Vacuum transmission platform

Abstract

The utility model provides a vacuum transmission platform, and belongs to the technical field of wafer processing. Which comprises a vacuum cavity, and is characterized by comprising a lifting platform and a lifting device which are arranged in the vacuum cavity, the lifting device comprises a guide pipe and a transmission structure; one end of the guide pipe penetrates through the vacuum cavity and is fixedly connected with the lifting platform, and the other end of the guide pipe is provided with a transmission structure for driving the guide pipe to ascend and descend; a sealing assembly is arranged at the position, penetrating through the vacuum cavity, of the guide pipe. The sealing assembly is composed of a sealing flange and a sealing ring, the vacuum state in the vacuum cavity is guaranteed in the lifting process of the guide pipe, and the sealing effect is better.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a vacuum transmission platform. Background Art

[0002] In the field of semiconductor manufacturing, wafers are core components, and the manufacturing process has extremely high requirements for precision, cleanliness, and environmental control. Therefore, during the wafer transmission process, it is necessary to ensure that the vacuum environment of the wafer is closed during the transmission process to prevent the intrusion of external pollutants. How to move the wafer position in a vacuum environment so that the wafer can be normally picked up and processed by the robotic arm has become a problem that technicians need to solve.

[0003] The patent application number (CN202311365622.X) discloses a wafer transfer device and control method, in which the lifting platform in a vacuum is described as follows: "Place the wafer box 100 on the lifting platform 25, and a lifting platform driving component is provided on the outer side of the first carrying cavity 22. The driving end of the lifting platform driving component is sealed and penetrates the cavity wall of the first carrying cavity 22 and is connected to the lifting platform 25. The lifting platform driving component drives the lifting platform 25 to rise and fall to adjust the position of the wafer 200 on the wafer box 100, so that the fingers 611 of the robot mechanism 6 can take the wafer 200. The structure of the lifting platform driving component is prior art and will not be described in detail here." The above patent does not disclose the specific structure of the wafer box lifting device.

[0004] Nowadays, the requirements for wafer transfer devices are gradually increasing, and technicians also have more requirements for wafer box lifting devices. The wafer box lifting device needs to ensure the stability of wafer lifting and lowering, ensure the vacuum environment, and make the structure as simple as possible. Utility Model Content

[0005] The purpose of this application is to provide a wafer box lifting device for use in a hollow environment. It has excellent sealing performance, a simple structure, and can detect whether the standard box is placed correctly and whether the level is correct. Therefore, this application provides a vacuum transmission platform, in which the transmission structure is arranged outside the vacuum chamber, the guide tube runs through the vacuum chamber and drives the lifting platform to rise and fall, and at the same time, a sealing flange and a sealing ring are used to form a vacuum detection chamber, so that the sealing performance of the connection between the guide tube and the vacuum chamber is better, with a simple structure and better sealing performance.

[0006] An embodiment of the present application provides a vacuum transmission platform, comprising a vacuum chamber, a lifting platform arranged in the vacuum chamber, and a lifting device for driving the lifting platform;

[0007] The lifting device comprises a guide tube and a transmission structure;

[0008] One end of the guide tube passes through the vacuum chamber and is fixedly connected to the lifting platform, and the other end of the guide tube is provided with a transmission structure for driving the guide tube to rise and fall;

[0009] A sealing assembly is provided at a position where the guide tube passes through the vacuum chamber;

[0010] The sealing assembly includes a sealing flange which is sleeved on the guide tube and fixed on the outer surface of the vacuum chamber. A vacuum detection chamber is formed between the guide tube and the sealing flange. The sealing flange is provided with an exhaust interface which is connected to the vacuum detection chamber.

[0011] By adopting the above technical scheme, the transmission structure is arranged outside the vacuum chamber, and the lifting platform is lifted and lowered by the guide tube, which is convenient for the maintenance of the transmission structure on the one hand, and reduces the volume of the vacuum chamber on the other hand; a sealing assembly is arranged at the connection between the guide tube and the vacuum chamber body, and is sealed by a flange and a sealing ring to ensure the sealing of the flange during the up and down movement of the guide shaft; the sealing flange is also provided with an exhaust interface that connects the vacuum detection chamber with the outside, and the air in the vacuum detection chamber can be extracted through the exhaust interface.

