate slices are more convenient.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to a lifting type immersion cleaning device. Background Art

[0002] Indium phosphide substrates have a wide range of applications in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other RF devices. RF devices made using indium phosphide substrates have demonstrated excellent performance in satellite, radar and other application scenarios. They are highly competitive in the RF front end of radar and communication systems, analog / mixed signal wide-bandwidth circuits, and are suitable for applications such as high-speed data processing and high-precision wide-bandwidth A / D conversion. It can be seen that indium phosphide substrates are expected to become the mainstream substrate material for RF devices.

[0003] In the manufacture of indium phosphide substrate materials, the polished indium phosphide substrate sheets need to be cleaned, and the existing cleaning methods mainly include spray cleaning or immersion cleaning. Among them, the immersion cleaning method is mostly manual placement of a fixture containing the substrate sheet into a cleaning solution for static immersion. This cleaning method is cumbersome and inefficient. Therefore, it is urgent to provide a new solution to solve the above problems. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a lifting immersion cleaning device to solve the technical problems of the existing manual cleaning method of placing a fixture equipped with a substrate sheet into a cleaning solution for static immersion, which is cumbersome and inefficient.

[0005] In order to achieve the above technical purpose, the present application provides a lifting type immersion cleaning device, including a cleaning tank, a swing rod, a swing drive mechanism and a lifting drive mechanism;

[0006] The cleaning tank is provided with a liquid cavity for containing cleaning liquid;

[0007] The cleaning tank is provided with an opening communicating with the liquid medicine chamber;

[0008] The swing rod is provided with a plurality of jigs for fixing the substrate sheet;

[0009] The swing driving mechanism is connected to the swing rod and is used to drive the swing rod to swing;

[0010] The lifting drive mechanism is connected to the cleaning tank and is used to drive the cleaning tank to move upward and downward, so that the swing rod can extend from the opening into the liquid medicine cavity or extend from the opening into the liquid medicine cavity;

[0011] Alternatively, the lifting drive mechanism is connected to the swing rod, and is used to drive the swing rod to move up and down, so that the swing rod can extend from the opening into the medicine liquid chamber or extend from the opening out of the medicine liquid chamber.

[0012] Furthermore, the swing drive mechanism includes a swing bracket, a swing driver and a transmission assembly;

[0013] A rotating shaft is provided on one end of the swing rod;

[0014] The driving end of the swing driver is connected to the rotating shaft through the transmission assembly to drive the swing rod to swing.

[0015] Furthermore, there are two swing rods;

[0016] One end of the two swing rods are connected together and are distributed in an inverted V shape;

[0017] The swing driving mechanism is connected to the two swing rods and is used to drive the two swing rods to swing together.

[0018] Furthermore, the swing drive mechanism includes a swing bracket, a swing driver and a transmission assembly;

[0019] A rotating shaft is provided at the connection position of the two swing rods;

[0020] The driving end of the swing driver is connected to the rotating shaft through the transmission assembly to drive the swing rod to swing.

[0021] Further, the swing driver is a rotary motor;

[0022] The transmission component is a coupling.

[0023] Further, the lifting drive mechanism includes a lifting drive;

[0024] The driving end of the lifting driver is connected to the cleaning tank.

[0025] Further, the lifting drive is a linear slide;

[0026] The linear slide is vertically arranged, and the slider thereon is connected to the outer side wall of the cleaning tank.

[0027] Furthermore, there are a plurality of jigs, which are arranged at stepped intervals along the length direction of the swing rod.

[0028] Furthermore, the fixture is provided with a slot for inserting the substrate sheet.

[0029] Further, the fixture is a U-shaped block structure;

[0030] The clamping slots are arranged at two ends of the top surface of the fixture.

