Positioning device

Abstract

The utility model discloses a positioning device which comprises a mechanical arm, a clamping box and a correcting assembly, the clamping box is provided with a plurality of clamping grooves, a feeding port and a discharging port, and the correcting assembly is arranged between the clamping box and the mechanical arm. The correction assembly comprises a first driving part and two correction structures, the two correction structures are oppositely arranged and connected with the first driving part so that the first driving part can drive the two correction structures to move oppositely or oppositely, each correction structure is provided with a plurality of clamping positions, and the clamping positions are clamped in the first driving part. And the clamping positions of the two correction structures are correspondingly arranged. According to the utility model, positioning correction can be carried out when the wafer is taken out every time, accumulative errors possibly generated due to long moving distance are reduced, the moving distance of the mechanical arm for correction is shortened, and the accuracy of taking and placing the wafer is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of secondary positioning of substrate sheets out of boxes, in particular to a positioning device. Background Art

[0002] In the traditional wafer processing process, the substrate needs to be moved to a fixed calibration workstation for position calibration to ensure the accuracy of each wafer pick-up and placement. However, this mode not only prolongs the overall processing time, but also may introduce additional position errors due to multiple long-distance movements of the robot. Utility Model Content

[0003] The technical problem to be solved by the utility model is that in the existing wafer processing process, the substrate needs to be moved to a fixed correction workstation for position calibration, which prolongs the overall processing time and may also introduce additional position errors due to multiple long-distance movements of the robot.

[0004] In order to solve the above technical problems, the utility model provides a positioning device, including a mechanical arm, a card box and a correction component, the card box has a plurality of card slots, a feed port and a discharge port, and the correction component is arranged between the card box and the mechanical arm;

[0005] The correction assembly includes a first driving member and two correction structures. The two correction structures are arranged opposite to each other and connected to the first driving member so that the two correction structures can be driven by the first driving member to move relative to or toward each other. The correction structure has multiple locking positions, and the locking positions of the two correction structures are arranged correspondingly.

[0006] In some embodiments, the correction structure includes a first base and a correction arm, the correction arm is mounted on the first driving member through the first base, and the first base is connected to the first driving member, and the correction arm has a plurality of the clamping positions spaced apart along its length direction.

[0007] In some embodiments, the correction arm includes a first arm and a second arm, the first arm is vertically connected to the second arm, the first arm is connected to the first base, and the second arm has the clamping position.

[0008] In some embodiments, the second arm has a side surface facing the other second arm, and the locking position is formed by the side surface being recessed inwardly.

[0009] In some embodiments, the card box includes a first side wall, a second side wall, a bottom plate and a top plate, the first side wall is arranged opposite to the second side wall, the bottom plate is arranged opposite to the top plate, the bottom plate is arranged at the bottom of the first side wall and the second side wall and is connected to the first side wall and the second side wall, the top plate is arranged at the top of the first side wall and the second side wall and is connected to the first side wall and the second side wall, the first side wall, the second side wall, the bottom plate and the top plate are enclosed to form a accommodating space that is arranged through along the first direction to define the feed port and the discharge port connected to the accommodating space, and a plurality of card slots are arranged on the first side wall and the second side wall.

[0010] In some embodiments, the robot arm includes a second base, a robot structure, a fork arm and a vacuum suction component. The robot is installed on the second base, the fork arm is connected to the robot structure, the fork arm has a vacuum suction port, and the vacuum suction component is connected to the vacuum suction port.

[0011] In some embodiments, a vacuum channel is formed in the fork arm, one end of the vacuum channel is connected to the vacuum suction port, and the other end of the vacuum channel is connected to the vacuum suction member.

[0012] In some embodiments, an arc-shaped notch is formed at the end of the fork arm, and a plurality of the vacuum suction ports are arranged at intervals along the curvature direction of the arc-shaped notch.

[0013] In some embodiments, the manipulator structure includes a third base, a second driving member, a first arm, a third driving member, a second arm and a fourth driving member, the third base is mounted on the second base, the second driving member is mounted on the third base and connected to the first arm, the third driving member is mounted on the first arm and connected to the second arm, and the fourth driving member is mounted on the second arm and connected to the fourth driving member.

[0014] In some embodiments, a mounting frame and a mounting plate are further included, the card box is mounted on the mounting frame, the mounting plate is mounted on one side of the mounting frame, and the correction component is mounted on the mounting plate.

