Cleaning device for semiconductor processing

Abstract

The utility model discloses a cleaning device for semiconductor processing, which comprises a box body, a box cover, a cleaning tank, a cleaning device and a fixed box, the box cover is movably connected to the top of the box body, the cleaning tank is fixedly connected to the top of the inner wall of the box body, and the cleaning device is fixedly connected to the bottom of the inner wall of the cleaning tank. The fixing box is fixedly connected to the bottom of the right side of the box body, a filtering assembly is fixedly connected to the left side of the top of the fixing box, and a conveying mechanism is arranged on the right side of the top of the fixing box. According to the cleaning device, the conveying mechanism is arranged, the cleaning agent is conveyed into the filtering assembly through the conveying mechanism, the cleaning agent is filtered through the filtering assembly, impurities are prevented from entering the cleaning agent, and the problems that an existing cleaning device cannot filter the cleaning agent, so that dust or impurities easily enter the cleaning agent when the cleaning agent is added, and the cleaning effect is affected are solved. And the cleaning device has the advantage that the cleaning agent can be filtered.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning, in particular to a cleaning device for semiconductor processing. Background Art

[0002] The semiconductor is placed inside the cleaning device for cleaning and needs to be stirred and cleaned together with a specific cleaning agent.

[0003] For example, there is a Chinese invention patent with application number 202223534799.1, which discloses a cleaning device for semiconductor processing, including a box body and a box cover, wherein a motor and a plurality of support columns are respectively arranged in the box body, and the top of the support column is fixedly provided with the same cleaning tank, the output shaft of the motor passes through the bottom of the cleaning tank, and a stirring rod is arranged, and a plurality of ultrasonic transducers are arranged at the bottom of the cleaning tank, and the ultrasonic transducer is externally connected to an ultrasonic generator, and a placement rack with a grid structure is placed in the cleaning tank, and a semiconductor is placed on the placement rack; a plug body is arranged below the box cover, and a plurality of ultrasonic transducers are inlaid below the plug body. The utility model can ultrasonically clean the upper and lower surfaces and surroundings of the semiconductor by arranging upper and lower ultrasonic transducers, and at the same time, the motor can stir the cleaning liquid through the stirring rod, so that the cleaning liquid can flow quickly, so that it can fully contact the semiconductor, improve the cleaning strength of the semiconductor, and avoid the waste of cleaning liquid resources.

[0004] The existing cleaning device cannot filter the cleaning agent, which results in dust or impurities easily entering the cleaning agent when the cleaning agent is added, thus affecting the cleaning effect. Utility Model Content

[0005] In order to solve the problems raised in the above-mentioned background technology, the purpose of the utility model is to provide a cleaning device for semiconductor processing, which has the advantage of being able to filter the cleaning agent, and solves the problem that the existing cleaning device cannot filter the cleaning agent, resulting in dust or impurities easily entering the cleaning agent when adding the cleaning agent, affecting the cleaning effect.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: including a box body, a box cover, a cleaning tank, a cleaning device and a fixed box, the box cover is movably connected to the top of the box body, the cleaning tank is fixedly connected to the top of the inner wall of the box body, the cleaning device is fixedly connected to the bottom of the inner wall of the cleaning tank, the fixed box is fixedly connected to the bottom of the right side of the box body, a filter assembly is fixedly connected to the left side of the top of the fixed box, and a conveying mechanism is opened on the right side of the top of the fixed box.

[0007] As a preferred embodiment of the present invention, the filter assembly includes a filter barrel, the filter barrel is fixedly connected to the left side of the top of the fixed box, the inner wall of the filter barrel is movably connected to a fixed frame, and the inner wall of the fixed frame is filled with filter material.

[0008] As a preferred embodiment of the present invention, a fixing cover is threadedly connected to the top of the inner wall of the fixing frame, and a through hole is opened on the top of the fixing cover.

[0009] As a preferred embodiment of the utility model, the top of the inner wall of the filter barrel is threadedly connected to a limiting cover, and the top of the inner wall of the limiting cover is movably connected to a delivery pipe.

[0010] As a preferred embodiment of the utility model, the conveying mechanism includes an adding hole, which is opened on the right side of the top of the fixed box, a storage groove is opened at the bottom of the inner wall of the adding hole, and a cover is threadedly connected to the top of the inner wall of the adding hole.

[0011] As a preferred embodiment of the present invention, a delivery pump is fixedly connected to the left side of the top of the inner wall of the fixed box, and a control device is fixedly connected to the top of the right side of the fixed box.

[0012] As a preferred embodiment of the present invention, an operation panel is fixedly connected to the right side of the control device.

[0013] As a preferred embodiment of the present invention, a connecting pipe is provided on the left side of the bottom of the inner wall of the storage tank, and the top of the connecting pipe is connected to the input end of the delivery pump.

