Swing arm mechanism and die bonding equipment

Abstract

The utility model relates to the technical field of die bonding, and discloses a swing arm mechanism and die bonding equipment. The suction nozzle is rotatably mounted on the swing arm; the rotary driving device is used for driving the suction nozzle to rotate and is mounted on the swing arm; the gas circuit structure comprises a cover body and a gas pipe joint mounted on the cover body, and the cover body is rotatably and hermetically connected with the top end of the suction nozzle to form a sealed cavity; an adsorption opening is formed in the bottom end of the suction nozzle and communicated with the sealing cavity, and the air pipe connector is communicated with the sealing cavity. According to the swing arm mechanism and the die bonding equipment, the wafer correction precision can be improved, and the die bonding precision can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal bonding, in particular to a swing arm mechanism and crystal bonding equipment. Background Art

[0002] The current swing arm for crystal bonding is provided with a suction nozzle, one end of which is provided with a suction port, and the other end is directly connected to an air pipe, and is provided with a synchronous belt for driving the suction nozzle to rotate. The existing swing arm has the following technical defects: when the synchronous belt drives the suction nozzle to rotate, the air pipe will rotate along with the suction nozzle, and the deformation of the air pipe itself will affect the rotation accuracy of the suction nozzle, thereby affecting the correction accuracy of the wafer adsorbed by the suction nozzle, thereby reducing the crystal bonding accuracy.

[0003] In view of this, it is necessary to design a swing arm mechanism and a die bonding device that can help improve the die bonding accuracy. Utility Model Content

[0004] The utility model aims to provide a swing arm mechanism and a crystal bonding device, which can help improve the crystal bonding accuracy.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A swing arm mechanism, comprising:

[0007] Swing arm;

[0008] A suction nozzle, rotatably mounted on the swing arm;

[0009] A rotary drive device, used for driving the suction nozzle to rotate, and installed on the swing arm;

[0010] The air path structure includes a cover body and an air pipe joint installed on the cover body, wherein the cover body and the top end of the suction nozzle are rotatably sealed and connected to form a sealed cavity; a suction port is provided at the bottom end of the suction nozzle, the suction port is connected to the sealed cavity, and the air pipe joint is connected to the sealed cavity.

[0011] Optionally, the cover body has a connecting hole, the top of the suction nozzle forms a stepped shaft, and the stepped shaft extends into the connecting hole;

[0012] A sealing component is installed on the stepped shaft, and the sealing component seals the gap between the stepped shaft and the connecting hole to form the sealed cavity.

[0013] Optionally, the stepped shaft is further provided with a bearing, the top surface of the bearing supports the sealing assembly, and the bottom surface of the bearing contacts the stepped surface of the stepped shaft.

[0014] Optionally, the inner ring of the bearing is sleeved on the stepped shaft, and the outer ring of the bearing abuts against the hole wall of the mounting hole of the swing arm.

[0015] The sealing assembly includes a sealing ring and a sealing nut, which are stacked; the sealing ring is sleeved on the stepped shaft, the sealing nut is threadedly connected to the stepped shaft, and the sealing nut presses the sealing nut against the bearing.

[0016] Optionally, a perspective window is provided on the top of the cover body, the suction nozzle has a vertical hole, one end of the vertical hole is connected to the sealing cavity, and the other end is connected to the suction port, and the perspective window is opposite to the vertical hole.

[0017] Optionally, at least two limiting protrusions are provided on the outer peripheral surface of the cover body;

[0018] The cover body is fixedly connected to the swing arm, and the limiting protrusion abuts against the top surface of the swing arm.

[0019] Optionally, the rotary drive device includes a drive motor, a second synchronous pulley mounted on a drive shaft of the drive motor, and a first synchronous pulley mounted on the suction nozzle, and a synchronous belt is tensioned between the second synchronous pulley and the first synchronous pulley.

[0020] Optionally, the air pipe joint is connected to a vacuum generating device.

[0021] A crystal bonding device comprises a swing arm mechanism as described in any one of the above items.

[0022] Compared with the prior art, the utility model has the following beneficial effects:

[0023] In the present embodiment, the cover body and the top end of the adsorption are rotatably sealed and connected so that the air pipe structure does not rotate when the cover body rotates, thereby avoiding the situation where the rotation accuracy of the suction nozzle is affected by the deformation of the air pipe. The air pipe joint and the adsorption hole are connected through the sealing cavity, which can ensure that the suction nozzle can work normally. This is equivalent to improving the precision of the solid crystal while ensuring that the suction nozzle can work normally. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0025] The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantive technical significance. Any structural modification, change in proportion or adjustment of size, without affecting the effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical contents disclosed by the present invention.