[0015] Compared with the prior art, the positioning device of the embodiment of the utility model has the following beneficial effects:

[0016] In the embodiment of the utility model, when the robot arm clamps the wafer through the discharge port, the two correction structures adjust their positions through the control of the first driving member to ensure that the positioning of the correction structure is perfectly aligned with the position of the wafer to be taken out by the robot arm, so that each time the wafer is taken out, the positioning correction can be performed, reducing the cumulative error that may be generated due to the long moving distance, shortening the distance that the robot arm needs to move for correction, and improving the accuracy of wafer placement. Compared with the prior art, the robot arm of this embodiment does not need to be frequently moved to an independent correction station for correction, which greatly reduces non-production time, speeds up the rhythm of wafer processing, and improves overall production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a positioning device provided by an embodiment of the utility model;

[0018] Figure 2 It is a schematic diagram of the working state of the correction component provided by the embodiment of the utility model;

[0019] Figure 3 It is a schematic diagram of the structure of the mechanical arm provided by an embodiment of the utility model;

[0020] Figure 4 It is a structural schematic diagram of a fork arm provided in an embodiment of the utility model;

[0021] Figure 5 The utility model provides Figure 4 Cross-sectional view in the AA direction;

[0022] Figure 6 It is a structural schematic diagram of a card box provided by an embodiment of the utility model;

[0023] Figure 7 It is a structural schematic diagram of a mounting frame and a mounting plate provided in an embodiment of the utility model;

[0024] In the figure, 1. robot arm; 11. second base; 12. robot arm structure; 121. third base; 122. first arm; 123. second arm; 13. fork arm; 131. vacuum suction port; 132. vacuum flow channel; 133. arc-shaped notch; 2. card box; 21. card slot; 22. feed port; 23. discharge port; 24. first side wall; 25. second side wall; 26. bottom plate; 27. top plate; 3. correction component; 31. first driving member; 32. correction structure; 321. first base; 322. correction arm; 3221. first support arm; 3222. second support arm; 33. clamping position; 4. mounting frame; 5. mounting plate. DETAILED DESCRIPTION

[0025] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0026] like Figure 1 , Figure 2 and Figure 6 As shown, the utility model provides a positioning device, including a robot arm 1, a card box 2 and a correction component 3, the card box 2 has a plurality of card slots 21, a feed port 22 and a discharge port 23, so as to facilitate the input and output of wafers, wherein the correction component 3 is arranged between the card box 2 and the robot arm 1;

[0027] The correction assembly 3 includes a first driving member 31 and two correction structures 32. The two correction structures 32 are arranged opposite to each other and connected to the first driving member 31 so as to drive the two correction structures 32 to move relative to or towards each other through the first driving member 31. The correction structure 32 has multiple locking positions 33, and the locking positions 33 of the two correction structures 32 are arranged correspondingly.

[0028] Based on the above structure, when the robot arm 1 clamps the wafer through the discharge port 23, the two correction structures 32 adjust their positions through the control of the first drive member 31 to ensure that the clamping position 33 of the correction structure 32 is perfectly aligned with the position of the wafer to be taken out by the robot arm 1, so that each time the wafer is taken out, positioning correction can be performed, reducing the cumulative error that may be caused by the long moving distance, shortening the distance that the robot arm 1 needs to move for correction, and improving the accuracy of wafer placement. Compared with the prior art, the robot arm 1 of this embodiment does not need to be frequently moved to an independent correction station for correction, which greatly reduces non-production time, speeds up the rhythm of wafer processing, and improves overall production efficiency.

[0029] In some embodiments, the correction structure 32 includes a first base 321 and a correction arm 322. The correction arm 322 is installed on the first driving member 31 through the first base 321, and the first base 321 is connected to the first driving member 31, ensuring that the correction arm 322 can respond to the driving force of the first driving member 31 and make corresponding movements. The correction arm 322 has a plurality of latching positions 33 arranged at intervals along its length direction, which are used to accurately align with the wafer, ensuring that the specific position of the wafer can be accurately positioned during each correction.

[0030] In some embodiments, the correction arm 322 includes a first arm 3221 and a second arm 3222. The first arm 3221 is vertically connected to the second arm 3222. The first arm 3221 is connected to the first base 321, providing a stable base for the entire correction arm 322. The second arm 3222 has a clamping position 33 for directly contacting the wafer for position correction.

[0031] In some embodiments, the second arm 3222 has a side facing the other second arm 3222, and the clamping position 33 is formed by the side being concave inward, which can fit the edge of the wafer more closely. Compared with the convex clamping position 33 design, it can provide a more precise contact surface, reduce the positioning error caused by surface friction or deviation, and ensure the position accuracy of the wafer during the placement process. In addition, the concave structure can also provide additional lateral stability through the slight clamping effect on both sides when the wafer is placed in the clamping position 33, preventing the wafer from sliding or shifting during the placement process.