[0031] It can be seen from the above technical scheme that the lifting and lowering immersion cleaning device designed in the present application drives the swing rod to swing back and forth in the liquid medicine chamber of the cleaning tank through the swing drive mechanism, so that the liquid medicine can rinse the substrate sheet of the fixture on the swing rod back and forth, so that the cleaning of the substrate sheet is more thorough, and the cleaning effect and cleaning efficiency are improved; and the lifting and lowering drive mechanism allows the cleaning tank or swing to move up and down, so that the swing rod can be extended into or out of the solution tank, the operation is simple, and the loading and unloading of the substrate sheet is more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0033] Figure 1 A first stereoscopic view of a lifting type immersion cleaning device provided in the present application;

[0034] Figure 2 A second stereoscopic view of a lifting type immersion cleaning device provided in the present application;

[0035] Figure 3 A three-dimensional diagram of a lifting type immersion cleaning device provided in the present application without a cleaning tank and a lifting drive mechanism;

[0036] Figure 4 A three-dimensional diagram of a jig and a substrate sheet of a lifting type immersion cleaning device provided in the present application;

[0037] In the figure: 1, cleaning tank; 11, liquid medicine chamber; 2, swing rod; 3, fixture; 31, card slot; 41, swing bracket; 42, swing drive; 43, rotating shaft; 51, lifting drive; 511, slider; 6, substrate sheet. DETAILED DESCRIPTION

[0038] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of them. All other embodiments obtained by ordinary technicians in this field without creative work based on the embodiments in the embodiments of the present application are within the scope of protection of the embodiments of the present application.

[0039] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0040] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0041] The embodiment of the present application discloses a lifting type immersion cleaning device.

[0042] See also Figure 1 , an embodiment of a lifting type immersion cleaning device provided in the embodiments of the present application includes:

[0043] A cleaning tank 1, a swing rod 2, a swing drive mechanism and a lifting drive mechanism.

[0044] A liquid chamber 11 for containing cleaning liquid is provided in the cleaning tank 1, and an opening connected to the liquid chamber 11 is provided on the cleaning tank 1 to facilitate the pendulum 2 to extend into or out of the liquid chamber 11; in order to facilitate the replenishment or discharge of liquid in the liquid chamber 11, corresponding liquid replenishment ports and liquid discharge ports can be further provided on the cleaning tank 1. In addition, the cleaning tank 1 can be made of, for example, aluminum alloy 6061 material, without specific limitation.

[0045] The swing rod 2 is provided with a plurality of jigs 3 for fixing the substrate sheet 6 . The swing rod 2 and the jigs 3 can be made of PEEK material, without any specific limitation.

[0046] The swing driving mechanism is connected to the swing rod 2 and is used to drive the swing rod 2 to swing up and down.

[0047] The lifting drive mechanism is connected to the cleaning tank 1, and is used to drive the cleaning tank 1 to move up and down, so that the pendulum rod 2 can extend from the opening into the medicine liquid chamber 11 or extend from the medicine liquid port into the medicine liquid chamber 11; or, the lifting drive mechanism is connected to the pendulum rod 2, and is used to drive the pendulum rod 2 to move up and down, so that the pendulum rod 2 can extend from the opening into the medicine liquid chamber 11 or extend from the medicine liquid port into the medicine liquid chamber 11.

[0048] The lifting immersion cleaning device designed in the present application drives the swing rod 2 to swing back and forth in the liquid medicine chamber 11 of the cleaning tank 1 through a swing driving mechanism, so that the liquid medicine rinses the substrate sheet 6 of the fixture 3 on the swing rod back and forth, so that the cleaning of the substrate sheet 6 is more thorough, and the cleaning effect and cleaning efficiency are improved; and the lifting driving mechanism allows the cleaning tank 1 to be lifted or swung, so that the swing rod can be extended into or out of the solution tank, the operation is simple, and the loading and unloading of the substrate sheet 6 is more convenient.

[0049] The above is an embodiment of a lifting type immersion cleaning device provided in the embodiment of the present application. The following is an embodiment of a lifting type immersion cleaning device provided in the embodiment of the present application. For details, please refer to Figures 1 to 4 .