[0014] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0015] 1. The utility model provides a conveying mechanism, through which the cleaning agent is conveyed into the filter assembly, and the cleaning agent is filtered by the filter assembly to prevent foreign matter from entering the cleaning agent. This solves the problem that the existing cleaning device cannot filter the cleaning agent, resulting in dust or foreign matter easily entering the cleaning agent when the cleaning agent is added, thus affecting the cleaning effect. The utility model has the advantage of being able to filter the cleaning agent.

[0016] 2. The utility model provides a filter assembly, wherein the delivery pump delivers the cleaning agent into the filter barrel, and then limits the filter material through a fixed frame. The filter material can filter the cleaning agent, intercept impurities in the cleaning agent, and filter the cleaning agent.

[0017] 3. The utility model provides a fixed cover and a through hole. The fixed cover can prevent the filter material from being separated from the fixed frame and limit the top of the filter material. The through hole can transport the filtered cleaning agent. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the main cross-sectional structure of the utility model;

[0020] Figure 3 The utility model is Figure 2 Enlarged structural diagram at A in the middle.

[0021] In the figure: 1. box body; 2. box cover; 3. cleaning tank; 4. cleaning device; 5. fixed box; 6. filter assembly; 61. filter barrel; 62. fixed frame; 63. filter material; 7. conveying mechanism; 71. adding hole; 72. storage tank; 73. lid; 8. fixed cover; 9. through hole; 10. limit cover; 11. conveying pipe; 12. conveying pump; 13. control device; 14. operation panel; 15. connecting pipe. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] like Figures 1 to 3 As shown, the utility model includes a box body 1, a box cover 2, a cleaning tank 3, a cleaning device 4 and a fixed box 5. The box cover 2 is movably connected to the top of the box body 1, the cleaning tank 3 is fixedly connected to the top of the inner wall of the box body 1, the cleaning device 4 is fixedly connected to the bottom of the inner wall of the cleaning tank 3, the fixed box 5 is fixedly connected to the bottom of the right side of the box body 1, a filter assembly 6 is fixedly connected to the left side of the top of the fixed box 5, and a conveying mechanism 7 is opened on the right side of the top of the fixed box 5.

[0024] refer to Figure 3 The filter assembly 6 includes a filter barrel 61 , which is fixedly connected to the left side of the top of the fixed box 5 . The inner wall of the filter barrel 61 is movably connected to a fixed frame 62 , and the inner wall of the fixed frame 62 is filled with filter material 63 .

[0025] As a technical optimization scheme of the utility model, by setting a filter component 6, the delivery pump 12 delivers the cleaning agent to the filter barrel 61, and then the filter material 63 is limited by the fixed frame 62. The filter material 63 can filter the cleaning agent, intercept impurities in the cleaning agent, and filter the cleaning agent.

[0026] refer to Figure 3 A fixing cover 8 is threadedly connected to the top of the inner wall of the fixing frame 62 , and a through hole 9 is opened on the top of the fixing cover 8 .

[0027] As a technical optimization solution of the utility model, by setting a fixed cover 8 and a through hole 9, the fixed cover 8 can prevent the filter material 63 from detaching from the fixed frame 62 and limit the top of the filter material 63, and the through hole 9 can transport the filtered cleaning agent.

[0028] refer to Figure 3 The top of the inner wall of the filter barrel 61 is threadedly connected to a limiting cover 10, and the top of the inner wall of the limiting cover 10 is movably connected to a delivery pipe 11.

[0029] As a technical optimization solution of the utility model, by setting a limit cover 10 and a delivery pipe 11, the limit cover 10 can close the top of the filter barrel 61, and the delivery pipe 11 can deliver the cleaning agent on the top of the filter barrel 61 to the cleaning tank 3.

[0030] refer to Figure 3 The conveying mechanism 7 includes an adding hole 71, which is opened on the right side of the top of the fixed box 5. A storage groove 72 is opened at the bottom of the inner wall of the adding hole 71, and a cover 73 is threadedly connected to the top of the inner wall of the adding hole 71.

[0031] As a technical optimization solution of the utility model, by setting up the conveying mechanism 7, the adding hole 71 can pour the cleaning agent, and then the cleaning agent is stored through the storage tank 72. The cover 73 can close the adding hole 71 when the adding hole 71 is not in use.

[0032] refer to Figure 3 A delivery pump 12 is fixedly connected to the left side of the top of the inner wall of the fixed box 5, and a control device 13 is fixedly connected to the top of the right side of the fixed box 5.

[0033] As a technical optimization solution of the utility model, by setting up a delivery pump 12 and a control device 13, the delivery pump 12 can extract the cleaning agent in the storage tank 72 through the connecting pipe 15, and then deliver it to the filter barrel 61, and the control device 13 can control the start and stop of the delivery pump 12.