[0032] like Figure 6 As shown, the card box 2 includes a first side wall 24, a second side wall 25, a bottom plate 26 and a top plate 27. The first side wall 24 is arranged opposite to the second side wall 25, and the bottom plate 26 is arranged opposite to the top plate 27. The bottom plate 26 is arranged at the bottom of the first side wall 24 and the second side wall 25, and is connected to the first side wall 24 and the second side wall 25. The top plate 27 is arranged at the top of the first side wall 24 and the second side wall 25, and is connected to the first side wall 24 and the second side wall 25. The first side wall 24 The second side wall 25, the bottom plate 26 and the top plate 27 enclose a accommodating space which is set to penetrate along the first direction to define a feed port 22 and a discharge port 23 which are connected to the accommodating space for loading and unloading wafers. A plurality of card slots 21 are provided on the first side wall 24 and the second side wall 25. Each card slot 21 corresponds to a precise position of the wafer, ensuring that the wafer maintains a correct posture and position in the card box 2, thereby ensuring the safety and positioning accuracy of the wafer during the processing.

[0033] Read also Figure 3 and Figure 4 The robot 1 includes a second base 11, a robot structure 12, a fork arm 13 and a vacuum suction piece. The robot is installed on the second base 11 and is responsible for performing the grabbing and releasing actions of the wafer. The fork arm 13 is connected to the robot structure 12 and is used to contact and transport the wafer. The fork arm 13 has a vacuum suction port 131, and the vacuum suction piece is connected to the vacuum suction port 131. The negative pressure suction principle is used to firmly adsorb the wafer to ensure that the wafer does not fall off during the transportation process.

[0034] This embodiment realizes precise grasping and placement of the wafer through the combination of the manipulator structure 12 and the fork arm 13. In addition, the vacuum suction piece contacts the surface of the wafer through the vacuum suction port 131 to generate negative pressure, forming a strong suction force, ensuring that the wafer can also be firmly fixed, reducing the risk of slipping due to external force, and protecting the integrity of the wafer.

[0035] like Figure 5 As shown, a vacuum channel 132 is formed in the fork arm 13 , one end of the vacuum channel 132 is communicated with the vacuum suction port 131 , and the other end of the vacuum channel 132 is connected to the vacuum suction member.

[0036] In this embodiment, the vacuum suction piece is used to draw air from the vacuum suction port 131, and a local vacuum environment is formed through the vacuum flow channel 132 inside the fork arm 13. When the wafer needs to be grasped, the vacuum source is turned on, the air in the flow channel is drawn out to form a vacuum, and the vacuum suction port 131 firmly adsorbs the wafer; and when the wafer needs to be put down, it is only necessary to restore the normal air pressure, that is, to close the vacuum suction piece, the adsorption force is released, and the wafer can be placed stably.

[0037] In some embodiments, an arc-shaped notch 133 is formed at the end of the fork arm 13, and a plurality of vacuum suction ports 131 are arranged at intervals along the curvature direction of the arc-shaped notch 133. This embodiment better fixes the wafer through the evenly distributed suction force at multiple points, ensuring that the wafer will not detach during transportation due to insufficient suction force at a certain point, causing the wafer to tilt or slide due to uneven force during transportation. At the same time, it also ensures that stable suction can be achieved even when there are slight differences in wafer size.

[0038] In some embodiments, the manipulator structure 12 includes a third base 121, a second driver, a first arm 122, a third driver, a second arm 123, and a fourth driver. The third base 121 is mounted on the second base 11. The second driver is mounted on the third base 121 and connected to the first arm 122 to drive the movement of the first arm 122. The third driver is mounted on the first arm 122 and connected to the second arm 123 to provide power for the second-stage movement. The fourth driver is mounted on the second arm 123 and connected to the fourth driver to drive the rotation of the second arm 123. In this embodiment, through the combination of multi-stage drivers and two-stage arm structures, the manipulator can achieve multi-degree-of-freedom movement, including but not limited to rotation, pitch, yaw, telescopic, etc., which is essential for precise operation in complex spaces.

[0039] like Figure 6 As shown, it also includes a mounting frame 4 and a mounting plate 5. The card box 2 is installed on the mounting frame 4, the mounting plate 5 is installed on one side of the mounting frame 4, and the correction component 3 is installed on the mounting plate 5, so that the position of the correction component 3 is close to the card box 2, which is convenient for fast and accurate positioning correction when the wafer is discharged from the card box 2, shortening the conversion time of the wafer from the storage state to the correction state, reducing unnecessary moving distance, accelerating the rhythm of wafer processing, and improving the overall operation efficiency.