[0012] In some embodiments, the vacuum chamber is provided with a box inlet and a door opening mechanism for opening and closing the box inlet; the vacuum chamber is also provided with a film taking port; the film taking port is provided on a side away from the box inlet; the film taking port is used to be sealed and connected to an external device;

[0013] The guide tube passes through the bottom of the vacuum chamber, and the transmission structure is located below the vacuum chamber.

[0014] After the wafer is placed on the lifting platform through the box inlet, the box inlet is closed by a door opening mechanism to put the vacuum chamber in a vacuum state, and then the wafer is taken out from the wafer taking port and processed in a vacuum environment.

[0015] In some embodiments, two in-position sensors are provided on the lifting platform to detect whether the standard box is placed correctly and leveled correctly, so as to facilitate the subsequent taking of the wafer.

[0016] In some embodiments, the guide tube is configured as a hollow tube, and the guide tube is fixedly connected to the lifting platform through a supporting chassis. An aviation plug is sealed on the supporting chassis so that the line can be routed through the hollow tube.

[0017] By adopting the above technical solution, the circuits of the electronic devices on the lifting platform can enter the hollow tube through the aviation plug and pass through the other end of the hollow tube. The aviation joint module is designed to be sealed and connected to an axial hollow conduit at the bottom, which can ensure the sealing of the vacuum chamber.

[0018] In some embodiments, the transmission structure includes a threaded rod arranged parallel to the guide tube, a threaded slider sleeved on the threaded rod, a servo motor for driving the threaded rod to rotate, and a lifting guide rail arranged parallel to the threaded rod;

[0019] The threaded rod and the lifting guide rail are fixedly arranged on the outer surface of the vacuum chamber;

[0020] The threaded slider is slidably disposed on the lifting guide rail and is fixedly connected to one end of the guide tube passing through the outside of the vacuum chamber.

[0021] The use of a combination of guide rails and lead screws can make the guide tube rise and fall more smoothly. The guide tube, lead screw and guide rails are arranged parallel to each other, with a compact structure and higher transmission efficiency.

[0022] In some embodiments, the servo motor is connected to the guide tube via a coupling to eliminate vibrations caused by rotation and enable the guide tube to rise and fall more smoothly.

[0023] In some embodiments, the transmission structure further includes a transition plate, which is sleeved on the guide tube and sealed on the outer surface of the vacuum chamber;

[0024] The sealing flange is sealingly arranged on the transition plate, and the threaded rod and the lifting guide rail are fixedly arranged on the transition plate.

[0025] By adopting the above technical solution, the transmission structure and the sealing assembly are connected into a whole through a transition plate, and the transition plate is sleeved on the guide tube and sealed and fixed on the outer surface of the vacuum chamber. This can make the structure more compact and convenient for maintenance and replacement, and can ensure the parallelism of the guide tube, the screw rod and the guide rail to a greater extent, improve the stability of the guide tube lifting and lowering, reduce the wear caused by the operation of the structure, and improve the sealing effect.

[0026] In some embodiments, the guide tube is further provided with a retaining ring, the retaining ring is located in the vacuum chamber and is sealed on the inner surface of the vacuum chamber;

[0027] The lower end of the retaining ring extends into the gap between the guide tube and the sealing cavity to protect the hole opened on the sealing cavity.

[0028] In some embodiments, a first sealing ring, a second sealing ring and a third sealing ring are arranged in the sealing flange, and a circle of stopper protrusions is arranged on one side of the sealing flange wrapping the guide tube and on one end close to the outer surface of the vacuum chamber, the first sealing ring is arranged on the upper side of the stopper protrusion, and the second sealing ring is arranged on the lower side of the stopper protrusion;

[0029] A circle of groove is arranged on one side of the sealing flange wrapping the guide tube, and the groove is located below the stop block protrusion. A third sealing ring is arranged in the groove, and the vacuum detection chamber is formed by the third sealing ring and the second sealing ring.

