Lifting rotating mechanism and vacuum coating equipment

Abstract

The utility model relates to the technical field of vacuum coating, and particularly discloses a lifting rotating mechanism and vacuum coating equipment. The lifting and rotating mechanism comprises a supporting seat, a rotating rod, a first fixing plate, a first lifting driver and a rotating driver. The rotating rod is rotatably arranged on the first fixing plate; the rotating rod is used for placing a target material; the first fixing plate is arranged on the supporting seat in a lifting manner; the first lifting driver is in transmission connection with the first fixing plate and used for driving the first fixing plate to lift; the rotating driver is in transmission connection with the rotating rod and used for driving the rotating rod to rotate. According to the lifting and rotating mechanism provided by the scheme, after the target material is mounted above the rotating rod, the rotating rod and the target material can be driven to lift through the first lifting driver, and the rotating rod and the target material are driven to rotate through the rotating driver, so that the target material is driven to adjust the position, and the height requirements of different coating processes on the target material are met; and the transmission precision requirement on the base material can be reduced.

Description

Technical Field

[0001] The present application relates to the field of vacuum coating technology, and in particular to a lifting and rotating mechanism and vacuum coating equipment. Background Art

[0002] In the process of coating the substrate, it is necessary to move the substrate or the target material so that the two are in contact with each other, and then the target material ions are sputtered onto the substrate by physical or chemical means to deposit into a thin film. In existing coating equipment, the target material is generally fixed at a certain position in the coating chamber, and then the substrate is transferred to contact with the target material, which requires high transmission accuracy of the substrate. Utility Model Content

[0003] In view of this, the purpose of the present application is to provide a lifting and rotating mechanism and a vacuum coating device, so as to solve the problem that the existing vacuum coating equipment has high requirements on the transmission accuracy of the substrate.

[0004] In order to achieve the above technical objectives, the first aspect of the present application provides a lifting and rotating mechanism, including: a support seat, a rotating rod, a first fixing plate, a first lifting drive and a rotating drive;

[0005] The rotating rod can be rotatably disposed on the first fixing plate;

[0006] The rotating rod is used to place the target material;

[0007] The first fixing plate can be lifted and lowered on the supporting seat;

[0008] The first lifting driver is connected to the first fixing plate in a transmission manner and is used to drive the first fixing plate to rise and fall;

[0009] The rotary driver is transmission-connected to the rotary rod and is used for driving the rotary rod to rotate.

[0010] Furthermore, it also includes a first screw rod;

[0011] The first lifting drive is a motor;

[0012] The output end of the first lifting drive is connected to the first screw rod;

[0013] The first fixing plate is meshedly connected to the first screw rod.

[0014] Furthermore, an insulating seat connected to the vacuum chamber is provided at the top end of the first screw rod.

[0015] Furthermore, it also includes: a wiring ring, a second fixing plate and a second lifting drive;

[0016] The second fixing plate can be lifted and lowered on the supporting seat;

[0017] The wiring ring can be slidably sleeved on the rotating rod and fixedly connected to the second fixing plate;

[0018] The second lifting driver is transmission-connected to the second fixing plate, and is used for driving the second fixing plate to rise and fall.

[0019] Furthermore, it also includes a second screw rod;

[0020] The second lifting drive is a motor;

[0021] The output end of the second lifting drive is connected to the second screw rod;

[0022] The second fixing plate is meshedly connected to the second screw rod.

[0023] Furthermore, an insulating seat connected to the vacuum cavity is provided at the top end of the second screw rod.

[0024] Further, it also includes: a guide rod;

[0025] The guide rod is vertically fixed on the support seat;

[0026] The first fixing plate and the second fixing plate are both sleeved on the guide rod.

[0027] Furthermore, a connecting seat for connecting to the vacuum chamber is provided at the top end of the guide rod.

[0028] Furthermore, it also includes a water cooling device;

[0029] The water cooling device is fixedly connected to the wiring ring.

[0030] A second aspect of the present application provides a vacuum coating device, comprising the lifting and rotating mechanism described in any one of the above items.

[0031] It can be seen from the above technical scheme that the present application provides a lifting and rotating mechanism and a vacuum coating device, wherein the lifting and rotating mechanism includes: a support seat, a rotating rod, a first fixed plate, a first lifting drive and a rotating drive; the rotating rod can be rotatably set on the first fixed plate; the rotating rod is used to place the target material; the first fixed plate can be lifted and lowered on the support seat; the first lifting drive is transmission-connected to the first fixed plate for driving the first fixed plate to lift and lower; the rotating drive is transmission-connected to the rotating rod for driving the rotating rod to rotate.