[0040] The working process is as follows:

[0041] Place the wafer box with the wafers on the mounting frame 4, move the robot structure 12, and move the front end of the fork arm 13 to the center of the wafer box. The wafer is adsorbed through the vacuum adsorption port 131 at the front end of the fork arm 13, and the wafer box is moved out to the correction component 3; the vacuum adsorption port 131 at the front end of the fork arm 13 stops adsorption, the first driving member 31 closes, and the correction arm 322 closes to clamp the wafer; the vacuum adsorption port 131 of the fork arm 13 adsorbs the wafer, the first driving member 31 opens, the correction arm 322 detaches from the wafer, and the robot structure 12 moves out of the position of the correction arm 322, and the operation is completed.

[0042] In summary, the embodiment of the utility model provides a positioning device, which, when the robot arm 1 clamps the wafer through the discharge port 23, the two correction structures 32 adjust their positions through the control of the first drive member 31, ensuring that the clamping position 33 of the correction structure 32 is perfectly aligned with the position of the wafer to be taken out by the robot arm 1, so that each time the wafer is taken out, positioning correction can be performed, reducing the cumulative error that may be caused by the long moving distance, shortening the distance that the robot arm 1 needs to move for correction, and improving the accuracy of wafer placement. Compared with the prior art, the robot arm 1 of this embodiment does not need to be frequently moved to an independent correction station for correction, which greatly reduces non-production time, speeds up the rhythm of wafer processing, and improves overall production efficiency.

[0043] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A positioning device, characterized in that: It includes a mechanical arm, a card box and a calibration component, wherein the card box has a plurality of card slots, a feed port and a discharge port, and the calibration component is arranged between the card box and the mechanical arm; The correction assembly includes a first driving member and two correction structures. The two correction structures are arranged opposite to each other and connected to the first driving member so that the two correction structures can be driven by the first driving member to move relative to or toward each other. The correction structure has multiple locking positions, and the locking positions of the two correction structures are arranged correspondingly.

2. The positioning device according to claim 1, characterized in that: The correction structure includes a first base and a correction arm. The correction arm is installed on the first driving member through the first base, and the first base is connected to the first driving member. The correction arm has a plurality of the clamping positions spaced apart along its length direction.

3. The positioning device according to claim 2, characterized in that: The correction arm includes a first support arm and a second support arm, the first support arm is vertically connected to the second support arm, the first support arm is connected to the first base, and the second support arm has the clamping position.

4. The positioning device according to claim 3, characterized in that: The second arm has a side surface facing the other second arm, and the locking position is formed by the side surface being recessed inwardly.

5. The positioning device according to claim 1, characterized in that: The card box includes a first side wall, a second side wall, a bottom plate and a top plate, the first side wall is arranged opposite to the second side wall, the bottom plate is arranged opposite to the top plate, the bottom plate is arranged at the bottom of the first side wall and the second side wall and is connected to the first side wall and the second side wall, the top plate is arranged at the top of the first side wall and the second side wall and is connected to the first side wall and the second side wall, the first side wall, the second side wall, the bottom plate and the top plate enclose a accommodating space that is arranged through along the first direction to define the feed port and the discharge port connected to the accommodating space, and a plurality of card slots are arranged on the first side wall and the second side wall.

6. The positioning device according to claim 1, characterized in that: The robot arm includes a second base, a robot structure, a fork arm and a vacuum suction piece. The robot is installed on the second base. The fork arm is connected to the robot structure. The fork arm has a vacuum suction port. The vacuum suction piece is connected to the vacuum suction port.

7. The positioning device according to claim 6, characterized in that: A vacuum channel is formed in the fork arm, one end of the vacuum channel is communicated with the vacuum adsorption port, and the other end of the vacuum channel is connected to the vacuum adsorption member.

8. The positioning device according to claim 7, characterized in that: An arc-shaped notch is formed at the end of the fork arm, and a plurality of vacuum adsorption ports are arranged at intervals along the curvature direction of the arc-shaped notch.

9. The positioning device according to claim 6, characterized in that: The robot structure includes a third base, a second driving member, a first arm, a third driving member, a second arm and a fourth driving member. The third base is installed on the second base, the second driving member is installed on the third base and connected to the first arm, the third driving member is installed on the first arm and connected to the second arm, and the fourth driving member is installed on the second arm and connected to the fourth driving member.

10. The positioning device according to claim 1, characterized in that: It also includes a mounting frame and a mounting plate, the card box is mounted on the mounting frame, the mounting plate is mounted on one side of the mounting frame, and the correction component is mounted on the mounting plate.

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