[0030] By adopting the above technical solution, three sealing rings are used to manufacture a three-layer sealing structure, which has a better sealing effect. At the same time, the second sealing ring and the third sealing ring surround the vacuum detection chamber. The air in the vacuum detection chamber can be extracted through the vacuum joint, thereby further improving the sealing effect and ensuring the sealing of the flange of the guide tube during the up and down movement.

[0031] In some embodiments, the sealing assembly further comprises a first retaining ring, a second retaining ring and a third retaining ring, all of which are sleeved on the guide tube; the first retaining ring, the second retaining ring and the third retaining ring are all arranged on the contact surface between the sealing flange and the guide tube;

[0032] The first retaining ring is arranged on the upper side of the first sealing ring, and constrains the first sealing ring together with the retaining block protrusion;

[0033] The second retaining ring is arranged in the groove and is located on the upper side of the third sealing ring;

[0034] The third retaining ring is fixed to the lower end of the sealing flange, the third retaining ring is in close contact with the third sealing ring, and the second retaining ring and the third retaining ring jointly constrain the third sealing ring.

[0035] By adopting the above technical solution, a groove and a retaining ring are provided to constrain the sealing ring, thereby preventing the sealing ring from moving up and down with the guide tube and squeezing the sealing ring, thereby achieving a better sealing effect.

[0036] In some embodiments, the first retaining ring is L-shaped, including an annular upper retaining ring and an annular lower retaining ring;

[0037] The upper retaining ring extends into the gap between the guide tube and the vacuum chamber, with the inner side close to the guide tube and the outer side close to the vacuum chamber;

[0038] The lower retaining ring is arranged between the sealing flange and the outer surface of the vacuum chamber, and the lower side of the lower retaining ring is in close contact with the first sealing ring.

[0039] By adopting the above technical solution, a maze structure is formed at the connection between the sealing flange and the vacuum chamber, which cooperates with the sealing ring used for sealing the sealing flange in the vacuum chamber to further increase the sealing effect. At the same time, the first retaining ring can also withstand part of the extrusion force to protect the holes opened on the vacuum chamber.

[0040] Other features and corresponding beneficial effects of the present invention are described in the latter part of the specification, and it should be understood that at least part of the beneficial effects become obvious from the description in the specification of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 A front elevation view of a vacuum transmission platform and an external vacuum chamber provided in an embodiment of the present application;

[0042] Figure 2 A vertical view of the back of a vacuum transmission platform and an external vacuum chamber provided in an embodiment of the present application;

[0043] Figure 3 This is an elevation view of the interior of a vacuum chamber after a wafer box is loaded on a vacuum transfer platform provided in an embodiment of the present application;

[0044] Figure 4 An elevation view of the position of a transition plate of a vacuum transmission platform provided in an embodiment of the present application;

[0045] Figure 5 An elevation view of the transmission structure position of a vacuum transmission platform provided in an embodiment of the present application;

[0046] Figure 6 An elevation view of a vacuum transfer platform lifting platform loaded with a wafer box provided in an embodiment of the present application;

[0047] Figure 7 A cross-sectional view of the sealing flange position of a vacuum transmission platform provided in an embodiment of the present application.

[0048] Description of reference numerals:

[0049] 1. Vacuum chamber

[0050] 2. Lifting platform; 21. In-position sensor;

[0051] 3. Lifting device; 31. Guide tube; 32. Transmission structure;

[0052] 321, threaded rod; 322, threaded slider; 323, servo motor; 324, lifting guide rail;

[0053] 325, transition plate;

[0054] 4. Sealing assembly; 41. Sealing flange;

[0055] 421, a first sealing ring; 422, a second sealing ring; 423, a third sealing ring;

[0056] 43. Vacuum detection chamber; 44. Air extraction interface;

[0057] 45. stopper protrusion; 46. groove;

[0058] 471, first retaining ring; 472, second retaining ring; 473, third retaining ring;

[0059] 5. Box inlet; 6. Door opening mechanism; 7. Film removal port. DETAILED DESCRIPTION

[0060] The following specific embodiments illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this implementation. On the contrary, the purpose of introducing the invention in conjunction with the implementation is to cover other options or modifications that may extend based on the claims of the present invention. In order to provide a deep understanding of the present invention, the following description will include many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0061] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0062] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0063] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description created by the present application, unless otherwise specified, "multiple" means two or more.