[0050] Based on the solution of the above embodiment 1:

[0051] Furthermore, the swing drive mechanism design includes a swing bracket 41, a swing driver 42 and a transmission assembly (not shown).

[0052] A rotating shaft 43 is provided on one end of the swing rod 2 , and a driving end of the swing driver 42 is connected to the rotating shaft 43 via a transmission assembly, so as to drive the swing rod 2 to swing by driving the rotating shaft 43 to rotate.

[0053] Furthermore, the swing rod 2 is preferably designed as two, and one end of the two swing rods 2 is connected together and distributed in an inverted V shape; the swing drive mechanism is connected to the two swing rods 2, and is used to drive the two swing rods 2 to swing together. The double swing rod 2 design can further increase the number of fixtures 3. For example, if one swing rod 2 is designed as one station, then the double swing rod 2 design is also a double station design, which can further increase the number of fixtures 3, and then increase the number of substrate sheets 6 to be cleaned, so as to improve the cleaning efficiency.

[0054] Furthermore, taking the swing rod 2 with two designs as an example, the swing drive mechanism may also include a swing bracket 41 , a swing driver 42 and a transmission assembly.

[0055] At this time, a rotating shaft 43 is provided at the connection position of the two swing rods 2; the driving end of the swing driver 42 is connected to the rotating shaft 43 through a transmission assembly to drive the swing rod 2 to swing.

[0056] Furthermore, the swing driver 42 of the present application can be a rotary motor, specifically a servo motor capable of forward and reverse rotation, without limitation; and the transmission assembly is a coupling, and the output shaft of the rotary motor is connected to the rotating shaft 43 through the coupling, thereby driving one / two swing rods 2 to swing. Of course, it is not limited to the swing drive control method of the rotary motor described above, and those skilled in the art can make appropriate changes based on this design without limitation.

[0057] Furthermore, the lifting drive mechanism includes a lifting drive 51, a fixed end of the lifting drive 51 is fixedly connected to a corresponding fixing device, and a driving end is connected to the cleaning tank 1 to drive the cleaning tank 1 to move up and down.

[0058] Furthermore, the lifting driver 51 can be specifically a linear slide; the linear slide is vertically arranged, and the slider 511 thereon is connected to the outer wall of the cleaning tank 1; by driving the slider 511 to move up and down, the cleaning tank 1 is driven to move up and down.

[0059] Furthermore, the number of jigs 3 is preferably multiple, specifically 5 jigs 3 can be set on each swing rod 2, without limitation; the multiple jigs 3 are arranged in a stepped manner along the length direction of the swing rod 2. The stepped arrangement will not cause residual liquid on the substrate sheet 6 on any jig 3 to drip onto the adjacent substrate sheet 6 when the cleaning tank 1 rises or descends (because the substrate sheets 6 of adjacent jigs 3 on the swing rod 2 are staggered with each other at this time).

[0060] Furthermore, in order to fix the substrate sheet 6 , the fixture 3 is provided with a slot 31 for inserting the substrate sheet 6 .

[0061] Furthermore, the fixture 3 is designed as a U-shaped block structure, and correspondingly, the slots 31 are opened at both ends of the top surface of the fixture 3, so that the two slots 31 can limit and fix the substrate sheet 6. This design has a simple structure, saves materials, and can play a good fixing role; as for the fixing method between the fixture 3 and the swing rod 2, it can be integrally formed or glued, or connected and fixed by a connector, and there is no specific limitation.