[0032] The lifting and rotating mechanism provided in this solution can, after the target material is installed above the rotating rod, drive the rotating rod and the target material to lift and lower through the first lifting drive, and drive the rotating rod and the target material to rotate through the rotating drive, so as to drive the target material to adjust its position, meet the height requirements of different coating processes for the target material, and reduce the transmission accuracy requirements for the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0034] Figure 1 A three-dimensional diagram of a lifting and rotating mechanism provided in an embodiment of the present application;

[0035] Figure 2 A front view of a lifting and rotating mechanism provided in an embodiment of the present application;

[0036] In the figure: 10, support seat; 21, rotating rod; 22, first fixed plate; 23, first lifting drive; 24, rotating drive; 25, first screw rod; 31, wiring ring; 32, second fixed plate; 33, third lifting drive; 34, second screw rod; 40, guide rod; 41, connecting seat; 50, insulating seat; 60, water cooling device; 61, fixed sleeve; 62, sealing ring; 100, target material. DETAILED DESCRIPTION

[0037] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0038] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0039] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0040] See also Figure 1 and Figure 2 In a first aspect of the embodiments of the present application, a lifting and rotating mechanism is provided, including: a support seat 10, a rotating rod 21, a first fixed plate 22, a first lifting drive 23 and a rotating drive 24.

[0041] The rotating rod 21 can be rotatably disposed on the first fixed plate 22. The rotating rod 21 is used to place the target 100. Specifically, the bottom end of the rotating rod 21 can be mounted on the first fixed plate 22 through a connecting member such as a bearing. The target 100 is placed on the top end of the rotating rod 21.

[0042] The first fixed plate 22 can be raised and lowered on the support base 10 ; the first lifting driver 23 is connected to the first fixed plate 22 for driving the first fixed plate 22 to rise and fall; the rotating driver 24 is connected to the rotating rod 21 for driving the rotating rod 21 to rotate.

[0043] In application, the top of the rotating rod 21 can extend into the vacuum chamber, and the height can be adjusted by the first lifting driver 23 to adjust the distance between the target 100 and the substrate, which can reduce the requirements for the transmission position of the substrate and is suitable for a variety of different coating process requirements. At the same time, the rotating driver 24 can drive the rotating rod 21 and the target 100 to rotate, which helps to make the target 100 uniformly and stably sputtered and deposited on the surface of the substrate, helping to ensure a uniform coating effect.

[0044] As an implementation manner, the rotary driver 24 may be a motor, and the output end of the rotary driver 24 is meshedly connected to the rotary rod 21 via a connector such as a gear, so as to drive the rotary rod 21 to rotate and the rotation speed is adjustable.

[0045] As an implementation manner, the first lifting driver 23 may be a linear driving component such as a cylinder, and the first lifting driver 23 may include a plurality of them.

[0046] In one embodiment, it further includes a first screw rod 25 ; the first lifting driver 23 is a motor; the output end of the first lifting driver 23 is connected to the first screw rod 25 ; and the first fixing plate 22 is meshedly connected to the first screw rod 25 .

[0047] In this embodiment, the first lifting driver 23 can drive the first screw rod 25 to rotate, thereby driving the first fixing plate 22 to rise and fall on the support base 10. The first lifting driver 23 and the first screw rod 25 can both include a plurality.

[0048] As a further improvement, the top end of the first screw rod 25 is provided with an insulating seat 50 connected to the vacuum chamber, that is, the top end of the first screw rod 25 can be fixedly connected to the vacuum chamber through the insulating seat 50, thereby integrating the lifting and rotating mechanism with the vacuum chamber.

[0049] In one embodiment, the lifting and rotating mechanism also includes: a wiring ring 31, a second fixed plate 32 and a second lifting driver 33; the second fixed plate 32 can be lifted and lowered on the support seat 10; the wiring ring 31 can be slidably sleeved on the rotating rod 21 and fixedly connected to the second fixed plate 32; the second lifting driver 33 is transmission-connected to the second fixed plate 32, and is used to drive the second fixed plate 32 to lift and lower.

[0050] Specifically, the connecting ring 31 can be used to connect the magnetic strip and the coil. The second lifting driver 33 can drive the second fixing plate 32 and the connecting ring 31 to move up and down as a whole.

[0051] As an embodiment, the second lifting driver 33 can be a motor; the output end of the second lifting driver 33 is connected to the second screw rod 34; the second fixing plate 32 is meshed and connected to the second screw rod 34. That is, the second lifting driver 33 drives the second screw rod 34 to rotate to drive the second fixing plate 32 to rise and fall.

[0052] Furthermore, an insulating seat 50 connected to the vacuum chamber is provided at the top of the second screw rod 34. That is, the top of the second screw rod 34 can also be fixedly connected to the vacuum chamber through the insulating seat 50.