[0064] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0065] In order to make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0066] See also Figures 1 to 7 , Figure 7 A front elevation view of a vacuum transmission platform and an external vacuum chamber provided in an embodiment of the present application; Figure 2 A vertical view of the back of a vacuum transmission platform and an external vacuum chamber provided in an embodiment of the present application; Figure 3 This is an elevation view of the interior of a vacuum chamber after a wafer box is loaded on a vacuum transfer platform provided in an embodiment of the present application; Figure 4 An elevation view of the position of a transition plate of a vacuum transmission platform provided in an embodiment of the present application; Figure 5 An elevation view of the transmission structure position of a vacuum transmission platform provided in an embodiment of the present application; Figure 6 An elevation view of a vacuum transfer platform lifting platform loaded with a wafer box provided in an embodiment of the present application; Figure 7 A cross-sectional view of the sealing flange position of a vacuum transmission platform provided in an embodiment of the present application.

[0067] like Figures 1 to 7 As shown, an embodiment of the present application provides a vacuum transmission platform, including a vacuum chamber 1, a lifting platform 2 arranged in the vacuum chamber 1, and a lifting device 3 for driving the lifting platform to lift;

[0068] Two in-position sensors 21 are provided on the lifting platform 2. The in-position sensors 21 are micro switches that can detect whether the wafer box is horizontally placed in a fixed position, ensuring that the wafer box is correctly placed to facilitate subsequent wafer processing.

[0069] The lifting device 3 includes a guide tube 31 and a transmission structure 32; the guide tube 31 is set as a hollow tube, the upper end of the guide tube 31 is fixedly connected to the lifting platform 2 through the supporting chassis, driving the lifting platform 2 to rise and fall, the supporting chassis is hollow inside, and the guide tube 31 is axially connected downward, and an aviation plug is sealed on the supporting chassis, so that the line can be routed through the hollow tube.

[0070] The lower end of the guide tube 31 is provided with a transmission structure 32 for driving the guide tube 31 to rise and fall;

[0071] The vacuum chamber 1 is provided with a box inlet 5 and a door opening mechanism 6 for opening and closing the box inlet; the vacuum chamber 1 is also provided with a film taking port 7; the film taking port 7 is arranged on a side away from the box inlet 5; the film taking port 7 is used to be sealed and connected with an external device;

[0072] The guide tube 31 passes through the bottom of the vacuum chamber 1 , and the transmission structure 32 is located below the vacuum chamber 1 .

[0073] The transmission structure 32 includes a threaded rod 321 arranged parallel to the guide tube 31, a threaded slider 322 sleeved on the threaded rod 321, a servo motor 323 for driving the threaded rod 321 to rotate, and a lifting guide rail 324 arranged parallel to the threaded rod 321;

[0074] The threaded rod 321 and the lifting guide rail 324 are both fixedly arranged on the outer surface of the vacuum chamber 1;

[0075] In some embodiments, the transmission structure 32 further includes a transition plate 325, which is sleeved on the guide tube 31 and sealed on the outer surface of the vacuum chamber 1, a sealing flange 41 is sealed on the transition plate 325, a threaded rod 321 is set on the transition plate 325 through a screw rod support, and the transition plate 325 also includes a mounting plate, which is parallel to the guide tube 31, and a lifting guide rail 324 is fixedly mounted on the mounting plate. The servo motor 323 is located directly below the screw rod and is fixedly connected to the mounting plate through a motor seat. The servo motor 323 is fixed, thereby ensuring the stability of the rotation of the servo motor 323.

[0076] In some embodiments, a lifting block is also provided on the mounting plate to prevent the threaded slider 322 from colliding during the rising process and causing damage to the equipment.

[0077] In some embodiments, a retaining ring is further sleeved on the guide tube 31 , and the retaining ring is located in the vacuum chamber 1 and is sealed on the inner surface of the vacuum chamber 1 .

[0078] The threaded slider 322 is slidably disposed on the lifting guide rail 324, and is fixedly connected to one end of the guide tube 31 passing through the vacuum chamber 1 through a shaft sleeve. When the threaded slider 322 rises, the guide tube 31 is driven to rise.

