Back-mounted evaporation clamp

Abstract

The utility model belongs to the technical field of chip evaporation, and particularly relates to a back-mounted evaporation clamp. The backpressure fixing device comprises a planet carrier, a connecting ring and a backpressure fixing device, wherein a plurality of mounting holes are formed in the planet carrier; the first surface of the connecting ring is matched and mounted in the mounting hole, and the second surface of the connecting ring is matched and mounted with a chip; the backpressure fixing device is arranged on the back face of the planet carrier and corresponds to the mounting hole, and the backpressure fixing device comprises a fixing part and a fixing part, the pressing member abuts against the back surface of the chip. The first end of the elastic piece is connected with the fixing piece, the second end of the elastic piece is connected with the pressing piece, and the elastic piece is used for pressing the chip and the connecting ring into the mounting hole of the planet carrier. The evaporation device is used for solving the problem of low evaporation efficiency.

Description

Technical Field

[0001] The utility model belongs to the technical field of chip evaporation, and in particular relates to a back-mounted evaporation fixture. Background Art

[0002] Evaporation refers to a process in which a certain heating evaporation method is used to evaporate the coating material under vacuum conditions and gasify it, so that the particles fly to the surface of the substrate and condense into a film. It has the advantages of simple film formation method, high film purity and density, and unique film structure and performance.

[0003] At present, the commonly used tooling for evaporation basically adopts a planetary pot. For sintered chips, since there is a molybdenum sheet sintered on the back of the chip, when the chip is installed on the hole of the planetary pot, the chip is fixed around the hole by fasteners such as clamps or screws, and then evaporation is carried out. However, this fixing method is usually cumbersome. There are many holes on the planetary pot. Each chip needs to be fixed with three or four fasteners, which leads to a slow installation speed of the chip on the planetary pot, affecting the overall evaporation efficiency. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a back-mounted evaporation fixture for solving the problem of low evaporation efficiency.

[0005] The utility model solves the above technical problems with the following technical solutions: a back-mounted evaporation fixture, comprising:

[0006] A planet carrier, on which a plurality of mounting holes are provided;

[0007] A connecting ring, wherein a first surface of the connecting ring is matched and installed in the installation hole, and a second surface of the connecting ring is used for matching and installing a chip;

[0008] A plurality of back pressure fixing devices are arranged on the back of the planet carrier and are arranged corresponding to the mounting holes, and the back pressure fixing devices include:

[0009] A fixing member, positioned and installed on the back of the planet carrier;

[0010] A pressing member abuts against the back side of the chip;

[0011] The elastic member has a first end connected to the fixing member and a second end connected to the pressing member, and is used to press the chip and the connecting ring into the mounting hole of the planet carrier.

[0012] Compared with the prior art, the above technical solution has the following beneficial effects:

[0013] The first surface of the connecting ring is matched with the mounting hole of the planetary frame, and the second surface of the connecting ring is matched with the chip. Then, the pressing piece in the back pressure fixing device is used to press on the back side of the chip, and the elastic force of the elastic piece is used to connect the chip to the connecting ring and fix it in the mounting hole. Since it is fixed by the elastic force of the elastic piece, when loading and unloading, it is only necessary to stretch the elastic piece so that the pressing piece leaves the chip surface to remove the chip, and the overall efficiency is extremely high.

[0014] Based on the above technical solution, the embodiment of the present application can also be improved as follows:

[0015] In one embodiment, a convex ring matching the mounting hole is formed on the first surface of the connecting ring, and a step groove matching the chip is formed on the second surface of the connecting ring.

[0016] In one embodiment, a height between the second end of the elastic member and the surface of the chip is greater than a height between the first end of the elastic member and the surface of the chip.

[0017] In one embodiment, the fixing member comprises:

[0018] A fixing seat, fixed on the planet carrier, wherein a screw hole is provided at the center of the fixing seat;

[0019] The connecting bolt is matched and screwed into the screw hole, and the connecting bolt is used to sleeve and fix the first end of the elastic member.

[0020] In one embodiment, at least two fixing members are provided, and the fixing members are evenly spaced and arranged on the planet carrier along the circumference of the center of the mounting hole.