[0062] Working principle:

[0063] 1. The swing drive mechanism operates, so that the swing rod 2 is in a loading state (taking the design of two swing rods 2 as an example, the V-shaped mouth formed between the two swing rods 2 is vertically facing downward, which can be regarded as a loading state; of course, it is not limited to this loading state design, and can also be other states suitable for loading, without limitation), and at the same time, the lifting drive mechanism operates to drive the cleaning tank 1 to descend, so that the swing rod 2 in the loading state is exposed from the cleaning tank 1;

[0064] 2. Manually install the substrate sheet 6 into the fixture 3 on the swing rod 2;

[0065] 3. The lifting drive mechanism operates to drive the cleaning tank 1 to rise, so that the fixture 3 and the substrate sheet 6 are immersed in the liquid in the liquid chamber 11;

[0066] 4. The swing drive mechanism drives the swing rod 2 to swing back and forth, so that the fixture 3 and the substrate sheet 6 swing back and forth in the liquid medicine.

[0067] The above is a detailed introduction to a lifting immersion cleaning device provided by the present application. For a person skilled in the art, according to the idea of ​​the embodiments of the present application, there may be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A lifting type immersion cleaning device, characterized in that: It comprises a cleaning tank (1), a swing rod (2), a swing drive mechanism and a lifting drive mechanism; The cleaning tank (1) is provided with a liquid chamber (11) for containing a cleaning liquid; The cleaning tank (1) is provided with an opening communicating with the liquid medicine chamber (11); The swing rod (2) is provided with a plurality of jigs (3) for fixing the substrate sheet (6); The swing drive mechanism is connected to the swing rod (2) and is used to drive the swing rod (2) to swing; The lifting drive mechanism is connected to the cleaning tank (1) and is used to drive the cleaning tank (1) to move upward and downward, so that the swing rod (2) can extend from the opening into the liquid medicine chamber (11) or extend from the opening out of the liquid medicine chamber (11); Alternatively, the lifting drive mechanism is connected to the swing rod (2) and is used to drive the swing rod (2) to move upward and downward, so that the swing rod (2) can extend from the opening into the medicine liquid chamber (11) or extend from the opening out of the medicine liquid chamber (11).

2. A lifting type immersion cleaning device according to claim 1, characterized in that: The swing drive mechanism comprises a swing bracket (41), a swing driver (42) and a transmission assembly; A rotating shaft (43) is provided on one end of the swing rod (2); The driving end of the swing driver (42) is connected to the rotating shaft (43) via the transmission assembly, and is used to drive the swing rod (2) to swing.

3. A lifting type immersion cleaning device according to claim 1, characterized in that: There are two swing rods (2); One end of the two swing rods (2) is connected together and arranged in an inverted V shape; The swing drive mechanism is connected to the two swing rods (2) and is used to drive the two swing rods (2) to swing together.

4. A lifting type immersion cleaning device according to claim 3, characterized in that: The swing drive mechanism comprises a swing bracket (41), a swing driver (42) and a transmission assembly; A rotating shaft (43) is provided at the connection position of the two swing rods (2); The driving end of the swing driver (42) is connected to the rotating shaft (43) via the transmission assembly, and is used to drive the swing rod (2) to swing.

5. A lifting type immersion cleaning device according to claim 2 or 4, characterized in that: The swing drive (42) is a rotary motor; The transmission component is a coupling.

6. The lifting type immersion cleaning device according to claim 1, characterized in that: The lifting drive mechanism comprises a lifting drive (51); The driving end of the lifting driver (51) is connected to the cleaning tank (1).

7. A lifting type immersion cleaning device according to claim 6, characterized in that: The lifting drive (51) is a linear slide; The linear slide is arranged vertically, and the slider (511) thereon is connected to the outer side wall of the cleaning tank (1).

8. The lifting type immersion cleaning device according to claim 1, characterized in that: The jigs (3) are multiple and are arranged at intervals in a stepped manner along the length direction of the swing rod (2).

9. The lifting type immersion cleaning device according to claim 1, characterized in that: The jig (3) is provided with a slot (31) for inserting the substrate sheet (6).

10. The lifting type immersion cleaning device according to claim 9, characterized in that: The jig (3) is a U-shaped block structure; The clamping slots (31) are provided at two ends of the top surface of the fixture (3).

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