[0079] A sealing assembly 4 is provided at the position where the guide tube 31 passes through the vacuum chamber 1 , so that the guide tube 31 can also be sealed during the lifting process.

[0080] The sealing assembly 4 includes a sealing flange 41 which is sleeved on the guide tube 31 and fixed on the outer surface of the vacuum chamber 1 and three sealing rings which are arranged between the sealing flange 41 and the guide tube 31;

[0081] A vacuum detection chamber 43 is provided between the guide tube 31 and the sealing flange 41, and an air extraction interface 44 for connecting the vacuum detection chamber 43 with the outside is also provided on the sealing flange 41. The air in the vacuum detection chamber 43 is extracted through the air extraction interface 44 to prevent the guide tube 31 from bringing air into the vacuum chamber 1 during the lifting and lowering, thereby achieving a better sealing effect of the structure.

[0082] In one embodiment, the three sealing rings include a first sealing ring 421, a second sealing ring 422 and a third sealing ring 423. A circle of stopper protrusions 45 are arranged on one side of the sealing flange 41 wrapping around the guide tube 31 and on one end close to the outer surface of the vacuum chamber 1. The first sealing ring 421 is arranged on the upper side of the stopper protrusion 45, and the second sealing ring 422 is arranged on the lower side of the stopper protrusion 45.

[0083] A circle of groove 46 is provided on one side of the sealing flange 41 wrapping around the guide tube 31. The groove 46 is located below the stopper protrusion 45. A third sealing ring 423 is provided in the groove 46. The third sealing ring 423 and the second sealing ring 422 are sealed to form a vacuum detection chamber 43.

[0084] In one embodiment, the sealing assembly 4 further includes a first retaining ring 471, a second retaining ring 472 and a third retaining ring 473, all of which are sleeved on the guide tube 31; the first retaining ring 471, the second retaining ring 472 and the third retaining ring 473 are all arranged on the contact surface between the sealing flange 41 and the guide tube 31;

[0085] The first retaining ring 471 is disposed on the upper side of the first sealing ring 421, and together with the retaining block protrusion 45 constrains the first sealing ring 421;

[0086] The second retaining ring 472 is disposed in the groove 46 and is located on the upper side of the third sealing ring 423;

[0087] The third retaining ring 473 is fixed to the lower end of the sealing flange 41 . The third retaining ring 473 is in close contact with the third sealing ring 423 . The second retaining ring 472 and the third retaining ring 473 jointly constrain the third sealing ring 423 .

[0088] In one embodiment, the first retaining ring 473 is L-shaped, including an annular upper retaining ring and an annular lower retaining ring;

[0089] The upper retaining ring extends into the gap between the guide tube 31 and the vacuum chamber 1, with the inner side close to the guide tube 31 and the outer side close to the vacuum chamber 1;

[0090] The lower retaining ring is disposed between the sealing flange 41 and the outer surface of the vacuum chamber 1 , and the lower side of the lower retaining ring is in close contact with the first sealing ring 421 .

[0091] In one embodiment, the vacuum chamber 1 is further provided with a wafer box inlet, a vacuum door sealed at the wafer box inlet, and a wafer outlet.

[0092] During operation, the robot arm places the wafer box on the lifting platform 2. After the in-position sensor 21 detects that the wafer box is placed correctly, the vacuum door is closed, and the inside of the vacuum chamber 1 is evacuated. The servo motor 323 drives the threaded rod 321 to rotate through the coupling, and the threaded slider 322 sleeved on the threaded rod 321 rises along the lifting guide rail 324. The guide tube 31 connected to the threaded slider 322 drives the lifting platform 2 to rise. Under the sealing of the sealing flange 41, the insertion of the guide tube 31 does not affect the vacuum performance. During the lifting and lowering process of the guide tube 31, the air in the vacuum detection chamber 43 is extracted through the exhaust interface 44, so as to further improve the vacuum environment and ensure the sealing of the sealing flange 41 during the up and down movement of the guide tube 31.