[0053] In application, the system may further include: a guide rod 40 ; the guide rod 40 is vertically fixed on the support seat 10 ; and the first fixing plate 22 and the second fixing plate 32 are both sleeved on the guide rod 40 .

[0054] The guide rod 40 is used to provide a guide for the lifting of the first fixing plate 22 and the second fixing plate 32. In addition, a connection seat 41 for connecting the vacuum chamber is provided at the top of the guide rod 40, so that the guide rod 40 can be fixedly connected to the vacuum chamber through the connection seat 41.

[0055] In one embodiment, since the target material 100 generates a large amount of heat during the coating process, the lifting and rotating mechanism further includes a water cooling device 60 ; the water cooling device 60 is fixedly connected to the wiring ring 31 .

[0056] Specifically, the water cooling device 60 can be sleeved on the rotating rod 21, and the rotating rod 21 is telescopically connected to the water cooling device 60. The bottom of the water cooling device 60 is fixed to the second fixing plate 32 through a fixing sleeve 61. A sealing ring 62 is sleeved on the water cooling device 60, so that the top of the water cooling device 60 can pass through the vacuum cavity and be sealed and connected to the vacuum cavity through the sealing ring 62.

[0057] A second aspect of the present application provides a vacuum coating device, comprising any of the above-mentioned lifting and rotating mechanisms.

[0058] Specifically, the vacuum coating equipment provided in this embodiment also includes a vacuum chamber, and the insulating seat 50 and the connecting seat 41 in the lifting and rotating mechanism are fixedly connected to the vacuum chamber, and are sealed and connected to the vacuum chamber through a sealing ring 62. During the coating process, the water cooling device 60 and the wiring ring 31 can be driven to lift and lower through the second lifting driver 33, and the rotating rod 21 and the target material 100 can be driven to lift and rotate through the first lifting driver 21 and the rotating driver 24, which can meet the high requirements of different coating processes for ITO targets. It should be noted that the other components included in the vacuum coating equipment can be components in the prior art, which will not be described in detail in this solution.

[0059] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A lifting and rotating mechanism, characterized in that: include: A support seat (10), a rotating rod (21), a first fixing plate (22), a first lifting drive (23) and a rotating drive (24); The rotating rod (21) is rotatably disposed on the first fixing plate (22); The rotating rod (21) is used to place the target material (100); The first fixing plate (22) is movably disposed on the supporting seat (10); The first lifting driver (23) is drivingly connected to the first fixing plate (22) and is used to drive the first fixing plate (22) to rise and fall; The rotary driver (24) is transmission-connected to the rotary rod (21) and is used to drive the rotary rod (21) to rotate.

2. The lifting and rotating mechanism according to claim 1, characterized in that: Also includes a first screw rod (25); The first lifting drive (23) is a motor; The output end of the first lifting drive (23) is connected to the first screw rod (25); The first fixing plate (22) is meshingly connected to the first screw rod (25).

3. The lifting and rotating mechanism according to claim 2, characterized in that: An insulating seat (50) connected to the vacuum cavity is provided at the top end of the first screw rod (25).

4. The lifting and rotating mechanism according to any one of claims 1 to 3, characterized in that: Also includes: A wiring ring (31), a second fixing plate (32) and a second lifting drive (33); The second fixing plate (32) is movably disposed on the support seat (10); The wiring ring (31) can be slidably sleeved on the rotating rod (21) and is fixedly connected to the second fixing plate (32); The second lifting driver (33) is drivingly connected to the second fixing plate (32) and is used to drive the second fixing plate (32) to rise and fall.

5. The lifting and rotating mechanism according to claim 4, characterized in that: Also includes a second screw rod (34); The second lifting drive (33) is a motor; The output end of the second lifting drive (33) is connected to the second screw rod (34); The second fixing plate (32) is meshingly connected to the second screw rod (34).

6. The lifting and rotating mechanism according to claim 5, characterized in that: An insulating seat (50) connected to the vacuum cavity is provided at the top end of the second screw rod (34).

7. The lifting and rotating mechanism according to claim 4, characterized in that: Also includes: A guide rod (40); The guide rod (40) is vertically fixed on the support seat (10); The first fixing plate (22) and the second fixing plate (32) are both sleeved on the guide rod (40).

8. The lifting and rotating mechanism according to claim 7, characterized in that: A connecting seat (41) for connecting to a vacuum chamber is provided at the top end of the guide rod (40).

9. The lifting and rotating mechanism according to claim 4, characterized in that: Also includes a water cooling device (60); The water cooling device (60) is fixedly connected to the wiring ring (31).

10. A vacuum coating device, characterized in that: It comprises the lifting and rotating mechanism described in any one of claims 1 to 9.

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