[0021] In one embodiment, the compression member comprises:

[0022] A compression plate abuts against the center of the back side of the chip;

[0023] A support column, the bottom end of which is fixed on the compression plate;

[0024] The handheld tray is fixed on the top of the support column, and a plurality of hook holes connected with the second end of the elastic member are provided on the handheld tray.

[0025] In one embodiment, the outer diameter of the hand-held plate is larger than the support column, and the outer diameter of the compression plate is larger than the outer diameter of the hand-held plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a schematic diagram of the overall structure of the utility model from a top view.

[0028] Figure 2 for Figure 1 Schematic diagram of the overall structure at A in the middle.

[0029] Figure 3 for Figure 2 Schematic diagram of the explosion structure.

[0030] Reference numerals:

[0031] 1. Planet carrier; 2. Mounting hole; 3. Connecting ring; 4. Chip; 5. Back pressure fixing device;

[0032] 501, fixing member; 502, pressing member; 503, elastic member;

[0033] 5011, fixing seat; 5012, connecting bolt;

[0034] 5021, compression plate; 5022, support column; 5023, hand-held plate;

[0035] 6. convex ring; 7. step groove;

[0036] 8. Hook hole; DETAILED DESCRIPTION

[0037] The following embodiments of the technical solution of the utility model are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the utility model, and are therefore only used as examples, and cannot be used to limit the protection scope of the utility model.

[0038] It should be noted that, unless otherwise specified, the technical terms or scientific terms used in this application should have the common meanings understood by technicians in the field to which the utility model belongs.

[0039] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0040] In addition, the terms "first", "second", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present utility model, the meaning of "plurality" is more than two, unless otherwise clearly and specifically limited.

[0041] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0042] like Figure 1-3 As shown, the utility model provides a back-mounted evaporation fixture, which includes: a planetary frame, a plurality of connecting rings and a plurality of back pressure fixing devices. The planetary frame is spherical as a whole, the front side of the planetary frame is a concave arc surface, and the back side is a convex arc surface. A plurality of mounting holes are opened on the planetary frame, and the mounting holes are distributed in multiple circles circumferentially around the center of the planetary frame.

[0043] The first surface of the connecting ring is matched and installed in the mounting hole, and the second surface of the connecting ring is used to match and install the chip. By setting the connecting ring, the chip can be installed in the mounting hole more closely, and the connecting hole is annular, and the middle is exposed to provide an area for evaporation on the front side of the chip. The back pressure fixing device is arranged in a one-to-one correspondence with the connecting ring and the mounting hole. The back pressure fixing device is arranged on the back side of the planetary frame, that is, a back pressure fixing device is arranged around each mounting hole. The back pressure fixing device includes: a fixing part, a pressing part and an elastic part. The fixing part is positioned and installed on the back side of the planetary frame, and the pressing part abuts against the back side of the chip. The first end of the elastic part is connected to the fixing part, and the second end is connected to the pressing part, which is used to press the chip and the connecting ring into the mounting hole of the planetary frame. The fixing part provides a support point, and the elastic part provides elastic force to press the pressing part on the back side of the chip.

[0044] The first surface of the connecting ring is matched with the mounting hole of the planetary frame, and the second surface of the connecting ring is matched with the chip. Then, the pressing piece in the back pressure fixing device is used to press on the back side of the chip, and the elastic force of the elastic piece is used to connect the chip to the connecting ring and fix it in the mounting hole. Since it is fixed by the elastic force of the elastic piece, when loading and unloading, it is only necessary to stretch the elastic piece so that the pressing piece leaves the chip surface to remove the chip, and the overall efficiency is extremely high.

[0045] Specifically, a convex ring matching the mounting hole is provided on the first surface of the connecting ring, and the convex ring is embedded in the mounting hole to play a positioning role. A step groove matching the chip is provided on the second surface of the connecting ring, and the chip is embedded in the step groove to position the chip, thereby realizing the positioning and fixing of the chip in the mounting hole through the connecting ring, and the step groove in the mounting hole can be set to different sizes according to the size of the chip.

[0046] To ensure that the elastic member can provide sufficient elastic force on the pressing member, the height of the second end of the elastic member from the chip surface is greater than the height of the first end of the elastic member from the chip surface, and the elastic member is in an extended state at this time. Since the elastic member needs to retract, it will press the higher second end downward, thereby adding the elastic force of the elastic member to the pressing member, and the second end can be used to press the pressing member toward the chip.