[0093] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum transmission platform, comprising a vacuum chamber, characterized in that: It includes a lifting platform arranged in a vacuum chamber, and a lifting device for driving the lifting platform to move up and down; The lifting device comprises a guide tube and a transmission structure; One end of the guide tube passes through the vacuum chamber and is fixedly connected to the lifting platform, and the other end of the guide tube is provided with a transmission structure for driving the guide tube to rise and fall; A sealing assembly is provided at a position where the guide tube passes through the vacuum chamber; The sealing assembly includes a sealing flange which is sleeved on the guide tube and fixed on the outer surface of the vacuum chamber; a vacuum detection chamber is formed between the guide tube and the sealing flange, and an exhaust interface connected to the vacuum detection chamber is provided on the sealing flange.

2. A vacuum transmission platform as claimed in claim 1, characterized in that: The vacuum chamber is provided with a box inlet and a door opening mechanism for opening and closing the box inlet; the vacuum chamber is also provided with a film taking out port; the film taking out port is provided on a side away from the box inlet; the film taking out port is used for sealing connection with an external device; The guide tube passes through the bottom of the vacuum chamber, and the transmission structure is located below the vacuum chamber.

3. A vacuum transmission platform as claimed in claim 1, characterized in that: The guide tube is configured as a hollow tube, and the guide tube is fixedly connected to the lifting platform via a supporting chassis. An aviation plug is sealed on the supporting chassis, so that the line can be routed through the hollow tube.

4. A vacuum transmission platform as claimed in claim 1, characterized in that: The transmission structure includes a threaded rod arranged parallel to the guide tube, a threaded slider sleeved on the threaded rod, a servo motor for driving the threaded rod to rotate, and a lifting guide rail arranged parallel to the threaded rod; The threaded rod and the lifting guide rail are both fixedly arranged on the outer surface of the vacuum chamber; The threaded slider is slidably disposed on the lifting guide rail and is fixedly connected to one end of the guide tube passing through the outside of the vacuum chamber.

5. A vacuum transmission platform as claimed in claim 4, characterized in that: The transmission structure further comprises a transition plate, which is sleeved on the guide tube and sealed on the outer surface of the vacuum chamber; The sealing flange is sealingly arranged on the transition plate, and the threaded rod and the lifting guide rail are fixedly arranged on the transition plate.

6. A vacuum transmission platform as claimed in claim 1, characterized in that: The guide tube is also sleeved with a retaining ring, which is located in the vacuum cavity and sealed on the inner surface of the vacuum cavity.

7. A vacuum transmission platform as claimed in claim 1, characterized in that: A first sealing ring, a second sealing ring and a third sealing ring are arranged in the sealing flange, and a circle of stopper protrusions are arranged on one end of the sealing flange wrapping the guide tube and close to the outer surface of the vacuum chamber, the first sealing ring is arranged on the upper side of the stopper protrusion, and the second sealing ring is arranged on the lower side of the stopper protrusion; A circle of groove is arranged on one side of the sealing flange wrapping the guide tube, and the groove is located below the stop block protrusion. A third sealing ring is arranged in the groove, and the vacuum detection chamber is formed by the third sealing ring and the second sealing ring.

8. A vacuum transmission platform as claimed in claim 7, characterized in that: The sealing assembly further comprises a first retaining ring, a second retaining ring and a third retaining ring, all of which are sleeved on the guide tube; the first retaining ring, the second retaining ring and the third retaining ring are all arranged on the contact surface between the sealing flange and the guide tube; The first retaining ring is arranged on the upper side of the first sealing ring, and constrains the first sealing ring together with the retaining block protrusion; The second retaining ring is arranged in the groove and is located on the upper side of the third sealing ring; The third retaining ring is fixed to the lower end of the sealing flange, the third retaining ring is in close contact with the third sealing ring, and the second retaining ring and the third retaining ring jointly constrain the third sealing ring.

9. A vacuum transmission platform as claimed in claim 8, characterized in that: The first retaining ring is L-shaped, and includes an annular upper retaining ring and an annular lower retaining ring; The upper retaining ring extends into the gap between the guide tube and the vacuum chamber, with the inner side close to the guide tube and the outer side close to the vacuum chamber; The lower retaining ring is arranged between the sealing flange and the outer surface of the vacuum chamber, and the lower side of the lower retaining ring is in close contact with the first sealing ring.

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