[0026] Figure 1 A schematic diagram of the three-dimensional structure of the swing arm mechanism provided in the embodiment of the utility model;

[0027] Figure 2 A schematic diagram of the installation structure of the suction nozzle, the rotary drive device and the air path structure provided in the embodiment of the utility model;

[0028] Figure 3 for Figure 2 A schematic cross-sectional view of the structure;

[0029] Figure 4 for Figure 2 Axonometric section diagram of the structure.

[0030] Illustrations: 1. Swing arm; 2. Suction nozzle; 201. Vertical hole; 3. Rotary drive device; 401. Sealing chamber; 41. Cover body; 42. Air pipe joint; 43. Perspective window; 44. Limiting protrusion; 5. Sealing assembly; 51. Sealing ring; 52. Sealing nut; 6. Bearing; 7. Driving motor; 71. First synchronous pulley; 701. Synchronous belt. DETAILED DESCRIPTION

[0031] In order to make the utility model's purpose, features, and advantages more obvious and easy to understand, the following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the embodiments described below are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally arranged component at the same time.

[0033] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0034] Embodiment 1

[0035] The embodiment of the utility model provides a swing arm mechanism, which can help improve the correction accuracy and further help improve the crystal bonding accuracy.

[0036] See also Figures 1 to 4 The swing arm mechanism includes: a swing arm 1; a suction nozzle 2, which can be rotatably installed on the swing arm 1; a rotation driving device 3, used to drive the suction nozzle 2 to rotate, installed on the swing arm 1; an air path structure, including a cover body 41 and an air pipe joint 42 installed on the cover body 41, the cover body 41 and the top of the suction nozzle 2 can be rotatably sealed to form a sealed cavity 401; the bottom end of the suction nozzle 2 is provided with a suction port, the suction port is connected to the sealed cavity 401, and the air pipe joint 42 is connected to the sealed cavity 401.

[0037] Specifically, the sealed cavity 401 is connected to the air pipe joint 42 and the suction port of the suction nozzle 2 respectively, so that the suction nozzle 2 can work normally. The cover body 41 is rotatably sealed and connected to the top of the suction nozzle 2, so that when the suction nozzle 2 rotates, the cover body 41 is not affected, that is, the air pipe joint 42 connected to the cover body 41 and the corresponding air pipe will not be deformed at this time; the air pipe will not be deformed due to the rotation of the suction nozzle 2, and the air pipe will not affect the correction accuracy of the suction nozzle, so that the correction accuracy of the chip is higher, which can further help improve the solid crystal accuracy. It should be noted that for the swing arm in the prior art, the rotation of the suction nozzle 2 will drive the deflection of the air pipe, because the force is mutual, and the force of the air pipe to restore the deformation after deformation will also act on the suction nozzle, resulting in a certain deviation in the rotation accuracy of the suction nozzle. This will not happen in the swing arm mechanism in this embodiment, that is, the suction nozzle 2 rotates to correct the chip with a higher accuracy.

[0038] Optionally, the cover body 41 has a connection hole, the top of the suction nozzle 2 forms a stepped shaft, and the stepped shaft extends into the connection hole; a sealing component 5 is installed on the stepped shaft, and the sealing component 5 seals the gap between the stepped shaft and the connection hole to form a sealed cavity 401. The setting of the connection hole can effectively facilitate the assembly of the suction nozzle 2, the sealing component 5 and other components, which is conducive to improving the assembly efficiency and also facilitates the formation of the sealed cavity 401.

[0039] Optionally, the stepped shaft is further provided with a bearing 6, the top surface of the bearing 6 supports the sealing assembly 5, and the bottom surface of the bearing 6 contacts the stepped surface of the stepped shaft. Optionally, the inner ring of the bearing 6 is sleeved on the stepped shaft, and the outer ring of the bearing 6 contacts the hole wall of the mounting hole of the swing arm 1, so that the suction nozzle 2 can be better fixed and the suction nozzle 2 can be rotated relative to the swing arm 1.

[0040] Optionally, the sealing assembly 5 includes a sealing ring 51 and a sealing nut 52, which are stacked; the sealing ring 51 is sleeved on the stepped shaft, the sealing nut 52 is threadedly connected to the stepped shaft, and the sealing nut 52 presses the sealing nut 52 against the bearing 6. Specifically, the sealing nut 52 presses the sealing ring 51 against the end face of the bearing 6, which can better fix the bearing 6 and prevent the bearing 6 from falling. In addition, the sealing ring 51 seals the gap between the stepped shaft and the connecting hole, which can effectively improve the sealing effect and reduce the possibility of air leakage.