[0034] refer to Figure 3 An operation panel 14 is fixedly connected to the right side of the control device 13 .

[0035] As a technical optimization solution of the present invention, by providing the operation panel 14, the operation panel 14 can be more convenient to operate.

[0036] refer to Figure 3 A connecting pipe 15 is provided on the left side of the bottom of the inner wall of the storage tank 72 , and the top of the connecting pipe 15 is connected to the input end of the delivery pump 12 .

[0037] As a technical optimization solution of the present invention, by providing a connecting pipe 15 , the connecting pipe 15 can enable the delivery pump 12 to extract the cleaning agent in the storage tank 72 .

[0038] The working principle and use process of the utility model are as follows: the delivery pump 12 delivers the cleaning agent into the filter barrel 61, and then the filter material 63 is limited by the fixed frame 62, the filter material 63 can filter the cleaning agent, intercept the impurities in the cleaning agent, and filter the cleaning agent. The fixed cover 8 can prevent the filter material 63 from detaching from the fixed frame 62, and limit the top of the filter material 63. The through hole 9 can deliver the filtered cleaning agent, the limiting cover 10 can seal the top of the filter barrel 61, and the delivery pipe 11 can filter the filter barrel 61. 1 is transported to the cleaning tank 3, the adding hole 71 can be used to pour the cleaning agent, and then the cleaning agent is stored in the storage tank 72, the cover 73 can close the adding hole 71 when it is not in use, the delivery pump 12 can extract the cleaning agent in the storage tank 72 through the connecting pipe 15, and then transport it to the filter barrel 61, the control device 13 can control the start and stop of the delivery pump 12, the operation panel 14 can be more convenient in operation, and the connecting pipe 15 can enable the delivery pump 12 to extract the cleaning agent in the storage tank 72.

[0039] To sum up: this semiconductor processing cleaning device, by setting up a conveying mechanism 7, conveying the cleaning agent into the filter component 6 through the conveying mechanism 7, filtering the cleaning agent through the filter component 6 to prevent foreign matter from entering the cleaning agent, thereby solving the problem that the existing cleaning device cannot filter the cleaning agent, resulting in dust or impurities easily entering the cleaning agent when adding the cleaning agent, affecting the cleaning effect.

[0040] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0041] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cleaning device for semiconductor processing, comprising a box body (1), a box cover (2), a cleaning tank (3), a cleaning device (4) and a fixing box (5), characterized in that: The box cover (2) is movably connected to the top of the box body (1), the cleaning tank (3) is fixedly connected to the top of the inner wall of the box body (1), the cleaning device (4) is fixedly connected to the bottom of the inner wall of the cleaning tank (3), the fixed box (5) is fixedly connected to the bottom of the right side of the box body (1), the left side of the top of the fixed box (5) is fixedly connected to a filter assembly (6), and the right side of the top of the fixed box (5) is provided with a conveying mechanism (7).

2. A semiconductor processing cleaning device according to claim 1, characterized in that: The filter assembly (6) comprises a filter barrel (61), the filter barrel (61) being fixedly connected to the left side of the top of the fixed box (5), the inner wall of the filter barrel (61) being movably connected to a fixed frame (62), and the inner wall of the fixed frame (62) being filled with filter material (63).

3. A semiconductor processing cleaning device according to claim 2, characterized in that: A fixing cover (8) is threadedly connected to the top of the inner wall of the fixing frame (62), and a through hole (9) is formed at the top of the fixing cover (8).

4. A semiconductor processing cleaning device according to claim 2, characterized in that: The top of the inner wall of the filter barrel (61) is threadedly connected to a limit cover (10), and the top of the inner wall of the limit cover (10) is movably connected to a delivery pipe (11).

5. A semiconductor processing cleaning device according to claim 1, characterized in that: The conveying mechanism (7) comprises an adding hole (71), which is opened on the right side of the top of the fixed box (5), a storage groove (72) is opened at the bottom of the inner wall of the adding hole (71), and a cover (73) is threadedly connected to the top of the inner wall of the adding hole (71).

6. A semiconductor processing cleaning device according to claim 5, characterized in that: A delivery pump (12) is fixedly connected to the left side of the top of the inner wall of the fixed box (5), and a control device (13) is fixedly connected to the top of the right side of the fixed box (5).

7. A semiconductor processing cleaning device according to claim 6, characterized in that: An operating panel (14) is fixedly connected to the right side of the control device (13).

8. A semiconductor processing cleaning device according to claim 6, characterized in that: A connecting pipe (15) is provided on the left side of the bottom of the inner wall of the storage tank (72), and the top of the connecting pipe (15) is connected to the input end of the delivery pump (12).

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