[0047] In order to make the compression piece have a better and more stable compression effect, at least two fixing pieces are provided, and the fixing pieces are evenly spaced along the circumference of the center of the mounting hole on the planetary carrier. In this embodiment, the two fixing pieces are symmetrically arranged around the center of the mounting hole. Correspondingly, two elastic pieces are provided, and the two fixing pieces are respectively connected to the compression piece. The fixing pieces evenly spaced along the circumference can provide stable and uniform compression force on the compression piece.

[0048] Wherein, the fixing member comprises: a fixing seat and a connecting bolt.

[0049] The fixing seat is fixed on the planetary carrier and is located outside the mounting hole. A screw hole is opened in the center of the fixing seat. The connecting bolt is threaded in the screw hole. The connecting bolt is used to sleeve and fix the first end of the elastic member. The connecting bolt and the fixing seat are used to realize detachable threaded connection. When the elastic member needs to be replaced, the connecting bolt can be removed to remove the first end of the elastic member to realize detachable connection of the elastic member.

[0050] Specifically, the compression member includes: a compression plate, a support column and a hand-held plate which are sequentially connected from bottom to top.

[0051] The bottom surface of the compression plate abuts against the center of the back side of the chip, and the compression plate provides a smaller pressure. The bottom end of the support column is fixed on the compression plate, and the hand-held plate is fixed on the top of the support column. The hand-held plate is provided with a plurality of hook holes connected to the second end of the elastic member. Due to the connection with the support column, the hand-held plate can not only increase the height of the second end of the elastic member, but also separate the hand-held plate from the compression plate, making it easier to grab by hand.

[0052] Among them, the outer diameter of the handheld plate is larger than the support column, which is convenient for hand grabbing. The outer diameter of the compression plate is larger than the outer diameter of the handheld plate. The larger compression plate reduces the pressure on the back of the chip and avoids damage to the chip.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A back-mounted evaporation fixture, characterized in that: include: A planet carrier, on which a plurality of mounting holes are provided; A connecting ring, wherein a first surface of the connecting ring is matched and installed in the installation hole, and a second surface of the connecting ring is used for matching and installing a chip; A plurality of back pressure fixing devices are arranged on the back of the planet carrier and are arranged corresponding to the mounting holes, and the back pressure fixing devices include: A fixing member, positioned and installed on the back of the planet carrier; A pressing member abuts against the back side of the chip; The elastic member has a first end connected to the fixing member and a second end connected to the pressing member, and is used to press the chip and the connecting ring into the mounting hole of the planet carrier.

2. The back-mounted evaporation fixture according to claim 1, characterized in that: A convex ring matching the mounting hole is formed on the first surface of the connecting ring, and a step groove matching the chip is formed on the second surface of the connecting ring.

3. The back-mounted evaporation fixture according to claim 1, characterized in that: The height between the second end of the elastic member and the surface of the chip is greater than the height between the first end of the elastic member and the surface of the chip.

4. The back-mounted evaporation fixture according to claim 1, characterized in that: The fixing member comprises: A fixing seat, fixed on the planet carrier, wherein a screw hole is provided at the center of the fixing seat; The connecting bolt is matched and screwed into the screw hole, and the connecting bolt is used to sleeve and fix the first end of the elastic member.

5. The back-mounted evaporation fixture according to claim 4, characterized in that: At least two fixing members are provided, and the fixing members are evenly spaced and arranged on the planet carrier along the circumference of the center of the mounting hole.

6. The back-mounted evaporation fixture according to claim 4, characterized in that: The pressure member comprises: A compression plate abuts against the center of the back side of the chip; A support column, the bottom end of which is fixed on the compression plate; The handheld tray is fixed on the top of the support column, and a plurality of hook holes connected with the second end of the elastic member are provided on the handheld tray.

7. The back-mounted evaporation fixture according to claim 6, characterized in that: The outer diameter of the hand-held plate is larger than the outer diameter of the support column, and the outer diameter of the compression plate is larger than the outer diameter of the hand-held plate.

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