[0041] Optionally, a perspective window 43 is provided on the top of the cover body 41, and the suction nozzle 2 has a vertical hole 201, one end of the vertical hole 201 is connected to the sealed cavity 401, and the other end is connected to the suction port, and the perspective window 43 is opposite to the vertical hole 201. Specifically, the detection camera can determine whether the suction nozzle 2 accurately absorbs the wafer through the perspective window 43 and the vertical hole 201, and detect the rotation angle of the wafer to further correct the rotation angle of the wafer. The perspective window 43 includes a window provided on the cover body 41 and a transparent plate installed on the window, and the transparent plate seals the window to avoid air leakage. The transparent plate can be made of glass or other transparent materials. Generally, the higher the transparency of the transparent plate, the better.

[0042] Optionally, at least two limiting protrusions 44 are provided on the outer circumference of the cover body 41; the cover body 41 is fixedly connected to the swing arm 1, and the limiting protrusions 44 abut against the top surface of the swing arm 1. In this embodiment, the limiting protrusions 44 are used for both limiting and fixing the cover body 41 on the swing arm 1, that is, the fastener can pass through the limiting protrusions 44 to detachably fix the cover body 41 on the swing arm 1.

[0043] Optionally, the rotary drive device 3 includes a drive motor 7, a second synchronous pulley installed on the drive shaft of the drive motor 7 and a first synchronous pulley 71 installed on the suction nozzle 2, and a synchronous belt 701 is tensioned between the second synchronous pulley and the first synchronous pulley.

[0044] Optionally, the air pipe joint 42 is connected to a vacuum generating device so that the suction nozzle 2 can suck the wafer.

[0045] Embodiment 2

[0046] This embodiment discloses a die bonding device, including the swing arm mechanism as described in the first embodiment.

[0047] As described above, the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments can still be modified, or some of the technical features can be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A swing arm mechanism, characterized in that: include: Swing arm (1); A suction nozzle (2) rotatably mounted on the swing arm (1); A rotary drive device (3), used for driving the suction nozzle (2) to rotate, and installed on the swing arm (1); The air path structure comprises a cover body (41) and an air pipe joint (42) mounted on the cover body (41); the cover body (41) and the top end of the suction nozzle (2) are rotatably sealed and connected to form a sealed cavity (401); the bottom end of the suction nozzle (2) is provided with a suction port, the suction port is connected to the sealed cavity (401), and the air pipe joint (42) is connected to the sealed cavity (401).

2. The swing arm mechanism according to claim 1, characterized in that: The cover body (41) has a connecting hole, and the top of the suction nozzle (2) forms a stepped shaft, and the stepped shaft extends into the connecting hole; A sealing component (5) is mounted on the stepped shaft, and the sealing component (5) seals the gap between the stepped shaft and the connecting hole to form the sealing cavity (401).

3. The swing arm mechanism according to claim 2, characterized in that: The stepped shaft is also equipped with a bearing (6), the top surface of the bearing (6) supports the sealing assembly (5), and the bottom surface of the bearing (6) contacts the stepped surface of the stepped shaft.

4. The swing arm mechanism according to claim 3, characterized in that: The inner ring of the bearing (6) is sleeved on the stepped shaft, and the outer ring of the bearing (6) abuts against the wall of the mounting hole of the swing arm (1).

5. The swing arm mechanism according to claim 3, characterized in that: The sealing assembly (5) comprises a sealing ring (51) and a sealing nut (52), wherein the sealing ring (51) and the sealing nut (52) are stacked; the sealing ring (51) is sleeved on the stepped shaft, the sealing nut (52) is threadedly connected to the stepped shaft, and the sealing nut (52) presses the sealing nut (52) against the bearing (6).

6. The swing arm mechanism according to claim 1, characterized in that: A perspective window (43) is provided on the top of the cover body (41); the suction nozzle (2) has a vertical hole (201); one end of the vertical hole (201) is connected to the sealed cavity (401), and the other end is connected to the suction port; the perspective window (43) is directly opposite to the vertical hole (201).

7. The swing arm mechanism according to claim 1, characterized in that: At least two limiting protrusions (44) are arranged on the outer peripheral surface of the cover body (41); The cover body (41) is fixedly connected to the swing arm (1), and the limiting protrusion (44) abuts against the top surface of the swing arm (1).

8. The swing arm mechanism according to claim 1, characterized in that: The rotary drive device (3) comprises a drive motor (7), a second synchronous pulley mounted on the drive shaft of the drive motor (7), and a first synchronous pulley (71) mounted on the suction nozzle (2), wherein a synchronous belt (701) is tensioned between the second synchronous pulley and the second synchronous pulley.

9. The swing arm mechanism according to claim 1, characterized in that: The air pipe joint (42) is connected to a vacuum generating device.

10. A die bonding device, characterized in that: The invention comprises a swing arm mechanism as claimed in any one of claims 1 to 9.

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